APELIOUI20Eco

NT

MADA

q4

n
u
n
u
n
u
n

aqaE

n
u
aEM

TE
M

pu

n
u

q
J

n
u

A
m

n
r

J~ !

0
. l
l

!
.

/~ 1993 11 1 i

(S I
!
!{ }

A
A

I
I

1 2
1
.1 2
1
.
2 22
1
.3 3
1
.4 3
1
.5 3
1
.6 3
2 5
3 7
4 1
1
5 1
3
6
1
5
5
6
.1 !1
6
6
.2 1
0
6
.
3 () 2
1

1
1

1 1
2
1
.1 1
2
1
.2 1
3
1
.2
.11
3
1
.
2
.
2 1
4
4
1
.
2
.
3 1
5
1
.
2
.
4 1
1
.3 1
8
9
1
.3
.11
1
0
1
.
3
.
21
1
.
3
.
31
1
1
1
1
1
.
3
.
41
1
2
1
.
3
.
51
1
.
3
.
6 11
2
1
.4 NC1
1
3
1
.5 1
1
3
2 11
4
2
.1 1
1
4
1
5
2
.2 1
3 1
1
7

(l
)

-a

3
.1
3
.2
3
.3
3.4
3.5
3
.6
3
.7

..
..
.

1
1
7

1
1
8

1
1
9

1
2
0
NC

1
2
1

1
2
2
.
.
..
..
.
..
.

12
3
c

2
1

p
o

2
3
1
.1

2
3
1
.2 2
3
1
.3

2
4
1
.4

2
4
2

2
5

2
5
2
.1
5
2
.1
.1? 2

2
5
2
.1
.
2 ()

2
.1
.
4

2
7

2
8
2
.1
.
5
2
.1
.
6

2
8

2
9
2
.2
2
.
2
.1

2
9

2-9
2
.2
.2
3 2-10
1
0
3
.1 2

2
1
0
3
.1
.1
3.1.2

2-12
3
.1
.3

2
1
2
3
3
.2 2 1
1
3
3
.
2
.12
1
3
3
.2
.22
3
.3

2
1
4
3.4 ?

2
1
4

2
1
4
3
.5
1
5
3
.6 2

2
1
6
3
.7
3
.8

2
1
7
3
.9

2
1
7

2
1
8
3
.1
0

I
V

3
1

1 3
2
2 3
3
3 N C
3
5
3
.1 3
5
6
3
.
2 NC3
3
.
3 3
1
3
3
.
4 C D-RO M3
1
4
3
.5 3
1
5
3
.6 3
1
5
3
.7 3 6
3
.8 )

3
1
6
4 3
1
8
5 ?()

3
2
0
6 3
2
1
7 3
2
2
8 3
2
4
9
3
2
5
9
.1 3
2
5
9
.
2

32
5
9
.3 3
2
6

4 .
..
..
..
..
.4
1
1 4
3
1
.1 4-3
1
.
2 !4-3
1
.
3 1'
1
4-5
1
.4 4
5
1
.
5 !4
5
2 4
6
2
.1 4-6
2
.2 4
7
2
.
2
.1 1
jA4
7
2
.
2
.
2 1
B4-10
2
.
2
.
3 C

4
1
4
2
.
2
.
41
JlD 4-14
2
.3 4-17
2
.
3
.14-18
2
.
3
.
2 MOl4-19
2
.
3
.
342
0
2
.
3
.
44
2
1

()

2
.3
.5

4-22
2
.3
.6

4-24

4-26
2
.3
.7
3

4-28
3
.1

4-28
4 F ILE .
.
...
.

4-29
4
.1 4-29
5

4-30
5
.1

4-30
5
.2 4-30
5
.
3 M

4
3
1

4-32
5
.
3
.1
5
.3
.2 4-36
5
.3
.3 4-40
5.3.4 -

4-44
5
.3
.5 4-48
5
.3
.6

4-52
5
.3
.7 4-57
5
.
4

4-58
5
.5

4
6
1
5
.6

4-64
5
.
7 PHNC4-66

4-66
5
.
7
.
1 PHNC
5.7.2 PHNC4-67
5
.8 4-68

4-68
5
.
8
.1-
5
.8
.2

4-69
6

4
-70
6
.1 4-70
6
.2 4-70

4-72
6
.3
6
.
3
.1

4-75
6
.
4

480
6
.
4
.1

4-83
6
.5

4-84

4-86
6
.5
.1
6
.6

4-87

4-88
6
.6
.1
6
.6
.24-88
6
.6
.3)

4-90

4
9
1
6.6.4(

4-92
6
.6
.5
6
.6
.6

4-92

v
i

6
.7 4-93
6
.
7
.1
4
9
5
7 4-96
7
.1
4
9
6
8 4-98
8
.1 ..
.
.

4-98

1 5
3
1
.1 5
3
1
.2 FILE5-4
1
.2
.15-5
1
.
2
.
2 5
6
1
.3 ()

5
7
1
.3
.15-8
8
1
.
3
.25
8
1
.
3
.
3 5
1
.
3
.
4 5
9
1
1
1
.
3
.5 5
1
.
3
.
6 5
1
1
1
1
1
.3
.7 5
1
.
3
.
8 5-12
1
2
1
.
3
.9 5
2 5
-13
2
.1 5-13
2
.2 5 1
4
2
.3 5-14
1
5
2
.
4 5
2
.5 5-15
2
.
5
.15-15
2.5.2 5-15
2
.6 5-16
2
.7 5-16
2
.
8 5
1
7
1
7
2
.9 5
2
.1
0 5-18
2
.1
1 5-18
2
.1
2 5
2
0
2
.
1
3 JUM P ()

5
2
0
2
1
2
.1
4 5
2
.1
5 5
2
1
2
2
2
.1
6 5

()

v
i
i

2
.1
7 5
2
6
2
.1
8 ()
)

5
2
7
2
.1
9 5
2
8
2
.2
0 5
2
9
66
1
1

6
3
1
.1

6
3
1
.2 6
4

1
.2
.16
4
7
1
.
2
.
26
2

6
8
2
.1 6
8
2
.2 6
9
2
.3 26
9
1
0
2
.
4 Y Z6
1
1
2
.5 6
1
1
2
.
5
.1 6
2
.6 6
1
2
1
2
2
.
6
.16
6
1
2
2
.
6
.
2 r
3

6 1
3
1
3
3
.1 6
1
3
3
.1
.1 6
1
3
3
.1
.
2 6
1
6
3
.1
.
36
1
8
3
.1
.
4 6
1
9
3
.1
.
5 6
3
.1
.
6 6
2
0
2
2
3
.1
.
7 6
2
9
3
.1
.
8 6
3
.1
.
9 6
3
0
.1
0 6
3
1
3
.1
.1
1 6
3
3
3
.1
.1
2 6
3
4
3
.1
3
.1
.1
3 6
3
4

IJ
~

6
3
4
3
.1
.1
4Z
3
.1
.1
56
3
5
.1
6 6
3
5
3
.1
.1
7 6
3
5
3
.1
3
.1
.1
8 6
3
6
3
.1
.1
9Z 6
3
6

V
I
I
I

3
.1
.20 6-36
3
.1
.
2
1

63
7
3.1.22 6
3
7
3
8
3
.2 6
3
8
3
.
2
.1 6
3
9
3
.2
.26
4
0
3
.
3 6
3
.
3
.1 !6
4
0
6
4
1
3.3.2 i
4
1
3.3.3 6
4 MOl642
4
.
1 M O I6
4
2
............
f
'

6-43
4.2 M DI..
4.3 M O I6
4
4
4
.
4 M OI
6-45
5 6
4
6
4
6
5
.1 6
5
.2 6
4
6
6
I
J
6-48
I
J
6-48
6
.1
6
.1
.16
4
8
6
.1.2 650
I
J
6-52
6
.1
.
3

1 7
2
2 J
(

7-4
3 7-7
4 7-8
4
.
1 7-8
4
.1
.1 NC7
-8
4.1.2 NC7
1
0
4
.2 7
1
2
5 Z(7-13
6 7
1
5

8
1

1 8-4
1
.1 8-4
1
.2 8-5
1
.3 Z8-6
(

I
x

1
.
4 8
6
7
1
.
5 )7 8
1
.
6 8
8
1
.7 ( 8
9
1
.8

8-10
1
.9 8
1
1
1
.1
0

8-12
1
.1
1

8-12
2 18-13
2
.1

8-13
2
.
2 8
1
3
3 18-14
3
.1

8-14
3
.
2 NC?8
1
5
3
.3 8
1
6
3
.
4 8
1
6
3
.5 Y8
1
7

8-17
3
.
5
.1
3
.5
.2

8-18
3.5.3 Y8
1
8
1
9
3.5.4 8
3
.6

8
2
1
3
.7

8
2
1
2
1
3
.8 8
4 3(l
e
t5
0
08-23
1)8-23
4
.1 ((
5 38-24
5
.1

8-24
5
.2 8
2
4
2
5
5
.
2
.18
2
6
5
.2
.28
5
.2
.38
2
7
6 6(1
0
0
0)8
2
8
2)8
2
8
6
.1 ((
6
.2

8-29
1<

8-29
6
.
3 7
6
.
4 8-29
7 1(2000) 83
0
3
0
7
.1 8
7
.2 ()
8
3
1
8

8-32
9 8-36

9
.1 8
3
7
9
.2 837
9
.
3 8-38
9
.
4 8-39
9
.5 8
4
0
1
0 ()

8-42
1
0
.1 8-43
4
5
1
0
.
2 8
1
0
.
3 8
4
6
4
7
1
1 8
1
2 8
5
1
5
1
1
3 8
1
4 8
5
2
5
3
1
5 8
6
1
1
6 8

1 9
2
2 9-4
2
.1 9-4
2
.2 9-5
7
2
.
3 9
..
..
...
.
...
.
.
.
.
..
.
.
.
.9
8
3 ..
4 ..
.
.
.
.
.
.
..
..
...
.
.
..
.
.
.
.
.
..
.
.
.9
1
O
5 ...
..
...
..
..
.
.
..
...
.
.
.9

2
5
.1 .
5
.1
.1
3...............9

2
5
.1
.
2 )79-12
5
.1
.
3 9-13
5.1.4 9-13
1
5
5
.1
.
59
1
5
5
.1
.
6 9

1
0

1
0
1

1
1
0
2
1
.1 "710-2
1
.2 )710-2
1
.3 )710-3
1
.4 10-3
2 1
0
4
2
.
1 NC1
0
4
(l

X
I

1
0
7
9
2
.
2 7
0
8
4
2
.3 1

...
.
..
..
.
.
..
.
.
.
..
.
.
.
.
.
.
.
..
..
....
.1
1
1
1
1~

1 1
1
2
2

.
.1
14
2
.1 1
1
4
2
.2 1
1
5

1
1
6
2
.3 7
3 1
1
7
3
.1

1
1
7
3
.2 1
1
9
3
.3 1
1
9

123456789

1
2

2
2

1
2
2

1
2
2
N C ?

1
2
3
N C

1
2
4

1
2
5
()

1
2
5
Z (HS-98) 12-6
O VS
i
l
l

1
2
7

x
i
i

1
2
1

1 2
1
.1 2
1
.2 22
1
.
3 3
1
.4 3
1
.5 3
1
.
6 3
2 5
3 7
4 1
1
5 1
3
6 1
5
6
.1 1
5
6
.
2 1
6
6
.
3 (

2
0

1
() I
123 A3 8
4
1

!4 C O2
3 A He-Ne

1
.1
i
E
!

!l

C O2!

f
b

C O2l
!

He-Ne!!
C O2!
!
!
<

1
.
2 2
-

1
.3
- 2
11!
()

!
)!

1
.4
-(
)

0
.l
e
t!

1
.5
- 1a
aaa

1
.6
(14)
Z nS e ()
!

-l

-!
-<
!!(
l
i

)
-!l

(!)!

!!
- l
! r6. 3 () J!

-!l
l
d:l

2
-
6
J
(r

(r
6
J
!l

J
( 6
)

!
!

!
6 )
(r
!
0
!(
)

i
(
)

r
5

N C

J

-J

rLASERALIGNMENT()J

rSYNCHRO CONTROL()J
r
/!
e
t!
Jl
()
-l
( r
6 )

()() I

!
()

(
1
)

(88 85

(
2
)
(1
3
1)

(
3
)
(14 16 )
( 134)
1.

2
.
l
J

3
.
4
.

(
4
)
(35)

l
(363)

(
5
)
(136)
!

(
6
)
1 ( 13 5)

-
!<

!
!l
!!

-
0
.!(

) l
"
7l

!
6
1

7!

?~ l

!J "
!
!

-
<
()

<
l

! l

J l

!!
M02(M30(

10

MADA

!i

l
m
1&1

t
l
'
~\

a
n
t
i
'

EEc
tk

1
f
V
9
u
f
r
t
.a
t
?
?
E
F
1
i
i
t

AJu'

uvJ

m-A

"
y
a
a
-

4p

a
e
'
r
U

v-E

LF

gAM

.
r
-

R
h
E
h
't

7
.
J
i
}
2
I
H

heat
s r
I

:
i
l
i
i
A
'

h
:

?
h

11

; .t-7i

i
f
;

F!-f.?~:~
- ~

.;
~~

@.

K....H....................................~:fl

lU-~.1:

'tt!'H.

uu

t
' -b.
i
.R. t~ I
) !
.
i

........

nj

A
I
HS-98

_ S . . I..D . . ~

n
OI
.

?
"

~
~
.
J
h
'
.
t

.
.Z

.
:
'.
8t T

~[]
-7

i
L
l
t
fO

12

_l

5
A
P
E
1
0
1
1
12
5
5
E
c
o

en

cJ

5ii :=~

j7 ;I
:\~:.t:1
':.0:t
I
I
I
( I

1)!

2
)

00

3
)

5
1
3
1
i
l
E

:~\
Xi42
j

F:J
_
.
.
_
l
l

:
L
1
j
i

.
.
.
.
.
.

F:f L?~;

jL +\to i

.
.
.

;
.
.

;
i
r
-

o
F

nk-1J

'
'
-

pu-P

800

5
1
0

n
u
h

4aq

11-m

7'

'

800

A
{

I
I1'l#~ -

I
:
:
:

"

"

7!

i
( 1270mmx1270mm

i
t
.
.
.
!

I
i

i
j
i

.
~
J
f
j
;

is'

()

vh

V)

jUlH

.
.
.
.

~JI

/
!
A
A L
R

13

6
6
.1
39!

1
3 A 3 84

2
(1)
!
!

!!

(2)
i
1

JI

15

6.2
39!J 1

I4
1
(1)i
!

(2)! l

(3)l

2
(1)

!
!

(2)

(3)
!!

!!

16

(4)

! I~ !

(5)!

3
(1)

(2)
!

(3)

<<
!!!

(4)

!!!
!

17

(5)
!
!
!!
59 1r

(6)

I ~

()

4
(1)!

(2)!!l

(3)

l I~

51

(4)

(5)!

18


()

t
+

38

3A

O
O
O
O
O
O
O
O
O
O

O
O
O

O
O
O
O
O
O

O
O
O

O
O

O
O
O

O
O

O
O

O
O
O

O
O

O
O

O
O
O
O
O
O

!!

O
O

O
O

OE
J
fc
l

19

6
.
3 (

ZnSe:(

ZnSe

ZnSe

1 ()

500!

1
5
2
5

:5mg/m3:O
.2mg/m3

LD50
ADI

20

 1E
~

1 1
2
1
.1 1
1
.2 1
3
1
.2
.1 1
3
1
.2
.2r.J- 1
4
1
.
2
.3 1
4
1
.
2
.
41

1
.3 1

1
.3
.11
9
1
0
1
.
3
.
21
1
1
1
.
3
.
31
1
1
1
.
3
.
41
1
2
1
.
3
.
5-1
2
1
.
3
.
6 11
1
.4 NC1
1
3
1
.5 1
1
3
2 1
1
4
1
4
2
.1 1
1
5
2
.2 1
3 1
1
7
1
7
3
.1 1
3
.2 1
1
8
3
.3 1
1
9
2
0
3
.
4 1
2
1
3
.
5 NC1
3
.6 1
2
2
2
3
3
.7 1

'

11

'

NC

_..~;/S::~?\
;

v
ii
nvi
i
i
U

l
I
"1

.
\~
i
-l.........~

:
:
:;
l

"
_
.
_
.
.

)"

i
i
i i11 ?.-'::-.:-.-:-.:-.:C~~-:l

i
1
J
J
j
1
;
i
i
i
:L

i
L

1-2

11i/J

1
L
_
_
V

1
.
2
1
.2
.1
A C
Y!!!!
!!

A CX!

!
l

!
!X!Y
(
)!

43

1
.2
.2

500mmx500mm
NC! "
v
100!NC
"t
J!
!J

NC

A !

!
l

<

1
.2
.3
l

14

1
.2
.4
APEI
O
I
D
2
5
2
7
l
e
tr
J!
12mm

165mm

45


J
()
A

/
:
:

359mm

7
2
.5mm

359mm

3
2
.5mm

1
/
2
"

1
4
1
m
m

28mm

1
1
/
4
"

1
6
5
m
m

40mm

2"*

1
8
9
m
m

52mm

3-1/2"

230mm

7
2
.5mm

1
6

()

/
(SN)

1
.3

(CO2) (N2) (He)

!C O2

(!
)
A C
!C O2

(He-N e)
C O2l

48

1
.3
.1
!

A CZ() I

(
1
)

-
70
.

Z!

49

-
4!

!
()

l
()
! I~ (

O
.l
m
m

(
2
)

(
3
)
Z l

1
.3
.2
3

1 2 3

4
1
0

1
.3
.3
!!
E

1
.3.4
!
!

!
!

? 7

1
1

1
.3
.5

C O2

!l

1
.3
.6
!
()
C O2
l

NC
(He-N e)
!C O2
!!

1
2

1
.
4 NC
N C

N Cl

1
.5
A M N
C
A M N C C
J
)4

!i
e
t

! A C 1
!I
e
(J')
3
4 2!
!
!

l
e
t!

l
i

!
!

13

2
{

2
.1

NC
!!

!!
(
)

1
!

1-14

2
.
2

!
!

l
e
t

!
!

!l

()
l
l
e
t

!!!
l
e
t

q
J
L L 1 1p

3k
EP J
r
h
u

7!

1-15


!!

7!!

16

3
3
.1
N C!

O
L
C
2
1
2
H
l
l
HYW6017

N C

O
L
C
3
2
0
H
I
I

IOLC-420HII

RKL-7500V-DA

O
L
C
4
3
0
H
l
l

()

RKL 11000V

(
!
() )

AMNC/PC

CA

A
1
5
A
(
C
K
D
)

APE
I
O
i
l
l
2
5
5
E

FX-5PB

1-17

3
.
2
!

A
P
E
L
I
O
i
l
l
2
5
5
E

xy :

XYZT cp ( 3)

EE

1270mm

1270mm

Z
X

300mm
1270mm

1270mm

75m/min

75m/min

60m/min

1-18

O
.Olmm

.
.
.
.
.

O.OOlmm

F4B
:1
0
0
k
g

n
o

F
l :50kg

930mm

e
x
)x500mmC
Y
)

500mm

13t{
t
o
n
}

AC3 200/220V10% 50/60Hz

3
.
3

200kN{
2
0
t
o
n
}

50mm

(8mm)

X310/Y290min
-1{
h
p
m
}(
8
m
m)

(25mm)

X270/Y250min
-1{
h
p
m
}(
8
m
m)

34
2
A
I

3
1
3
A
I

1
/
2
"

2
0
(
8
)

1
9(
8
)

1
1
/
4
"

8(
8
)

6(
6
)

2
"

2(
2
)

3
1
/
2
"

2(
2
)

2(
2
)

AI(
1
1
/
4
"
)

2
(
2
)

2(
2
)

A1
(
2
"
)

(
)
)
{

(
1
)

1
1
9

3
.
4

I
.
f

j
;

f
k
d
.
T

1500W

2600W

.
.
.
.
.
.
.
.
1
0
0
%

1
0
.
6J
J
I
T
l

21mm (1
.5mI
)

1
.5
m
ra
d

4
5

CO
He=5:
3
4:
6
1 2 %
2:
2 :N
2I
) K J
I
/h
(

3600W
1
.
.
.
.
.
.
.
.
2
0
0
0
H
z

3000W

1
.0% ()

O
L
C
4
3
0
H
l
l

2000W

1200W

0C
4
2
0
H
I
I

.
.
.
.
.

"
'

O
L
C
3
2
0
H
l
l

O
L
C
2
1
2
H
l
l

1
0 /
h

5
5
.
.
.
.
.
.
.
.
6
5 /min()

2
0
/
h

8
5
9
5
/min
()

2070mmX 600mmX 9
00mm

1150mmX 600mmX 9
00mm

120

AC3
25kVA

200/220V10% 50/60Hz
35kVA

3 ( 1)
()

40kVA

3
.
5 NC

i
N C
I

AMNC/PC

N C

.XYZTCP

. 3
-()

- Z (HS-98)
. N C 7
.
.

.JOG
277

1f

250

-
.

1
0
1
0

- 4

.3.5 F D
DATA I
N
P
U
T
)
.! (
M
A
N
U
A

O
.0
0
1m
m (X Y Z)

O
.0
0
1m
m (X Y Z)

2MB (5km)

/ / M D I / /

-
.

.
.()
e N C

-
-
-
- 7 eNC
-
-

42

3
.
6

f
1
4
.
1

J
1
4

LA
E

'-

~T

H
Y
W
6
0
1
7
A
1
5
A

R
K
L
7
5
0
0
V
D
A

R
K
L
1
1
0
0
0
V
C
A

(
C
K
D
)

()

()

OLC-320HI
I

OLC 212HI
I

OLC-430HI

OLC-420HI
I

29/30kW
{
2
5
0
0
0
/
2
7
0
0
0
k
c
a
l
/
h
}
(
5
0
/
6
0
H
z
)

3
6
.OkW

17.4/18.8kW
{
1
5
0
0
0
/
1
6
2
0
0
k
c
a
l
/
h
}
(
5
0
/
6
0
H
z
)

E
Z
~

7
0/
m
i
n

80L/
m
i
n

1
5
0/min

80

1
5
0

1
6
0

( j
4C)

( X )

1
5
0
0X 7
0
0X 1990mm

1015X 8
5
0X 1800mm

1
3
6
0X8
5
5X 1
7
9
0
r
n
m

( )

430 (
5
1
0
) kg

410 (
5
6
0
)k
g

5
5
0(
7
1
0
) kg

t22

AC3
11/14kVA (
5
0
/
6
0
H
z
)

200/220V 10% 50/60Hz

20/22kVA (
5
0
/
6
0
H
z
)

26/30kVA (
5
0
/
6
0
H
z
)

3
.
7

FX-5PB

3m3/
m
in

1.8kPa/2.5kPa (
1
8
0
m
m
A
q
/
2
5
0
m
m
A
q
)(
5
0
/
6
0
H
z
)

7m2

1
0/min

6
L

O
.75kWX2
P

AC 3 200/220V (
5
0
/
6
0
H
z
)

240kg

23

1-24

MACA

1 2
3
1
.1 2
3
1
.2 2
3
1
.3 -2-4
1
.4 2-4
2 2
5
2
.1 2
2
.1
.12
5
2
.1
.
2 () 2
5
6
2
.1
.
3}2
2
.1
.
4 2-7
2
.1
.52
8
8
2
.1
.
6 2
.2
9
2
.2 .
9
2
.
2
.12
9
2
.2
.22

A
!

2t

3
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
e

2
1
0
3
.1 ....
.
..

2
1
0
1
0
3
.1
.1 2
1
2
3
.1
.
2 2
1
2
3
.1
.
3 2
3
.2 2
1
3
1
3
3
.
2
.12
1
3
3
.2
.22
3
.3 2
1
4
1
4
3
.
4 ? 2
3
.5 2
1
4
3
.6 2
1
5
3
.7 2
1
6
1
7
3
.8 2
3
.9 2
1
7
1
8
3
.1
0 2

22

1
.1

f
C
)

1
.2
I

"
"
4
G
o
CC
)
5'
j

75%

G
.49m/s2{
G
.05G}

()

23

1
.
3
-!
.

.
.

.
.

B
.....
...

(: m)

HYW6017-A15A

0
.
6

.
o6

0.6

1
.0

R K- 7 5 0 0 V - D A

1
.5

1
.5

1
.5

2
.0

1
.5

1
.
5

1
.5

2
.0

aaO V - C A

RKL-l 1

1
.
4
<l

2-4

2
2
.1
2
.1
.1

)77

7
7
()

{}

O
.5
M
P
a

m
i
n
250/

2
.2kW

{
5
.
0
k
g
f
/
c
m2}

{
2
5
0
N
L
/
mi
n
}

0
.
9
5MPa

1000L/min

{
9
.
5
k
g
f
/
c
m

{
1
0
0
0
N
/
m
in
}

0
.
9
5MPa

m
i
n
1
5
0
0/

7
.5kW

1
5
k
W

{
9
.
5
k
g
f
/
c
m2} {
1
5
0
0
N
/
m
in
}

l
l
7
()

2
.1
.2(
!
OLC-HIl3
l
!

2-5


E
~

C O2 : N2 : H e=5 :3
4:6
1 [%]

!+ 2 %

j
E
=

C O2 U H P >99.99%

N2 ZERO-A >99.995%
He ZERO-A >99.995%

045-474 3
9
6
6

0
4
2
7
7
2
7
1
5
1

0
4
6
2
3
8
2
0
2
1

6
4
6
1
0
427 5
0

06-311-1373

3-3581-8216
0

2
.1
.3
(1)
132m3(2 1)

'

CAV-20ES []

20m3/h
2
0
0/min
2 lMPa{10kgf/cm2}

(2) ()
0
7m3(2 1)
1

26

CAV-20ES []I
d:

;
6
a

20m3/h
2
0
0/min
2 lMPa{10kgf/cm

(3)
7
7

CAV-20ES []

20m3/h
2
0
0/min
2 1
M
P
a{
1O
k
g
f/c
m2}

2
.1
.
4
!7
j

1
0[l
e
t
G
l
l
e
t

l
()
1

3
0
m
g
/

1
0
m
g
/

1
0
m
g
/

(KMn04)

1
0
p
p
m

(F e)

Mn
)
e

0
.
3
p
p
m
O
.3
p
p
m

(pH)

5
.
8
"
'
'
8
.
6

;(G1
0)!!
;
;

0
4
4(
8
7
7
)0
4
6
1

2
7

2
.
1
.
5
G1
0 O
.3
5
M
P
a
{
3
.5
k
g
f
/
c
m
j

R D 25S RD-25SR ()
[]

2
.1
.6

28

()

5
0
0
m

()

5
0
0
m

2
.2
2
.2
.1

(!
)

.1

!N C

2.2.2

. (NC)
!
!
(NC)
!

2
9

3
!

.!l

3
.1

A .
<l

{}I

3
.1
.1

A
P
E1
0
m2
5
5
E

1
3t{
t
o
n
}

!
l
e
t
7 1{
2 3
!
l
e
t6
0

2-10

2
1
1

3
.1
.2

HYW6017-A15A

4
3
0
k
g

RKL-750QV-DA

4
1
0
k
g

RK-11QQQV-CA

5
5
0
k
g

l
e
t6
0

3.1.3
1
1
0
k
g
4!

0

6

2-12

3
.
2
<

3
.2
.1
(1) XYZ
X Y
Z!

(2)

4
! (4)<

3.2.2
(2)o
M 6 8

2
1
3

3
.
3
(NC) -I

3
.
4
!

l

3
.
5
O
.
5
M
P
a
{
5
.
0
k
g
f
/
c
m2}
1

214

3
.
6

-!

!
(02) (N2
) (A IR) !
!

Ill-u

u
Ill-u

2-15

3
.
7

.!

!()

J E T-S1
0
5 ()
3 (C02 N2 He)

1:25MPa{
2
5
0
k
g
ff
e
r
n
2:O
.5
M
P
a{
5
.O
k
g
ff
e
r
n
?
}

:O
.3
M
P
a{
3
.O
k
g
f
:1
2
f
h

! (1/4 7m)

1
1

1
12~15MPa{120~150kgffern2}

()

2 2
O
.3
t
v
Pa {
3kgff
e
r
n!

2 O
.5MPa {5k
g
ff
e
r
n
?
}
l

l
2 O
.15~a
{
1
.5
k
g
ff
em
!
!
!

2-16

3
.
8
!

3
.
9

!I
d:

l
(G1
0 0.35MPa{3.5kgf/cm2}!)

-5

217

3
.1
0

2
1
8

1 3
2
2 3
3
3 N C
3
5
3
.1 3
5
3
.
2 NC
}
/j

3
6
3
.3 3
1
3
3
.
4 CD-ROM3
1
4
3
.5 3
1
5
3
.6 -3
1
5
3
.7 3
1
6
3
.8 ()

3
1
6
4 3
1
8
5 7() 3-20
6 3
2
1
7 3
2
2
8 3
2
4
9 3
2
5
9
.1 3
2
5
9
.2 3
2
5
9
.3

3
2
6

31

1
NC

-l:i

i mi l - -

32

NC
(

[
1
]NC()
ON"! NC
ON" !
NC
OFF"
l
e
tTRIP"

JlA J!
e
tTRIP"
l
OFF"ON".I

eNC fNC 3J!

OFF" I
<
NCTRIP"
.! f
NC
" (OFF)I

33

[
2
]
fNCON" OFF" !
<N C" (0N)

[
3
]
l

A
J

34

N C

N C N C C D
- R O Mc

3
.1

l
e
t 4 5
6<

35

3.2 NC

I
m

i
J
f
i
t
L
J
Jl
L
U

(1)

[
1
] O N
N C N C
rNCON" !O
NJ

3-6

[
2
] OFF
N C"
!3J N C

CD-ROM
N C

[
3
]NC
N C

:NC

:
r

o
NJ N C!

:NC

[
4
]

:!
:
:!

[
5
]

3
7

[
6
]

.!? J
!

[
7
]
!
!
!
f+XJ f+YJ f+ZJ

+X

-x

+() I
X

<
I

+Y

Y
Y+() I

-Y

Y l

+Z

Z+() Z

38

Y
Y <
I

Z l

Z <
I

[
8
]0T
X Y oT ()

(
j)i

[
9
]()

"
! "

!"! 5!
()

"!(l
)

[
1
0
]()
"!!
"! H
e
Ne
"

[
1
1]
N Cl

[
1
2
J
M DI

39

[1
3
]
MOl

[
1
4
]

A
J

[
1
5
]+B()
N C( (8)!
B+!!

[
1
6
]- B()
N C() (8)+i

Bl

[
1
7
](-
N C

()
!

3-10

[
1
8
] ( )
1

" "

r
J'(

.() r
JJ
l
!
!

[
1
9
](
X Y!
" I
" I
X Y

[
2
0
]
MDI" "
!

3
1
1

[
2
1]
!TC

[
2
2
]
-/~'!

-l
d
:
1
!

312

3
.
3

!<

l

(

() J

3-13

3.4 C D-R O M
O

AU

R
D-
C

C D R O M

()
CD-ROM

. C D - R O Mi
C D - R O M

[
1
]
CD-ROM l
CD-ROM
!

CD-ROM!
l

[
2
]
CD-ROM()

[
3
]

[
4
]

3-14

3
.5
!

3
.
6
N C l

[
1
J

[
2
]

[
3
]

[
4
]

[
5
]

3-15

3
.i
?
N C

f
/
J

3
.
8 ()
[11

AJ

[11

[
1
]
@

! f
/

[000
]

[
3
]
l
f
/

X1

:1 l
O
.
O
O
l
m
m

X 1a :1 l
O
.
O
l
m
m o
X100: 1! O
.
l
m
m

3-16

I
I

(}

[
2
]

I
I

[
4
]I

+
+:

+ l
:
i

3-17

N CJ7

"l

:l

-)

()

()

3-18

!
<
<

3
1
9

7!

N C ?7

AMU
NITROGEN
HIGH PRESSURE

N C"

320

6
-D!

'M DI"

-1-
-/'-

! 1
!

NC

3
2

&
00
(
J

A9

9
1
18.

9
1
1

N C
0
N C

"MOl"

3-22

/"(2)
"
I
"
!!
I
d:!

."I
d:/" J
"

"
!
(
()!

o0
1

()

[
'
x
)

Ua

3-23

8
-J rM3J

O
i

72

M 3
!JI

324

1
i

9
.
2

.

LASER ALIGNMENT
OFF

ON

STRIKER
OUTER

@
INNER

LASER A L IGNMENT(
O FF
i
tI

STRIKER
l

325

TOOL
l
e
t

STRIPMISS
ON" I
<

9
.
3

J 3

i
<

3
26

A"

C (2")D (31
/
2
" ) E (41
/
2
"
)
!

s
"

A (
1
/
2
"
) B (11
/
4
"
)

A (
1
/
2
"
) B (11
/
4
"
)

A - d

--

l
aIJISJ

CD

1
P
1 0

t
'
'
'
t
'
'

aq
.
aa
-

/ /

q u A.

nJnJ

1 4
3
1
.1 4
3
1
.2 4
3
1
.3 !4-5
1
.
4 4-5
1
.5 !4-5
2 4-6
2
.1 4-6
2
.
2 4
7
2
.
2
.1 J
'
A
4
7
2
.2
.2 B4
1
0

2
.
3 4
1
7
2
.
3
.14-18
2.3.2 M D I4-19
0
2
.3
.34 2
2.3.44
2
1
2.3.54-22
2
.3
.6 4-24
2
.3
.74-26
3 4-28
3
.1 4-28
4 F IL E4-29
4
.1 4-29

(!)

4
1

4
3
0
5
.1 4
3
0
5
.2

4
3
0
5
.
3 M 4
3
1
5
.
3
.1 4
3
2
5
.3
.2

4
3
6
53
.3 4
4
0

4
4
4
5
.
3
.
4
5
.3
.5 -4
4
8
5
.3
.6- 4
5
2
5
7
5
.3
.7 4
8
5
.4 4 5
5
.5 4
6
1
5
.6 6
4

5
.
7 PHNC

4
6
6
5
.
7
.
1 PHNC 4 6
6
5
.
7
.
2 PHNC4
6
7
5
.8 4-68
5
.
8
.1

4
6
8
5
.
8
.
2 4
6
9
6
4
-70
6
.1 4
7
0

4
7
0
6
.2 ?
6
.3 4
7
2
6
.
3
.1............e4-75
6
.
4 4-80
8
3
6
.
4
.1 4
6
.5 4
8
4
5
.1 4
8
6
6
.6 4-87
6
.
6
.1 4-88
6
.6
.24-88

4
-90
6
.6
.3 ()

4
9
1
6
.
6
.
4(
6
.
6
.
5 4-92
6
.6
.6 4-92
6
.7 4-93
9
5
6
.7
.14
7 4
9
6
7
.1 4-96
8 4-98
8
.1 4-98

4-2

1
l
J r
Jr
FILE Jr

J J 6
!Jr

Jr
FILE
Jr
Jr
Jr

F ILE

1
.1
i

()

1
.2

r
F ILE
!!
!

43

r
F IL E

! r
!

r
F ILE

MOl!

r
F I E
J

4-4

1
.
3 X
r

F ILE
!
/'-

1
.
4
!l
e
t

1
.5
!
!

4
5

2
2
.1

MDI

l iL
z
E
/

NC

-
:
:M P M()i

7
:?
100%
:
:
:

:(
: 1

:(M30 G
50
)

4
6

2
.2
!A S C OJ

2
.2
.1 A

"
MOl"
!
!MOl"

"
OFF

'
CRT M

F A
I

. FA" F3"

/
U L !
!
l

I
i

N C

!
c J
1
l

4
8


!
N C/"/";
)
/"

Z
Z
!

X Y T C!

( MOl)

F1

75m/min

75m/min

30min1 {
r
p
m
} 60mi
r
p
m
}
n
-1 {

F2

5
6
.25m/min

5
6
.25m/min

30mi
n
-1 {
r
p
m
} 60mi
r
p
m
}
n
-1 {

F3

37.5m/min

37.5m/min

1
5
mi
n
-1 {
r
p
m
} 30mi
r
p
m
}
n
-1 {

F4

18.75m/min

18.75m/min

1
5
m
i
n1 {
r
p
m
} 30mi
r
p
m
}
n
-1 {

FA

37.5m/min

37.5m/min

1
5
mi
n
-1 {
r
p
m
} 30mi
r
p
m
}
n
-1 {

:1

:
:!

4
9

2
.2
.2 B

4
-10

" I
!
1

" I

: J"1
0

:r
"2
0

: r
'
!

.""3

" NC
:r
MOl "
" "

4-1
1

()
()()
((
!
" i
" I

"M D I
!"

" I

4
-12


3
0N C
6
D

" () I
l

/'
i

""l

" ()l
1

/'
" ()

" ()

r
/
'

r
/

r
/
'
/'

" () !

4
13

2.2.3 C

2
.
2
.
4 D

M P M!

N C!

14

()
"I
d:M D I
"

-Fl'"'-'F3: F 1 () " F 3 () "

:l

AMNC

" I
l

" I

(
)

!!
"

4
-15


'

ovs()
O VS
i
l
l!O V
SI
I

4
-16

2
.
3

:2!

M D1

I/O

:7

:!

4
-17

2
.3
.1
!

:!

) I

:
!2

4
-18

2
.3.2 M D It
j
!
!

1.
5
X1
0
0
0 Y500

1
) rXJ
2
) rlJ raj raj raj

3
)

r
yJ

4
) r5J raj rOJ
5)

2
.

r
J
1! 1 l

j
j3 MOl l
e
t

3
. !!

:M1
0
0

NCT :M
l
0
l

ABS:G9
0
INC:G91

G5
0:G5
0

4
-19

2.3.3
I/O

.1

1
1
I
I
1

BU

;
r
2
.
3
.
6

4-20

2.3.4

:
:
: (e)

:!
:
:J

:x

:Y

:
z

:T

:C

:B

2
.3
.5

.
J
l
l
..I.'Ul!Wl_

-
E

'

..

Er
a
r
a

i
-~>...~"".--~""""""".."""""""""."""""-----~>----~~--~---

()!(
)
2

!
Jr
Jr
Jr
J
I

Jr

4
-22

 I~

L..{

:
j

fJj - - J
(;

::;

Jr
Jr
Jr

Jr
J

: 10%

.10%

1
/
1
0

: f
"YJ
1 %

:100%1

0----254

0----200

0----200

0
-15a

0----200

23

2
.
3
.
6
!
J

:!

4
24

: I/O


L
E
D ()

:
N C

:NC

N C

:N C

I
)

2
5

2
.
3
.
7
!

)
:I

"

/ : 1

l
J

426

 MOl
MOl

4
27

3
3
.1

J
5

4
28

F I L E

4
.1
rF ILEJ rF I E
J
F ILE
J (FD) N C

429

5
5
.1

J
i
Jr
Jr
JrM
JrPHNC

J J 6

i
l
e
trM

5
.
2
NCl

-!M !

4
30

5.3 M
r
MJ r
M r
M

431

5
.3
.1
J

M
12"I

M12" 1
6

12" :
-M
()

1.

1
m
m
)
(

2
.
12" 2
.)
(M

(
m
m
)

3
.
12" 3
.)
(M

(
m
m
)

432

2
)
(M1
{

'

J
'

M:M12

()

mm

2'
"
'
'
9
9

2
.
5

mm

0
'
"
'
'
9
9

G06"
()

.
-!

3
3

1.!!
(
2
.
)!7
.5
f7J f
.J 1
5
J I

!()
1.J

2
. I
J

434

.M
fMJ

l
?J
J!

435

5
.3
.2
r
J'1

J
'
M500
t
v
1
5
0
1
"
!

M500M501"

.M500" :1
'
)
()

.M501" :1
'()
()!
M500"l
2
.
5
m
m
"

1.

1
m
m
)
(

2
.

/l
e
t!

(
m
m
)

3
.

/
(
m
m
)

4
.

(
m
m
)

4-36

 (M500 M501)

Url
U
I
l
Q_~
r

(~.~I

~I

l
U
J

(r.~1

J
'

M:

M500

M501

()

7
.
5

m
m

2
.

.
.
9
9

4
.5

m
m

o...99

4
0

4
2
.
5

m
m

5
.

.
.
9
9

2
.5

2
.
5

m
m

o...99

806"
)

r
.

. 7
5
k
N{
7
.5
t
o
n
}
J"
1: 2

:1

4
37

.~RfFI)I)~
:

II|
Ei
~

1.i
!
()

2
.
7
.
5
) l

r7Jr
.J r
5
Jr

!()
1.

2
.

438

M!
fM

l
d:i
?J

39

5
.
3
.
3

!
!

5
0
2
'
"
'
'
5
0
5
" M
5
7
0
'
"
'
'
5
7
5
" 1
0
! M M

1.
[0'
"
'
'
3
5
m
m
J

m
m
)
(

5'
"
'
'8mm

!
J

(
)l

2
.
[0'
"
'
'
3
5
m
m
J

J
'
I
d:! Omm

m
m
)
(

3
.
[
1
5
'
"
'
'
4
5
m
m
J

(277-2
) mm
! 3

(
m
r
n
)

4
.
[0'
"
'
'
1
5
m
m
J

1
Omm
(
m
m
)
lJ
7!

.1.

r
5
.9

. 2
.0
. 3
.

4-4
0

.
.
.
.

I
I
+ I
I

L_

I
I

l
i
j
'

L_

l
I
<

-L--L-

_..+--

i
i
i

M: M502..... M505 M570r~M575

()

.
.
.
.
.
8
+5

m
m

0
.
.
.
.
.
3
5

m
m

0
"
"
"
'
3
5

m
m

1
5
"
"
"
'
4
5

m
m

0
"
"
"
'
1
5

2
7
7
-

0
.
0 ()

G
06"
(7)

4
4

1.!l

()

2
.
)7
.
5
r7J J r
5
J r

.
r

!()

1.

2
.

4-4
2

.M !
fMJJ

!!?J
J!

4-4
3

53.4

J
i

!
!

!MM560.
.
.
.
.
.
5
6
9
"
1
0

1.
[0"
"
"
'
3
5
m
r
n
]

2
.

(
m
m
)

5.
.
.
8mm
I
d:
!
(
)

! Omm

(
m
m
)

[0"
"
"
'
3
5
m
m
]

3
.
[
1
5
'
"
'
'
4
5
m
r
n
]

277-2
(
) mm
! 3
!
(
m
m
)

4
.
[0'
"
'
'
5mm]

;
i
Omm
J
(
m
m
) '

.1.

r
5
.9
J

2
.0

3
.

4-44

0L

L--
I

.
.

?-i

.
4

.4-

'

M :M560 M569
'"'J

()

1
0

5 8

m
m

m
m

o 35
o 35

m
m

1
54
5

m
m

o1
5

'"'J

2
7
7
-

0
.
0 ()

'"'J

'"'J

'"'J

'"'J

G06"
(?)

4-4
5


1.!l

()

2
.
)!7
.
5

r7J r
.Jr
5
Jr

(
1.

2
.

4-4
6

@M
r
M

!?J
l
J

4-4
7

5
.
3
.
5
1
(
)<

5
0
6
"
"
"
'
5
0
9
" 4
! M M

.
.
.
.
.
8mm
1 5

1.
[0"
"
"
'
3
5
m
m
]

m
m
) l
(

(/'
) l

2
.

277-2
(
) mm
3

!
(
m
m
)

[
1
5
"
"
"
'
4
5
m
m
]

3
.
[0
.
.
.
.
.
1
5
m
m
J

(
m
m
)

4
.
[0
.
.
.
.
.
1
5
m
m
]

4
9) mm
(

(
m
m
)

4mm
'
J

.1. J

r
5
.9

. 2
.0
. 3
.

4-48

t)
L

l
L
-
L

-.:::....- I

M :M
5
0
6
'
"
"
"
"
'
M
5
0
9

()

2
7
7
-

m
m

0
'
"
"
"
"
'
3
5

m
m

1
5
'
"
"
"
"
'
4
5

m
m

0
'
"
"
"
"
'
1
5

9'
"
"
"
"
'
9
.
5

m
m

0
'
"
"
"
"
'
1
5

G06"
()

4-4
9


1.!!

2
.
i
7
.
5

r
7Jr
.Jr
5
Jr

!()
1.

2
.

4
50

@M
fMJJ

?J
!l
J!

451

5
.
3
.
6

!4-54
!
!M M510-..559
M800-..M999" 250

1.
[O-..3
5
m
m
]

m
m
)
(

() + (5-..
8mm)

2
.
[O-..3
5
m
m
]

() Omm
!

(
m
m
)

3
.
[
1
5-..4
5
m
m
]

(277-2
) mm
! 3
!-
(
m
m
)

4
.
[O-..3
0
m
m
]

/'
Omm
(
m
m
) '
J

5
.
[O-..390kN

2
0
t
o
n
}
200kN {
l

{
O'
"
"
3
9
t
o
n
}]

4-52

6
.
[H/0]

H () I

H /
0"

J
'
lOOms

7
.

[
a--g9gms]

(
m
s
)

l
"
"

8
.
[
a 390kN
{
a 39ton}]
1""-'

1""-'

2
0
t
o
n
}
! 200kN {
kN {
t
o
n
}

.1. J

r
5
.
9J

2
.0

3
.

:J
"

B

:A
J :8

53

T
f
J

4
1
-
;-
:I

~I

MM}
MR

:H

- L O

i
l
l

M : M510"-"M559 M8
0
0 M9
9
9
r-.;

()

+5
.
.
.
.
.
.
.
8

m
m

0
'
"
'
'
3
5

m
m

0
'
"
'
'
3
5

m
m

1
5 45

m
m

o 30

277-

0
.
0 ()

2
0
0{
2
0
}

r-.;

r-.;

k
N{
t
o
n
} 0
'
"
'
'
3
9
0{
3
9
}

H: ()

H /O

1
0
0

m
s

0
'
"
'
'
9
9
9

2
0
0{
2
0
}

k
N{
t
o
n
} 0
'
"
'
'
3
9
0{
3
9
}

G
06"
(7

4
-54

1.!
()

2
.
)!7
.
5
f7J f
.J f
5
Jf

!()

1.
2
.

4-55

@Ml

r
MJJ

i
?J
r
i
c

Jl

4
-56

5
.3
.7
)Q
.

(
m
m
)
(
m
m
)

(mm)

mm

(mm)

J
'

M12

M500

[
5
.O
J
2
.0
3
5
.0

[
5
.O
J
2
.
0
"
'
3
5
.
0

M
5
0
1

5
6
0
'
"
'
'
5
6
3 M
5
1
0
"
"
'
5
5
9
M
5
0
2
"
"
'
5
0
5 M
5
0
6
"
"
'
5
0
9 M

[
4
.
5
J
[
2
.O
J
0
.
0
'
"
'
'
3
5
.
0 0
.
0
"
"
'
3
5
.
0
.
0
'
"
'
'
3
5
.
0
0
.
0
'
"
'
'
3
5
.
0 0

0
.
0
'
"
'
'
3
5
.
0

[
2
.
5
J
[
2
.
5
J
[
2
.
5
J
.
0
.
.
.
.
.
.
.
1
5
.
0 0
.
0
.
.
.
.
.
.
.
1
5
.0 0
.
0
'
"
'
'
3
0
.
0
O
.0
"
"
'1
5
.0 0
.
0
.
.
.
.
.
.
.
1
0
.
0
.
0
'
"
'
'
1
0
.
0 0
0
.
0
'
"
'
'
1
0
.
0 0

0
.
0
'
"
'
'
1
5
.
0

[
4
2
.5
J
[
4
0
.O
J
[
4
0
.O
J
1
5
.
0
'
"
'
'
4
5
. 1
5
.
0
.
.
.
.
.
.
.
4
5
. 1
5
.
0
"
"
'
4
5
. 1
5
.0
"
"
'
4
5
.
5
.
0
.
.
.
.
.
.
.
4
5
.
1
5
.
0
'
"
'
'
4
5
. 1
5
.
0
'
"
'
'
4
5
. 1

(ms)

[
7
.
5
J
2
.
0
'
"
'
'
3
5
.
0 2
.
0
'
"
'
'
3
5
.
0
.0
"
"
'
3
5
.0 2
.0
"
"
'
3
5
.0 2
2
.
0
"
'
3
5
.
0

(kN {
t
o
n
}
)

(kN {
t
o
n
}
)

{
O
.0
.
.
.
.
.
.
.
3
9
0
}

0
.
.
.
.
.
.
.
9
9
9

H /O

{
D.
0
.
.
.
.
.
.
.
3
9
0
}

. l
e
t NCI

i
4-33"'-'4-54() J!
!
. H ()
0

o() " 2

! () J [

4
57

5
.
4
J

-
JI

J
I

: !

: !!

rAJ rTJ

!
!

4
-58

T!
T

[]
CSTJ
R
B
I
2T

(1
) f
STJI
TOO

: t

fT J

(2) fT
(3) fTOO T?J

!JTT
!

(//) Y a T (
j

eT ~!

STJI
T T
T
STJI
fT<
.!9
0
l
e
t

. W D R
T

4
59

[]
(1) NC
J" I

(
2
) NC" I

(3) T

JI
fT

(4) r
J
T!

-Jl

fT
J J
r

J
i

460

5
.
5
J!

[]
(1)T

(2) r

(3)
:
(4)

4
8
1

-
l ~

'

'

-.

.I~~

Y
.
3
n
?

T
?R
E
l
Y
R
Z1:
1
u
z
A

4
t

ID;

z
A:
z

S
E

A
v
a.
Y

2
a

E
F

!
I

)1 &
J
l
.

.
r

t
7.

-0

s r~.~
v-

Jl0

?/oi
l

. U
F

l
1(t

A
E
V
Y
F
h
n
a

i
l
!
1
1
2

1
2
1 ...

R'

A
V
J
E
T
t

Y
B

E
.'1

<
1
>

-I~ a

I
I
I

AZ
.
Z

I~ ZE

1
iKzEaztM--~
A:.
.

A
Z
Y
2
r
z
m

va
E
maza
1
5 S
a

'
M
t
I

A:""

df

I
A
x
V Z
V
Ea

E
'

-.
.
.
.
.

:
:
:
:
:

4
h
w
e

-wba

.
J

.I
c
t
x

62

(1)T

(2)
(3)

r
J
rTOO?J
i
c

T
J

4
63

5
.
6
J

JI

: T

. l

464


J :l

!
J

:
!

J :!

:!

.! J

<

4
65

5.7 P HNC
5.7.1 PHNC
PHNC l
(
6
!

f
PHNC J

T!

r
'

l0

()

A: 1/2"

B: 1-1/4"

C:2"

0: 3-1/2"

3
!

l
() I

(X" ) 7
LCD"

o:-
1:

2 :?
J/~|

NY

.'
)
7
'
)

I
)
"
)
?

i I
M
1
2

M
5
0
0 I5
0
5
IM
5
0
1
0:
1

2:

'
)
1
IJ
.

IM502"" IM560

"

I5
6
9

IM506

IM510""

I5
0
9

I5
5
9

"

I 0 1 0 1 0 I X I0
I0
0
0 1 0 I0
I X I 0 I 0 I X 1_0

*1:"

1
'

()

466

(
l
e
t i

!
(

0
"

1"0" 2"

e
t 0"
l

1
/
2
"

1
1
/
4
"

2
"

3
1
/
2
"

2
0
7
.
5

2
0
7
.
5

2
0
8
.
0

2
0
9
.
0

3
9
.
0

9
9
.
5

1
5
9
.
5

2
7
9
.
1

a ()

a ()

o()

o()

5
.
7
.
2 PHNC
1.T!!
()

2
. !
3
.

r
.Jr
.
J

4
67

5
.
8
5
.
8
.
1

)!
l

l
e
t
l

1:

1
9:0
0

2:23:0
0

3: 3.. 8:0
0

468

1
9:
0
0

5
.
8
.
2
1.l

()

2
.
3
.

4
. i
or

" () I

!"

4
69

6
6
.1
J
J
!J J J

Jr
5

6
.2
I
c
t
NC!o

.!
0

.1! 1a 3 5

. 200
!
l

4
-70

!!
!
:

o100
M102 (C-SUS 1
. 0);
G90 G92 X1000 Y1000;
G20 X20 Y20;

E00 1
GOl Y10;

C
S
U
S1
.0

M 102 ()
C-sus1
. 0
C - S U

3 1
.
2

S1
. 0
C

S
U
S1
.
0

EOO'No.
1

7
:
l
NO 1
0
1

.
.

...1
'
:
/

201

2
3
4

C-sus1
. 0?N
o
. 0
110

CSUSl
.O

?
:
I
f
'

~
1
0
1

fJ f~

102
103

S
U
Sl
.
O

N
o
. 201
201

fJf{

201
202
203
204
205

4
-7

6
.
3

I
d:
i

:
J l

: 8
:".

4-72

: l
l

:.
o00'""'999.99
:m
m

 :
:(9
.Omm

:9
.Omm
:
:)7)
:Z!
!
:O N OFF

101.--....103
? No :r

:N
o
.

1:7.52 :5
.
0
" 3 :3
.
7
5
" 4: 5 :1
0
.
0
"

: [F]
.
.
.
.
.
.
9
9
9
9
9
: 0.
:m
m
/
m
in

: [S]
.
.
.
.
.
.
9
9
9
9
: 0.
:W (CW:)

:1
'

) [P]
.
.
.
.
.
.
9
9
9
9
: 0.
:Hz

:I
'

)
l
[Q]
: 0.
.
.
.
.
.
.
1
0
0
:%

:7
:O~2. 5
5{
a~25.
2
:MPa {
k
g
f/cm
}

5
}

4
-73

:)7
1-... 3 : 4: 5 :A
ir
6 :(

?i
9
.9
: 0:

:
9
.9
: 0:m
m

:
9
.
9
9
9
: 0:m
m

:
r201-----205

0 201'-""'205

:)7
2
01'-""'205
J

O 2
01'-""'205
E097

d:0"
7I

:NC

o
.
1(
E001
)
N

JI
o
.2N
o
.1
0J
I

N
N C

4-74

:;')
;
9
9
: 0-

:
E0 10!

:!
: W

:!7
:M
P
a{
k
g
f
/
c
m2}

: (j
)

(!)

6
.3
.1

1
.

r
!

2
.

3
.

4-7
5


!
I
J

1
. I
!

2
.

(
N
o
.
1 0)

I
J

1
.

2
.

JI

JI
Jr
Jr

J

JI
Z
!l

Z!

J!
Jr
Jr
J

4
-76

N
o
.
NoJ
I
I

2
.

r1a1Jr1a2Jr1a3J

1
.

r
J

2
.

r
aNJ I
d
:r
aFFJ

4
77

1
.

r
J

2
.

r1Jr
2Jr
3Jr
4Jr
5J

J<

1
.

2
.

3
.

1
.

2
.

3
.

J
~

4-78

M 1a2 ( )"

JI

7 JI

JI

f
/
'
f
/
'
JI

7
9

6
.
4
7
7 J 7

!l

: 8
:"

:!

:O
.0
0
9
9
9
.9
9
:m
m

:
:(9
.O
m
m)
:9
.
0
m
r
n
:
:)7
:Z

480

:O N OFF
I~

7 No

:
r
?J 101"'103

:N
o
.

1:7
.
5
" 2 :5
.
0
" 3 :3.754: 5 :1
0
.
0
"

: [S]
: 0"
'
9
9
9
9
:W (CW:

: [PJ
"

: 0"
'
9
9
9
9
:Hz

: [Q]
"i

: 0'
"1
0
0
:%

:"!

I
e

0
1

: 0"
"
9
9
9
9
:Hz

:"!
{
0
1

: 0"
"1
0
0
:%

4
81

:"!
<
e

0
1

I
: 0'
"
'
'
9
.
9
:

:"!
<
e
t 0
1

l
"
'
'
9
9
: 0'
:

:[]
.1
'
"
'
'
9
9
.9
:O
:

:
:0
'
"
'
'
2
.55 {O'
"
'
'
2
5
.5
}
2
:MPa {kgf/cm}

:7
1
'
"
'
'
3
: 4: 5 :A
ir 6: (

: 1'
"
'
'7

:7
7!

"
'
'
9
.
9
: 0'
:

:
: 0'
"
'
'
9
.
9
:mm

4
82

:!

: 0"
'
9
9

:!
:W

:!7
2
:M
P
a{
k
g
f/
c
m
}

:()

(l

6
.4
.1
f
6
.3
.1 J
7

4
83

6
.
5

l
!
i

:
J
: 8
:"
"

:J
!

:O
.0
0
'
"
'
"
"
9
9
9
.9
9
:mm

:
:9
.Omm)
:9
.Omm
:

:7
:Z!!

484

:O N O F F

7101'""'103
No :r
7
o
.
:N

1:7
.
5
" 2 :5
.
0
" 3 :3
.
7
5
" 4: 5 :1
0
.a
"

:!

!
"
"
'
1
8
0
: 0'
:

: [S]
[S]
.
;
9
9
9
9
: 0"
:W (CW:)

: [P]
"
"
'
9
9
9
9
: 0'
:Hz
: [
Q
]
1
0
0
: 0:%

:[]
.1
9
9
.9
:O
:

7:7

'
"
"
'
2
.5
5 {O2
5
.5
}
:0
:MPa {kgf/e
m
:
?
}

4
85

:7

1
"
'
3
: 4: 5:A
ir 6:

!
: 1 7
r-.J

:)
: 0 9
.9
:m
m
r-.J

:
: 0 9
9
9
9
:m
m
/
m
in
r-.J

: [PJ
: 0 9
9
9
9
:Hz
r-.J

Q
]
: [
: 0 1
0
0
:%
r-.J

:!
:W

:l

2
}
:M
P
a{
k
g
fI
c
m

6
.5
.1

r
6
.3.1
J

4
86

6
.
6
J
J

:{
200

487

6
.6
.1
H
I

1
.

2
.

r
!(

6
.6
.2
JI

1
.

2
.

r
JN
o
.J
r
6
.3 J

3
.
:16 8
:"

4
88

4
.

r
aKJ

5
.

d:
JI

489

6
.6
.3
JI

1
. !

2
.

r
l
)

3
.
: 1
6
:

P
I

4
.

r
aKJ

I
d:

490

6
.
6
.
4 ()

1
.

2
.

3
.
: 16
:"
"
J

4
.

r
aKJ

9
1

6
.
6
.
5

1.!

2
.

r
oKJ

3
.

6
.
6
.
6

I
J
<c

1
.

2
.

3
.

4
92

r
oKJ t

6
.?
J r
J'

e
1:Z eM
103)I
Z0
.
z

Z: Z()(
)

: eM104) Z

MOO

: (M104 MOO)
Z

Mal

:.

()

:
(M1a
4 M 180)
Z

-
- +Z+Z (
G93Z ) Z
Z l

4
93

:
)Z!0
.

.3
O

Z1 (HS-98)

O N

494

:()
N CM 1a
a
l

N
o
.
1

N C

:r
2
Y Z
2!

:()

:()Y

6
.7
.1
1
.

2
.
J

. 0" "

3
.

r
oKJ

4
95

7
7
.1

!J

NC!
!!

.!Jl
T
!

4
96

:J
J
:
J
(4)
:
J
!

J: J JI

4
97

8
8
.1
f?HELPJ

I
J

<

4
98

1 5
3
1
.1 5
3
1
.2 F I E5-4
1
.2
.15
5
1.2.2 5-6
1
.
3 ()

5-7
1
.3
.1 5-8
1.3.2 5-8
1.3.3 5-8
1.3.4 5-9
1.3.5 5
1
1
1.3.6 5
1
1
1.3.7 5 1
1
1.3.8 5-12
1.3.9 -5-12
2 5-13
2
.1
5-13
.
.
.
...
.~ 5 14
2.2 ..
2.3 5-14
2
.
4 5-15
2.5 5-15
2
.
5
.15-15
2.5.2 5-15
2
.
6 5-16

(l

5
-1

2
.7 5
1
6
2
.
8 5
1
7
1
7
2
.9 5
2
.1
0 5
8
8
2
.1
1 51
2
0
2
.1
2 5
2
.
1
3 JUM P () 5
2
0
2
1
2
.1
4 5
2
1
2
.1
5 5
2
2
2
.1
6 5
2
.1
7 5
2
6
2
.1
8 ()
() 5
2
7
8
2
.1
9 52
2
9
2
.
2
0 5

1
1
.1
J
r

! NC(
3
.5
"
FD)()
NC FD!

Ji

rF ILE l
d:

3
.
5
"F0

NC

'

I
F I E

'
-

'

.
.
.
.
.

5
3

1
.2 F I E
J IF ILEJ
8)
(

IF ILE

:
I

IF0J

INCJ NC

IFOJ
(
3
.5
"FD)

54

1
.2
.1
!
1

rF ILEJ rF I E

rF ILEi

d
: J
I

J
rF ILE

JI
. rF ILE
J!

2
. (
N C)
J
.a) rFOJ

b
) NC rNCJ

N Cl

3
.

!(
l
)

4
. !
!

5
. !

6
.
JI

5
5

1
.2
.2
I
J

rF 1LEJ rF ILE
J

1
.

JI
r

r
F IL E

2
.

3
.

r
JI
(
N C)

4
.

)
;
'

-~

t!
E

)(

i
f
{ j

5
. 3

.!

5
6

1
.
3
r
F ILE
JJ!

--

I
I

:

:
I
)
:
:

:7

:(

:
:

5
7

1
.3
.1

2
!

1
.3
.2

NC J ric()J r

J r
J
()

1
.3
.3

I
J

I
J
!

5
8

1
.
3
.
4
!
I
J

1.

r
1
.3
.2

2
.
3
.
4
. (<
t
J

5
.

5
9

6
. ?

.
.

7
. ?J

5
-10

1
.3
.5
N C IC() I

1I!

1.

2
.

1
.3
.6
{
I
J
i

1
.

2
. (
)

3
. r ~
J

r
*
J

1
.3
.7
N C IC) I

1
. (

2
.
3
.

5
-11

1
.3.8

J

(
)

1
.3
.9
!IC
RS-232C

1
.

r
1J'
"
'
'r
1OJ 10Ie

2
.

r
1J ~ r
1OJ !

3
. g
3 J

5
-12

2
2
.1

1!

5
-13

2
.
2
!
!J
!
A

..

&

1
7

2.3

(
)c

8 3 a

()
Ji

5
-14

2.4

J
!!
rNCJ rFOJ
!
rFILE
l
J

2
.
5
2
.5
.1
!
J rJ r
J r

!!

2
.5
.2

I[Y~.I i

J !

5
-15

2.6
!

!1

Id
:

2
.
7
.

-<l
0
r~J rTJ

5-16

2
.
8

1

1

2
.
9

5
-17

2
.1
0

()
J

[]
!

2
.1
1
(
I)() I

5
-18

[
[]

:
!!

[]

[]

:I

[]

J :
[3

E
F
".
.
.
.

1
r

j
{ j

5
19

2
.1
2
()
!!

I_~~

rCOPYJ

l
I

C
O
p
y

rCOPYJl

e
-!

2
. !! J I

2
.1
3 JUMP ()
!() I

j
rJUMPJ
;JUMP

:
J
J
r
;
7JJ

r-

20

:!

:!

:!

2
.1
4

JI

!J
1
.2FILE
(1
)
.

2
.1
5

JI
(r
1
.2FILE
)

2
1

2
.1
6
G J
J
G !!G

s
l

522

3J

:8

:(
(
J

3J

:G

:3G

i?J (

:GJ

-
I
J

1
.

23

2
.

3
.

G73 G75 G76

!
24

4
.
J

:G

:J

-!
l

(
i

JI

1.X Y W Q

25

2
.

3
.
4
.

JG

2
.1
7
G

J3!l
e
t 3J

5-26

2
. 1
8 (
()

()

1
.

2
.

3
. Gl

4
. f

5
.
?
J?!

(8)
1J

527

 J
I

? J
J

:l

J :!

2
.1
9

1
.

2
.

J :!

528

2
.
2
0
G G

1
.

r
J

2
. G

3
.

529

 30

MADA

1
I
J
6
3
1
.1 6-3
1
.2 6
4
4
1
.2
.16
7
1
.
2
.
26
2 6
8
8
2
.1 6
2
.2 -6
9
2
.3 26
9
1
0
2
.
4 Y Z6
1
1
2
.5 6
1
1
2
.
5
.16
2
.6 --6
1
2
2
.
6
.16
1
2
6
1
2
2
.6
.2 r
3 6
1
3
1
3
3
.1 6
1
3
3
.1
.16
3
.1
.
2 6
1
3
1
6
3
.1
.
36
1
8
3
.
1
.
4 6
3
.1
.
5 6
1
9
2
0
3
.1
.
6 6
6
2
2
3
.1
.
7(i

6-1

3
.1
.
8 6
2
9
3
.
1
.
9?6
3
0
3
.1
.1
06
3
1
3
.1
.1
1 6
3
3
.1
2 6
3
4
3
.1
.1
36
3
4
3
.1
3
.1
.1
4 Z()
6
3
4
3
.1
.1
5 6
3
5
.1
6 6
3
5
3
.1
.1
76
3
5
3
.1
.1
86
3
6
3
.1
3
6
3
.1
.1
9 Z6
3
.1
.2
063
6
.2
1 ?6
3
7
3
.1
.2
2 6
3
7
3
.1
3
8
3
.2 6
3
8
3
.
2
.16
3
9
3
.2
.26
4
0
3
.3 6
6
4
0
3
.
3
.1i
6
4
1
3
.3
.2l
4
1
3
.3
.3 6
4 MOl

6
4
2
4
2
4
.
1 MDI 6
4
.
2 MO I6
4
3
4
4
4
.
3 MO I!6
4
5
4.4MOI6
5

6
4
6
4
6
5
.1 6
5
.2 6
4
6
6
I
J

4 4
8
4
8
6
.1 6
4
8
6
.1
.16
5
0
6
.1
.
26
5
2
6
.1
.
316

6
2

1
1
.1
!8 r
1
<
-

)
(-)
Z

. N C
!!
l

CD-ROM!
CD-ROM!
)
I

6
3

1
.2

.
2
.1
1.(!)f
N
Cl
" (0N) I

J1
6
" " (0N)

2
.

o5~3{aPM5.0~3
1 .

~
m
c
/
f
g
k

2
0
.
3
0
+
0
.
0
5M
P
a{
3
.0+0.5k
g
f/
c
m
}
2

()

:
2

3
.
2
4
. O
.5
M
P
a{
5
.0k
g
f/
c
m
7
}

6-4

5
. NCJ!

" I

~r-~-~_l~

H___~

10co) r~ C
100

too

II
[

I I I I )
X+

Z+

I
xI
z
-I

I
II
II_
II
I
6
.

OFF

ON"
7
. rNCOFF"

ON" I

6
-5

8
. NCONJ
oNJ2 i
J

J NC
rNC 3JrNC 3J
3 rNC rNC
3J J

9
. NC" I

NCJ

l
3

66

1
.2
.2
1.(!fNC"
(0N) I

J " (0N) !

2
. .
o5MPa {5.Okgf/cm~

3
. f
fNC
OFF" ! ON"
4
. NCoNJ
ONJ2J

J N C
fNC 3JfNC 3J
fNC]J rNC
3J

6
-7

2
!

2
.1
1
. A B

2
. J
Z Y C

3
.

Y Z C P3JI

6
8

2
.
2
1!

1
. J

2
. J
+J C
J r
NC
(r

l
J 1!!
+ZJ
Z r
!2

2
.
3 2
2!
1.
J

2
. J
Z 2 XY 2

NC
J
!

. 2 J

6
9

2
.
4 Y Z
! X"Y Z
i
N C
)

N C

e
x

YZ) +

Flr
:
JL
:
J

N
~
U
~

.A r
l
0
0
%
Jr
5
0
%
Jr
2
5
%
J
l

E -

()
A
r
;

J r

r
;
1

6
-10

2
.
5
2
.5
.1
!
(1) (
A
0
7
0
0
4
) G24 33000
80%1
!

(2)JI

(3)

r
"
1
0

i
!<
A

A
0
7
0
0
4
;
(
0
7
0
0
4POWERC
H
E
C
K
)
;
M102(POWER);
G93Z
2
0
0
.:
M
7
5
8
:
G2483000P100Q100R
6
0
0
.:
M
7
5
9
:
M
3
0
;

6
11

2
.
6
l
e
t

2
.6
.1

1
.

r
J

2
. - 3J
f
J

l
3
. l

3J

1

2.6.2

j !<

1
.

r
r
J

2
.

r

r
J
1

6
-12

3
l

3
.1
3
.1
.1
!

3
.1
.
8
( f

3
.1
.2

JI

j 1FILE

~.

2
. rF iLEJ

6
13

3
.
1
IF0J

4
. !

5
.

JI

6.1
i

6-14

7
.
JI

-)
r
<

6
15

3
.1
.3
1
6

l
!JIl
1
.

r
J

2
.

3
.

r
(

) I
()

4
.

5
.
<
I
!
()
!"
4 () "
JI
()1)-
r
3
.1
.1
1

()
!"

JI
5 (A ir) "

.
!"l

()
! r
3
.1
.1
1 J

6
-16

()
!"
JI
6 () "

J
! f
3
.1
.1
1 J l

6
17

3
.1
.
4
!

1
. NC
" I

.
.
g

2
. Z
j

3
. Z

4
. 9
0
0

5
. !

1.!
l

2
. 9
0

3
. Z
!

4
.

6-18

3
.1
.5
!!

1
. r
3
.1
.4JI

2
.

1
. !

2
. r
3
.1
.4 JI

6
-19

3
.1
.6
!!
e
t 2" 1
0
"I

l
!7
1
.
5
"

2
" ( O
L
C
4
3
0
HI
I)

7
.
5
"

5
"

3
.7
5
"

1.5
"
(O
L
e2
1
2
HI
IO
L
C
3
2
0
HI
I O
L
C
4
2
0
HI
I)

10"

7.5"

5-

3
.75"

620


1
. f
3
.1
.4JI

2
. 7

0
"
1

3
. 7

4
. 1
.5
"
~


1
. !
1
.5
" ?

!7l

1
0
" !

7!
2
. !!

3
.r
3
.1
.4 JI

3
.1
.7

A J
"!
!i

0
.
!!

.
!

I
J

1
.

6-22

r
JI

J" I

3
.

r
r
F4J

R
t

r
J

~v iUJJ

6
.

AW

"

R
5
.

2
.

7
.

8.l
No.

6
23

1/2" 1-1/4" 2"

3-1/2"

24

1
.

2
.
3
.

4
.

1/2"

1.

2
. l

3
.

4
.
5

~Il

L I.
.
J

5
. !

6
25

1.

2
.

A ()

1
.
2
. eM8)
3
. (

)
4
. !

!I
!90 2 (A B)
A
90

5
. !

6
. !

626

7
. i
!-

()

~'
8
.
1

A ()
!
-

6
27

1.
2
.
3
. eM8)

4
.
5
. ?!!

6
. !2

.30
"

6
28

3
.1
.
8
1
. r
J

2
. !

3
.

4
.

5
.

6
.
Y

7
.

r
J

&

6
29

3.1.9

.NC
7
l

}}

J
[
i

s
)

NITROGEN
HIGH PRESSURE

O
O

1.J

2
. ?

6-30

3
. 3 "

? N C" I

J
3 J"

3
.1
.1
0
]I
(
l

) I

4 r
2
.3
.6
(r
) 1/10J

63

@
00%1

6
-32

3
.1
.1
1

I
J

1.

2
. ()
o3mm
.
.
5
m
m
1

.~

O
.3
m
m:
L5
m
m
:

l
I
i
:
!

e
z

6S
S

3
.1
.1
2
(7
J 2 (
) J
()

3
.1
.1
3
1.<!(I

7 4 )

2
. !!
()7

!
!<

2
.1
.1
4 Z

J
(7
J 5 Z
() J)
- (+0.2m
m
) !
.

6
34

3
.1
.1
5
i
AJ

-
-
-

3
.1
.1
6
BJ

" "MDI
"

I
d:"MDI
" 3

3
.1
.1
7
BJ

3?!
!

6
.1
.3)I
J
r

6
35

3
.1
.1
8
AJ

AJ

3
.1
.1
9 Z
Z
Z
Zl

3
.1
.2
0
1
))
7
J

6
36

3
.1
.2
1
4
J r
5
. I
<
1

3.1.22
!

637

3
.2
3
e2
.1
1.

2
. D
3
.

r
" I

4
.

r
" I

5
. B

r
/
'"

() I

.!B
-1J" I

6
.

r
"

7
.

r
" I

r
/
'

9
.

638

3
.2
.2

1.

2
.

r
J I

3
. AJON" I

:1
:
:!

4
. D
5
.

6
.

r
J"
r
"

7
. B

8
.

r
/
'"

() I

r
"

9
.

--

[I:
I:
[
l
j

~I

-!G98 U V G75 G76

(7
)

6
39

3
.
3
!!
2
!

3
.3
.1
eM00)
M O0"

"
MO0
J

eM0 1)

100" c

NC

eM02
)
M O2"
NCI
d:l

eM30)

M O2"
M30"
NC!
l

(G50)

M O2" G 50"

NC!

6-4
0

3
.
3
.
2

N C!

i
N C

.!J N C

<

r
(
)
!

3
.3
.3
l

N C ?!i

6-4
1

MDI
fMDI
/J 1
1

A !
M02 ()
M30 ()

4
.1 M D I
N C

.1<

1. fMOIJ MOl!

2
. f
4 f
2
.3
.
2MOl

3
. NCMOl" I

4
.

6-4
2

.MDI 1 (1)
868
G69" G26G28"
f
4
.
4 MOl

5
.

r
J

()
MOl
JI
T

4
.
2 MD II
1(1
3 13!
r
/
'
868869" J
f
/
'

13
!

6-4
3

4
.3 MD I
MOlG26G28"
!A fO N e
) "
ON"
i
1
O F F () "
A r

: G9
0 X5
0
0
. Y5
0
0
. T2
0
1 (J

G2
8 I5
0
. J 0 K2
"

'
X5
0
m
m 2
2MOl

1
. G90 X
5
0
0
.Y
5
0
0
.T
2
0
1
"

2
.

X
5
0
0
.Y
5
0
0
. "I

r
/
X5
0
0
. Y5
0
0
. . I
/'
1

3
. G28 1
5
0
. J0 K2
"

4
. A r
O N ()"
5
.

5
5
0
.Y
5
0
0
. .'
X

r
/
'

{X5
5
0
. Y5
0
0
. "I

6
.

X
6
0
0
.Y
5
0
0
. "I

r
/
'
X6
0
0
. Y5
0
0
. . I

6-44

4
.
4 MD I
:
;
1
'JOlv
1

f
J
'
J

ON"

OFF"

"

" ()

6-45

5
J N C

5
.1
1
. NC"

2
.
d:
l

I
J
'
:
I+XJ I-XJ X
I+YJ I-YJ Y

N C

/
/
/ " J

3
1
1
3
8
3
2
3

3
2
3

2
5
/ 3

5
.
2

""

1
. I
J" I

2
. I
/" J"
"

3
. A I
J I
F4J
4
. I
()

6-4
6

5
.

r
/.. J

t
o

"

6
. NC"
""
7
.

."
!!!

6-4
7

6
6
.1
6
.1
.1
1
. NC" I

2
. NC"

NCJ
3J

3
. 3J
!
4
. ( r
2
.
2 I

5
.

6
.

7
. A O
F
F
J NC

. NC

648

8
.

f
OFF?J
J

NCONJ fNC
J!TRIP"

NCl
f
NC
OFF"

9
.

1
O
.
11.fNC
" (0F F) I

. Jl
e
t ON"!

1
2
.

6-4
9

6
.1
.2
1.(r
2
.2
)

2
.
!
3
.

4
. A O
F
F
J N C

. N C

650

5
. I
OFF?J

NCoNJ INC
!TRIP" !

NC! I
NCJ
OFF" I

6
.

7
. I
NC" (OFF) I

J ON" !

8
.

6
5

6
.1
.
3
1
.

2
.

3
. J

J
!

!NC!OFFI
f
N
CJTRI
pIti

4
. NC" I

5
. NC.. j

6
. OFFI

]
l

(:)

7
.
8
.

652

9
. rNCO
FF" I

1
O
.

Jl
e
t ON" !

6
53

654

MADA

1 7
2
2 (

7-4
3 7-7
4 7-8
4
.1 7
8
4
.
1
.
1 NC7
8
4.1.2 NC7
1
0
1
2
4
.2 7
5 Z()7
1
3
6
7-15

J!

J"i

1
!

N CJ7l

1
)

1.J

2
.

3
. J" I

i
1

AMU
NITROGEN
HIGH PRESSURE

72

7l
N CJ""

"

73

J
C
M

(
)

!
!

i
l
d

.!

3!
!

1
.

(
0
7
0
0
0N
O
Z
Z
L
EC
E
N
T
E
R
)
M
l
0
0
M
l
0
2
(
P
O
W
E
R
)
N
l
G
O
O
Z
2
5
.
E
O
O
l
E
l
0
3
M
l
0
3
M
l
0
4
G
O
O
Z
1
0
0
.
M
O
O
G
O
T
O
l
M
3
0
74

2
.

r
j " I

3
.
!

4
.

6
. NC" I

7
.

8
.

r
J

J" I

7
3
9
.

r
"

1
0
.
[
)
.
)I
!
(I

1
1
. !

(
a
)(
b
) (
c
) C
d
)

f
Ur:
h

I~

/ ak

'
:
'

J
'
"

75

1
2
. 3
"
"
"1
1

7
6

()
I
J

1.

2
. ()
O.3mm
!1.5mm

O
.3mm:-

1
.5mm:

77

!!

4
.1
l

S
U
S
)t1
.0
)
((

I
J

4
.1
.1 NC
1.!

(
-y! 60mm
+ Y 60mm Y
=
O
"
+ X 8
m
m
J + X
!8mm!
i

2
.

(
0
7
0
0
2MANUALFOCUSC
H
E
C
K
)
#
5
5
1=
5
0
.
M
10
2(
S
U
S
1
.0
)
G
9
2
X
2
5
0
0
.Y
1
7
7
5
.

7
8

G
9
3
X1
0
0
.Y
4
0
0
.
M
l
0
0
N
l
E
3

G
O
O
X
#
5
5
1Y
O
.
G
O
O
Z
2
0
.
M
l
0
3
G
0
1
Y
5
0
.
M
l
0
4
5
5
1=
#
5
5
1+
8
.
G
O
O
Z
1
0
0
.
Y
l
0
0
0
.
M
O
O
G
O
T
O
l
M
l
0
l
G
5
0
3
.

3mm

4
.

r
N C"
!J"

5
.

r
J

6
. 3
"
!O
.5mm

7
.

J"
J

8
. 1
)
67

" I

.5mm
O

9
.

" I

1
0
. 6 9

79

11
.

r
J"

0
"

4
.1
.2 NC
1.

2
.

(
N
CF
O
C
U
SCHECK);
#
5
5
1=
5
0
. ;
#
5
5
2
=
7
.
G
9
2
X
2
0
0
0
.Y
1
5
2
0
.

7
.
.
1
0

G
9
3
X
1
0
.Y
1
5
0
.
M
10
2(
S
P
C1
.0
)
M
1
0
0
E
3
;
N
1;
G
O
O
S
5
5
2
;
G
O
O
X
5
51
.Y
O
.

G
O
O
Z
2
0
.
M
1
0
3
G
O
lY
5
0
.
M
1
0
4
5
5
1=
#
5
5
1+
8
.
5
5
2
=
#
5
5
2
+
0
.
5
I
F[
5
5
2
G
T
1
4
]
G
O
T
0
2
;
G
O
T
O
l;
N
2
;

M
1
0
1
G
5
0
3
. NC"

4
.

r
J"

5
. r

2
1
5mm B=15mml
O
.5
m
m
B=
6
0
m
m8
r
n
m
6
.

f
lJ
!

74

4
.2
!

(
)
!
N C
l
l

7
1
2

J
0
i

. (+0.2mm)

.Z=25mm

Z=25mm<
!

J
Jl
<3
!2
.3mm!

1
. Z
2
. !
3
. [""

4
. (
0
8
0
1
0
)
Z=25mm
!
Z

7
1
3

5
.
0
1

6
. i
5010
3 I

3
0
'
"
'
'
4
0
7
.

I
J

8
. Z X y"!

7
1
4

6
!()

1) a
t b C d

:(
2
0

2) X Y
!

[x
)
"a>b

"a<b

i
~_Lx

Lb

~_Lx

+X!

c<d
c>d

+y!

-
-0

- y1

7
1
5

3)

X
x=

y =

()

"!

+ (X)

-a>b

(X)

-a b

(X) ( X)

c>d

(Y)

-c d

(Y) ( Y)

+ (Y)

((1
4
1
6
.7J)

.
1
1E
31
.

e
z()

=0.32mm
Y=251
.64mm

7
1
6

e
:
:
:
:15.
6
5mJll
b::::1435mJll
c 13.
9
3
mJll
d=16D7mJll

I
7
I=
y= 1

x=

a
;
b

1
5
.
6
51
4
.
3
5
2

=O.65rmn

1
3
.
9
3
:
6
.
0
7

=1.07nun

X 1
6 a>b Y C d
l

!
X = (X
) + (X
) =0.32+0.365=0.97
y = (Y
) ( Y) =251
.6
4
-1
.0
7
=
2
5
0
.5
7

0
.9
7
m
m
X=
Y=
2
5
0
.5
7
m
m

<

(
T
E
S
T
C
U
T
)
M
l0
2(
S
P
C1
.0
)
G
9
2
X
2
0
0
0
.Y
1
5
2
5
.
G
9
3
X
2
9
0
.Y
4
0
0
.
X
2
5
.Y
2
5
.T
M
l
0
0
E
4

G
l
1
1X
2
5
.Y
2
5
.1
5
0
.Q5
.
H
O
.
5
G
5
0

7
1
7

718

MADA

1 8
4
1
.1 8
4
1
.2 8
5
1
.3 Z8
6
1
.4 8
6
1
.5 )78
7
1
.6 . 8
8
1
.7 ()8
9
1
.8 8-10
1
.9 8
1
1
1
.1
0 8
1
2
1
.11 8-12
2 18-13
2
.1 8-13
2
.2 8
1
3
e

()

A -

Ji

J"{!

81

n
o

q
u

R
J
V

3 1

8-14
3
.1

8-14
1
5
3
.
2 NC8
3
.
3 78
1
6
3
.
4 8
1
6
3
.5 Y8
1
7
3
.
5
.1

8-17
3
.5
.2

8 8
1
8
3.5.3 Y8
3.5.4 8
1
9
3
.6 8
2
1

8
2
1
3
.7
3
.
8 8
2
1
4 3(5
0
08-23
1)8
2
3
4
.1 ((
5
.1

8-24
5
.
2 8-24
2
5
5
.
2
.18
2
6
5
.2
.28
2
7
5
.2
.38
0
0
0)8
2
8
6 6(1
2)8
2
8
6
.1 ((
2
9
6
.
2 8
2
9
6
.3 8
6
.
4 8
2
9
7 1(2
0
0
0) 8
3
0
7
.1 8
3
0
7
.
2 ()
8
3
1
8

8-32
9 836
9
.1 8
3
7
3
7
9
.
2 8
9
.
3 83
8
9
.4 8-39
4
0
9
.5 8
1
0 ()

8-42

8-43
1
0
.1
4
5
1
0
.
2 8
1
0
.
3 8
4
6

82

1
1
1
2
1
3
1
4
1
5
1
6

8-47
8
5
1
...
....
......
.

8
5
1
8-52
8-53
8
6
1

83

1
.1

!'" "

1
)

. I ~ l

.!
0
!

1
. " I

2
.

3
. (7)

84

4
. (Kodak LensCleaningPaper)

:
;
4
7
7E
Ej
Z

5
. <
3
l
1 i
<
1
!
1l
e
tl

l
j
4
'
"
'
"
'
5

6
.
6
1
I
J

7
. <
8
.

1
.2

1
3

85

1
.
3 Z
Z

.!

1
.4

2
1!0
} !
.
3
"
"
'
'
0
.5
M
P
a{
3'
"
'
'5k
g
f/
c
m

()

1
. !

86

2
. 2!

3
. l

.
I ~ l ! ( )

4
.

5
.
6.1 (
1
2
"
'
'
1
5
t
v
Pa {
1
2
0
"
'
'
1
5
0
k
g
f
/
c
m2}

7
. 2 2
2
O
.3
M
P
a{
3
.Okgf/cm

} I
8
.

1
.5

O
.3
"
'
'
0
.5
M
P
a{
3"
'
'5kgf/cm2} !

.
l

.HvPa {10kgf/cm2}
1
MPa {
1Okgf/cm2}
l

?l
!

87

1
.6

!
!

!
!

!
!
i
b
l
J

'

~
\
<

.
l
<
l

J"l

.!l

!
{

88

1
.7 (

@"

.5

MAX MIN i
MIN5

f6 '6(1000
)J f
6
.1 ()

8
9

1
.8
!
.5MPa {
5
.Okgf/
cm2}
:O

()

<( f
S )

!
7!

8-10

1
.9

8
J

!
1

.J"
!!

1
;j

81
1

1
.1
0

1
.1
1

i
<

8-12

1
1!1

2
.1
r
8 J
c()

2
.
2
)

8
1
3

1
1!1<

3
.1
r
8 1

Y (T) (C)

84

3.2 NC
11
N C!<

(!7
1
. <

2
. !<

3
. 2
'
"
'
"4g1
!5
()
4
. LiZ N C!

5
.

I ~ <

6
. i

7
. 2

8-15

3
.
3
1!1

!7

1
.

r
-OFF"

2
.

J
X4

3
. l

4
. !<

5
. 2 4gj!5
()
'"'J

6
.

7
.

3
.
4
1!1
!!
(
l

8-16

3
.5 Y
1!1Y

3
.5
.1
1
.

r
" t

OFF" I

2
.
3
. IN O U T!

4
. YY

5
.

!0

.
7
J

6
. !

7
.

Yi

8-17

3
.5
.2

!
!

1
.r
J OFF"
1

2
.
3
. c
4
.

5
.

3
.
5
.3 Y
1
. Yl

2
. Y1
3
. Y!

L'

818

3
.5
.4
1.
2
. Y
1

3
. 7

4
.

(
1
) 3 4l

(
2
) F (ADJ) I

A
D
J
.VOL)!
(

!!

(
3
) (
M
E
A
S) I

.<

1S/cm
()
(!
!!
r
1
4

5
.
10S/cm

10S/cm

819



@l
e
t
<
I

0
-
0
.

!
()
!

dg

.
.
.

h J HEO

4000
3000

2000

10 0 0

800

600
500
400

200

'00
10 0

200

300

400 500

S /e m

8-20

3
.6

) f
9
I

3
.?
1

e
t r
l
0 () J
l

3
.
8

1
.

r
"

2
. 3

3
. J
t

821

4
. G24 83000 cw

!
(
N
A
I
B
U
H
O
D
E
N
)
G
9
2
X
2
5
0
0
.Y
1
7
7
5
.
Ml00
M758
G24S2000Pl000l00R600.
M759
M
l
0
l
M30

5
. r

6
. r
J
1

7
.r
J
cw
-50W !

3 rll
<
8
. r

9
. J

!
1
0
. f
/3

8
22

3 500

4
.1 ()(1)
500
( 16 6( 1
0
0
0
) J 1
6
.1 (-
)

823

3
3!1

5
.1
l
(
1
8 l

()
()

c?
x
L M

y M

5
.2
3!1
1
)

!
!
l
l
e
t
!
! 31

8-24

5
.2
.1
1
.

r
J

J OFF" I

2
.
3
. M 4

4
. 4

.!!

<
l

.!!
0
i
.
!
.1
d
:0
l
!

8
-25

5
.2
.2
1
.

2
.

l
(

.I
)
l
l

7 l
!
. 2
l

8-26

5
.2
.3
1.O
!

2
.

! 42
3
. j l
l

!M 4

4
.

1 -
1
j
7

827

6 1000 )
6(1
0
0
0) I
1

6
.1()(
2)
6

l~

1000

:SO-M ()

C-SOM ()
:2

eOLC1000P1500P
C250 (
L
C
2
0
0
)

1
.

r
I

2
.

r
OFF"

3
.
4
. 5
O

5
. !
6
.
7
. MAX
MIN

8
.
9
.

828

r
J ON"

1
0
. i
" I

1
J" [
11
. 5

)1 2
~
8

6.2
61
"" I

6!1
!

6!11
0

6
.
3
'
6!1

6.4
6!1

d:l

8-29

1 2
000

1(2000) I
1

7
.1
1!1I
d:

N C
N CJ
'

e N CI
)

830

7
.2()

12
0
0
0H
!

1
.

r
" I

OFF"

2
.
3
. 0
4
.
5
.
I
J
O I~
1.
2
. 0

l
I

3
.

4
. 5
.
6
.

.
<

.!

83

~6

3 i
1

3!1

1!1

X
7

11

X L M

31

11

Y (T)

11

Y
7 (C)

1!1

Y L M

3!1

1
0

1!1

1
1

11

1
2

11

1
3

1
4

3 1

1
5

C()

11

NO

1
6

I
)

()

!
3
!

1 500
2
1
7

()

6
1
0
0
0 ) I
1

832

~?

1
j
C
3
2

7
J

I
f7
2

32

DTE~

7
N
o
.2

E
P
O

f
-EP-O 7
1

I
f7E
PRO

7
S
R
L

E
-j
2
2

LC-SOM

f
-.2

71~/\

RA

SO-M

l
e
t

I
)

MY-2

SO-M

8
33


!!
Ml

1.
!(
)
2
. LM!<

3
. L M<

.
!

1
.

2
.
3
. 0
4
.

834

8-35

9
!l

l
I
J

J
A -
J"
!

eHe-Ne !!

1He-Ne

M3

836

9
.1
l

x"

()

J a

0
1

<
42

9
.
2
1
.r
" I

He-Ne

2
.r
" I

3
.
4
. ! 1
0
c
m He-Ne

5
. He-Ne!

6
. He-Ne
!

7
. !

837

9
.
3

1
1.

2
.
3
. 1

2
1.

2
. 2

3
1.

2
. 3

9
.
4
r

8-38

9.4

.<

1
. J
2
. l
I
)
!

1
.

l
1
l
l
e
tl

.!0
?

1.()

2
.

(KodakLensCleaningPaper) <

8 39

3
.
!

9
.
5
1
. He-Ne!I
)H
e-Ne

1
He-Ne !

I d:~

2
. 2.5mm He-Ne
He-Ne!l

He-Ne

1!

()
(<)() I

l
l

84
0

 H
e
N
e

1
~
O

~
O

. x.

9
.
1
f

841

10
C
O2 C
O

!!C
O
2
"
!
!1
"1!l
!

C
O2
!
2!

(
1
)
l

(
)I

l
l
( r
)

(
2
)
!
C
O2l

l
He-Ne()
C
O
2

842

.
7

!!

!
1 1!

.C0
l
e
t
2
l

!
!!

e
H
e
N
e !!

1
0
.1
!l
C
O
2

NCj " I

rLASERALIGNMENT () J O
FF"

1
. fLASERALIGNMENT () J ON"
i

2
. "!
3
.

843

4
. !
()

!!

Y!!

..

'

y
J

.7.5" 7!
!
5" 7

5
. C
/'
f
l
O
.
2 J

l
l
d:

1
'

( f
9
f
5
.2
)

8-44

1
0
.2

A 5
CO
2

1
. r

2
. '
M10 2 (
P
O
W
E
R
) E 103!

.J ~ r "
1'
7
"

5
0
0
W

1000Hz

50

O.02MPa

5
.
A
i
r

0.3

1.5mm

2
{
O
.2
k
g
fI
c
m
}

(
N
AI
BU-HODEN)
G
9
2
X
2
5
0
0
.Y
1
7
7
5
.
Ml00
M758
G24S2000Pl00Ql00R600.
M759
M
l
0
1
M30

3
. He-Ne 5mmJ

c
o
!
I
)!
O
C
2 !

8
45

4
. 2
0
'
"
'
'
3
0
c
m
!
l

l
!5
'
"
'
'
1
0 7
0

5
.r
"
6
.r

7
.r
"

1
0
.3

C
O
'
)3
(

r
9

84
6

11
r
3
.
8 JI

rcw
5
0
W
J)I!
()

A -!

1 1!
i
"
!

1
. (

7!
2) I

(
+
1
0
0
a
wI
1V

LC~ =cH

(2)

2
. NCJ" I

3
. r
/
'
3

847

4
.

i
bq

5
. JI

6
. 8 2 4 S3000 cw
80%!!G 2 4 R R360O
.(
6
0
mi
n
)I

(
N
A
I
B
U
H
O
D
E
N
)
G
9
2
X
2
5
0
0
.Y
1
7
7
5
.
M100
M758
G
2
4
S
2
0
0
0
P
l
0
0
0
l
0
0
R
6
0
0
.
M759
M
1
0
1
M30

7
.
6
0

cw
80%
1
5

8-48

8
.

!i
i

O
OC (H)
)
FM (V

OC (V
)
FM (H)

9
. !l

110m() I

0
.!2
'
"
'
'
3i
!
lOW
1<:11

i
!

1
0
. 9
11
.

1
2
. 1<:1
fiX

84
9

1
3
. J

1
4
. j'3

1
5
.

850

12
!
2
8

C!
!

1
3

1!1ON/OFF

l"
!0
.(
r
1
4 l
)

85

1
4
()
"

1.
<

2
. !
3
. !
4
. '
3""'5
5
.

7
J
1""'4

-() I
!

852

15

(
S
H
I
N
D
A
S
H
I
)
(
F
O
C
U
S
)
(
M
A
N
U
A
L
F
O
C
U
S
)
(
G
A
S
F
L
O
W
)
(
N
A
I
B
U
H
O
D
E
N
)
(
T
E
S
T
C
U
T
)
8
0
1a(
A
P
L

H
9
8
A
-1
)

(7)
N C

N C

50

HS-98

r
(
S
HI
N
D
A
S
HI
)J!

2
0
m
m

(
0
7
0
0
0N
O
Z
Z
L
EC
E
N
T
E
R
)
M
1
0
0
M
10
2(
P
O
W
E
R
)
N
1
G
O
O
Z
2
5
.
E
O
O
l
E
1
0
3
M
1
0
3
M
1
0
4
G
O
O
Z
1
0
0
.
M
O
O
G
O
T
0
1
M
3
0

8-53

 f
N C (
F
O
C
U
S
) J N C
!

J
i
B 7mm 0.5mm 50mm8mm
B 1
4
m
mI
(200mmX 200mm
)
1
5 B
f
J
J<

H
e
N
e

8
n
r
n 5
m

(
F
O
C
U
S
);
5
5
1=
5
0
.;
5
5
2
=7
.;
G
9
2X
2
5
0
0
. Y1
5
2
0
.:
G93X1
7
0
.Y
2
3
0
.
;
Ml02(SPC1.0);
M
l
0
0
;
E
3
N
l
G
O
O8
#
5
5
2
;
G
O
OX
#
5
5
1
.Y
O
.
;
G
O
OZ
2
0
.:
M
l
0
3
;
G
O
lY
5
0
.
:
M104
#
5
5
1=
#
5
5
1+
8
.;
#552=552+0.5;
I
F
[
#
5
5
2G
T
1
4
.
]G
O
T
0
2
;
G
O
T
O
l;

N
2
:
M
l
0
l;
G
5
0
;

8-54

(MANUALFOCUS) J
!

50mm1
.5mm
! O

l
8mm!! 6
rOJ
!

rOJ I

raJI

H
e
N
e
8nm

<0

(
0
7
0
0
2MANUALFOCUSC
H
E
C
K
)
5
5
1=
5
0
.
.0
)
M
l02(
S
U
S1
G
9
2
X
2
5
0
0
.Y
1
7
7
5
.
G
9
3
X
1
0
0
.Y
4
0
0
.
Ml00
N
l
E
3
G
O
O
X
#
5
5
1Y
O
.
G
O
O
Z
2
0
.
Ml03
G
a
lY
5
0
.
Ml04
5
5
1=
#
5
5
1+
8
.
G
O
O
Z
1
0
0
.
Y
l
0
0
0
.
MOO
G
O
T
O
l
M
l
0
1
G
5
0

855

 rNC (
G
A
S
- O
W
) J NC
!
1
. l

2
. ?'
P
O
W
E
R
"
3
. E010!
1

.t
l
I

0
.
0
0
0

O
.a

n
u

I
ft
l
J

I
~ t 1 0
1

! 1!

O<
J l
JJ

4
.r
20mm

5
. )7
1
6
.

856

(
G
A
SF
L
O
W
)
;
G
9
2
X
2
5
0
0
.Y
1
7
7
5
.
M
l02(
P
O
W
E
R
)
Ml00
G
O
O
Z
2
0
.
E010
Ml03AO
G
0
4
X
l
0
0
0
.
Ml04
M
l
0
l
G50

r
(NAIBU-HODEN) J

l
E 10) G 2 4
E (EO l
S() p () Q( R()

-OFF"J
600
(
N
A
I
B
U
H
O
D
E
N
)
G
9
2
X
2
5
0
0
.Y
1
7
7
5
.
Ml00
M758
G24S2000Pl000100R600.
M759
M
l
0
1
M30

857

 r
5
0 (
T
E
S
T
C
U
T
) J 5
05
0
O
J

(
T
E
S
T
C
U
T
)
M
l0
2(
S
P
C
1
.0
)
G
9
2
G
9
0
X
2
5
0
0
.Y
1
7
7
5
.
G
9
3
X1
0
.Y
5
0
0
.
M
l
0
0
E
O
O
l
G
l
1
1
X
1
0
.Y
l
0
.1
5
.
E
0
0
2
G
l
1
1
X
4
0
.Y
l
0
.1
1
2
.
5
E
0
0
3
G
l
1
1X
2
5
.Y
3
5
.1
3
5
.J
1
5
.
E
0
0
4
G
l
1
1X
2
5
.Y
2
5
.1
5
0
.Q
5
.H
O
.5
M
l
0
1
G
5
0

r
801a (AP~98-A-l)

J Z (HS-98)

2
5
m
m
0
1

J!
73

(
H
S
9
8R
E
G
U
L
A
T
I
O
N
)
M
l
0
2
(
S
P
C
1
.
2
)
M
1
0
0
G
5
3
Z
3
0
0
.
G
9
0
G
9
2
Z
3
0
0
.
G
9
0
G
O
O
Z
1
5
.
M
7
2
2
M
7
2
7
G
5
5
5
H
9
8
.
Z
0
.
1
.
G
9
1Z1
G
0
4
X
O
.1
G
5
5
5
H
9
8
.Z
O
.
0
2
G
0
4
X
O
.1
G
9
0
G
9
2
Z
0
.
G
O
O
Z
2
.
8
G
0
4
X
O
.5
M
7
2
7

8-58

GOOZ1.5
G
0
4
X
O
.5
M
7
2
7
G
O
O
Z
O
.2
G
0
4
X
O
.5
M
7
2
7
G
5
3
Z
3
0
0
.
G
9
0
G
9
2
Z
3
0
0
.
M
7
2
7
M
7
2
3
M
1
0
1

859

860

MADA

1
6

8-4
8-5
8-6
8-6
8-7

8-10

8
1
1

8-12
8-13
8-13

1
0

1
1

1
2

1
3

1
4

1
5

1
6

1
7

1
8

1
9

2
0

2
1

2
2

2
3

2
4

2
5

26

2
7

2
8

29

30

3
1

8-9

8-8

8-12
1

..

861

3
6
(
1
0
0
0
)
1
(
2
0
0
0
)

01

8
1
6
8
1
6
8
1
7
8
2
1
8
2
1
82
1

3
(5
0
0
)

O
O
O
O
O
O
O

N C

8
2
3

(1)

8
2
4
8
2
4
8
2
8

8
2
9
8-29
8
2
9
8
3
0

8
3
1

1
0

1
1

1
2

' i
! i
! ! ! ! j !

/1/
8
1
4
81
5

/1/
OJ

01
OJ
oj
Oi

01
01
01

/
/
O
O
O
Ol

01
01
O

01

/1/
01
01
01
01
01
01
O
O

/1/
01
OJ

01
O!

01
01
01
O

/
O
O

01
01
01
O!
Oi

01

/1/
Oi
O!
O!
O!

01
O!

01
Oi

/
O
O
O

01
01
01
01
01

/1/

/1/

/1/

/j/

OJ
Oi
Oi
Oi
Oi

O
O
O
O
O
O

O!

01

01
01

Of

O!

01
01
01

01

0
01

O!

01
01

01

Oi

01
O

0;

OJ

'

(2)

63

1 9-2
2 9
4
2
.1 9-4
2
.
2 9-5
2.3 9-7
3 9
8
4 !9-10
5 ?9-12
5
.
1 ?9-12
.1..
.....
..
...
..
.9

5
.1
2
5.1.2 ...
..
..
.
.....
..
...
..
.9

1
2
5.1.3
5
.1
.4
5
.1
.5
I
J
9-15
5
.1
.
6 9-15

1
.
<

l
!
77

5
0
-1<11

.
o
.
N

<
.i
.() I

!
!

l
(!)

!
.()!
0
l
7
<1
j
l
!
1
l

!
7

r
4

92

Ea9!

I~ 0"

@!!<
S

93

2
NCI
?

10 (9 1
) 73 5((
)
9
0

J
4 J

r
6

.9

N
o
.
l

2
.1
NC

1
)

94

2
.'
2

(J IS)(
)!
'

SPC

SPCC

E-SPC

SPCC

SPH

SPHC

SS400

SS400

SUS

SUS304-2B()

A-SUS

SUS304-2B

C-SUS

SUS304-2B

E-SUS

SUS304-2B

Al050

Al050

A 2017

A2017

A5052

A5052

SECC

SECC

E-SECC

SECC

SPG

S P G

E-SPG

S P G

S :7
.
5
"
T :1
0
"

:
W:HS-WACS

95

4
.
9
.
SUS

5
m
m
~
O
m
m
~
1
6
.

3. 2mm=SPCC
6
. Omm=SPHC
Omm=SS400

SUS304-2B

SECC :1m 1
0g

SPG

9-6

:!1m 1
4
9g

JIS A5052
JIS A 20 17)7)
JIS Al050

2
.
3
!
!
:

0100
M102 CC-SUS1. 0)

G90 G92 X1270 Y1270

GOO X20 Y20;
M100
E0 1

G 0 1 Y 10

M102

?
-.
.
.
.
.
.

C
-$1.0
"

E0 1"

N o. 1

.
..
.
.

7 N o. I
10 1

E$
U
$
!
.
O

.lij2(1lIA 4

101
102
103

SUS1
. 0

.
..
.
..
.
.

.
.
.
.
.
.
..
..
.
.

c-

NllllQI]

2
3
4
5

CC-S

US1.0)"

.
..

..
.
.

.
.

No. 10 1?

!201

C
S
U
$1
.0

O
I
I
I
201
202
203
204
20S

.
.
.
.
.
.
.
.
.
.
.

.
.
.
..
.
.
.
.
.
.

.
.
. I
f

N o
.2 a1

..

97

3
-!
l
!

-
.1
.5mm!
<

() 0 !

(1)

.5
!57
1
0()l

1
(2)

! 2 3 2.5W
()i

(3)

N C ?
N CI

9
8

SPCl. 6

]
[ J

I
N
O
.
1 .101

S
P
C1
.
6
/
1900
[
b
a

:
s
p
c

[)

//
[A;.JON/
~-

F
)I
[S~
:
.
10 I

0
0
i 1
0
2
0
0
13
6
0
0 1
0
0
0
'3
6
0
0 5
0
0 2
0
2 1
1
0
0
3I3
0
0
0 7
0
0
4I4
0
0
0 8
0
0
o 1
0
0
a
6

3
2

o
h

3
0
0

8
0
0 1
0
0
0

5
0

t'n

0
.
0

0
.
0

1
.5
1 0
.
0
0
0

I
t

0
1 0
.
0
0
1 0
.
0
0
1 0
.
0

'.~

[
5
l.
~11U!{ !
j
"~-'f~
|~-'f~
i

6
:
1
0

0
2
0
0
0
1
1
0
0
2
1 36
i
2
0
6
0
0
'
2

1
l
l
1
0
3 3
6
0
0
2
0
t'n
N
o

O
.1
8
0
2
0
1
1
.
5
0
.
1
1
1
6
5
4
0
0
0
L
1
2
2
2
0
0
9
2
4 2
0
2
1
.
5
5 0
. i
1
.
5 0
2
0
2
1
.
5

0
.
0

O
.I

7 E

q
_.Q

[mm:

~ . 7 '

9
9
2
.
1
4
0

N
o

n
:

0
.
3
i
0
.
2
0
.
1
O
.I

1/2/3/4/5

0
.
0
1

i
l ~.

0
0
.
.
0
0
1
1
.
.
5

EUU

o08a.5

0
.
0
1

J
.5

[
j

o
O
0
+
4
'
l
1

1
1
1
0
0
0
2
3
1

:
.
i
N
o

u
n
a
u

"A
'i
l
i
t

'
n
. t'n t
:
7
J
J E 1 :

t'n :
l
'n i
l
:
'
T
:
I


E

t

2
0
1
2
0
2

2
0
5

1
2
0
1
1
2
0I
I
Z
O
1
2
0
1
2
0

3
6
0
0
3
6
0
0
3
6
0
0
3
6
0
0
3
6
0
0

1
0
1
0
1
0
1
0
1
0

2
2
0
0
z
a

0
o
ae
0
o
e

2
0I O
.0

1
0
0
0
0
1050
0 1

0
o
a
o
z
0
.
5
0
0 1
0
0
1
0
0
O
.I
1IO
.5
0
0 1
0
0

51
2

2
3

5
6
7

::h

1
0
1
0
1
0
1
0
1
0

2
0
2
0
1
5
1
5
1
5

Z
(l
I
P
agf
/c2
}
)

O
.
II
I
P
a
{
1
.O
i

G
.
O
}
0
.
6 a{

O
.
I
"
P
a
I
1
.
O
}

9
9

4
7
7

!!

1 :!
7
N
o
.

.J f

[
S
]

1
0
1 3
6
0
07
0

1
5

1
0

O
.5 4

0
.
0
51

3.0sec
100Hz19

O.5sec
100Hz18

O
.5sec
90Hz17

O
.5sec
O
.5sec

80Hz16
70Hz15

9-10

 2 :!3
7
N
o
.

'

7

[
S
]

1
0
1 3
0
6
0
07

1
5

.
o7

1
0

0
.
0
51

O.5sec

95Hz20
90Hz19%
85Hz18

80Hz17
O7sec75Hz16

70Hz15

'
9
1
1

5
5
.1
.
N C
1
2..

5
.1
.1
73l

s
s()?

5
.1
.2
1.1!
!7
! 7
<

9-12

5
.1
.3

l
l
(
)
-

5
.1
.
4
?l

N C

NCI

NCl
1
6: eNC)

! N C

9-13

A
:

.
3!
2

N C

:
:
:

A :

()

-1-

2
.
3

N C

~."'~"Jiii::
aD J ' ~

:
:

:
.......:y
()

N C2.4

2
.
4

N C

N Cl

l!
I
d:l

!
1
5
0
!
0

9-14

0
0

180 !

7
9 )<
1
O
0

5
.1
.5
.
.2
0
1
'
"
'
'
2
0
5 NC

5
.1
.6
NC e
NC) I

Gaa;]
! [
G6 1 G 0 9
(l
e
t)

G111/G112/8113/G114) [
Gaa;]
(
!
l
NC

[0N]
GOO

[0FF
] l

NC [GOO:J NC l

9-15

9-16

MADA

 10

1 1
0
2
1
.1 -;10-2
1
.2 )710-2
1
.3 )710-3
1
.4 10-3
2 )710-4
2
.
1 NC-;
10-4
2
.2 10-79
2
.
3 1
0
8
4

0
1

1
.1

J 3

Ji

J!
!

1
.2

9
9
9
9

NC

1
0
0
0
0-1
0
9
9
9

1
2
0
0
0
1
3
0
0
0
-1
3
9
9
9
1
4
0
0
0
1
5
0
0
0
1
6
0
0
0 7
2
0
0
0
0
-

102

NC

1
.3

!J
JI
3 (
1
0
0
0
0
Jl
) f
2
.2 7 J
f
2
.3

1
.4
!!
!!
<

0
3

2
2
.
1 NC
150

10
4

701

702

7
0
3
1

704

705

706

707

708

709

710

10

711

1
1

712

12

713

13

714

14

715

15

716

16

717

1
7

718

18

719

19

720

20

721

21

722

22

723

23

724

24

725

25

726

26

727

27

728

28

729

29

730

30

7
3
1

31

732

32

733

33

734

34

735

35

736

1
3
6

737

37

738

38

739

39

740

40

741

4
1

742

42

743

43

744

44

745

45

746

46

747

47

748

48

749

49

750

50

751

5
1

752

52

753

53

754

54

755

55

7
'

756

56

757

57

758

58

759

59

760

60

761

6
1

762

62

7
'

763

63

764

64

765

65

766

66

767

67

768

68

769

69

770

70

771

7
1

772

7
2

773

73

774

74

7
<

775

75

776

76

777

77

778

78

779

79

780

80

781

8
1

782

82

783

83

784

84

7
"

785

85

786

86

787

87

788

88

789

89

10

790

90

791

9
1

792

92

793

93

794

94

795

95

796

96

797

97

798

98

799

99

1000

1001 MOl MOl

MOl

1002

1003 MOl

MOl

1004

1005
9
1006EM

2000J

2001

2002

2003T

2004

2005

2006MOl

o R
eady
2007 Se
[]

n
i
t
i
a
l Ready
2008!I
[]

Alarm Rese
2009 l
t Ready[ ]

2010 System
Ready[[]

2011 M123

2012 M123

2013 -IM123

10
6

MOl

or

or

or

or

or
or

or

o
r
2
0
1
5

o
2
0
1
6 M123

o
2
0
1
7

r
o
2
0
1
8

o
2
0
1
9

2
0
2
0

o
r
2
0
2
1 N CM123
T
2
0
2
2
r
o

r
o
2
0
2
3

2
0
2
4
1
o

2
0
2
5 p

2
0
1
4

)
o
r

2
0
2
6 I

2
0
2
7

2
0
2
8

4000RAMD
i
s
kF
o
r
m
a
t

4
0
0
1RAMD
i
s
kOpen

4
0
0
2RAMD
i
s
kC
l
o
s
e

4
0
0
3RAMD
i
s
kRead

4
0
0
4RAMD
i
s
kW
r
i
t
e

4
0
0
5RAMD
i
s
kD
e
l
e
t
e

4
0
0
6RAMD
i
s
kRename

l
i
t

4
0
0
7RAMD
i
s
kF
u
l
l

7
7l
l
t
F
u
l

.1

O
p
e
ne
r
r
)RAM
4
0
1
0 (
D
i
s
kmemorye
r
r
o
r

4
0
1
1 i(
W
r
i
t
ee
r
r
)RAM
D
i
s
kmemorye
r
r
o
r

4
0
1
2(Sume
r
r
) DPR

memorye
r
r
o
r

(
r
e
a
de
r
r
)RAM
4013
D
i
s
kmemorye
r
r
o
r

(
F
u
l
le
r
r
)
4014'.
128K

.
J
.I

r
r
) RAM'
4020(Open e
D
i
s
kmemorye
r
r
o
r

(
W
r
i
t
ee
r
r
) RAM
4
0
2
1
D
i
s
kmemorye
r
r
o
r

r
r
) DPR
4022(Sum e
r
r
o
r

emorye

r
e
a
de
r
r
) RAM
4023(
D
i
s
kmemorye
r
r
o
r

F
u
l
le
r
r
)
4024.(
128K

.
.

r
r
)
40257"7"1(Closee
1
(
C
l
o
s
ee
r
r
)
2(Closee
r
r
)
40267".io
2
(
C
l
o
s
ee
r
r
)
(Opene
r
r
)RAM
4030
D
i
s
kmemorye
r
r
o
r

r
e
a
de
r
r
) RAM
4031 (
D
i
s
kmemorye
r
r
o
r

(
W
r
i
t
ee
r
r
)RAM
4032
D
i
s
kmemorye
r
r
o
r

(
F
u
l
le
r
r
)
4033

.71
.

40357.
(
C
l
o
s
ee
r
r
)
(
C
l
o
s
ee
r
r
)
5
0
0
1 001 1
1
5002 001 2
2
5003 001 3
3
5004 001 4
4
5005 001 5
5
5006 001 6
6
5007 001 7
7
5008 001 8
8
5009 001 9
9
5010 001 10
10

=;1-9

@9

108

5
0
1
1
11
5012
12
5013
13
5014
14
5015
15
5016
16
5
0
2
1
1
5022
2
5023
3
5024
4
5025
5
5026
6
5027
7
5028
8
5029
9
5030
10
5
0
3
1
11
5032
12
5033
13
5034
14
5035
15
5036
16
5
0
4
1
1
5042
2
5043
3
5044
4
5045
5
5046
6

001 11

-~

001 12

e-~

001 13

001 14

-~

001 15

-~

001 16

-~

002 1

1\0-~

002 2

-~

002 3

-~

002 4

002 5

-~

002 6

-~

002 7

002 8

-~

002 9

002 10

-~

002 11

-~

002 12

002 13

-~

002 14
002 15
002 16

003 1
003 2

-~

-~

003 3

.-~

003 4

-~

003 5

003 6

-~

5047 003 7
7
5048 003 8
8
5049 003 9
9
5050 003 10
10
5
0
5
1 003 11
11
5052 003 12
12
5053 003 13
13
5054 003 14
14
5055 003 15
15
5056 003 16
16
6
0
0
1 001
1 1
6002
2
1 2
6003
3
1 3
6004
4
1 4
6005
5
1 5
6006
6
1 6
6007
7
1 7
6008
8
1 8
6009 009
1 9
6010 0010
1 10
6
0
1
1
11
1 11
6012
12
1 12
6013 0013
1 13
6014
{14
1 14
6015
15
1 15
6016
16
1 16
6
0
2
1
-/1
2 1
6022
-/2
2 2

0
-10

7
1
-j
I

I
j

I
j

I
j

or
or
or
or
or
or
or
or
or
or
or
or
or
or
or
or
or
or

6023
2 3
6024
2 4
6
0
2
5
1
2 5
6026
2 6
6027
2 7
6028
2 8
6029
2 9
6030
2 10
6
0
3
1
2 11
6032
2 12
6033
2 13
6034
2 14
6035
2 15
6036
2 16
6
0
4
1
3 1
6042
3 2
6043
3 3
6044
3 4
6045
3 5
6046
3 6
6047
3 7
6048
3 8
6049
3 9
6050
3 10
6
0
5
1
3 11
6052
3 12
6053
3 13
6054
3 14

-/3

o
r

o
r

-/5

o
r

-/6

o
r

-/7

o
r

-/8

o
r

1
'
9

o
r

-/10

o
r

t
11

o
r

/12

o
r

/13

o
r

-/14

o
r

-/15

o
r

-/16

o
r

or

? 2

o
r

A
S

? 3

or

A
S

o
r

A
S

? 5

o
r

A
S

or

A
S

? 7

o
r

A
S

? 8

o
r

ASS 9

o
r

A
S

A
S

A
S

? 10

o
r

A
S

? 11

o
r

A
S

? 12

o
r

A
S

13

o
r

ASS-? 14

o
r

1
1

ASS 15
6055
3 15
ASS
99
16
6056
3 16
ASS
9 1
6061
4 1
ASS 2
6062
4 2
ASS9 3
6063
4 3
ASS
- ; 4
6064
4 4
ASS
9 5
6065
4 5
9 6
6066 00ASS4 6
9 7
6067 00ASS4 7
ASS9 8
6068
4 8
ASS9 9
6069
4 9
6070
ASS9 10
4 10
6071
ASS 11
4 11
6072
ASS 12
4 12
6073
ASS9 13
4 13
6074
ASS
14
4 14
6075
A
S

1
5
4 15
6076
A
S

1
6
4 16
6
0
8
1
ASS SID 1
5 1
6082
ASS
SIO 2
5 2
6083
ASS SIO 3
5 3
6084
ASS SIO 4
5 4
6085
A
S

~
S
I
O

5
5 5
6086
ASS
SIO 6
5 6
6087
A
S

~
S
I
O

7
5 7
6088
A
S

~
S
I
O

8
5 8
6089
A
S

S
I
O

9
5 9
6090
ASS SIO10
5 10

1012

o
r
o
r

o
r
o
r
o
r

o
r
o
r
o
r

o
r

o
r
o
r

o
r

o
r
o
r
o
r
o
r
o
r
o
r

o
r

o
r
o
r
o
r
o
r
o
r
o
r
o
r
o
r
o
r

A
S

'
~
SIO 11
6
0
9
1
5 11
A
S

'
~
SIO 12
6092
5 12
A
S
T
'
~
SIO13
6093
5 13
A
S

~
S1014
6094
5 14
A
S

'
~
S
I
O

15
6095
5 15
A
S

~
S1016
6096
5 16
ASS
1
6
1
0
1
6 1
A
S

2
6102
6 2
ASS 3
6103
6 3
A
S

4
6104
6 4
6105 00ASS 5
6 5
ASS 6
6106
6 6
A
S

7
6107
6 7
A
S

8
6108
6 8
6109 00ASS -~ 9
6 9
6110 00ASS 10
6 10
6111 00ASS -~ 11
6 11
6112 00ASS -~ 12
6 12
6113
A
S

1
3
6 13
6114 00ASS -~ 14
6 14
6115 00ASS -~ 15
6 15
A
S

1
6
6116
6 16
+
I
J
OT 1

7
0
0
1 -1- +1

o
r
o
r

o
r

o
r

o
r

o
r
o
r
o
r

o
r

o
r

o
r

o
r
o
r

o
r

o
r

o
r

or
o
r

o
r

or

or
or
O
T
I
)
'
)

7002 -1 + 2

+
I
J
OT 2

OT

7003 -1 + 3

+
I
J
OT 3

- OT

7004 -1 + 4

+
I
J
OT 4

OT

7005 -1 + 5

+OT 5

OT

7006 -1 + 6

+
I
J
OT 6

OT

7007 -1 + 7

+
I
J
OT 7

OT

10-13

7008-.J
+8

+
I
J
OT 8

OT

7009-/' + 9

+
I
J
OT 9

OT

I
J
OT 1
0
7010-/:+10 +

OT

7
0
1
1-/ +11 +
I
J
OT 1
1

-OT

7012-/ +12 +
I
J
OT 1
2

OT

7013-/+13 +
I
J
OT 1
3

OT

7014-/ +14 +
I
J
OT 1
4

OT

7015-/J
+15 +OT 1
5

OT

70161
'
+16 +
I
J
OT 1
6

OT

7
0
2
1-/-1

OT 1

+OT

7022-/'J
2

OT 2

+OT

7023-/3

OT 3

+OT

7024-/" - 4

OT 4

T
I
)
+O

7025-/J
5

OT
5

+OT

7026-/J
6

I
J
OT 6

+OT

7027-/:-7

I
J
OT 7

+OT

7028-/J
8

OT 8

+OT

7029-/9

I
J
OT 9

+OT

7030-/J
10 OT 1
0

+OT

7
0
3
1-/J
11

OT 1
1

+O
T
I
)

7032-/"12

I
J
OT
1
2

+OT

7033-/13 OT 1
3

+OT

70341
'
14
I
J
OT 1
4

+OT

7035-/J
15
I
J
OT 1
5

+O
T
I
)

7036-/16 OT 1
6

+OT

7
0
4
1 -/ +1

+1 1

7042
J + 2

+
I
J
1 2

7043/ +3

+1 3

7044
J + 4

+
I
J
1 4

7045-/ + 5

+~
1 5

1
0
.
.
1
4

 6
7046-/J

1
1
6
+

7047-/j +7

1
1
7
+

7048-/ +8

+1
8

7049-1 + 9

+1
9

j
I
1
1
0
7050-/j +10 +

1
7

1
1
1

7
0
5
1-/ +11 +

J
I
1
1
2
7052-/ +12 +

1
3
7053-/ +13 +1

1
'
+14 +
1
1
1
4
7054-

7055-/J
+15 +1
1
5

1
6
7056-/+16 +1

7
0
6
1-/1

1
1

7062-/J
2

1
2

7063-/:-3

1
3

1
'
J
-4
7064-

1
4

7065/5

1
5

7066-/6

1
6

7067-/J
7

1
1
7

7068-/8

1
8

7069-/J
9

1
9

10 1
7070-/J
1
0

-11
7
0
7
1 -/J

J
I
1
1
1

7072-/J
12 1
1
2

-13 1
7073-/l
1
3

7074-/J
14 1
1
4

15
1075-/l
J
I
1
1
5

16 1
7076-/J
1
6

+1
1
0
8
1 -/l
70821
'
J
:+2

+3
7083-/l

+
J
I1
1

+
J
I1
2

+1
3

10-15

'
+4
7084 1

+1
4

1
'

+5
7085

1
'
J +6 +IJ1 6
7086

+1
7

7087-/ +7
"
f

+1
8

7088-/j:+8

+
I
J
1
9

7089-/:+9

.
I
J
1 1
0
7090-/+10 +

1
7
0
9
1 -/ +11 +1 1

7092-/ +12 +1 1
2

7093-/:+13 +
I
J
1 1
3

7094-/' +14 +1 1
4

7095-/' +15 +
I
J
1 1
5

7096-/ +16 +
I
J
1 1
6

7
1
0
1 -/1
1
1

7102 1
'
2

I
J
1
2

7103 1
'
3

I
J
1
3

7104-/ -4

I
J
1

I
J
1
7

7108 1
'
8

1
8

7109 1
'
9

1
9

7105-/5
7106-/6
7107 1
'
7

7110-/10
7
1
1
1 -/11
7112-/12
7113-/13
7114-/14

1 1
0

1 1
1

1 1
2

1 1
3

1 1
4

7115-/15 IJ1 1
5

10-16

)1 1
6

-16 I
7116-.J

7
1
2
1 1

2
7122 2

3
7123 3

4
7124 4

5
7125 5

6
7126 6

7
7127 7

8
7128 8

9
7129 9

10
0
7130 1

1
11
7
1
3
1 1

2
12
7132 1

3
13
7133 1

4
14
7134 1

15
5
7135 1

6
16
7136 1

DSP
9
8000DSP
c

8001 1

8021 1

9 1
.-

8022 2

.9 2

8023I~

.9 3

8024I~

.9 4

80251 5

.-~ 5

.6

80261~

8027 7

.7

80281 8

.9 8

8029 9

.@9

80301 10

.10

8031 1 11

.11

8032 12

.12

80331 13

.13

80341 14

14

1
'

8035 15

.15

80361 16

.9 16

9000

10
7

9001

9002

9003 LS

LS

LS

S
9004

LS

S
9005

LS

9006
S

LS

9007

S LS
9008
9009

9020
S-ON LS

LS

9021 S O N S

LS

9022LS O N S

9023
S - OLS

S
N
9030 LS OFF LS
LS

9031 S-OFF LS

9032
S OFF S
S

9033
S 0 S

S
FF

9200PHNC

9201 PHNCM123PHNC

9202PHNC
T PHNC
T

9203PHNC/~

M123PHNC

9204PHNC

9205

9206PHNC RAM

9207PHNC I~

9208PHNC

10

18

1)

(1mm)

9209PHNC 1)

2
)
3)

9210PHNC I~ I~
(PUNCH)

9211 PHNC I~ I~

()

9212PHNC I~ I~

()

9213PHNC I~ I~

()

9214PHNCI~

()

9215PHNC I~ I~

()

9216PHNCI~ I~
(PUNCH)

9217PHNC

(PUNCH)
(PUNCH)

9218PHNC (

()

9219PHNC ()

()

9220PHNC (

()

9221 PHNC (

()

9222PHNC (

()

9223PHNC

(PUNCH)
(PUNCH)

9224PHNC+OT

M
flI'o
"

9225PHNCO T

M
"0"

10-19

9226PHNC

9227PHNC
1
'

I
9251PHNCAI A
l

9252PHNCAI

I
9254PHNCAI A

9255

9256(()
)

9260PHNCPHNC

9261 PHNC
IJPHNC

9270HLS
1

HLS

HLS

9271HLS
2

HLS

HS

9272HLS HLS
M1SH3
()
T

9273HLS HSM1SH3

()
T

9274PHNCNC
(NC)

9275PHNCNC
2(NC)

9276PHNC

()
9277PHNC

10000

1
0
0
0
1'..

2
3kg/cm2

10002
7

LS

-9.
10003
10008'.

1
0
0
2
1 AC.
10022DC.

10

20

D Cfj

l.

10030

OLC-212H:50min OLC:55minOLC-420H:55min
320H
OLC-420H2:55minOLC:55Umin
430H

10052

10053

(50)

10060

.
1
06hPa(80To
r
r
)

1
0
0
6
1 .

OLC-H

10062

I
J()

100631
100642
1
0
0
7
1 7 ._~

(
)

.
_
~

10078

'

100799

1
0
0
8
1 ._~

50uS

10077

10085
10087
10105..
10108

10110.

1
0
1
1
1

10112

10113A
ID

10114

101151

101162

1
0
2
1

101173

10118 1

10119 2

10120 3

10121 4

10122 5

10123 6

1
10201 DC

10202DC
2

3
10203DC

4
10204DC

10205DC
5

10210DCl I

10211 DCl AC

10212DC1

10213DCl

10214DCl 77

10215DC1

10216DCl

1
10217DCl

10218DCl
2

3
10219DCl

10220DC2

10221 DC2 AC

10222DC2

10223DC2

10224DC2 77

DC2
10225i

10226DC2

1
10227DC2

O22

2
10228DC2

3
10229DC2

10230DC3

10231 DC3 AC

10232DC3

10233DC3

10234DC3

10235DC3

10236DC3

1
10237DC3

2
10238DC3

3
10239DC3

10240DC4

10241DC4 AC

10242DC4

10243DC4

10244DC4

10245DC4

10246DC4

1
10247DC4

2
10248DC4

3
10249DC4

10250DC5

10251DC5 AC

10252DC5

10253DC5

10254DC5 77

10255DC5

10256DC5

1
10257DC5

10

23

10258De5
2

10259DC5
3

10260DC6

10261 DC6 AC

10262DC6

10263DC6

10264DC6 77

10265DC6

10266DC6

10267DC6
1

10268DC6
2

10269DC6
3

10300RF

10301 RF
1

10302RF
2

10303RF
3

10304RF
4

10305RF
5

10310RF1

10311 RF1

10312RF1

10313RF1 1

10314RF1
2

10315RF1
3

10320RF2

10321 RF2

10322RF2

10323RF2
1

10324RF2
2

10325RF2
3

10-24

1
0
3
3
0RF3

1
0
3
3
1RF3

1
0
3
3
2RF3

1
0
3
3
3RF3 1

2
1
0
3
3
4RF3

1
0
3
3
5RF3
3

1
0
3
4
0RF4

1
0
3
4
1RF4

1
0
3
4
2RF4

1
0
3
4
3RF4 1

1
0
3
4
4RF4
2

1
0
3
4
5RF4
3

1
0
3
5
0RF5

1
0
3
5
1RF5

1
0
3
5
2RF5

1
0
3
5
3RF5 1

1
0
3
5
4RF5
2

1
0
3
5
5RF5
3

1
0
3
6
0RF6

1
0
3
6
1RF6

1
0
3
6
2RF6

1
0
3
6
3RF6 1

1
0
3
6
4RF6
2

3
1
0
3
6
5RF6

1
2
1
0
0'

'
9
J

1
2
1
0
1

rLASERAUGNMENTJ
rLASER
AUGNMENTJ7
1

1
2
1
0
2

9l

{j'
J

0
-25

.
12103

I.
)

~- J "~
j "~

12104

r
j
9JI
:
:
9 J

12105

OLC

12106

-~

!9-~ J "~

7
1NC
.J
NC

fJ

12107~-(;)

)19
JI~

121087 JI~-()

9
9 JI
r ~
-

y
12109

NC.NC

12110

13100

9
fJ"

13101 ()

LS
fOTj""
LS

13102()

"9~

"~

13103

Il J "~

12111

fJ
"
9

13104.

14100

"
IY+
""
9

J"

14102

14103

141041

9
"

J "~

1026

).f
J .~
1
4
1
0
5. I

1
4
1
0
6

l
&J
.~

1
4
1
0
7

& fJ
.~

1
4
1
0
8}ItV (.
J. ~ 7

1
4
1
0
9.() 7.
j .~7

1
4
1
1
2-~

jltC1

- ~ j
l t C 1 r

.~

1
4
1
1
3-~
jltC2

- ~ j
l t C 2

f
.~

1
4
1
1
6() !

ryj .~

'
1
4
1
1
7 (
I
)
)

-~

-~-l

ryj "~

J.

Y J " ~
.X
Z
.

1
4
1
1
8

1
4
1
1
9

-11 -~

f J .~

1
1
9

1
4
1
2
0-9 (-9 J

1
4
1
2
1-9 (f

)
"
1

1
4
1
2
2-~

) J
1
"

1
4
1
2
3-~

(7) ?j
1
"

10
27

14124-~

9 J
(
"
9

14125-~
)

(
J

"
9

9 J
14126
"
9
()
14127-9 I) -~

y.
141281

o
v
s

14129

J
.

I
)-;J. _tO

j"
9

'
9

o
v
s

o
v
s

o
v
s J " ~

14130

o
v
s

14131

J .~

o
v
s

14132

"~

o
v
s

14133

o
v
s

14134

j"
9

o
v
s

o
v
s fJ"
9
o
v
s

14135

ZjJ~
J~J

14136

"
9

Z J~J "~
3

14137

Z30mmJ

14140

l
r
j

14141 7/" NC
14142

10-28

14143.

14145.
14146

14147

.
.

J .~
.

j
9
J

14148

J .~
.-~
FA

14149
9

9
J
.~

14150

'

14151

.. J .~

14152

. -~

J9

14153.

'

J .~

14155..

.
.~

14156.

.9

.~

14169

14170

14171

14173

r77 J .~

14174
77
7

14175I
)
7

. -
7 ' J ~ S O

LS .~

1
7)SOL:

LS.~

10

29

'
14177Z

J
1

9LS J
7
LS
1

y
C .

14179.

14180

14181

1
1
14182-

j
1

14183

NC

14184

NC

14185

f
J9

14186

1
1 NC 7
9

)
e
14187I

14188

14189
14190.

J
1

14191

14192
7

1
)
;
1

14193

NC 7

14194

J"
1
1

14195

14196

14197
14198Z

10-30

fj
1
Z

14199Z

'
9
X YZ f

14200

..

9
+Z
14202

1r-ZJ
Z+ "
Z

14203
Z

"
1r+ZJ'
9
Z
Z+
H

14204
9
+B

B+ "rOT
9r-BJ'
9B
J'
H

14205
9
B

1rOTI)
B-""
9r+BJ'
9B+
'

'

14206.9

J'
J

I.
l

14207.

14208.1

..

2
14209.

..

3
14210.

14214
14222.

. J

14223

77J'
9

14225()

() J'
9

14226()

f
()j.

14227()

.()J'
9

3
1

14228(

()J.

J
I
r
J.
()

r
14230
J.;
()

14231

'
1
1
=r
j.;
()

14232(
A
) r
'
7
(
A
) J.;

14229

r
'
7
8
) J.
(

y
J (
8
)
14233

14234(
A
)

A
) .;
(

8
) I
)
14235 (
e

(
8
) J.;

r
'
7
A
) j.;
(

y
14236(
A
)

8
)

y
I
)
14237(
(
8
) j

)
A
) J"I
14238(

(
A
) J.

8
) J.I
)
14239(
(
8
) .7

14240

)
I
j .~

14241

. f J . ~

14245UL
9
-

.
(

.
)

UL f J .~
1

14246
7

J .~

14248

1032

14249..
14250X
14251
14252

14253MP

14254

""""

:
7
"J
";

-9 -;

14255
14256
14257. +OT

.e OT
14258

.
+OT .

.OT .

..OT.
14259e.
OT
7
1

'
1
".1
142601"
(M90)

'
1
".2
14261 2"
(M91)

1
'".1
14262.1"
(M92)

2
142632.e.
(M93)

14264
(M94)

14265
(M95)

14266X/V

X
Y X
Y

14267

"
"
1Y+
X
Y
H

14273HS-98

J";

HS-98 DC24VDC24V

J
";
.f
J7
HS-98I
)

33

1
4
2
7
4HS-98-9

9
HS-98-$I}ItJ'
S-98
H

$
1
1
4
2
7
5HS-98.'

9
HS-98J'
H
S-98

1
4
2
7
6HS-98

J'$1
HS-98I
)f
S-981
)
7
'
H

J
.$I
1
4
2
7
7HS-98I
)

.
H
S-98.

1
4
2
7
8.

t
o
.
1
4
2
7
99

()
9

1
4
2
8
07
7

1
4
2
8
17'7

1
4
2
8
2

9
9
.$I

9
7

7
0

1
4
2
8
3

9L
S
I

1
4
2
8
4 7

LSfJ

'$1

1
4
2
8
5

)
s
w
r
I
S

1
4
2
8
6+P

I
J '
P+
j'$1P
H

1
4
2
8
79
P

P "
J'$1P+
H

1
4
2
8
8

fJ'$1
s
w

1
4
2
8
9

(
M
7
5
8
)9J'$1

10-34

14290

9 NC

9 .-9NC
1
4
2
9
1 .
e
t

-;NC

9 .1'-;NC
14293

NC
142944-$I4.-;.'-~

MP e-;.
NC
14295MPe-;

14296.-$I.-$INC

NC
14297-;-;(-$I-~
)
i

U
L
-;
14292L

L
U
L-$I

14298-;(NC
)

15800

40
4
h
P
a
(
3
T
o
r
r
)

1
5
8
0
1

15802

)
I
..

15803
15804

66-..")1')"
80hPa(50-60To)

15840

1
5
8
4
1

15842

15843
15844..

...

..

16000

1
6
0
0
1 MOl MOlMOl

16002

19994

or

19995

o
r

19996

r
o

19997

or

10

35

19998

19999

or
or

I
)
20001 9

20005

20006

Ready

20007.

20008

20034JOB
0
20035JOB

!JOB

JOB
0

250
20036JOB

JOB 250

20134 Win.

20135PC
PC

20136PC

20137PC

21001 P. P

21002P.
P

I
)
or

or

21010DSP!DSPl

I
)
or

or

*
21011 M1DSP.M1DSPl

a
i
lpende
r
r
o
r
M
a
i
lpende
r
r
o
r
21020M

or

a
i
li
n
i
t
i
a
le
r
r
o
r
21021 M

I
}
or

M
a
i
li
n
i
t
i
a
le
r
r
o
r

21022

21023INTtimeout

I
)
or

I
}
or

21031ITP-INT
(ORG)

21032ITP-INT
(MNL
)

21033ITP-INT
(PTP)

21034ITP-INT
(UNE)

21035ITP-INT
(
C
I
R
)

21036ITP-INT
(PUNE)

21037ITP-INT
(PRESS)

21038ITP-INT
(FLSRC)

21039ITP-INT
(FLON)

21040ITP-INT
(FLOFF)

10
3
6

2
1
0
4
1ITP-INT

(BEAM)

2
1
0
4
2ITP INT

(PIER)

2
1
0
4
3ITP-INT

(PROC)

2
1
0
4
7ITP-INT

(TF)

2
1
0
4
8ITP-INT

(HS)

2
1
0
4
9ITP-INT

(TRON)

2
1
0
5
0ITP-INT

(TROFF)

2
1
0
5
4ITP-INT

(POS)
m l I T P - I N T
(ECODE)

2
1
0
5
7ITP-INT

(CYL
)

2
1
0
6
2ITP-INT

(
IN)

2
1
0
6
7ITP-INT

(PRESET)

2
1
0
6
8ITP-INT

(MODE)

2
1
0
7
5ITP- INT

(RESET)

2
1
0
7
6ITP-INT

(CLEAR)

2
1
0
7
7ITP INT

(REBOOT)

2
1
0
8
4ITP INTmode

(UNE)

2
1
0
8
5ITP- INTmode

(
C
I
R
)

2
1
0
8
6ITP- INTmode

(PUNE)

2
1
0
8
7ITP- INTmode

(PRESS)

2
1
0
8
8ITP - INTmode

(FLSRC)

2
1
0
8
9ITP INTmode

(FLON)

2
1
0
9
0ITP- INTmode

(FLOFF)

2
1
0
9
1ITP- INTmode

(BEAM)

2
1
0
9
2ITP- INTmode

(PIER)

2
1
1
0
1ITP-INT
1
1
2
1
1
0
2ITP-INT

2
1
1
1
0syncsync

or

0
37

21111ITP-INT
(
1)
1
21112ITP-INT
(
2)
2
21113ITP-INT
(
3)
3
21114ITP-INT
(
4)
4
21115ITP-INT
(
5)
5
21116ITP-INT
(
6)
6
21117ITP-INT
(
7)
7
21118ITP-INT
(
8)
8
21119ITP-INT
(
9)
9
21120I
TP INT(
10)
10
21121 ITP-INT
(
11)
11
21122ITP-INT
(
12)
12
21123ITP-INT
(
13)
13
21124ITP-INT
(
14)
14
21125ITP-INT
(
15)
15
21126ITP-INT
(
16)
16
21131 ITP-INT
(
1)
1
21132ITP-INT
(
2)
2
21133ITP-INT
(
3)
3
21134ITP-INT
(
4)
4
21135ITP-INT
(
l
5
5)
21136ITP-INT
(
6
6)

10-38

21137ITP-INT(
7
7)
21138ITP-INT(
8)
8
21139ITP-INT(
9)
9
21140ITP-INT(
10)
10
2
1
1
4
1 ITP-INT(
11)
11
21142ITP-INT(
12)
12
21143ITP-INT(
13)
13
21144ITP-INT(
14)
14
21145ITP-INT(
15)
15
21146ITP-INT(
16)
16
21170ITP-INT s

t
a
t
u
sb
i
te
r
r
o
r
(ECODEB
I
T
)
21200
j

2
1
2
0
1 0

or

21202C

AIC

21220

2
1
2
2
1 AI
AI

f
21230

21300

2
1
3
0
1

21302T O NT O N

21303T OFF T OFF

21304T

21305C

C
21306C O NC O N

21307C OFFC OFF

21308C 0 C
O

21309C C

21310TTl

T
2
1
3
1
1 CC

L
t

21312

10

39

21401 T1
21402T2
21403T3
21404T4
21405T5
21406T6
21407T7

-9(T1)

-9(T2)

9(
T
3
)
1

97

(T4)

9-9(T5)

-~(T6)

)~ 9 -~(T7)

'-~

21408T8

)~ (T8)

21410VON V'ON

"'7

21411

21412

21413

21420U O N U O N

21421
y

U
21422 U l

21430V
!
U

21431 V

21432

21440

21441

22001

~
9

1
22002
2
22003
3
22004]
4
22005
5
220067
6

10
-4
0

r
o

r
o

r
o

-'~9

22007
1 7
22008
1 8
22009
1 9
22010
1 10
22011 7
1 11
22012
1 12
22013 7
1 13
22014
1 14
22015
1 15
22016
1 16
2
2
0
2
1
2 1
22022
2 2
22023
2 3
22024
2 4
22025
2 5
22026
2 6
22027
2 7
22028
2 8
22029
2 9
22030
2 10
22031
2 11
22032
2 12
22033
2 13
22034
2 14
220357
2 15
22036
2 16
2
2
0
4
1
3 1
22042
3 2

9
7
00

o
r

99 8
009

r
o

9 8
00-

r
o

9 10

o
r

99 11
00-

o
r

9 12
009

o
r

99 13
009

r
o

14
009

o
r

9 15
009

r
o

00 16

o
r

00. 1

00. 2

00. 3

o
r

00"$I7 4

"$I7 5

"$I7 6

"$I7 7

00"$I7 8

"$I7 9

00. 10

o
r

00. 11

)
I
o
r

00"$I7 12

9 13
00"

00"$I7 14

r
o

00"$I 15

o
r

"$I 16

o
r

-$I 1

-$I 2

41

22043
3 3
22044
3 4
22045
3 5
22046
3 6
22047
3 7
2
2
0
4
8
!
3 8
22049
3 9
22050
3 10
2
2
0
5
1
3 11
22052
3 12
22053
3 13
22054
3 14
22055
3 15
22056
3 16
22061
4 1
22062
4 2
22063
4 3
22064
4 4
22065
4 5
22066
4 6
22067
4 7
22068
4 8
22069
4 9
220707
4 10
22071
4 11
22072
4 12
22073
4 13
22074
4 14

10
4
2

-$I 3

-$I 4
f
-$
1 5

00-$I 6

"
-$
1 7
00T

-$I 8
9
-$I 10

00-$I 11
00 12

-$I 13

14
-$I 15

L
9
-$I 16
00J

00

-$I

-$I

-$I

-$I

-$I

-$I

-$I

-$I

-$I

-$I

-$I)
I

-$I

00

00

22075
4 15
22076
4 16
2
2
0
8
1
5 1
22082
5 2
22083
5 3
22084
5 4
22085
5 5
22086
5 6
22087

7
22088
5 8
22089
5 9
22090
5 10
2
2
0
9
1
5 11
22092
5 12
22093
5 13
22094
5 14
22095
5 15
22096
5 16
2
2
1
0
1
6 1
22102
1
6 2
22103
6 3
22104
6 4
22105
6 5
22106
6 6
22107
6 7
22108
6 8
22109
6 9
22110
6 10
v

00

00

00

00

00

00

00

00

00

00

10
4
3

22111
6 11
22112
6 12
22113
6 13
22114
6 14
22115
6 15
22116
6 16
22121
7 1
22122
7 2
22123
7 3
22124
7 4
22125
7 5
22126
7 6
221277
7 7
22128
7 8
22129
7 9
22130
7 10
22131 7
7 11
22132
7 12
22133
7 13
22134
7 14
22135
7 15
22136
7 16
22141
I
S 1
22142
I
l
l
S 2
22143
8 3
22144
8 4
22145
8 5
22146
8 6

10-44

00

00

00

00

00

00

00

00

00

00

00

22147
8 7
22148
8 8
22149
8 9
22150
8 10
2
2
1
5
1
8 11
22152
8 12
22153
8 13
22154
8 14
22155
8 15
22156
8 16
2
2
1
6
1
9 1
22162
9 2
22163
9 3
22164
9 4
22165
9 5
221667
9 6
22167
9 7
22168
9 8
22169
9 9
22170
9 10
2
2
1
7
1
9 11
22172
9 12
22173
9 13
22174
9 14
22175
9 15
22176
9 16
2
2
1
8
1
O 1
22182
O 2

00

00

00

00

00

01

01

10
45

22183
0 3
22184
O 4
221857O 5
22186
O 6
22187
O 7
22188
O 8
22189
O 9
22190
O 10
22191
O 11
22192
O 12
22193
O 13
22194
O 14
22195
O 15
22196
0 16
22201
1
22202
2
22203
1 3
22204
1 4
22205
5
22206
6
22207
7
22208
1 8
222097 9
22210
10
22211
11
22212
12
22213
13
22214
14

10
4
6

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

22215
1 15
22216
1 16
2
2
2
2
1
2 1
22222
2 2
22223
2 3
22224
2 4
j

22225
2 5
22226
2 6
222277
2 7
22228
2 8
22229
2 9
22230
2 10
2
2
2
3
1
2 11
22232
2 12
22233
2 13
22234
2 14
22235
2 15
22236
2 16
2
2
2
4
1
3 1
22242
3 2
22243
3 3
22244
3 4
22245
3 5
22246
3 6
22247
3 7
22248
3 8
22249
3 9
22250
3 10

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

10
47

22251
3 11
22252
3 12
22253
3 13
22254
3 14
22255
3 15
22256
3 16
22261
4 1
22262
4 2
22263
4 3
22264
4 4
22265
4 5
22266
4 6
22267
4 7
22268
4 8
22269
4 9
22270
4 10
22271
4 11
22272
4 12
22273
4 13
22274
4 14
22275
4 15
22276
4 16
22281
5 1
22282
5 2
22283
5 3
22284
5 4
22285
5 5
22286
5 6

10
4
8

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

22287
5 7
22288
5 8
22289
5 9
22290
5 10
2
2
2
9
1
5 11
22292
5 12
22293
5 13
22294
5 14
22295
5 15
22296
5 16
2
2
3
0
1 7
6 1
22302
6 2
22303
6 3
22304
6 4
22305
6 5
22306
6 6
22307
6 7
22308
6 8
22309
6 9
223107
6 10
22311
6 11
22312
6 12
22313
6 13
22314
6 14
223157
6 15
22316
6 16
2
2
3
2
1
7 1
22322
7 2

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

10
4
9

22323
7 3
22324
7 4
22325
7 5
22326}v.
7 6
22327
7 7
22328
7 8
22329
7 9
22330
7 10
22331
7 11
223327
7 12
22333
7 13
22334
7 14
22335
7 15
2233677
7 16
22341 7
8 1
22342
8 2
22343
8 3
22344
8 4
22345
8 5
22346
8 6
22347
8 7
22348
8 8
22349
8 9
22350
8 10
22351
8 11
22352
8 12
22353
8 13
22354
8 14

1050

01

01

01i

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

22355
8 15
22356
8 16
2
2
3
6
1
1
9 1
22362
9 2
22363
9 3
22364
9 4
22365
9 5
22366
9 6
22367
9 7
22368
9 8
22369
9 9
22370
9 10
2
2
3
7
1
9 11
22372
9 12
22373
9 13
22374
9 14
22375
9 15
22376
9 16
22381
0 1
22382
0 2
22383
O 3
22384
O 4
22385
O 5
22386
O 6
22387
O 7
22388
O 8
22389
O 9
22390
O 10

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

01

02

02

02

02

02

02

02

02

02

02

10
5

2
2
3
9
1
O 1
1
22392
O 12
22393
O 13
22394
O 14

22395
O 15
22396
O 16
2
2
4
0
1
1 #1
22402
#2
22403
1 #3
22404
#4
22405
1 #5
22406
1 #6
22407
1 #7
22408
1 #8
22409
1 #9
22410
1 #10
22411
1 #11
22412
1 #12
22413
1 #13
22414
1 #14
22415
1 #15
22416
1 #16
23000

02

02

02

02

02

02

029

"
027

02

02.

029

02

02

02

02

02

02

02

02

02

02

02

2
3
0
0
1
23002

23003

23004

23006

J-J
I

23007

23005

10

52

23008

23009

23010

Jy
J
23011 J;

I'
:
J
23012 f'
;
J

23013

23014MDI

MDI

23015MDI

MDI

23051

230521 1

2305300

0
230540

2305507 0
23056 N7

23057N N
23058A

23059A A

23060

23061 B B

.A7.
23062Ai

23063BBl

23064M 7Ml
7

23065F7.F

23066G
G

2306707
2

02

23068G

23069M12-M13 M12-M13

23070B A B A

23071 ..-

23072M10-M11 M10-M1l

23073

23074GOO-GOl GOO-G01

23076 p
7
<
NCT
M101

23077

t
=

NCT
Ml03

23078

j
:

NCT Ml04

1053

2
3
0
7
9

NCTM758

2
3
0
8
0

NCTM759

O
O
I
2
3
1
0
0.G

2
3
1
0
1GOl

2
3
1
0
2G02
L
2
3
1
0
37G
0
3
1

2
3
1
0
47G
0
4
1

231057G05

2
3
1
0
6G
0
6
1

2
3
1
0
7G07

2
3
1
0
87G
0
8
1

2
3
1
0
9G
0
9
1

231107G10

2
3
1
1
1G11
L
2
3
1
1
27G12
L
2
3
1
1
3.7G
1
3
1
L
2
3
1
1
4.7G14
L
2
3
1
1
5G15
L
2
3
1
1
67G16
L
2
3
1
1
7G17
L
2
3
1
1
8 G18

2
3
1
1
9G
1
9
1
L
2
3
1
2
0.G20

2
3
1
2
17 G21
L
2
3
1
2
2.G
2
2
1
L
2
3
1
2
3G23
L
2
3
1
2
4G
2
4
1

2
3
1
2
5G
2
5
1

2
3
1
2
6.G26

1054

2
7
1
=
2
3
1
2
7l
G

2
8
1
2
3
1
2
8l
G

2
9
1
2
3
1
2
9G

3
0
1
2
3
1
3
0.G

3
1
2
3
1
3
1G

3
2
1
2
3
1
3
2G

3
3
1
2
3
1
3
3.G

3
4
1
2
3
1
3
4G

3
5
1
2
3
1
3
5G

3
6
1
2
3
1
3
6G

2
3
1
3
7G37

3
8
1
2
3
1
3
8G

2
3
1
3
9G39

4
0
1
2
3
1
4
0G

4
1
2
3
1
4
1G

2
3
1
4
2G42

2
3
1
4
3G
4
3
1

4
4
1
2
3
1
4
4G

2
3
1
4
5G
4
5
1

2
3
1
4
6G46

2
3
1
4
7l
G47

2
3
1
4
8G48

4
9
1
2
3
1
4
9.G

5
0
1
2
3
1
5
0.G

2
3
1
5
1G
5
1

2
3
1
5
2!G
5
2
1

2
3
1
5
3G53

5
4
1
2
3
1
5
41
G

10

55

2
3
1
5
57G55

2
3
1
5
6G56

2
3
1
5
7G57

5
8
1
2
3
1
5
8G

2
3
1
5
9.G59

23160G60

6
1
2
3
1
6
1G

2
3
1
6
2.G62

23163!G63

6
4
1
231647G

23165.7G65

23166.G66

23167G67

6
8
1
23168G

6
9
1
231697G

23170.7G
7
0
1

7
1
2
3
1
7
1G

7
2
1
23172.G

23173.G73

23174G74

23175G75

23176l
G76

23177G77

7
8
1
23178G

23179G79

8
0
1
23180G

8
1
2
3
1
8
1.G

2
3
1
8
2.G
8
2
1

10
5
6

2
3
1
8
3G
8
3
1

2
3
1
8
4'G84

2
3
1
8
5G
8
5
1

2
3
1
8
6.G
8
6
1

2
3
1
8
7 G87

2
3
1
8
8G88

2
3
1
8
9G
8
9
1

2
3
1
9
0G
9
0
1

2
3
1
9
1G
9
1

2
3
1
9
2G
9
2
1

2
3
1
9
3G
9
3
1

2
3
1
9
4!G
9
4
1

2
3
1
9
5l
G95

2
3
1
9
6G
9
6
1

2
3
1
9
7l
G
9
7
1

2
3
1
9
8G
9
8
1

2
3
1
9
9G
9
9
1

2
3
2
0
0Gl00

2
3
2
0
13.Gl01

2
3
2
0
23.Gl02

2
3
2
0
3{G103

2
3
2
0
4Gl04

2
3
2
0
5!Gl05

2
3
2
0
6.Gl06

2
3
2
0
7.Gl07

2
3
2
0
8GlOB

2
3
2
0
9.Gl09

2
3
2
1
0Gl10

10

57

2
3
2
1
17G111

"]'

2
3
2
1
2.G112

2
3
2
1
3o
r7G113

2
3
2
1
4G114

2
3
2
1
5G115

"]'

2
3
2
1
6Gl16

2
3
2
1
7Gl17

2
3
2
1
8Gl18

"]'

2
3
2
1
9G119

2
3
2
2
0.G120

2
3
2
2
1G121

2
3
2
2
2G122

2
3
2
2
3 G123

2
3
2
2
4.G124

2
3
2
2
5G125

2
3
2
2
67G126

2
3
2
2
7G127

"]'

2
3
2
2
87G
1
2
8
r

2
3
2
2
9!7G129

23230G130

2
3
2
3
1..G131

2
3
2
3
2G132

2
3
2
3
3G133

2
3
2
3
4o
rG
1
3
4
1

2
3
2
3
5G135

2
3
2
3
6G136

2
3
2
3
7G137

2
3
2
3
8G138
l

1058

2
3
2
3
9.G139

2
3
2
4
0'G140

2
3
2
4
1'G
1
4
1

2
3
2
4
2.G142

2
3
2
4
3'G143

2
3
2
4
4G144

2
3
2
4
5!G145

2
3
2
4
61
G
146

2
3
2
4
7.G147

2
3
2
4
8.G148

7
'

2
3
2
4
9!G149

2
3
2
5
0!7G150

2
3
2
5
17G
1
5
1

2
3
2
5
2G152

2
3
2
5
3!7G153
{

2
3
2
5
4G
1
5
4
1

2
3
2
5
5!G155

2
3
2
5
6G156

2
3
2
5
7G157

2
3
2
5
8l
7G
158

2
3
2
5
9G159

2
3
2
6
0l
7G160

2
3
2
6
1i
G
1
6
1

2
3
2
6
2l
7G
162

2
3
2
6
3l
7G
163

2
3
2
6
4l
7G
164

2
3
2
6
57G165

2
3
2
6
6G166

59

2
3
2
6
7G167

2
3
2
6
8.G168

2
3
2
6
9.G169

1
7
0
r
2
3
2
7
0G

1
7
1
2
3
2
7
1.G

'

2
3
2
7
2G172

2
3
2
7
3G173

2
3
2
7
4G174

2
3
2
7
5G175

2
3
2
7
6
i.G176

2
3
2
7
7.Gl77

2
3
2
7
8.G178

2
3
2
7
9G179

2
3
2
8
0G180

2
3
2
8
1 G181

2
3
2
8
2.G182

2
3
2
8
3G183

23284G184

23285G185

23286.G186

2
3
2
8
71
G187

2
3
2
8
8.G188

2
3
2
8
9.G189

23290G190

2
3
2
9
1.G191

2
3
2
9
2.7'G192

2
3
2
9
37'G193

2
3
2
9
4.7G194

1060

2
3
2
9
5G195

2
3
2
9
6.G196

2
3
2
9
7..G197

2
3
2
9
8.G198

2
3
2
9
9G199
L
O
O
I
2
3
3
0
0G

0
1
2
3
3
0
1.7G

0
2
1
2
3
3
0
2G

0
3
1
2
3
3
0
3G

0
4
1
2
3
3
0
4.G

0
5
1
2
3
3
0
5G

0
6
1
2
3
3
0
6G

0
7
1
2
3
3
0
7G

0
8
1
2
3
3
0
8G

0
9
1
2
3
3
0
9G

2
3
3
1
0G10

1
1
2
3
3
1
1G

2
3
3
1
2G12

2
3
3
1
3G13

2
3
3
1
47G14

2
3
3
1
5.G15

2
3
3
1
6G16

2
3
3
1
7G17

2
3
3
1
8G18

2
3
3
1
9.G19

2
3
3
2
0.G
2
0
1

2
3
3
2
1G
2
1

2
3
3
2
2!G22

)'7

0
61

2
3
3
2
3G23

2
4
t
2
3
3
2
47G

2
5
t
2
3
3
2
5G

2
3
3
2
6G26

2
3
3
2
77G27

2
8
1
23328.G

2
9
1
2
3
3
2
9G

3
0
1
23330G

2
3
3
3
1G31

3
2
1
2
3
3
3
2G

2
3
3
3
3G33

3
4
1
23334G

23335G35

23336G36

3
7
1
23337G

3
8
1
23338G

2
3
3
3
9G39

4
0
1
23340G

2
3
3
4
1.G41

2
3
3
4
2G42

2
3
3
4
3G43

2
3
3
4
47G44

2
3
3
4
5G45

4
6
1
2
3
3
4
6G

4
7
1
2
3
3
4
7.G

2
3
3
4
8.G48

4
9
t
2
3
3
4
97G

5
0
t
23350G

10
62

7~

2
3
3
5
1G
5
1

2
3
3
5
2G52

2
3
3
5
3G
5
3
1

2
3
3
5
4G
5
4
1

2
3
3
5
5.7G
5
5
1

2
3
3
5
6G
5
6
1

2
3
3
5
7G57

2
3
3
5
8G
5
8
1

2
3
3
5
9.7G
5
9
1

2
3
3
6
0G
6
0
1

2
3
3
6
1G61

2
3
3
6
2G
6
2
1

2
3
3
6
3G
6
3
1

2
3
3
6
4G64

2
3
3
6
5G
6
5
1

2
3
3
6
6G
6
6
1

2
3
3
6
7G67

2
3
3
6
8G
6
8
1

2
3
3
6
9G
6
9
1

7
0
1
2
3
3
7
0
1

2
3
3
7
1G71

2
3
3
7
27G
7
2
1

2
3
3
7
3i
7G
7
3
1

2
3
3
7
4G
7
4
1

2
3
3
7
5G
7
5
1

2
3
3
7
6 G76
i

2
3
3
7
7G77

2
3
3
7
87G78

63

23379G79

8
0
1
23380.G

8
l
2
3
3
8
1G

2
3
3
8
2G82

8
3
f
2
3
3
8
3.G

8
4
1
23384G

2
3
3
8
5G85

2
3
3
8
6G86

2
3
3
8
7.G87

8
8
1
23388G

2
3
3
8
9G
8
9
1

23390G
9
0
1

2
3
3
9
1G
9
1

23392G92

233937G93

233947G94

233957.G95

23396G96

23397l
7G97

9
8
1
233987.G

233997G
9
9
1

234007.Gl00

2
3
4
0
17G
1
0
1

23402Gl02

234037Gl03

23404.7G104

23405.G105

234067.Gl06

10
64

2
3
4
0
7.Gl07

2
3
4
0
8Gl08

2
3
4
0
9Gl09

2
3
4
1
0Gl10

l
l
1
2
3
4
1
1.G

2
3
4
1
2l
Gl12

2
3
4
1
3.Gl13

2
3
4
1
4.G114

2
3
4
1
5Gl15

2
3
4
1
6Gl16

2
3
4
1
7Gl17

2
3
4
1
8Gl18

2
3
4
1
9Gl19

2
3
4
2
0G120

2
3
4
2
1G121

2
3
4
2
2G
1
2
2
1

2
3
4
2
3G123

2
3
4
2
4G
1
2
4
1

2
3
4
2
5G125

2
3
4
2
6G126

2
3
4
2
7G127

2
3
4
2
8G
1
2
8
1

2
3
4
2
9G129

23430G130

2
3
4
3
1G
1
3
1

2
3
4
3
2G132

2
3
4
3
3G133

2
3
4
3
4G134

65

23435.G135

23436.G136

2
3
4
3
7G137

23438G138

IG139
23439"

23440.G140

1
4
1
2
3
4
4
1G

2
3
4
4
2G142

2
3
4
4
3.G143

23444G144

2
3
4
4
5G145

2
3
4
4
6G146

2
3
4
4
7.G147

23448.G148

23449G149

23450G150

2
3
4
5
1i
1
5
1
G

23452G152

23453G153

23454..G
1
5
4
1

234557G155

234567G
1
5
6
1

23457G157

234587G158

23459.G159

23460G160

2
3
4
6
17G
1
6
1

23462G162

1066

2
3
4
6
3.G163

2
3
4
6
4G164

2
3
4
6
5..G165

2
3
4
6
6..G166

2
3
4
6
7.G167

2
3
4
6
8G168

2
3
4
6
9G169

2
3
4
7
0G17D

1
7
1
2
3
4
7
1G

2
3
4
7
2.G172

2
3
4
7
3G173

2
3
4
7
4.G174

2
3
4
7
57G175

2
3
4
7
6G176

2
3
4
7
7G177

2
3
4
7
87.G178

2
3
4
7
97G179

2
3
4
8
0G18D

2
3
4
8
1G
1
8
l

2
3
4
8
2l
G182

2
3
4
8
3G183

2
3
4
8
4.G184

2
3
4
8
5G185

2
3
4
8
6G186

.G187
2
3
4
8
7l

2
3
4
8
8G188

2
3
4
8
9G189

2
3
4
9
0G190

7
<
0

10
67

2
3
4
9
1 .G191

23492G192

23493G193

23494G194

23495G195

23496G196

23497G197

23498G198

23499G199

23510

7.
2
3
5
1
11
I

7
'

23512J

23513P7.

23514Q7. Q

23515K

K7

23516D

23517If

23518J
i

7
'

23519K

23520

2
3
5
2
1

23522

23523G66G66

235241J
IG7 1J
tG75
5

235251
G71
G76
6

23526G22
G22

23527

.
23600uv

uv_
0

2
3
6
0
1

23602V

23603V (UV V(UV

L

236049090:

23605G
G

U
-'}

23607V-'}

VJ

'

'
}

23608W

23606U-'}

23609W W

10
68

23610GOTO GOTO

F
23611IF I

23612WHILE WHIE

23613END END

F
23614F

23615G04

G04

23616G01 F

G01 F

23617G98 I

G98 i

23618G98 J

G98 J

23619G98 P

G98 P

23620G98 K

G98 K

23621 G98 D

G98 D

23622

23623G73 Q G73 Q

23624G06 A

G06 A

23625G06 B

G06 B

. K.Q G94 PKQ 0

23626G94 P

.
)
/

236271

23628M M

23629TT

T
T
23630T

23631G75 Q

G75 Q

23632G76 Q

G76 Q

23633TC TC

I G7 1
23634 1j
G75
5

I G7 1
23635 1j
G76
6

23636

236373000.3000.

23638G50.G50.

23639E
c

23640G31l

G31

23641

7
'RC

23642

23643

C.R

23644

23645

23646
23647G02l

T
G02l

23648G03l

G03l

10

69

23649

23650

23651

23652

C
R

23653

23654

23655

CR
0

23656

P
0

23657

K
0

23658

23659

23660

23661

23700

23701 9

23702.

23703G75G75
J
L-

23704G76G76
J
L

T
uv
23705uv

23706

23707.

23708MFIN

M N

23709

23710ITPITP

23711
-1'

23712

7 9
23713"
'

23714

23715

23716

23717

23718

23719

23720

G25G27

23721

23722

G52

23723

1070

23724

X
I
F
23726E

X
I
F
23727E

X
I
F
23728E

X
I
F
23729E

23730

2
3
7
3
1 G53

G53

23732M NTC

23733

23734

23735

23736

23737(22

)
23738

(T1)

23739
(T2)
23740

(T3)
2
3
7
4
1

(T4)
23742

(
23743

(T6)
23744

(T7)
23800

L
2
3
8
0
1

23802

23806

(LI
N)
(el

23807

23808

(L-
C)

23803
23804
23805

R)

(
?
?
?
)

7
1

23809

(c-

23810

(L-

C)

23811

23812

23813

23814

23815

23816

23817

23818

23819

29100C200PC

2
9
1
0
1
10
E
m
s
]

2622
63CH
10[ms]

29102lOB

29103

29104

29105

29106
100E
m
s
]

29107I
/O
:
:
;
-

29108

29109CPU

29110I/O

10-72

I/O

AROOO
-AR0015

I
/0

2
9
1
1
1 I/O

I
/0

2
9
1
1
2

29113PC

29120D-NETI/O

D-NET

2
9
1
2
1 D-NETI/O

D-NET

2
9
1
2
2D-NETI/O

D-NET

29123D-NET1
/
0

D-NET

2
9
1
2
4D-NETI/O

D-NET

2
9
1
2
5D-NET1
/
0

D-NET

2
9
1
2
6D-NETI/O'

D-NET

2
9
1
2
7D-NETI/O

D-NET

2
9
1
2
8D-NETI/O

D-NET

2
9
1
2
9D-NETI/O

D-NET

2
9
1
3
0I/OI/O

2
9
1
3
1I/OI/O

2
9
1
3
2I/OI/O

29133I/OI/O

2
9
1
3
41
/
0I/O

10

73

/
OI
/
O
2
9
1
3
5 I

1
0!l0
2
9
1
3
6 1

1
0I
/
O
2
9
1
3
7 1

29138 I
/
OI/O

29139I/OI/O

29200

29300

2
9
3
0
1END

29302I
/O

END

29303110

29304I
/
O

29305I
/O

29306 I
/
O

2
9
3
0
7liD

r
I
/O

29308

10
7
4

29400

2
9
4
0
1

29500IOBATC200PC

2
9
5
0
1

29502

29503

29504

29505IOBAT MPC

29510

2
9
5
1
1

29512

29520

2
9
5
2
1

29522
OFF
1
0
295301

2
9
5
3
11
1
0

1
0
295321

29533110

1
0
295341

29535110

29536110

29537110

29538110

29539110

29540I/O

2
9
5
4
1 1
1
0

29542I/O

29543I/O

29544I/O

75

29545I/O

29546I/O

29547I/O

29548I/O

RAMERROR
30001 RAMERROR

30002PTMERROR

PTMERROR

30010lOBSCC

lOBSCC

30011lOBSCC

lOBSCC

30012M123 :IOB M123lOB 108 M12310

30013M123 :OLC M123OLC OLC M123OLC

31000DSP Boot

DSP Boot

31001 M1DSP Boot

M1DSP

31002DSPDPRAMe
r
r
o
r

M123

31003DSP2DPRAMe
r
r
o
r

M1DSP

31004DSP.

DSP

31005M1DSP7< M1DSP

32000DSP
9

DSP
9

32010(.rOBAT7

)
32011 J
1
32012J
2
32013J
3
32014J
4

001 1

001
7 2

001 .3

001
7 4

32015I 001 .5
5

32016J 001 7 6
6
32017J 001 .7

7
32018J
8
32019J
9
32020J
10
32021 J
11

10
7
6

001 8

001 7 9

001 .10

001 7 11


32022J 001 .12
12

32023J 001 7 13
13

14
32024J 001 77
14

32025J 001 15
15

32026J 001 .16

16
32030 (

)
3
2
0
3
1 J
1
32032J
2
32033J
3
32034J
4
32035J
5
32036J
6
32037J
7
32038J
8
32039J
9
32040J
10
3
2
0
4
1 J
11
32042J
12
32043J
13
32044J
14
32045J
15
32046J
16
32048

002

002

002

002

002

002

002

002

002

002

002

002

002

002

002

002

32049

32050M123

M123

32060

MPC

32062

MPC

32063

MPC

32064T

MPC

32066

MPC

32068

MPC

32069WDT

MPC

32070BUS

MPC

10

77

32072

MPC

32073T'.

MPC

32074

MPC

32075

MPC

32076

MPC

320801
'

MPC

32084T

MPC

32086T

MPC

32089P

MPC

32095

MPC

32096

MPC

10
7
8

2
.2
!2
!

40.0hPa

o00*
7!2l
!*

2 7N C

N C

<
000

0
0
1

2
}
.3MPa {3k
g
f/cm
2 O

0
0
2

79

003

008

0
2
2

030

: 0LC-212HI
I
O L e- 320HI
I
O L e- 420HI
I
O L e- 430HI
I

5a
L/

:
5 5 /
:
5 5 /
:
6aL/

0
5
2

053

0
6
0

1080

0
6
1

0
6
2

0
6
3 3

064 5

0
7
1
7
!

078

079

085
?

10
81

0
8
7

1
0
8

8 r
3
.
3 l

l
e
t
1
1
0

1
1
1

1
1
2

<
205 D C 5

DC

3
0
0 RF
R F

10-82

3XO R F x
RF

* 7 - XI
1
'
"
'
"
'
6
2
0
0 D C
3
0
0 RF

10
83

2
.
3

2219"fM3J

J 2!

l
2
!* 2 N C
J
N CJ
l
e
t

O
A
O
!

O
A
5

O
E
O

O
E
P
!

O
F
F
!

10

84

1
2
4 D0 -E N D

DO-END 1 1I

1
2
5
>!

1
2
6 D O

DOn
l
1;
;
n~

1
2
7 N C

NC

1
2
8
o"
'
'
9
9
9
9I

1
2
9
>?

O85

1
3
0
C N C P M C

! P M C C N C

1
3
1
!5

1
3
2
!

r
l
)

1
3
3

1
3
5

(
J
)

<

1
3
6
B l

10

86

1
3
9 i
PM C
PMCl

1
4
1 G 5 1
G 5 1 ()
i

1
4
2
'
'
9
9
9
9
9
9
1"
J

1
4
3

1
4
4
C

1
4
5

1
4
6 G
!

0
87

1
4
8

i
J

1
5
0

1
5
1

fl) j

1
5
2
1
Ji1

1
5
3 T
Tl
T
J
<

1
5
4
1<:1:!
1
5
5 T
M 0 6T

10
88

1
5
6 P /

1
5
7

1
5
8

1
5
9

1
6
0 G 7 2. 1

G 72. 1
1
G 72.
1

1
6
1 G 7 2. 2

G 72. 21 G 72.
2
J

1
7
5

I
d:

fGa7. 1

10
8
9

1
7
6 G
G
f
'
)?
G!
1) (G28 G 5 3 G 7 3 G 7 4 G 7 6 G 8 0
-G89)
2
) (G92 G54-G59)

3
) (G52)
<
179 C
N
o
.
7
5
1
0
)

d:!
I
180 ( )

1
8
1 G 8 1

1
8
2

1
8
3

G 8 3 2

!
184

!7
1
8
5 G 8 1

1
8
6
I
d:!7

10

90

1
9
0
!

1
9
4

1
9
7 C O N O
l

1
9
9
!7

2
0
0
7

2
0
1

2
0
2

2
0
3
!

204 M G 8 4
!

2
0
5 D I O F F
!

2
0
6 !
!

2
1
0 M 1 9 8 / M 0 9 9

10

91

2
1
1 G 9 9 G 3 1 ()

2
1
2
!
2
1
3
()!
1)!

2
)!//

3
)

4
)

(
N
o
.
8
3
1
3
)

214

i
222

2
2
3
!

224
!

230 R
~|7

10-92

2
3
1

G 10

L 5 0

2
3
2
!

5
0
0
0
!7

5
0
0
3 ILLEGAL PARAMETER (Hpee)
l
e
t

5
0
0
4 Hpee

5
0
0
6
!

5
0
0
7 TOOL LARGE DISTANCE
l

5
0
0
9 O ()

I
Z

5
0
1
0
E O R %"

fl)

5
0
1
1

o ()

5
0
1
2 G05 P10000 ILLEGAL START UP
l
e
t!

1093

5
0
1
3 HPCC:CRC O F S REMAIN A T CANCEL

5
0
1
5
!

5
0
1
6 M
!M
M

5
0
4
3 G 6 8
7

5044 G 6 8
I
d:!7

5060 ()
I
d:!7

5
0
6
1
7

5062 ()

!7

1094

 1
1E

1 1
1
2
2 1
1
4
2
.1 1
1
4
2
.2 1
1
5
2
.3 1
1
6
3 1
1
7
3
.1 1
1
7
3
.
2 1
1
9
3
.
3 1
1
9

AB

1
/
2
"

1
.6-1
2
.7mmdi
a
.

1
6 (8)

AB

1
/
4
"
1
/
2
" 1-

1
.6-31
.7mm di
a
.

1
2 (8)

B'

11
/
4
"(
AI
)

1
2
.
8
31
.7mm d
i
a
.

2 (2)

2
"

31
.8
5
0
.8mmdi
a
.

2 (2)

3
1
/
2
"

i
a
.
5
0
.
9
8
8
.
9mmd

2 (2)

( ) 1
6()

1
12

B~h

3150~

2
1
2

2
2
5

2
2
7
3 1
3

(
(0)210

:
20

()

32

'
3
'
31/8
D

1
/
2
"

1
.6
"
'1
2
.7mm di
a
.

1
9 (8)

11
/
4
"

1
2
.8
"
'
31
.7mm di
a
.

6 (6)

2"

3
1
.
8
"
'
5
0
.
8mm d
i
a
.

1 1

31
/
2
"

i
a
.
5
0
.
9
"
'
8
8
.
9mm d

2 (2)

11
/
4
"

1
2
.
8
"
'
31
.7mm di
a
.

2 (2)

2"

mm d
i
a
.

1(
1
)

31.8~50.8

G H
( )()

1
1
3

2
2
.1
1
/
2
" 11
/
4
"
/() 2

-() 1

./'() 1

-() 1

2"

31
/
2
"

./'() 2

-() 2

-() 1

2
.2

1
/
2
"
-

--

11
/
4
" 11
/
4
"

4 (0
90

180 270
0

2"

/
+ (900 )

/"1

--

l
f
l
/ l (2700 )

2"

--

31
/
2
"

+-
A

(270

115

2
.3
!
l
7(J

10

(71
6

(mm)

O
.8
~

1
.6~2.

1.

2
.
3
'
"
'
'
3
.
2

3
.
2
'
"
'
'
4
.
5

4
.5
'
"
'
'
6
.0

1
16

(mm)
.
o.0~51
3

O
.7
"
'
0
.9

0.15~0.3

O
.20~0.
3
5
O
.3~0.
4
O
.3
"
'
0
.4
0
.
4
"
'
0
.5
O
.4~0.
6
5
O
.4~0.
O
.5
"
'
0
.7
O
.6~0.
9
O
.5
"
'
0
.7
O
.7
~ 1. 2
O
.g 1
.2
"

3
3
.1

!
Pk
N
{
t
o
n
}=

A (
m
m
) xt(
m
m
) xO
.1r N/mm2{
k
g
/
m
m2}
1
0
0
0

P:

A:

t:

r.

!P 200kN{
2
0
t
o
n
}

2
:t=6mmr=400N/mm
{
4
0kg/mm2}

P20000
txr
6x40
83+=26.539

=
-xl000==83mm

26.5mm( 8
3m
m
)I

11-7

1
'

2
2
{
4
0kg/mm
} ."
=400NImm

'
10

30

~N

{
t
o
n
}
20

10

<
'
0

100 I
:
?

J
(
)

4
0

6
'
0

i
o

9
0

(L)

~llln lI~
=2r

1
1
8

3?O 340 3o ( m m )

180 ?OO n o ?40 260 ?80 J

=2(a+b)

l
i
o

( m m )

3
.
2
!

:(
t
)2
.3mm 1
.0x2
.3=2
.3 (
m
m
)

(
m
m
)

1
.0Xt

1
.0Xt

2
.Oxt
t:

3
.
3
l
1

1 : A
(
1
/
2
" ) 1B(1-1/4" )

400N/mm2
{
4
0kg/mm2}

m
m
)

(
m
m
)

5
.0

5
.
0
.
.
.
.
.
.
.
.
1
2
.
7

4
.5

4
.
5
.
.
.
.
.
.
.
.
1
2
.
7

4
.0

8
.
0
.
.
.
.
.
.
.
.
1
2
.7

2
500N/mm
2
}
{
5
0kg/mm

119

 2: B(1
1
/
4
" )! 1C (2" )

2
400N/mm

{
4
0kg/mm2}

2
600N/mm
2
{
5
0kg/mm
}

11-10

(
m
m
)

(
m
m
)

6.0

1
2
.
8 31
.7

4
.5

1
2
.
8 31
.7

4.0

1
2
.8 31
.7

r-J

r-J

r-J

1
2

123456789

1
2
2
..
.
.
.
.
.
.
.
.
..
...
.
.
...
.
.

1
2
2
e

1
22

1
2
3
NC....................
NC......
.
..
..
.
...
.
.
...
...
..
..
.
.
.
.

1
2
4
?.....
.
.
.
.
.
.
..
.
.
.
...
.
.
...
...
..
.
.

1
2
5
(

1
2
5
Z CHS-98) 1
2
6
O VS
i
l
l

1
2
7

1
2
1

6 r
3
.1
.3

2
C
O
2
!
CO
2

3
.1
.
3
6
J r

3
!

6 1
3
.1
.
3

1
2
2

N C

NC

NCJ7
! 4 J

[]
[ 1

SPco. 5
:SPCO. 5
:
SPC
:[] :O. 5

[ 3 / / /
[] ON

1 1-

N o [FJ [8]

2
.
:
0

2 1000 3600 400

20

2.0

8 4000 700

100

'
1
.
.
0

100

EO

200

3600 100

4 5000 900

.
.
.
.
.

6
[]
[]

:SPCO. 5
:SPC
:[] :0. 5

[] / / ~ l ) /
[] ON

[S] I

1
7
(I
I
r
I

tY
"
J
.

N
o
.

1
0
1 J3600 1
2
0
0

20
1

0
1

j
o

O
.1

i
Y

:1~Oj;11

1
0
2

- "

-
Z

23

N C

0
.
0
0
'
"
'
"
'
1
9
.
9
9
O
.1
2
}
O
.0
2
'
"
'
'
1
M
P
a{
O
.2
'
"
'
"
'
1
0
.O
k
g
f/
e
r
n
2
(
0
.0
2
'
"
'
"
'
2
M
P
a{
D
.2
'
"
'
"
'
2
0
.0k
g
f/
e
r
n}*)
2
0
'
"
'
'1
MPa{
O
'
"
'
"
'1
0
.O
k
g
f/e
r
n}
2
} *)
(
0
'
"
'
"
'
2
M
P
a{
O'
"
'
"
'
2
0
.0k
g
f/
e
r
n
+ 3 % (
0'
"
'
"
'5
0

C 2
5

C
)
'
"
'
'
5
0

C
/
8
0
%RH

/
*J

2
. 0.02MPa{0.2kgf/ern
}
.
o02MPa{O.2kgf/em:?}

N C
N C i

l
e
t B" I

N C
4 J

. 8 l
e
t l

12
4

1
8
.
0
0
0
r
n
m

1
0
0
r
n
r
n
/
r
n
i
n

O
.
O
O
l
r
n
m

0
'
"
'
"
'18.000

! 6

f
3
.1
.1
6

!
1

.
6
m
m4
0
m
m
1
1
.
6
m
m

2
0
m
m
)
I

.40mm

12

8 Z (HS-98)
Z1!
!!
Zi

(
)! Z

Zl
l

l
Z()

d 7<
I
Z1 1
0

12
6

9 0 vS
i
l
l
O VS
i
l
l c e D

O V SI
I royS
i
l
l

1
2
7

1
2
8

MADA

1
.

...........
.

.
.
.

.
.

.
.
.

.
.
.

.
.
.
.

.
.
.

.
.
.

.
.
.
.
.
.Q
.
.
.
.-
.
.
.

.
1
H

2
.....
.
.
.

.
.
.
.
.

.
.
2

2-1 .....
.
.
.
.

.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
2
H

2-2 ....
.
.
.
.

.
.
.
.

.
.
.
.

.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
3
H

3
.... -.....
..
.
.

.
.
.
.

.
.
.
.

.
.
.
.

.
.
.
.

.
.
.

.
..
.

.
.
.
.
.

.
.
.

.
5
H

3-1 ....
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
5
H

3-2 .
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
5

3-3

.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.7
3-4 .....

.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.9
H

3-5 ....

.
.
.
.

.
.
.
.

.
.
.
.

.
.
.
.
.

.
.
.
.

.
.
.
.

.
.
.

.
.
.

.
.
.

1
1
H

3-6
.
.
.
.

.
.
.
.

.
.
.
.

.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
1
5
H

4
......
.
.
.
.
.

.
.
.
.

.
.
.
.

.
.
.
.

.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
1
9
H

4-1

.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.19
4-2 .
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
1
9
4-3 ..
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
1
9

5
....
.

..
.
.
.
.
.
.

.
.
.
.

.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
..
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
2
1
H

6
......
.
.
.
.
.
.
..

.
.
.
.
.

.
.
.

.
.
.

.
.
.
.

.
.
.

.
.
.

.
.

.
.
.

.
.
.
.
.

.
.
.

.
2
2
H

7
....
.
.
.
.
.
.
.
..

.
.
.
H

.
.
.
.
.
.
.
2
5

8
.....
.
.
.
.
.

.
2
7

.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.27
8-1

8-2 .....
.
.
.
.

.
.
.
.

.
.
.
.

.
.
.
.

.
.
.
.

.
.
.
.
.
.
.
2
8
H

11
1111
1111
1111

1
1111
1111
1111
1111
1111
1111

111
1111
1111
1111
1111
1111

1
1111
1111
1111
1111
1111
1111

1.

APEUO

IJJ

(
)
o

'

()(
)

2
.
2-1

()

M
2
.
5
M3
M4
M5
M6
M8

()

6mm

NC
R

()

0
.
4
5
0
.
5
0
.
7
0
.
8
1.0
1.2
5

SPCC SECC SPHC S8400 AL

)
SUS Cu ( 1
0-3000rpm(2
)
20.3
)
TiN

()
()
()

M
2
.
5M3M4M5.M6.M7.M8
)
() (6
)
(SMC
)
(7
X=+50 Y=50
AMNC/PC
M2.5.M3.M4M5.M6.M8
4()

4J

(1)
(2
) o
(3) !o
(
(5) o
(6)
(7) o

2-2
1

Alli--v

X 320mmY 40mm

 F E

ama

ohm-hr

uhmm

huhhmA

()

3
.
3-1

TiN

TiN-TF( 2)

2
1
9
6

TEL0
3
5
4
7 7
5
5
5 ()

3-2

M 3

i
M
3

(3)

1-2mm

r4-3
J

-3-1!M 32

(-3
)

(-3-1
)

3-3
a)

N C
- 4
O.05MPa r

(
)

99X()

-4

7-

:0.5MPa

:0.05MPa

lL

b)

(2-3 )

2 1
-

-5 j

)~

5 )~.

3-4

o
<()>
1
.r

2
.r
J

3
.r
J
0
4 0

5
.r

-6

-6

j
o

-7

10

3-5
MM111-M116(M117)
M
M110o

M117
M118

[]

G92X

G9~X_

Y_-T_;

;-4

G90X

M110; 4

G50;
M

Mll1
M2.5

M112
M3

Ml13
M4

M114
M5

1
1

M115
M6

Ml16
M8

M117

IM118

SPARE

IDRAW

(1)X 320mmY
40mmNC

()
G92X

G90X700.Y500.T
X500.Y300.T
X300.Y400.T

MOB;
X300.Y400.T
X500.Y300.T
X700.Y500.T
M09;

M112;
X300.Y400.

M113;
X500.Y300.

M114;
X700.Y500.

M110:
G50;

12

ccm

M3

-8

13

E
-1.-

M 5 J

M 4 J

(
2
)320mm(X)

APEUOill-255ECO

X
-330-950mm

Y
-10-1270mm

-8

-9

{M(NO.)-Ml1O
}
o
Gl0()G50()G68()G69(

)M02()M30()M97(
)MlDOC)Ml0l()T

-Ver.3.06
()

14

3-6
[3-4 ]
o
o
2
a)

-10(T7

o )T2(M3)

T2 M3T7
(M3)T7 M3
[23735

M2.5

M6
-10

15

1
.r

2
.r
J

3. r
J
4.

-11

5
.r
jo

-12

6. r
J

16

b)

M2. 5

-13

M6

1
.r

J
2
.r
J

3
.r
J
o

-14

1
7

4. r
J0

5
.r

15

)
OFFf
M2.5-M5
o

18

4.

4-1

4-2

1!1

[2-3 ]

O
O
O
O
O
O
O
O
O

4-3

1
'
1-2mm)
(

19

[]
!M( M3
M112)MOO

o
() 1-2mm

-arE

EEN2

y.
~!

[]

20

5.
-JIS2

-27[8-1 ]

-
j
I

21

6.
!

NO

NO

22

J()

NO

NO

23

JIS2

1()

NO

()

24

7.

No

2
1
4
0
1T1 j

y
-$I(
T1)(-$I
(
21402T2 ;-$I(T2
)-$I
;
21403T3 -$I(
T
3
)
(
:
2
1
4
0
4
'T4 ;
'
1

9
J
"-$I(T4)
;
21405T5
y.-$I(
T5)-$I

21406T6 -$I(
T
6
)
(-$I
:
2140717; T7 !
?
j
L'-$I(
T
7
)
(
j

21408T8
y-$I(
T8).-$I
!
21410VON V O N
(
2
1
4
1
1

:
21412
y

;
j
2
1
4
1
3

(
(
21420U O N U O N
!
T

!
2
1
4
2
1 -
;
21422 Ui
U
;
i

!
2
'
;
"
4
'
3
0
'
'
'
'
;

i
!
?
i
):
:
t
:
:
.
l;
t-
UV
U
J

i
t

2
1
4
3
1V
;
;
;
21432
:

21440
!

2
1
4
4
1
;
;(
23733
y

(
23734
y

25

 No

23735

23736
23737(22

;)

;
t

j
(T1)

-
2373
8
2
:(T2)
I
23746f-
;( T 3 ) !
23741
!
:(T4)

!
i

23742

;(T5)

23743
j
(T6)
I
23744

;(
T
7
)

26

8.
8-1

M2
M2.3
M2.5
M2.6
M3
M4
M5
M6
M8

0.
4
0.4
0.45
0.45
0.5
0.7
0.8
1
.0
1
.25

mm
1
.81
2.21
2.28
2.38
2.75
3.65
4.60
5.50
7.35

85-90%o

-
(SUS S K
)

27

8 - 2

JIS2

M2.5x0.
45
M3xO.5
M4xO.7
M5xO.8
M6x1
.0
M 8x1
.25

SPCC
SPHC

()
50
000
000
40
30
000
000
20
10
000
000
6

[3-4 ]

28

2
5
9
1
1
9
6 2
0
0

T
E
L
.0
4
6
3
9
6
1
1
1
1()