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Beam Processing Technologies
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Beam Processing Technologies is a collection of papers that deals with the miniaturization of devices that will be faster, consume less power, and cost less per operation or fabrication. One paper discusses metal oxide semiconductor (MOS) integrated circuit technology including the operation of devices whose lateral and vertical dimensions are scaled down. If the devices' silicon doping profiles are increased by the same scale factor, they can operate on lower voltages and currents, with the same performance. Another paper describes laser beam processing and wafer-scale integration as techniques to increase the number of devices on a silicon chip. Electron beam technologies can be used in many fabrication processes such as in microlithography, selective oxidation, doping, metrology. Ion beam applications depend on the presence of the ion introduced into the device (e.g. implantation doping), on pseudoelastic collisions (e.g. physical sputtering or crystal damage), and on inelastic scattering (e.g. polymer resist exposure). Silicon molecular beam epitaxy (SiMBE) can also grow high-quality layers at low temperature, particularly concerning germanium, especially as reagrds the growth system design and utilization of n- and p-type doping. Chemical beam epitaxy (CBE) is another epitaxial growth technique that can surpass MBE and metal organic chemical vapor deposition (MO-CVD). The collection is suitable chemical engineers, industrial physicists, and researchers whose work involve micro-fabrication and development of integrated circuits.
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Titles in the series (17)
VLSI Electronics Rating: 0 out of 5 stars0 ratingsVLSI Electronics: Microstructure Science Rating: 0 out of 5 stars0 ratingsVLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5VLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5Materials and Process Characterization Rating: 0 out of 5 stars0 ratingsVLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5Plasma Processing for VLSI Rating: 5 out of 5 stars5/5GaAs Microelectronics: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5Surface and Interface Effects in VLSI Rating: 5 out of 5 stars5/5VLSI Design Rating: 5 out of 5 stars5/5Metal – Semiconductor Contacts and Devices Rating: 0 out of 5 stars0 ratingsVLSI Metallization Rating: 5 out of 5 stars5/5Lithography for VLSI: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5VLSI and Computer Architecture Rating: 5 out of 5 stars5/5Beam Processing Technologies Rating: 0 out of 5 stars0 ratingsVLSI in Medicine Rating: 5 out of 5 stars5/5
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Beam Processing Technologies - Academic Press
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