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Guided by Dr. M.R. Baiju Professor Dept. of ECE CET Presented by VISAKH.V M4 AEI, ROLL NO:12
Energy Harvesting
Overview
Energy Harvesting
According to the study only the rst 500 Hz of the spectra is important. First, there is a sharp peak in magnitude at a fairly low frequency with a few higher frequency harmonics. Another observation is that the fundamental vibration frequency for almost all sources is between 70 and 125 Hz.
Energy Harvesting
Energy Harvesting
There are mainly three main methods for converting the energy from vibrations to electrical energy. They are Electromagnetic Power Conversion Elecrostatic Power Conversion Piezoelectric Power Conversion
Energy Harvesting
The constitutive equations for a piezoelectric material are given in equations ?? and ?? . = + dE (1) Y D = E + d where: is mechanical strain is mechanical stress Y is the modulus of elasticity (Youngs Modulus) d is the piezoelectric strain coefcient E is the electric eld D is the electrical displacement (charge density) is the dielectric constant of the piezoelectric material (2)
Energy Harvesting
The work done for the thesis includes the following. Familiarized Coventorware(Design and Analysis Software) Design and Analysis of Cantilever Beam in Coventorware Design an Analysis of Piezoresistor in Coventorware Familiarized Mems+ Interfaced Mems+ with Matlab Designed Mems Switch in Mems+ Analysed Mems Switch in Matlab Designed Energy Harvester Structure in Mems+
Energy Harvesting
Energy Harvesting
Modes of Vibration
Mode 1
Mode 2
Energy Harvesting
Mode 3
Mode 4
Energy Harvesting
Mode 5
Mode 6
Energy Harvesting
Energy Harvesting
A new MemPZR analysis is set up using the above model. And with a voltage difference of 1V applied to the electrodes and a 0.2N of force appied , the resulting currents at the electrodes is obtained. Patch voltage Patch Current % change in current in1 1 1.462025E08 4.430218 in2 1 1.332666E08 -4.809469 out1 0 -1.462025E08 4.430218 out2 0 -1.332666E08 -4.809469
Energy Harvesting
Mems Switch
Energy Harvesting
Mems Switch
Simulink Model
Energy Harvesting
Mems Switch
Pullin Voltage
Energy Harvesting
Materials Used
The piezoelectric energy harvesting structure process ow is designed in MEMS+. The materials used for the process are Silicon (Proof Mass) SiO2 AlN(Piezoelectric Material) Al(Electrical Contact)
Energy Harvesting
Process Flow
Silicon material is deposited over a substrate to dene the proof mass layer and also the anchor part.This layer has a height of 400 um. The next step is the deposition of oxide layer over this layer. The oxide layer has a thickness of about 0.5 um . Then another layer of silicon is deposited over this layer with a thickness 5 um. Then the piezoelectric material AlN is deposited over this layer with a thickness of 1 um. After etching , Aluminium is deposited to dene the electrode contacts.
Energy Harvesting
Mask Layouts
Energy Harvesting
Energy Harvesting
Energy Harvesting
Energy Harvesting
Work to be Done
System level Analysis of Energy Harvester Circuit Using Matlab and Mems+ FEM Analysis of the EH circuit using Coventorware Multiphysics Analysis of the circuit using Comsol
Energy Harvesting
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Energy Harvesting