PREVENTIVE MAINTENANCE OF ELECTROGLAS EG2001 1.

0 PURPOSE: To define preventative maintenance procedure which will ensure maximum equipment uptime and operation within specified tolerances.

2.0 SCOPE: This specification applies to all Wafer Sort Electroglas 2001 and 2080 prober. 3.0 EQUIPMENT/TOOL:

3.1

TOOLS 3.1.1 3.1.2 3.1.3 3.1.4 Indexer platform leveling block Ceramic honing stone Forcer lifting tool. Vacuum cleaner.

3.1.5 Leveling Gauge. 3.1.6 Digital Voltmeter (DVM)

4.0

SUPPLIES/MATERIALS:

4.1

Supplies 4.1.1 4.1.2 4.1.3 4.1.4 4.1.5 Aeroshell 17 grease or equivalent. Delicate machinery oil, NYE 623a or equivalent. Lint free wipers. Platen Surface Cleaner. Imperial lapping film

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APPLICABLE DOCUMENTS AND FORMS:

5.1.1 Specs of PM must follow as per stated in EG2001X manual. 5.1.2 RC-397 ( Preventive Maintenance Checklist / Adjustment Record ) 5.1.3 RC-691 ( Wafer Sort Pre Operation Checklist ) Support Document 5.1.4 RC-300 ( Preventive Maintenance Document ) Support Document

6.0

DEFINITIONS: PM Preventive Maintenance

7.0

REQUIREMENTS: 7.1 PM time windows 7.1.1 Semi annual (Half Year) + 1 week (These activities of PM on EG2001X series probe at Wafer Sort operation are specified at maximum 26 week. The prober is scheduled on a 25 weekly basis with a 1 week flexibility to perform PM)

7.2 SEMIANNUAL PM PROCEDURE 7.2.1 7.2.2 7.2.3 7.2.4 Remove microscope,remove ring carrier assy.And place on table positioned the eg. Blow the platen and wafer feed areas off with compressed air.Use vacuum where necessary. Plug in utility lines and turn on,ie.(power ,air). Using only the eg forcer tool inserted into the notch on the side of the forcer,(notch is located by the arrow on the red sticker on the top of the forcer),carefully lift the forcer from the platen.Place a clean piece of foam rubber on the platen and set the forcer onto the foam on its side with the motor coils facing you.

7.2.5

Check all forcer air jets for adequate air flow.Note:Do Not Remove The Air Jets Unless They Appear To Be Clogged,if this is the case,then remove and clean on an individual basis by reverse insertion.Remember to turn off power to remove air before removing the air jet. Turn the forcer so that the motor coils are facing up.Take care to avoid excessive twisting or strain on the umbilical cable.Remove power,(so that the air is not on). Inspect the bottom of the forcer looking for contiminants,(ink and/or rust).If ink is found,then clean the bottom of the forcer with ace surface plate cleaner and kim wipes.Do not use acetone, IPA or any chlorinated solvent! If rust or other tough contaminants are found then lightly rub the rust away using 30-micron grit mylar film,(green paper).Do this only if necessary.Clean off all residue with kim wipes and Platen Surface Cleaner. Use the ceramic block(Eg part#104206)to find any burrs or scratches on the surface of the X and Y motors,(the bottom of the forcer).Do this by lightly running the block over the bottom of the forcer.Once found,the block can also be use to remove scratches and burrs.Move the block left to right then front to back. Do not move the block around in a circle! This will cause a hole to develop in the surface of the motor.Continue until smooth.Wipe the bottom of the forcer with Platen Surface Cleaner and kim wipe to get rid of any residue. Note: a)Clean the ceramic block with Platen Surface Cleaner and kim wipes after every use.Do this by placing the block on a flat surface,(not the platen),on the top of a piece of 30-micron green mylar film.Put a little Platen Surface Cleaner on the film and work the block till it is clean. b)Never use a block that is dirty (pieces of debris embedded in the bottom of the block);This will scratch the bottom of the forcer.

7.2.6

7.2.7

7.2.8

7.2.9

Use mirror glaze mold release wax(Eg part#064958)on the bottom of the forcer.With the air on,apply a thin even coat to the bottom of the forcer.Buff off excess wax.This will keep from filling the air jets and oval recessions with wax.Do not use furniture wax or a petroleum based wax products on the forcer or platen!

7.2.10 Follow the same procedured for the platen.When working on the platen remove the forcer from the platen and place on the backside of the eg table with proper support so as not to stress the umbilical cable.Place the foam between the forcer and the table.

7.2.11 With the forcer sitting on the foam which is setting on the platen remove the chucktop and set on the foam towards the back of the prober.Turn off prober power.Remove connectors J124,J125, and J127 from the chuck I/F PCB.It is not necessary to remove J126 as it goes to the Z motor and not to the Z-stage. Do not remove the connectors by pulling on the wires,but rather by pulling on the connector bodies.(The wires are very thin and can be damaged). 7.2.12 Disconnect the vacuum pin hose from the brass connector and the Z-stage ground wire if there is one. 7.2.13 Remove the fiberglass washer from under the chucktop. 7.2.14 Remove and discard the four o-rings.Do not touch the two screw in the top of the stem,as these hold the leadnut in a critically adjusted position! 7.2.15 7.2.16 Clean the fiberglass washer with isopropyl alcohol and set it side to dry. Remove the felt pad and screen.Squeeze the excess oil from the pad and clean both the pad and the screen(This can be done by soaking both in a small container of ISO).After five minutes re-move both items from the soak and squeeze the alcohol from the pad and set both items a side to dry. Remove the Z-stage from the forcer.Do this by removing the three mounting screws,washers,and insulators that secure the Z-stage to the forcer.Now the Z-stage can be removed from the forcer.Discard the three mounting pads.Cut any tie wraps as required to remove the Z-stage from the forcer. Remove The Stem Assembly. Remove the socket head screw holding the Z zero shutter bracket to the Z-stage stem assy.And remove the shutter bracket. Take two of the screws used to hold the chucktop in place and screw them into the top of the stem assy.These screws will be used as temporary handle to hold the stem assy.Do not touch the stem with your hands! 7.2.19 Rotate the pulley ccw to back the stem out of the Z-stage housing.Rest the stem assembly vertically on a clean work surface.If you use the air/belt trackplate place a lint-free towel on the track plate first because the oil will drip onto the plate and could get onto the backs of the wafers. Rotate the pulley gear to check the bearings.They should rotate smoothly if not the Z-stage may need to be either rebuilt or replaced,depending on the condition of the stem-to-housing clearance. Clean And Lubricate The Housing Assy.Clean the oilite bushings with a lint free swab dampened with NYE 623A oil.

7.2.17

7.2.18

7.2.20

7.2.21

7.2.22

Scrub the leadscrew clean with nylon cotton bud. Do not touch the bushing with anything that could cause damage,such as metal or alcohol. Lubricate the leadscrew with aeroshell 17 grease be sure to put the grease onto the screw,rather than the nut.This way the grease will not be forced upward to foul the felt pad. Clean And Lubricate The Stem Assy. Clean stem and leadnut with safety solvent.Be sure the to scrub the threads of the nut with the acid brush. Apply thin coat of NYE 623A oil if you have a PZ5 Z-stage or Eg lubricant(part#064981-003)If you have a PZ150 or PZ250 to the outside of the stem(a few drops are sufficient,usually spread into a ring at the base of the stem).

7.2.23

7.2.24

7.2.25

7.2.26 Insert The Stem Into The Housing. Insert the stem back into the Z-stage housing ,(a slight twisting motion usually helps-never force the stem if it binds).Turn the leadscrew clock wise to engage the leadnut. Rotate the stem to make the shutter bracket mounting screw hole visible. 7.2.27 Return the screen and felt pad. Dampen the pad with oil (three drops only). 7.2.28 Rotate the pulley to drive the stem up and down (check for roughness).If the stem does not move freely, the leadnut may require adjustment. This adjustment is critical, and should only be performed by Eg field service. 7.2.29 Drive the stem down until is flush with the top of the theta gear. Wipe away all excess oil at this time. 7.2.30 Remove the theta driver assembly by loosening the two screws located on the underside of the Z stage housing. Set the theta drive assembly aside. 7.2.31 Remove the theta gear by extracting the three mounting screws from the underside. Pull the gear straight up, off of the theta bearing. 7.2.32 Check theta bearing rotation. If sticky or gritty, it must be relubed. To purge the bearing, turn the Z-stage assembly upside down, and apply drops of oil from the underside of the bearing. Rotate the bearing as the oil is applied. Catch the old grease/oil mixture in a cloth or kimwipe. 7.2.33 When the bearing turns freely, introduce new mobile 28 grease to the bearing: with the butt end of a cotton swab or applicator, take small bits of grease and push the grease onto each ball bearing from the underside,(if you happen to have a grease syringe, this is even better). Continuously rotate the bearing during the application of the grease. 7.2.34 Once the bearing has been relubed, clean the theta gear with cotton bud, and reattach it to the Z-stage. Tighten the three button head mounting screws to about .5/lbs. Verify that the gear rotates freely.

7.2.35 Reinstall The Theta Drive Assembly. Place the theta assembly onto the ledge of the Z-stage and hand tighten the two screws. Be sure to install the two lock washers. 7.2.36 With the worm gear and theta gear (PZ-5) meshing properly together, apply enough pressure to center the worm gear shaft bearing within the eccentric hole in the theta housing. 7.2.37 Hold the theta assembly in place and tighten the two screws to about 5 to 7/lbs. 7.2.38 Reassemble and mount the stage per steps 43-66,(routine maint. Procedure. Grasp the chucktop and check for any obvious play or backlash in theta. Note: When turning the chucktop in the ccw,(left), direction there will be a ,springiness, that will cause the chucktop to move back to the right when the chucktop is release. This is normal and is supposed to be there. When gently trying to turn the chucktop cw,(right), there should be no noticeable movement or backlash in theta. If there is then readjust the theta drive assembly till it is correct. If the theta assembly is correct then the theta fixation bearings could be out of adjustment. This adjustment is covered in the section labeled. 7.2.39 Install The Shutter, O-rings, Washer, And Chucktop. Drive the stem upward approximately 1/8. 7.2.40 Reinstall the Z zero shutter and torque the shutter mounting screw to 2/lbs. 7.2.41 Clean the seats for the four o-rings with an alcohol-dampened applicator. This is to insure that no oil in the seats. 7.2.42 Install the four new urethane o-rings, (Eg part #0341676-002), onto the top of the stem. Ensure that they are properly seated. 7.2.43 Install the Z-stage onto the forcer on the three new gaskets of identical thickness. 7.2.44 Connect the vacuum pin line to the brass connector, then reinstall the forcer/z-stage ground wire(if any). 7.2.45 Install fiberglass washer and chucktop. Torque the chucktop mounting screws to 4.5/lbs.(use a star pattern). Note: Do not over-torque the chucktop mounting screws,( maximum 4.5 inch pounds), as it may strip the helicoils out of the insulation plugs or pull the insulation plugs out of the stem. 7.2.46 Perform Final Adjustments. Adjust the theta fixation bearings to zero play to center pin.( Z-stages have a spring-loaded shaft, so no adjustment is needed.

7.2.47 Adjust eccentric shafts with 5/32 open wrench. This adjustment has been done if either of the bearings can be rotated without moving the stem up or down, but are still touching the center pin. 7.2.48 Move the stem up and down and check for proper rotation of the two bearings against the center pin. If one of them does not rotate, readjust the particular shaft. 7.2.49 Check for proper spring action of the vacuum pins. 7.2.50 Connect J124, J125, J127 to their proper connectors on the chuck I/F board. 7.2.51 Turn prober power back on. 7.2.52 Check all tubing for possible leaks. 7.2.53 Install The Z Drive Belt. Using the lifting tool, insert the tip of the lifting tool in the, notch, on the side of the forcer. Using a rocking motion, gently lift the side of the forcer away from the platen surface, then grasp the motor by hand to complete this process, until the forcer is laying on its side. 7.2.54 Shut the system power, off. Note that system air is now off. If the air does not go off, then SV3 in the pneumatic module is probably sticking. 7.2.55 Loosen the two Z drive motor mounting screws,(the allen-head screws), and slide the motor toward the chuck assembly. 7.2.56 Install the drive belt back onto the two pulley gears. Slide the Z drive motor to set the belt tension. The belt should be just tight enough that when light pressure is place on one side of the belt, the other side doesnt flex. 7.2.57 Turn on the prober power. Note that the forcer air has come back on. If the forcer air does not come back on, then SV3 in the pneumatic module may be sticking, or the +28vdc supply fuse(F9) may have blown. 7.2.58 Gently lower the forcer back onto the platen. 7.2.59 Block the Z zero sensor , and reset the forcer. Adjust the flag to be centered over the sensor, and tighten it, (use about 5/lbs. of torque). If the message, Theta sensor not found, continue? appears on the monitor, press the enter key.

7.2.60 Verify that the forcer moves properly and that the Z-stage gear doesnt touch the platen. Use the Z diagnostic in the probers DIAG menu. Run the DIAG function for five minutes to ensure that the Z-stage functions normally. 7.2.61 This completes the routine check maintenance procedure.

7.2.62 Perform The Chucktop Planarity Check . Place the dial indicator stand on the platen, and adjust the probe to read the chuck surface @ Z=200. 7.2.63 Using the 0.0001 dial gauge, measure the chuck top surface height at 3 points, at the outer edge, in line with the PZ-5 mounting screws. All three points must be within .0005 of each other. If not, adjust the mounting screws, (high points to low, to a maximum of 8/lbs.). If planarity cannot be achieved at this torque, the gaskets must be re-placed. This should not be a problem since you have already replaced these pads previously. 7.2.64 Set Z Electrical Zero. Blank and reset the forcer. This brings the chuck to Z=0.00. 7.2.65 Ring Carrier Calibration. Reinstall the ring carrier and perform the ring carrier adjustment on the ring carrier if necessary, per procedure in the EG training manual. 7.2.66 Profiler PM And Calibration. Clean profiler sensor with alcohol by manually moving it up and down. When doing this action make sure to place a kimwipe on the platen surface to collect the alcohol before it gets onto the platen surface. 7.2.67 Perform the profiler calibration as stated in the EG training manual. Note: If the sensor head needs adjustment then avoid excessive torque on the head, as this can cause the piston to stick in the head. 7.2.68 When the profiler PM is done then run the profiler portion of the DIAG. Menu to verify proper profiler operation.

8.0 8.1

RESPONSIBILITIES: It is the responsibility of the technician performing an EG2001X PM to ensure that this procedure is followed, that all applicable items on the PM checklist are completed, and that an updated PM sticker is attached to the front of the prober's power module upon completion of th PM. The Wafer Sort production supervisor is responsible for ensuring probers are made available for Preventative Maintenance When scheduled. The Wafer Sort PM Coordinator is responsible for ensuring PM schedules are issued in a timely manner and for reviewing and logging completed PM jobs. DISPOSITION OF MATERIAL: Dispose all wipes with IPA and grease in the designated bin.

8.2

8.3