(VLS)

Si- (a) Ge- (b)

1 (1 D)
(VLS)

 vls
:
(CVD),
- (MBE)

--
SiC ()

 :
1.

2.

CS
K
1
Cl

VP
3.
.
4.
5.

 VLS

D D0 T P , n 1,5 2
T0
P0

2V1
Rm
lv
RT ln( s )

2

r


VLS

(a) Ge (b) GaN (c) ZnO

Ge

OAG