Running head: TETRAMETHYLAMMONIUM HYDROXIDE

Readiness of THAH
Sanghee Owens

To Jesse Peterson
ENGL-2100
SALT LAKE COMMUNITY COLLEGAE
JULY 5 2015

TETRAMETHYLAMMONIUM HYDROXIDE
Table of Contents
Abstract..3
Introduction4
Background..4
Purpose..4
Methods.4
Limitation..4
Collecting data.5
What is TMAH..........................................................................5
Potential Health Effects.............................................................5
Prevention from injury5, 6
Conclusion7
Recommendation7
Works Cited...8

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Abstract
The purpose of this report is to provide safety guidelines for Tetrametylammonium hydroxide
(TMAH) for our team. This is an applicable solution on heavily boron-doped layer or P-type
layers therefore it will enhance our etch-rate technique. But it is a highly dangerous chemical
when handled inappropriately. The risks of TMAH have been studied as well as
recommendations provided for the handling process. Our research plan includes four phases: 1)
background of the chemical; 2) health hazard; 3) real life experiments on a Personal Protective
Equipment (PPE) protocol; 4) recommendation.
Our study of the readiness of TMAH concluded with two results. Providing a training and mini
class for our team would be the most effective way to reduce injuries. In the long run,
implementation of safety procedures would save unnecessary training and resources.
Furthermore it could save a persons life. We recommend setting up a training program as well as
selecting the trainer who can oversee the program.

TETRAMETHYLAMMONIUM HYDROXIDE

Introduction

Background

I am a YE technician who specializes in the SEM Lab and working for IM Flash
Technologies, Inc. Part of our job is to handle various chemicals to enhance the etch rate
for our flash memory. We have been introduced to Tetrametylammonium hydroxide
(TMAH) as response to a new technology. According to K. Westra (2010), his report
indicates TMAH etches are used to etch the 100 crystal structure, forming the
membranes, V-grooves and other structures. M.Rashid (2010) indicated in his report, that
TMAH has low surface roughness to assure good silicon interface qualities.

Purpose

The purpose of this report is to study the problems on current personal protective
equipment and is to provide the solution.

Methods

The methods I choose have been conducting on online research and Salt Lake community
college library as well as real experiments of own personal protective equipment (PPE) in lab.

Limitations

Since this chemical is new to us and its handling it is not familiar to us, the business plan
can change overnight. There is no guarantee this chemical will stay in the lab.

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Collecting Data

What is Tetrametylammonium Hydroxide?

MSDS number T1816, It is component of 20% to 25% Tetrametylammonium hydroxide, 50% to

85% Methyl Alcohol and 0% to 30%. Molecular weight is 91.18. (MSDS)

Potential Health Effects.

It is poison danger and corrosive. It may be fatal if swallowed and harmful if inhaled or absorbed
through skin. It causes burns to any area of contact. (MSDS)
1. Inhalation: symptoms may include burning, wheezing, laryngitis, shortness of breath.
Symptoms of overexposure may include headache, drowsiness, nausea, vomiting,
blurred vision, blindness, coma and death.
2. Ingestion: symptoms parallel inhalation. Can intoxicate and cause blindness. Usual
fatal doses are between 100-125 milliliters.
3. Skin contact: Symptoms of redness, pain and severe burn can occur.
4. Eye contact: symptoms blurred vision, redness, pain and severe tissue burns.

Prevention from injury

According to Chen-chang,Jiin, Jou-fang (2015) in their 13 case study that included three patients
who died after being exposed to 25% TMAH they concluded that preventive strategies are
warranted. Sadly in this study, the cases were done after people died. If they had a safety
procedure in placed and were provided training on proper handling, these death could have been
prevent. Another case study by Celine, Fosse (2015) compared initial TMAH decontamination
with diphoterine versus tap wafer with two fatal TMAH occupational exposure cases. This
chemical is known for its corrosive properties and systemic toxicity.

TETRAMETHYLAMMONIUM HYDROXIDE

The best way to prevent from injury; 1) get proper Personal Protective Equipment
(PPE) like Latex gloves, blue gowns, shoes covers, shoes boots, orange gloves,
googles and face shield. 2) Create and implement the safety procedure and class
that exclusively for TMAH 3) Designate personnel for each four shifts.
This is what has been found from real life experiments.

1. All the tools in the wet-hood should be tape with bright orange taped on them.
o These color coded tools can be only used in BASE wet-hood that are designated
for TMAH to prevent cross-contamination from the TMAH free hood. Bright
orange tape has been selected for color blind personnel.
2. We should explore more options for PPE.
o Several guys on my team tried all PPE to see if they fit on all personnel.
It seemed that all the PPE were fix okay on them except the googles. The googles
are too big and thick around the face and caused a lifted face-shield that exposed
the persons neck area.
These PPE usually come in a one size fit all and it is designed for men rather than
women. This is unfavorable for most Asian personnel as well since some have
small faces. In order to resolve this issue, we should consult with Fab 10
Singapore to see what kind of PPE they have used.
3. Long hair should be tided back before entering the BASE hood.
o Long hair can be hazardous when it covers personnels face while handling
TMAH.
o This should be in our safety procedure for someone who has a long hair and
provide them with hair ties.

TETRAMETHYLAMMONIUM HYDROXIDE

4. The bench
o The current bench is bit narrow. It may bring problems like falling while sitting
on it and putting on shoes covers.
Conclusion

Discussion.

Many semiconductor use 25% TMAH for etch technique and the results are consistent.
According to the MSDS report, the health rating is at a 3, which are severe, flammable, contact
rating at 4 which is extreme. If personnel is exposed to it by inhalation, ingestion, skin contact
and eye contact, such contact would be fatal and death. Furthermore it could cause legal and
ethical issues as well as losing well trained personnel, which would be a big loss for our
company. Using a hazardous chemicals are a necessary evil in the lab. But we can prevent
injuries from happening or significantly reduce them by creating a safety procedure and training.
According to our last All Team Member meeting (ATM), IM Flash Technology, Inc is well
known for its high standards for safety among other comparable semiconductor companies. We
should not disappoint them.

Result and recommendation

Our real life experiments show some improvements on our PPE (see page 6). This can be
changed over time due to new employees and vendors and helpers who come from all over the
world. Our recommendation is to create a new safety procedure for TMAH, provide training, and
continue conducting case studies on safety and procedures, updating them from time to time so it
can provide the most updated information based on hard data.

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Sites
Celine, Fosse (2015).Decontamination of Tetrametylammonium hydroxide (TMAH) splashes:
promising results with Diphoterine in Vitro.Cutaneous and Ocular Toxicology volume 29,
Issue 2, Pages 110-115
Lin, Chun-Chi. (2015).Tetramethylammonium hudroxid Poisoning. Clinical Toxicology Volume
48 issue 3, Pages 213-217.
Rashid, M. (2010).Impact of Silicon Surface Roughness upon MOS after TMAH and KOH
Silicon Etching Progress of Physics Research in Malaysia American Institute of Physics
978-7254-0797
Westra,K. (2010). KOH and TMAH Etching of Bulk Silicon. MEM Library.

Footnote
MSDS; The Material Safety Data Sheet is a detailed information bulletin prepared by the
manufacturer or importer of a chemical that describes the physical and chemical properties,
physical and health hazards, routes of exposure, precautions for safe handling and use,
emergency and first-aid procedures.

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