Comments on TS for SEM:

CL.3.1
Filament heating and gun alignment is to be automatic.
Operational modes:
High vacuum
Low vacuum
Extended
vacuum/
ESEM Mode
SE:Secondary Electrons

3.0 nm or better at 30 kV (SE)

4.5 nm or better at 30 kV (BSE)
10 nm or better at 3 kV (SE)
3.0 nm or better at 30 kV (SE)
4.5 nm or better at 30 kV (BSE)
10 nm or better at 3 kV (SE)
5.0 nm or better at 30 kV (SE)

BSE:Backscattered Electrons
Beam deceleration: Variable from 50V to 4KV.
Magnification : 5x to 300,000x

Sl.no.5 Eucentric Specimen stage Rotation:360 degrees(continuous), with

Raster rotation/Dynamic focus/Tilt correction. Motorized sample insertion and
retraction with auto retract safety features.
Tilt: minus 10 degrees to + 90 degrees
Manual control: Provision for manual control for most frequently used functions such
as focus, contrast, brightness and various scan modes must be provided.
Essential sample holders: Single-stub mount, Multi-stub holder

Optics: The optical system should maintain focus with change in probe
current.Signal mixing should be possible.

Sl.no.7 :Vacuum system:

Turbo pump: Internally mounted 70L/s aircooled turbo molecular pump.
Vacuum measurement: Pirani gauge as standard.
Typical ultimate vacuum: 5 x 105mbar or better.
Sputter vacuum range: Between 5 x 103 and 5 x 101mbar or better
Sputtering: 0150mA to a predetermined thickness (with optional FTM) or by the
builtin timer. Automatic vacuum control, which can be preprogrammed to suit the
process and material
Vacuum shutdown feature leaves the process chamber under vacuum when not in
use
Thick film capabilities up to 60 minutes sputtering time without breaking vacuum

Sl.no.9:Sputter coater-Metal sputtering or carbon evaporation or both ,Fine grain

sputtering for advanced high resolution FESEM applications
Sl.no.10 The system software should be capable of automated functions such as
filament heating, gun alignment, focus, brightness and contrast. In addition, the

software should specifically include measurement functions such as distance

between parallel lines-horizontal, vertical and diagonal.
Image display and processing:
32bit graphical user interface with Windows 7 or latest, keyboard,
optical mouse, One/Two 19inch LCD displays, Magic Switch TM (softwarecontrolled
switchbox), Joystick, Manual user interface, 19inch LCDs, image processing resolution of
2kX2k pixel or more, Image from different detectors could be viewed simultaneously in a split
up view area of the monitor.
Noise reduction by average or integration method
Spares:100 tungsten hairpin filament elements are to be supplied.
A Peltier- cooled stage to control dehydration from wet specimens is be offered as
an option.(Rate to be quoted separately).
A specimen coating(gold coating) unit is to be offered as an option.
Auger electron detector should be offered as an option.
cl.3.2 EDS
Guaranteed Energy resolution of 120130 eV or better for Mnk at 100,000 cps or
higher.
Real Time Phase Mapping with Phase to Element & Element to Phase map display
Element detection from Be to U
Automatic Element identification
Qualitative & Quantitative analysis
EDS should have Variable pressure Quantification algorithm for accurate EDS under
Low vacuum conditions
Report generation Reference standard for EDS should be provided .
EDS software: Quantification software, Spectrum Utility, Imaging/Mapping software,
Line Scan acquisition software, Fast mapping software, suitable Software 59
elements standard:
59 Element Standard including rare earths consisting of element standard materials
suitable for use with EDS and WDS system. The materials are mounted on a 1" or
1.25" diameter stub or suitable stub with a Faraday cup for Beam Current
measurements. The elements are: Be, B, BN, C, Mg, Al, Si,Sc, Ti, V, Cr, Mn, Fe, Co,
Ni, Cu, Zn, GaAs, Ge, Zr,Se, Nb,Mo, Ru, Rh, Pd, Ag, Cd, InP, Sn, Sb, Ta ,Te,Hf,BaF2,W,
Os, Ir,Pt, Au, PbS, Bi, Th, U, (MgFe)2SiO4,

MgCaSi2O6,Ca2Na(MgFe)4Ti9Si6Al2O22(OH)2, K(Mg,Fe)3AlSi3O10(OH)2, NaAlSi2O6,

KAlSi3O8,

Na, K, Al, Fe silicate glass, LiAlSi2O6, Na4AlBeSi4O12Cl , SrSO4, CsAlSi2O6,

(Ce,La,Th)PO4 HgS,CaCO3, Ca5(PO4)3F

System is to be compatible with common third party accessories: Cryo

cathodoluminiscence, sample current detector

stage,