Coupled-FieldAnalysisGuide

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2.23. Example: Electromechanical Analysis

Inthisexample,youwillperformadirectcoupled-fieldanalysisofaMEMSstructure.

Figure 2.28: Electrostatic Parallel Plate Drive Connected to a Silicon Beam

Beam Properties

Parallel Plate Drive Properties

2

L=150m

Ap=100(m)

b=4m

gap=1m

h=2m

r=8.854e-6pF/m

E=1.69e5N/(m)

=2.332e-15kg/(m)

2.23.1. Problem Description

AMEMSstructureconsistsofanelectrostaticparallel-platedriveconnectedtoasiliconbea
structure.Thebeamispinnedatbothends.Theparallel-platedrivehasastationarycomp
andamovingcomponentattachedtothebeam.Performthefollowingsimulations:
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1. Apply150Voltstothecombdriveandcomputethedisplacementofthebeam
2. ForaDCvoltageof150Volts,computethefirstthreeeigenfrequenciesofthebea
3. ForaDCbiasvoltageof150Volts,andaverticalforceof0.1Nappliedatthemid
ofthebeam,computethebeamdisplacementoverafrequencyrangeof300kHzt
kHz.

TheparallelplatecapacitanceisgivenbythefunctionCo/xwhereCoisequaltothefree-s
permittivitymultipliedbytheparallelplatearea.Theinitialplateseparationis1m.TheM
andHarmonicanalysismustconsidertheeffectsoftheDCvoltage"preload".Theproblem
uptoperformaPrestressModalandaPrestressHarmonicanalysisutilizingtheStaticanaly
results.Aconsistentsetofunitsareused(MKSV).SincethevoltageacrossTRANS126is
completelyspecified,thesymmetricmatrixoption(KEYOPT(4)=1)issettoallowforuseo
symmetricsolvers.

2.23.2. Expected Results

Theexpectedanalyticresultsforthisexampleproblemareasfollows.

2.23.2.1. Static Analysis

UY(node2)=-0.11076e-2m

2.23.2.2. Modal Analysis

f1 =351kHz
f2 =1380kHz
f3 =3095kHz

2.23.2.3. Harmonic Analysis

Frequency@maximumdisplacement=351.6kHz
Maximumdisplacement=22m(undamped)
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2.23.2.4. Displays
Figure2.29:ElementsofMEMSExampleProblem showsthetransducerandbeamfinite
elements.

Figure2.30:LowestEigenvalueModeShapeforMEMSExampleProblemshowsthemode
shapeatthelowesteigenvalue.

Figure2.31:MidSpanBeamDeflectionforMEMSExampleProblemshowstheharmonic
responseofthemidspanbeamdeflection.

Figure 2.29: Elements of MEMS Example Problem

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Figure 2.30: Lowest Eigenvalue Mode Shape for MEMS Example Problem

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Figure 2.31: Mid Span Beam Deflection for MEMS Example Problem

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2.23.3. Building and Solving the Model

Thecommandtextbelowdemonstratestheprobleminput.Alltextprefacedwithanexclam
point(!)isacomment.

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/batch,list/show,file/prep7/title,Static,Modal,HarmonicresponseofaMEMSstructure/c
L=150!beamlength(micrometers)b=4!beamwidthh=2!beamheightI=b*h**3/12!
momentofinertiaE=169e3!modulus(microNewtons/micron**2)dens=2332e-18!dens
(kg/micron**3)per0=8.854e-6!free-spacepermittivity(pF/micron)plateA=100!capacito
platearea(micron**2)vlt=150!Appliedcapacitorplatevoltagegapi=1!initialgap(micro
1,3!2-Dbeamelementr,1,b*h,I,h!beampropertiesmp,ex,1,Emp,dens,1,denset,2,126,
Transducerelement,UX-VOLTdof,symmetricc0=per0*plateA!C0/xconstantforCapacita
equationr,2,0,0,gapi!Initialgapdistancermore,c0!RealconstantC0n,1,-10n,2,0n,22,L
type,2real,2e,1,2!Transducerelement(arbitrarylength)type,1real,1e,2,3!Beamelem
*repeat,20,1,1nsel,s,loc,x,-10nsel,a,loc,x,Ld,all,ux,0,,,,uy!PinbeamandTRANS126elem
nsel,s,loc,x,0d,all,uy,0!AllowonlyUXmotiond,2,volt,vlt!Applyvoltageacrosscapacitor
nsel,s,loc,x,-10d,all,volt,0!Groundotherendofcapacitorplatensel,allfini/soluantyp,sta
Staticanalysispstres,on!turnonprestresseffectssolvefini/post1prnsol,dof!print
displacementsandvoltageprrsol!Printreactionforcesfini/soluantyp,modal!Modalanal
modopt,lanb,3!BlockLanczos;extract3modesmxpand!Expand3modespstres,on!Inc
prestresseffectssolvefinish/post1set,1,1!Retrievelowesteigenfrequencyresultspldisp,
modeshapeforlowesteigenfrequency/soluantyp,harm!Harmonicanalysishropt,full!Fu
harmonicanalysisoptionpstres,on!Includeprestresseffectsharfrq,300000,400000!Freq
range(Hz.)nsubs,500!Numberofsamplingpoints(substeps)outres,all,all!Saveallsubs
ddele,2,volt!deleteappliedDCvoltagensel,s,loc,x,L/2!Selectnodeatbeammidspanf,al
Applyverticalforce(.1N)nsel,allsolvefinish/post26nsol,2,12,u,y,!selectnodewithapp
forceadd,4,1,,,,,,1/1000!changetoKilohertzplcplx,0!magnitude/axlab,x,Frequency(Kh
setgraphicsoptions/axlab,y,Displacement/xrange,325,375/yrange,0,20/gropt,divx,10/g
axis,1.5/grop,ltype,0/dev,text,1,400xvar,4plvar,2!Plotdisplacementvs.frequencyprva
Printdisplacementvs/.frequencyfinish
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