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molbloc/molbox specifications - General

molbox1+ molbox RFM All specifications same molbox1 unless specified otherwise. Normal Operating Temperature Range: 15 to 35 C Storage Temperature Range: -25 to 35 C Normal Operating Pressure Range: 20 to 200 kPa absolute (3 to 30 psia) or 50 to 500 kPa absolute (7 to 70 psia) upstream, or 200 to 2000 kPa (30 to 300 psia) with molbox1+S only. Overall Flow Range: <1 to 5 000 slm Inlet Connection: 1E1-S thru 1E2-S 2E2-S thru 2E3-S 5E3-S and 1E4-S 1/4 in. VCR 1/2 in. VCR 1 in. VCR or 1 in. NPT Outlet Connection: 5E1-S thru 2E3-S 5E3-S, 1E4-S 16 mm (3/4 in.) ISO-KF style vacuum flange 40 mm (1 1/2 in.) ISO-KF style vacuum flange Gases Supported: Nitrogen (N2), Dry Air, Humid Air, Argon (Ar), Carbon Monoxide (CO), Helium (He), Oxygen (O2), Carbon Dioxide (CO2), Carbon Tetrafluoride (CF4), Ethane (C2H6), Ethylene (C2H4), Fluoroform (CHF3), Hexafluoroethane (C2F6), Hydrogen (H2), Methane (CH4), Nitrous Oxide (N2O), Propane (C3H8), Sulfur Hexafluoride (SF6), Butane (C4H10), Octafluorocyclobutane (C4F8), Xenon (Xe)

Flow Measurement
Range: Dependent upon molbloc size and pressure calibration range (see molbloc-S Ranges table) Required Back Pressure Ratio: 0.4 to 0.9 depending on Reynolds number Calibration Gases: Standard: Dry air Optional: N2 (to replace standard air calibration or in addition), Ar, H2, He, N2O. Consult factory regarding availability of availability of these gases for specific ranges, or for other gases. *Dry air calibration is required for humid air operation molbloc-S Pressure Calibration Ranges: Low Pressure (LP): 20 to 200 kPa absolute (3 to 30 psia) upstream Standard Pressure (SP):

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50 to 500 kPa absolute (7 to 70 psia) upstream High Pressure (HP): 200 to 2 MPa absolute (30 to 300 psia) upstream * HP calibration usable with molbox1+S terminal only * Flow measurement specifications valid from 10% to 100% of molbloc full scale Resolution: 0.0015 % of FS 0.01 % of reading Precision: 0.06 % of reading 0.30 % of reading Predicted Stability (One Year): 0.05 % of reading 0.2 % of reading Measurement Uncertainty 0.2 % of reading Premium calibration: 0.125 % of reading 0.5 % of reading from 50 to 500 kPa