Escolar Documentos
Profissional Documentos
Cultura Documentos
2005
with the technical co-sponsorship of : IEEE - Electron Devices Society IEEE Reliability Society
in conjunction with : ANADEF - France organised by : Laboratoire IXL CNRS Universit Bordeaux 1 ENSEIRB
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ROOM 3.5, third floor 9:00 Tutorial T3 Basic Principles for Managing Foundry Programs by Arnie LONDON (London Associates, USA)
Since the emergence of foundries in the mid 1980s as a source of supply of IC wafers, their importance in the microelectronics industry has grown steadily. Many small fabless companies have emerged, and even some of the larger manufacturers use foundries to supplement their wafer supply. By having an understanding of how the basic foundry relationship works, it is more likely that a customer will have positive results in terms of product performance and reliability and timely program execution. This is especially true for smaller volume customers. This presentation describes the key organizations and people involved in a typical foundry program and discusses the importance of establishing a strong engineering and logistical interface between foundry and customer. The steps in assessing foundries and making a final selection are discussed. Also covered are the steps in going from an initial design to production status including establishing appropriate yield targets. Case histories of some actual foundry programs are given to illustrate situations in which positive and less than positive results were achieved.
10:30
11:00
Tutorial T2 "Negative Bias Temperature Instability (NBTI) in MOS devices" by Jim STATHIS (IBM, USA)
The purpose of this tutorial is to bring together much of the latest information and recent developments in understanding of NBTI. Negative Bias Temperature Instability (NBTI), refers to the generation of positive oxide charge and interface traps in MOS structures under negative gate bias, in particular at elevated temperature. First reported in the 1960s, several effects conspire to bring NBTI back to the attention of device and circuit designers: First, the operating voltage has not scaled as rapidly as gate oxide thickness, resulting in higher fields which enhance the NBTI; second, device threshold voltage scaling has not kept pace with operating voltage, which results in larger percentage degradation of drive current for the same change in Vt; and third, the addition of nitrogen into the gate dielectric for gate leakage reduction and control of boron penetration has had the side effect of increasing NBTI. We will begin with an outline of the basic observations and experimental methods of the early NBTI studies, and proceed to more advanced observations and methods, including recovery or relaxation. Various theories and models will be reviewed. Finally, the impact of NBTI on circuit performance degradation will be discussed.
12:30
Lunch
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15:00
15:20 15:40
SESSION A
Quality and Reliability Techniques for Devices and Systems Auditorium Chairs : V. Loll (Nokia - Denmark) F. Marc (IXL, University of Bordeaux - France)
16:00
A1
16:20 16:40
A2 A3
17:20 17:20
A4 A5
Layout Dependency Induced Deviation from Poisson Area Scaling in BEOL Dielectric Reliability Y. Li1,2, Zs. Tkei1, Ph. Roussel1, G. Groeseneken1,2, K. Maex1 (1 IMEC, 2Katholieke Universiteit Leuven Belgium) Study of Area Scaling Effect on Integrated Circuit reliability Based on Yield Model C. Hong, L. Milor, M. Choi, T. Lin (Georgia Institute of Technology USA) Investigation on Seal-Ring Rules for IC Products Reliability in 0.25 m CMOS Technology S-H. Chen, M-D. Ker* (Industrial Technology Research Institute, *National Chiao-Tung University Tawan) Reliability for Recessed Channel Structure n-MOSFET J.Y. Seo, K.J. Lee, Y.S. Kim, S.Y. Lee, S.J. Hwang, C.K. Yoon (Samsung Electronics Korea) Reliability Prediction in Electronic Industrial Applications G. Cassanelli1, G. Mura2, F. Cesaretti3, M. Vanzi2, F. Fantini1 (1University of Modena, 2 University of Cagliari, 3Thermowatt Italy)
17:40
18:00
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8:30
IP2
9:10
E1
9:30
E2
9:50 10:10
E3 E4
10:30 SESSION B3
Coffee break Back-end reliability Auditorium G. Groeseneken (IMEC Belgium) N. Stojadinovic (University of Nis - Serbia and Montenegro) Invited Conference : Reliability challenges for low-k dielectrics and copper diffusion barriers Zs. Tkei1, Y-L. Li1,2, G.P. Beyer1 (1IMEC, 2Katholieke Univ. Leuven - Belgium)
Effect of Test Condition and Stress Free Temperature on the Electromigration Failure of Cu Dual damascene Submicron Interconnect Line-Via Test Structures A. Roy, C.M. Tan, R. Kumar*, X.T. Chen* (Nanyang Technological University, *Institute of Microelectronics Singapore) Effect of Vacuum Break after the Barrier Layer Deposition on the Electromigration Performance of Aluminium Based Line Interconnects C.M. Tan, A. Roy, K.T. Tan*, D.S. Kwang Ye*, F. Low* (Nanyang Technological University, *Systems on Silicon Manufacturing Singapore)
Chairs:
10:50
IP 3
11:30
B3-1
11:50
B3-2
SESSION D
Advanced Failure Analysis: sample preparation, case studies Room 3.5, third floor Chairs: Ph. Perdu (CNES - France) M. Vanzi (University of Cagliari France)
D1 D2 D3
Advanced Electrical Analysis of Embedded Memory Cells using Atomic Force Prober (AFP) M. Grtzner (Infineon Technologies Germany) Oxide Charge Measurements in EEPROM Devices C. De Nardi, R. Desplats, P. Perdu, F. Beaudoin, J-L. Gauffier* (CNES/THALES, *LNMO - INSA Toulouse France) Localization and Physical Analysis of Dielectric Weaknesses for State-of-the-Art Deep trench based DRAM Products G. Neumann, J. Touzel, R. Duschl (Infineon Technologies Germany)
12:30
Lunch
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14:00
IP4
Invited Conference : Failure Analysis Issues in Microelectromechanical Systems (MEMS) Jeremy Walraven (Sandia lab.- USA)
Out of Plane vs. in Plane Flexural Behaviour of Thin Polysilicon Films: Mechanical Characterization and Application of the Weibull Approach F. Cacchione, A. Corigliano, B. De Masi*, C. Riva* (Politecnico di Milano, * STMicroelectronics - Italy) FTIR Spectroscopy for the Hermeticity Assessment of Micro-Cavities D. Veyri1,2, D. Lellouchi3, J.L. Roux1, F. Pressecq1, A. Tetelin2, C. Pellet2 (1CNES, 2IXL University of Bordeaux, 3NovaMEMS France) Failure Predictive Model of Capacitive RF-MEMS S. Mell, D. De Conto, L. Mazenq, D. Dubuc, B. Poussard, C. Bordas, K. Grenier, L. Bary, O. Vendier*, J.L. Muraro*, J.L. Cazaux*, R. Plana (LAAS-CNRS, *Alcatel Space Industries France) Biaxial initial stress characterization of bilayer gold RF-switches K. Yacine1, F. Flourens1, D. Bourrier1, L. Salvagnac1, P. Calmont1, X. Lafontan2, Q.H. Duong3, L. Buchaillot3, D. Peyrou1, P. Pons1, R. Plana1 (1LAAS-CNRS, 2NovaMEMS, 3IEMN Lille France)
14:40
H1
15:00
H2
15:20
H3
15:40
H4
SESSION B1
Failure Mechanisms in Silicon Devices Room 3.5, third floor Chairs: G. Groeseneken (IMEC Belgium) N. Stojadinovic (University of Nis - Serbia and Montenegro)
14:00
B1-1
14:20
B1-2
14:40
B1-3
15:00
B1-4
15:20
B1-5
Gate Stress Effect on low Temperature Data Retention Characteristics of Split-Gate Flash Memories L.-C. Hu, A.-C. Kang*, E. Chen*, J.R. Shih*, Y.-F. Lin, K. Wu*, Y.-C. King (National TsingHua University, *Tawan Semiconductor Manufacturing Company Tawan) Tunnel Oxide Degradation under Pulsed Stress G. Ghidini, C. Capolupo, G. Giusto, A. Sebastiani, B. Stragliati, M. Vitali (ST Microelectronics Italy) Negative Bias Temperature Instabilities in P-Channel Power VDMOSFETs N. Stojadinovic, D. Dankovic, S. Djoric-Veljkovic, V. Davidovic, I. Manic, S. Golubovic (University of Nis Serbia and Montenegro) Hot-Carrier Reliability of 20V MOS Transistors in 0.13 m CMOS Technology Y. Rey-Tauriac1, J. Badoc1, B. Reynard1, R.A. Bianchi1, D. Lachenal1,2, A. Bravaix2 (1ST Microelectronics, 2L2MP-ISEN France) Hydrogen-related Influence of the Metallization Stack on Characteristics and Reliability of a Trench Gate Oxide M. Nelhiebel, J. Wissenwasser, Th. Detzel, A. Timmerer, E. Bertagnolli* (Infineon Technologies, *TU Wien Austria)
16:00
Coffee break
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16:20
B1-6
16:40
B1-7
17:00
B1-8
17:20
B1-9
Dielectric Reliability of Stacked Al2O3-HfO2 MIS Capacitors with Cylinder Type for Improving DRAM Data Retention Characteristics J.Y. Seo, K.J. Lee, S.Y. Lee, S.J. Hwang, C.K. Yoon (Samsung Electronics Korea) Degradation of High-K La2O3 gate Dielectrics using Progressive Electrical Stress E. Miranda, J. Molina*, Y. Kim*, H. Iwa* (Universitat Autonoma de Barcelona - Spain, *Tokyo Institute of Technology - Japan) Impacts of the recovery phenomena on the worst case of damage in DC/AC stressed ultrathin NO gate oxide MOSFETs A. Bravaix1, D. Goguenheim1, M. Denais1,2, V. Huard3, C. Parthasarathy2, F. Perrier2, N. Revil2, E. Vincent2 (1L2MP-ISEN, 2STMicroelectronics Crolles 2 Alliance, 3Philips Semiconductors Crolles 2 Alliance France) Radiation Source Dependence of Performance Degradation in Thin Gate Oxide FullyDepleted SOI n-MOSFETs K. Hayama1, K. Takakura1, H. Ohyama1, S. Kuboyama2, S. Matsuda2, J.M. Rafi3, A. Mercha4, E. Simoen4, C. Claeys4,5 (1Kumamoto National College of Technology, 2Japan Aerospace Exploration Agency - Japan, 3Institut de Microelectronica de Barcelona - Spain, 4IMEC, 5 Katholieke Universiteit Leuven Belgium)
SESSION D
Advanced Failure Analysis: sample preparation, case studies (contd) Room 3.5, third floor Chairs: Ph. Perdu, (CNES - France) M. Vanzi (University of Cagliari Italy)
16:20 16:40
D4 D5
17:00
D6
17:20
D7
STEM Role in Failure Analysis Process M.A. Ianello, D. Gobled (Texas Instruments France)) Assessment of the Analytical Capabilities of Scanning Capacitance and Scanning Spreading Resistance Microscopy Applied to Semiconductor Devices M. Stangoni, M. Ciappa, W. Fichtner (ETH Zrich Switzerland) Dynamic Laser Stimulation Case Studies F. Beaudoin1, K. Sanchez1,2, R. Desplats1, P. Perdu1, J.M. Nicot1, J.P. Roux2, M. Otte3 (1CNES/THALES, 2Credence DCG France, 3Texas Instruments Germany) Electrical Performance Evaluation of FIB Edited Circuits through Chip Backside Exposing Shallow Trench Isolations U. Kerst, R. Schlangen, A. Kabakow, C. Boit (Berlin University of Technology Germany)
17:40 to 19:00
Workshop EUFANET : European Failure Analysis Network Room 3.5, third floor Mediator: Romain Desplats, CNES The 5th EUFANET workshop will focus on Diagnostic ATPG and CAD approaches for IC analysis. Issues are linking electrical test with IC diagnostics and manipulation of large CAD files.
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08:30
IP5
09:10
B2-1
09:30
B2-2
09:50
B2-3
10:10
B2-4
SESSION N
Noise degradation related to failure mechanisms Room 3.5, third floor Chairs : H. Hartnagel (TU Darmstadt Germany) N. Labat (IXL, University of Bordeaux - France) Invited Conference Accumulation of nonequilibrium phonons in biased channels for microwave power FETs and HEMTs Arvydas Matulionis, Juozapas Liberis (Semiconductor Physics Institute, Vilnius, Lithuania)
Dynamic-Stress-Induced High-Frequency Noise Degradation in NMOSFETs C. Yu, J.S. Yuan, A. Sadat* (University of Central Florida, *Conexant Systems USA) DC and Low Frequency Noise Analysis of Hot-Carrier Induced Degradation of Low Complexity 0.13 m CMOS Bipolar Transistors P. Benoit1,2, J. Raoult1, C. Delseny1, F. Pascal1, L. Snadny1, J-C. Vildeuil2, M. Marin2, B. Martinet2, D. Cottin2, O. Noblanc (1CEM University of Montpellier, 2ST Microelectronics France)
09:10
IP7
09:50
N1
10:10
N2
10:30
Coffee break
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10:50
IP6
G1 G2 G3
SESSION C
Electron and Optical Beam Test Room 3.5, third floor Chairs: L. Balk (University of Wuppertal - Germany) R. Cramer (Altis Semiconductor - France)
10:50
C1
11:10
C2
11:30 11:50
C3 C4
NIR Laser Stimulation for Dynamic Timing Analysis K. Sanchez1,2,3, R. Desplats1, F. Beaudoin1, P. Perdu1, J.P. Roux2, G. Woods2, D. Lewis3 (1CNES-TES, 2Credence DCG, 3IXL University of Bordeaux France) Impact of semiconductors Materials on NIR Laser Stimulation Signal A. Firiti1, F. Beaudoin2, G. Haller1, P. Perdu2, D. Lewis3, P. Fouillat3 (1STMicroelectronics, 2CNES-THALES, 3IXL University of Bordeaux France) Photon Emission Microscopy of inter/intra Chip device Performance Variations S. Polonsky, M. Bhushan, A. Gattiker, A. Weger, P. Song (IBM USA) Light Emission to Time resolved Emission for IC Debug and Failure Analysis M. Remmach1, A. Pigozzi1, R. Desplats1, P. Perdu1, D. Lewis2, J. Noel3, S. Dudit3 (1CNES-TES, 2IXL University of Bordeaux, 3STMicroelectronics France)
12:30
Lunch
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14:20
G5
14h40
G6
15:00
G7
15:20
G8
SESSION C
Electron and Optical Test (Contd) Room 3.5, third floor Chairs: L. Balk (University of Wuppertal - Germany) R. Cramer (Altis Semiconductor - France)
14:00
C5
C6 C7 C8
Electrostatic Discharge Fault Localization by Laser Probing S. Grauby, A. Sahli, W. Claeys, D. Trias*, S. Dilhaire (CPMOH University of Bordeaux, *Serma Technologies France) Seebeck Effect Detection on Biased Device without OBIRCH Distortion Using FET Readout S. K. Brahma, C. Boit, A. Glowacki (Berlin University of Technology Germany) Innovative Packaging Technique for Backside Optical Testing of Wire-Bonded Chips A. Tosi, F. Stellari*, F. Zappa (Politecnico di Milano Italy, *IBM USA) Two-dimensional dopant profiling and imaging of 4H silicon carbide devices by secondary electron potential contrast M. Buzzo1,2, M. Ciappa2, M. Stangoni2, W. Fichtner2 (1Infineon Technologies - Austria, 2ETH Zrich Switzerland)
15:40
Coffee break
16:00 to 17:30 Parallel sessions - Poster Session (second floor) - Annual Power Devices Workshop (Room 5.3, third floor): Lead free solders for power electronics or Thermal interface materials Moderators : E. Wolfgang, Siemens (Germany) M. Ciappa, ETH Zrich (Switzerland) 19:00 Bus departure for the gala diner
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09:00
IP8
09:40
F1
10:00
F2
10:20 SESSION F
Coffee break Packaging, Assemblies and passive components reliability Auditorium Chairs: W. Wondrak, (DaimlerChrysler - Germany) Y. Danto (IXL-University of Bordeaux - France)
10:40
F3
11:00
F4
11:20
F5
12:00
F6
New experimental Approach for Failure Prediction in Electronics : Topography and Deformation Measurement Complemented with Acoustic Microscopy I. Richard, R. Fayolle, J-Cl. Lecomte (Insidix France) Correlation between Experimental Results and FE Simulations to Evaluate Lead-Free BGA Assembly Reliability A. Gudon-Gracia, E. Woirgard, C. Zardini (IXL University of Bordeaux France) Vibration Lifetime Modelling of PCB Assemblies using Steinberg Model A. Dehbi, W. Wondrak (DaimlerChrysler Germany) Y. Ousten, Y. Danto (IXL University of Bordeaux France) Moisture Diffusion in Printed Circuit Boards: Measurements and Finite-Element Simulations K. Weide-Zaage1, W. Horaud2, H. Frmont3 (1University of Hannover Germany, 2 Solectron, 3IXL University of Bordeaux France)
Announcement of ESREF 2003 Best Papers Awards Conference closing session Bus departure to Bordeaux Merignac Airport
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POSTERS
The Poster session is scheduled on Thursday, October 13 from 16:00 to 17:30. SESSION A AP1 Quality and Reliability Techniques for Devices and Systems Method for
Robust, Versatile, Direct Low-Frequency Noise Characterization Material/Process Quality Control Using Cross-Shaped 4-Terminal Devices A. Kerlain, V. Mosser (Itron France) Failure Mechanisms in Silicon Devices
SESSION B BP1
BP2
BP3
BP4
BP5
BP6 BP7
Hot Carrier and Soft Breakdown Effects on LNA Performance for Ultra Wideband Communications E. Xiao, P. P. Ghosh, C. Yu*, J.S. Yuan* (University of Texas at Arlington, *University of Central Florida USA) The Impact of Static and Dynamic Degradation on SOI Smart-Cut Floating Body MOSFETs M.A. Exarchos, G.J. Papaioannou, J. Jomaah*, F. Balestra* (National and Kapodistrian University of Athens Greece, *IMEP ENSERG France) Pre- and post- BD electrical conduction of stressed HfO2/SiO2 MOS gate stacks observed at the nanoscale L. Aguilera, M. Porti, M. Nafria, X. Aymerich (Universitat Autonoma de Barcelona Spain) Elimination of Surface State Induced Edge Transistors in High Voltage NMOSFETs for Flash Memory Devices Jin-Wook Lee, Gyoung-Ho Buh, Guk-Hyon Yon, Tsai-su Park, Yu-Gyun Shin, U-In Chung, Joo-Tae Moon (Samsung Korea) Damage Root Isolation about Field Lightning Surge Failure of High Voltage BJT Based Line Driver for ADSL System J. S. Jeong, Jae-Hyun Lee, Jong Shin Ha, Sang Deuk Park (Samsung Electronics Korea) Voltage Stress-Induced Hot Carrier Effects on SiGe HBT VCO Chuangzhao Yu, Enju Xiao*, J.S. Yuan (University of Central Florida, * University of Texas at Arlington USA) Reliability Improvement by the Suppression of Keyhole Generation in W-Plug Vias Jong Hun Kim, Kyosun Kim, Seok Hee Jeon, Jong Tae Park (University of Incheon Korea) Electron and Optical Beam Testing (EOBT)
SESSION C CP1
Circuit-internal signal measurements with a needle sensor C. Hartmann, W. Mertin, G. Bacher (Universitt Duisburg-Essen Germany) Advanced Failure Analysis: sample preparation, case studies
DP3
DP4
Characterization of a 0.13 m CMOS Link Chip using Time Resolved Emission (TRE) J.F. Stellari, P. Song, J. Hryckowian, O.A. Torreiter*, S. Wilson, P. Wu (IBM USA, *IBM Germany) Localization of Marginal Circuits for Yield Diagnostics Utilizing a Dynamic Laser Stimulation Probing System J.Y. Liao, G.L. Woods*, X. Chen, H.L. Marks, (NVIDIA, *Credence Systems USA) Characterisation of Dopants Distribution using Electron Holography and FIB-Based Lift-off preparation U. Muehle, A. Lenk*, R. Veiland, H. Lichte* (Infineon Technologies, *Dresden University Germany) SRAM Cell Defect Isolation Methodology by Sub Micron Probing Technique
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DP5
DP6
DP7 DP8
F. Sibileau, C. Ali, C. Giret, D. Faure (Texas Instruments France) Intermittent Contact Scanning Capacitance Microscopy An Improved Method for 2D Doping Profiling P. Breitschopf1, G. Benstetter1, B. Knoll2, W. Frammelsberger1,3 (1University of Applied Sciences Deggendorf, 2Infineon Technologies Germany, 3University of the West of England United Kingdom) Non-Destructive Identification of Open Circuit in Wiring on Organic Substrate with High Wiring Density Covered with Solder Resist C. Ming Tan, K. Peng Lim, T. Chong Chai*, G. Cheng Lim, (Nanyang Technological University, *Institute of Microelectronics Singapore) Die Repackaging for Failure Analysis S. Barberan, E. Auvray (ST Microelectronics France) Image alignment for 3D reconstruction in a SEM R. Pintus, S. Podda, M. Vanzi (University of Cagliari Italy) Failure Mechanisms in Microwave, High Bandgap and Photonic Devices
A 3000 Hours DC Life Test on AlGaN/GaN HEMT for RF and Microwave Applications A. Sozza1,2,3, C. Dua1, E. Morvan1, B. Grimber1, S. Delage1 (1Alcatel-Thales III-V Lab. France, 2Universita Degli Studi di Padova Italy, 3IXL University of Bordeaux - France) Performances and limitations analyses of PHEMT and MHEMT for applications in high bit rate fibre-optic systems O. Pajona, C. Aupetit-Berthelemot, R. Lefevre*, J.M. Dumas, (ENSIL-University of Limoges, *Alcatel-Thales III-V Lab France) Packaging, Assemblies and passive components reliability
SESSION F FP1
FP2
A Simple Moisture Diffusion model for the Prediction of Optimal Baking Schedules for Plastic SMD Packages K. Chooi Lee, A. Vythilingam*, P. Alpern* (Infineon Technologies Germany, *Infineon Technologies Asia Pacific Singapore) Reliability Potential of Epoxy Based Encapsulants for Automotive Applications T. Braun, K.F. Becker, M. Koch, V. Bader, R. Aschenbrenner, H. Reichl (Fraunhofer Institute for Reliability and Microintegration & Technical University Berlin Germany) Power Devices Reliability
SESSION G GP1
GP5 GP6
Reliability Screening through Electrical Testing for Press-Fit Alternator Power Diode in Automotive Application C. Ming Tan1, J. Chiu2, R. Liu3, G. Zhang4 (1Nanyang Technological University, 4Integrated Business and Engineering Pte Singapore, 2Actron Technology Corp., 3Poworld Electronics Co. Tawan) Trench Insulated Gate Bipolar Transistors Submitted to High Temperature Bias Stress C.O. Maga, H. Toutah, B. Tala-Ighil, B. Boudart (LUSAC Cherbourg France) Comparative Analysis of Accelerated Ageing Effects on Power RF LDMOS Reliability M.A. Belad, K. Ketata, K. Mourgues, H. Maanane, M. Masmoudi, J. Marcon (LEMI University of Rouen France) Non Destructive Testing Technique for MOSFET's Characterisation during Soft-Switching ZVS Operations F. Iannuzzo (University of Cassino Italy) The Role of IGBT Module in Electromagnetic Noise Emission of Power Converters C. Abbate, G. Busatto, F. Iannuzzo, L. Fratelli (University of Cassino Italy) A Novel fast and Versatile Temperature Measurement System for LDMOS Transistors A. Tazzoli, G. Meneghesso, E. Zanoni (University of Padova Italy)
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GP7
Specification and use of pulsed current profiles for ultracapacitors power cycling W. Lajnef, J-M. Vinassa, O. Briat, E. Woirgard (IXL University of Bordeaux France) MEMS/MOEMS, Sensors and Actuators reliability
Investigation of Charging Mechanisms in Metal-Insulator-Metal Structures M. Exarchos, V. Theonas, P. Pons*, G.J. Papaioannou, S. Mell*, D. Dubuc*, F. Coccetti*, R. Plana* (University of Athens, *LAAS-CNRS France) Failure Analysis of Micro-Heating Elements Suspended on Thin Membranes D. Briand1, F. Beaudoin2, J. Courbat1, N.F. de Rooij1, R. Desplats2, Ph. Perdu2 , (1University of Neuchtel Switzerland, 2CNES-TES lab. France) Thermal and Electrostatic Reliability Characterization in RF MEMS Switches Q.-H. Duong1,2, F. Flourens4, L. Buchaillot1, D. Collard1, P. Schmitt3, X. Lafontan3, P. Pons4, F. Pressecq2 (1IEMN Lille, 2CNES, 3NovaMEMS, 4LAAS-CNRS France)
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