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Department of Materials Science and Engineering, The University of Tennessee, Knoxville, TN 37996, USA
Molecular Scale Engineering and Nanoscale Technologies Research Group, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Received 31 May 2004; received in revised form 18 August 2004; accepted 2 September 2004
Available online 30 October 2004
Abstract
In order to optimize the electrical and optical properties of indium tin oxide (ITO) thin films, a statistical analysis called Taguchi design
was employed. It is shown that the sheet resistance and transmittance are inversely proportional to each other as a function of the process
parameters. Additionally, the preferred orientation of crystalline ITO film is distinguishably changed with the increase of sputtering
temperature and oxygen fraction (O2/O2+Ar) in the sputtering ambient. The change in crystallinity results from the content of incorporated
oxygen, which significantly affects the electrical and optical properties of ITO films and causes a rearrangement of atoms to form preferred
closed-packed plane orientation. Finally, the microstructure of the ITO films becomes denser with the increasing oxygen fraction. As a result
of this work, we have successfully achieved low sheet resistance (7.0 V/5) and high transmittance (~90%) for 300 nm thick films.
D 2004 Elsevier B.V. All rights reserved.
PACS: 73.50.-h; 78.20.-e
Keywords: Indium tin oxide (ITO); Sputtering; Taguchi design; Transparent electrode
1. Introduction
Indium tin oxide (ITO) thin films are widely used as
transparent electrodes in electronic displays [1]. In recent
years, ITO has also been implemented in light-addressed
intracellular biological probes [2,3]. Normally RF magnetron sputtering is used for the deposition of the film because
it provides a low temperature deposition process and higher
process efficiencies, higher throughput, and process reliability [1]. When using ITO transparent electrodes, there is a
well-known trade-off between the sheet resistance and the
transmittance, which is dominated by the number of oxygen
vacancies in the films [4,5]. Oxygen vacancies are donor
levels in ITO; consequently, when ITO is slightly oxygendeficient, reasonable electrical transport can be realized. The
transmittance however can be deleteriously affected if the
films are too oxygen-deficient as they become more metallike. Therefore it is important to determine the optimized
deposition conditions in order to achieve high transmittance
and low sheet resistance at the same time. In a typical RF
magnetron sputtering system, normally there are four main
factors that control the process; RF power, gas pressure,
temperature, and gas composition. To optimize this wide
parameter space in a serial manner is tedious and unwieldy
and many parameter interactions can go undetected. To
facilitate rapid process optimization and reduce the number
of trials and analytical errors, statistical tools can be
implemented. In this research, we describe a Taguchi design
of experiment (DOE) for the purpose of optimizing the ITO
deposition [6,7]. This DOE is normally used for optimizing
a process condition that is completely unknown or in the
initial stage of process development to determine the overall
tendencies of process factors with less experiment trials [7].
The process targets for the ITO films are sheet resistance
b10 V/5 and transmittance (at 488 nm) N85% for a nominal
film thickness of 300 nm.
60
2. Experimental details
The specified description of the DOE is described in
detail in Table 1. Our initial DOE was a three-level
design (low, medium, high) for the four process factors,
which included RF power, temperature, pressure, and O2
fraction (for a Ar+O2 ambient). The responses for the
DOE included deposition rate, transmittance, sheet resistance, and etching rate. For the DOE analysis, a high
deposition rate, high transmittance, low sheet resistance,
and high etch rate were desirable. Consequently, to
qualify how the factors affected our responses, the
following illustrates our interpretation of the results:
dlarger is betterT for deposition rate, dlarger is bestT for
transmittance, dsmaller is bestT for sheet resistance, and
dlarger is betterT for etching rate.
An AJA ATC2000 RF magnetron sputtering system
was utilized for the deposition of ITO thin films on glass
substrates. The sputtering target has a diameter of 50 mm
and a thickness of 6 mm and consists of In2O3 and 10
wt.% SnO2. The base pressure prior to the sputtering
deposition was below 5.310 6 Pa and the total flow rate
of argon used in the sputtering was fixed at 25 sccm for
all conditions. The substrate is heated by quartz lamps
and the temperature is controlled within F1 8C.
The transmittance of ITO thin films was measured
using a calibrated Ar lamp and an Ocean Optics PC2000
spectrometer with a wavelength range 200900 nm. The
transmittance was fixed and normalized at 488 nm
because our application is a light-addressed biological
probe operated at that wavelength because silicon is the
active layer and has a high absorption coefficient at 488
nm. The sheet resistance was analyzed via four-point
probes (Veeco FPP-5000) and the reported value is an
average of three measurements over the sample. The film
thickness and etching rate were evaluated by using
Surface Profiler (KLA Tencor Alpha-Step 500). The
Table 1
DOE for optimizing ITO thin film deposited by RF magnetron sputtering: Taguchi design
No.
Factors
1
2
3
4
5
6
7
8
9
a
b
c
d
Responses
RF power,
W (W/cm2)
Temperature,
8C
Pressure,
Pa
O2 ,
sccm
D/Ra,
nm/min
Trb,
%
Rsc,
V/5
E/Rd,
nm/min
75
75
75
100
100
100
125
125
125
30
130
230
30
130
230
30
130
230
0.7
2.0
3.3
2.0
3.3
0.7
3.3
0.7
2.0
0
2
4
4
0
2
2
4
0
2.63
0.67
0.14
0.82
0.93
2.91
0.84
3.43
2.52
35.1
86.1
89.5
87.2
85.8
88.9
89.2
86.8
68.6
262
63,593
391
~150,000
231
343
~150,000
10,839
28
N200
N200
b5
N200
N200
424
N2000
545
403
(3.7)
(3.7)
(3.7)
(4.9)
(4.9)
(4.9)
(6.2)
(6.2)
(6.2)
RF power
Temperature
Pressure
O2 content
Lower Rs
Higher Tr
Higher D/R
Optimized
Low
High
High (2)
Low
(b75 W)
High (1)
High
High
High
(N230 8C)
Low
High (2)
Low (1)
Low
(b0.7 Pa)
Low (2)
High (1)
Low
Low
(~0 sccm)
(1), (2): The first and second priorities effecting on process targets.
61
Table 3
Additional experiment for optimizing dominant factors: temperature and O2/(O2+Ar) ratio
No.
1
2
3
4
5
6
7
8
9b
Factors
Responses
RF power,
W (W/cm2)
Temperature,
8C
O2/(O2+Ar)
D/R,
nm/min
Tr,
%
Rs,
V/5
XRD
intensitya
75
75
75
75
75
75
125
125
125
400
400
400
400
400
400
400
30
30
0.00
0.01
0.02
0.04
0.06
0.08
0.00
0.00
0.00
3.23
3.29
3.19
2.81
2.56
2.39
4.70
3.22
3.22
87.3
82.7
81.5
92.8
98.1
96.6
68.2
75.8
85.9
7.0
97.2
242.1
201.5
339.8
479.3
8.9
206.0
8.2
405
305
295
334
804
954
440
164
369
(3.7)
(3.7)
(3.7)
(3.7)
(3.7)
(3.7)
(6.2)
(6.2)
(6.2)
62
Fig. 2. XRD pattern for sintered ITO target containing In2O3 and 10 wt.%
SnO2.
63
Fig. 7. SEM image of ITO film with the increase of oxygen in gas: (a) O2/
(O2+Ar): 0.00; (b) 0.02; (c) 0.08.
4. Conclusions
To improve the electrical properties, lower sheet resistance, ITO deposition should be processed under higher
temperature and low oxygen fraction. A tradeoff between
64
Acknowledgements
This work was supported in part by the National Institute
for Biomedical Imaging and Bioengineering under assignment R01EB000433 and through the Laboratory Directed
Research and Development funding program of the Oak
Ridge National Laboratory, which is managed for the U.S.
Department of Energy by UT-Battelle, LLC.
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