XGT7000V Manual

X-RAY ANALYTICAL MICROSCOPE
XGT-7000V
Instruction Manual
CODE:GZ0000090619
Preface
This manual describes the operation of the X-RAY ANALYTICAL MICROSCOPE, XGT7000V.
Be sure to read this manual before using the product to ensure proper and safe operation of
the instrument. Also safely store the manual so it is readily available whenever necessary.
Product specifications and appearance, as well as the contents of this manual are subject to
change without notice.
Warranty and Responsibility

HORIBA warrants that the Product shall be free from defects in material and workmanship
and agrees to repair or replace free of charge, at HORIBAs option, any malfunctioned or
damaged Product attributable to HORIBAs responsibility for a period of one (1) year from the
delivery unless otherwise agreed with a written agreement. In any one of the following cases,
none of the warranties set forth herein shall be extended
z Any malfunction or damage attributable to improper operation
z Any malfunction attributable to repair or modification by any person not authorized by
HORIBA
z Any malfunction or damage attributable to the use in an environment not specified in this
manual
z Any malfunction or damage attributable to violation of the instructions in this manual or
operations in the manner not specified in this manual
z Any malfunction or damage attributable to any cause or causes beyond the reasonable
control of HORIBA such as natural disasters
z Any deterioration in appearance attributable to corrosion, rust, and so on
z Replacement of consumables
HORIBA SHALL NOT BE LIABLE FOR ANY DAMAGES RESULTING FROM ANY
MALFUNCTIONS OF THE PRODUCT, ANY ERASURE OF DATA, OR ANY OTHER USES
OF THE PRODUCT.
Trademarks
Generally, company names and brand names are either registered trademarks or trademarks
of the respective companies.
July, 2007
2007 HORIBA, Ltd.
Conformable Directive
This equipment conforms to the following directives and standards:
Directives:
Standards:
the EMC Directive 89/336/EEC, in accordance with Article 10

(1) of the Directive
the Low Voltage Directive 2006/95/EC
[the EMC Directive]
EN61326: 1997/A3: 2003 Class B, Minimum requirements
[the Low Voltage Directive] EN61010-1: 2001
Installation Environment
This product is designed for the following environment.
z Installation Categories II
z Pollution degree 2
Information on Disposal of Electrical and Electronic Equipment

The crossed out wheeled bin symbol shown on the product or
accompanying documents indicates separate collection for waste electrical
and electronic equipment (WEEE) under the WEEE Directive 2002/96/EC in
the European Union.
This product should not be disposed of as unsorted household waste.
Your correct disposal of WEEE will contribute to reducing wasteful consumption of natural
resources and protecting human health and the environment from potential negative effects
caused by hazardous substances in products.
Contact your supplier for information on applicable disposal methods.
FCC Rules
Any changes or modifications not expressly approved by the party responsible for compliance
shall void the user's authority to operate the equipment.
WARNING
This equipment has been tested and found to comply with the limits for a Class A digital
device, pursuant to part 15 of the FCC Rules. These limits are designed to provided
reasonable protection against harmful interference when the equipment is operated in a
commercial environment. This equipment generates, uses, and can radiate radio frequency
energy and, if not installed and used in accordance with the instruction manual, may cause
harmful interference to radio communications.
Operation of this equipment in a residential area is likely to cause harmful interference in
which case the user will be required to correct the interference at his own expense.
For your safety

Warning messages are described in the following manner. Read the messages and follow the
instructions carefully.
Meaning of warning messages

This indicates an imminently hazardous situation which, if not avoided, will
result in death or serious injury. This signal word is to be limited to the most
extreme situations.
This indicates a potentially hazardous situation which, if not avoided, could
result in death or serious injury.
This indicates a potentially hazardous situation which, if not avoided, may
result in minor or moderate injury. It may also be used to alert against
unsafe practices.
Without safety alert indication of hazardous situation which, if not avoided,
could result in property damage.
Symbols
Description of what should be done, or what should be followed
Description of what should never be done, or what is prohibited
Safety Precautions
This section provides precautions to enable you to use the product safely and correctly and to
prevent injury and damage. The terms of DANGER, WARNING, and CAUTION indicate the
degree of imminency and hazardous situation. Read the precautions carefully as it contains
important safety messages.
DANGER
High voltage
Do not touch inside with power ON.
Electrical hazardous voltage can cause shock or death.
Do not disconnect HV connector while power is ON.
Wait one minute after poert is turned OFF.
WARNING
Electric Shock
To prevent electric shock, ground this unit.
However, never ground it using a hazardous medium such as gas pipe.
Extremely Low Temperature (-196C)

Do not touch low-temperature parts.
When replenishing liquid nitrogen (-196C), make sure to wear safety glasses and thermal insulated
leather gloves, and handle the liquid nitrogen carefully to keep it away from the skin and clothing.
If liquid nitrogen is spilled or splashed on the skin or clothing, it may cause serious damage to the skin
and subcutaneous tissue.
Oxygen Deficiency
Make sure to ventilate the room to avoid the risk of suffocation.
Nitrogen gas (N2) can create oxygen deficient atmosphere.
CAUTION
If the X-ray indicator remains lit even when the sample chamber cover is open (to insert a sample or
for any other reason), discontinue use of the XGT-7000V immediately, to prevent possible damage to
hands or fingers inside the chamber.
Be careful not to spill out the liquid nitrogen when refilling.
If liquid nitrogen spills on the detector cable or peripheral devices, it may cause breakage.
When opening/closing the door, move down the Z axis from the measurement position referring to the
height adjustment camera. Opening/closing the door without the Z axis moved down may damage the
sample.
Since the accurate stage is mounted to the door, open/close the door slowly. If not so, the door may
be broken or the stage may be damaged.
Be sure not to pinch your hand at opening/closing the door. Otherwise it can cause injury.
In replenishing liquid nitrogen, the funnel and beaker are cooled to a very low temperature. Hold the
upper part of the funnel and the grip of the beaker.
Do not apply any force on the frozen funnel and beaker. They can be broken easily. If the funnel or
beaker is cracked, replace it with new one.
If liquid nitrogen overflows from the inlet, do not force the lid onto the inlet, and just wait for liquid
nitrogen to evaporate naturally.
Put nothing on the fan filter. If not so, the XGT-7000V may be damaged.
Points of concern
Use of the equipment in a manner not specified by the manufacturer may impair the protection
provided by the equipment. And it may also reduce equipment performance.
The product employs precision driving parts (XYZ stage) and a high-voltage power source for
X-ray. Therefore, exercise the following precautions:
z Use the product in an environment free from corrosive gas.
z Avoid using the product in a location close to equipment using strong electric power (such
as an electric furnace), or near a radio or sound wave source.
z Do not give a shock or large vibrations to the product. To move the product to another
location, contact our service or sales office.
z Avoid turning ON the power again immediately after turning it OFF.
z Since Windows XP is used, the specified procedure must be taken to shut off the power.
Read this instruction manual carefully, and follow the relevant instructions.
z Do not use the cord set (power cable) for other products than this system.
z Be sure to observe the cautionary matters written in this manual for handling this system.
Disposal of the product

When disposing of the product, follow the related laws and/or regulations of your country for
disposal of the product.
Description in this manual

Note
This interprets the necessary points for correct operation and notifies the important points for
handling the unit.
Reference
This indicates the part of where to refer the information.
Tip
This indicates reference information.
Contents
1
BEFORE USING THE XGT-7000V . . . . . . . . . . . . . . . . . . . . .
1.1
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.2
System configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.2.1
Appearance of the XGT-7000V . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Name and explanation of analysis unit . . . . . . . . . . . . . . . . . . . . .
1.3.1
1.3.2
1.3.3
1.3.4
1.3.5
Analysis unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Right side of analysis unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Indicator of analysis unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Operation panel of analysis unit . . . . . . . . . . . . . . . . . . . . . . . . . . . .
XGT controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3
4
5
7
8
1.4
Installation conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.5
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10
1.5.1
1.5.2
1.5.3
1.5.4
1.5.5
1.5.6
1.5.7
1.5.8
1.5.9
1.5.10
1.5.11
Modification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Power cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Physical shock (impact) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
User of XGT-7000V software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Power setting on PC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Installing other applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Handling of liquid and powder samples . . . . . . . . . . . . . . . . . . . . . . .
Handling liquid nitrogen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Connecting detector cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Vacuum pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10
10
10
10
10
10
10
10
11
11
11
Filling dewar with liquid nitrogen . . . . . . . . . . . . . . . . . . . . . . . . . .
12
BASIC OPERATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
13
2.1
Starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
13
2.2
How to shut-down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
14
2.3
Opening/closing sample chamber door . . . . . . . . . . . . . . . . . . . .
15
SAMPLE SETUP AND VACUUMING . . . . . . . . . . . . . . . . . . .
16
3.1
Mounting sample . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
16
3.1.1
3.1.2
3.1.3
3.1.4
3.1.5
3.1.6
3.1.7
Samples with a thickness of less than 15 mm . . . . . . . . . . . . . . . . . .

Samples with a thickness of 15 mm to 33 mm . . . . . . . . . . . . . . . . .
Samples with low-contrast transmission X-ray . . . . . . . . . . . . . . . . .
Transmitted X-ray Filter Insertion . . . . . . . . . . . . . . . . . . . . . . . . . . .
16
18
20
22
24
26
27
3.2
Evacuating the analysis probe and sample chamber . . . . . . . . . .
28
3.3
Adjustment of Optical Image Window . . . . . . . . . . . . . . . . . . . . . .
29
1.3
1.6
3.3.1
3.3.2
3.3.3
3.3.4
Setting of X-ray applied position . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Compensate stage moving distance . . . . . . . . . . . . . . . . . . . . . . . . .
Whole image position calibration . . . . . . . . . . . . . . . . . . . . . . . . . . .
Adjustment of height standard line . . . . . . . . . . . . . . . . . . . . . . . . . .
29
31
31
31
MAINTENANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
32
4.1
Replenishing liquid nitrogen . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
33
4.2
Checking vacuum condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
36
4.2.1
4.2.2
Checking vacuum condition of the analysis probe . . . . . . . . . . . . . .

Checking vacuum condition of the sample chamber . . . . . . . . . . . .
36
36
4.3
Checking X-ray generator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
37
4.4
Checking vacuum condition of sample chamber . . . . . . . . . . . . .
37
4.5
Applying grease to the XY stage . . . . . . . . . . . . . . . . . . . . . . . . .
38
4.6
Replacing the X-ray indicator (X-RAYS ON) lamp . . . . . . . . . . . .
39
4.7
Cleaning the fan filters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
40
4.8
Analysis probe window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
41
4.8.1
4.8.2
Installation procedure for analysis probe window . . . . . . . . . . . . . . .

How to remove the analysis probe window . . . . . . . . . . . . . . . . . . .
41
43
TROUBLESHOOTING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
44
5.1
Alarm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
44
5.2
Power supply troubles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
45
5.3
Operation troubles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
46
5.4
Other troubles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
47
APPENDIX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
48
6.1
Measurement Principles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
48
6.2
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
51
6.2.1
6.2.2
6.2.3
6.2.4
6.2.5
6.2.6
Analyzer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Data processor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Ambient conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Power source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Mass . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
51
52
53
53
53
53
Wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
54
6.3
ACCESSORIES. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
56
1 BEFORE USING THE XGT-7000V
BEFORE USING THE XGT-7000V
1.1
Overview
The XGT-7000V X-Ray Analytical Microscope has been designed to simultaneously measure
and analyze the transmitted X-ray image, fluorescent X-ray image, and X-ray spectrum of a
sample. The XGT-7000V allows you to analyze the elements contained in a sample
(qualitative analysis) and the content of a certain element (quantitative analysis). It is also
capable of analyzing the inner structure of a sample using transmitted X-rays as well as
analyzing the distribution of elements using the mapping function. By using the X-ray Guide
Tube (XGT), the X-ray can be narrowed down without reducing the intensity, enabling a
microanalysis in a shorter time.
Instead of using a conventional detector that must be cooled with liquid nitrogen to prevent
lithium from spreading, the XGT-7000V uses a high-purity silicon detector called XEROPHY.
Since liquid nitrogen needs to be filled only when a measurement is performed, there is
substantial labor savings in both handling and maintenance.
The software installed in the XGT-7000V is compatible with Microsoft Windows, so that
anybody can operate it.
A handy clipboard enables spectrums, analysis results, images and other data to be
transferred to other Microsoft Windows-compatible applications.
1.2
System configuration
1.2.1
Appearance of the XGT-7000V

XGT-7000V consists of the following units.
Analysis unit:
radiates X-rays to the sample and then detects the emitted fluorescent
X-rays with its semiconductor type detector.
Personal computer: control the measurement operations and display, save, or access the
collected data.
Data processor:
processes the measured signals sent from the detector.
XGT controller:
is a control device for manually moving the sample stage in the X-Ydirection. A power switch and emergency stop switch for the XGT are
also incorporated.
Printer:
prints out a hard copy of the data.
Vacuum pump:
produces vacuum for surrounding section of detector and sample
chamber.
Analysis unit
Data
processor
Personal
computer
Display
Printer
XGT controller
Vacuum pump
Fig. 1 View of the XGT-7000V

Names and explanation of analysis unit
1.3
Name and explanation of analysis unit
1.3.1
Analysis unit
Fig. 2 Analysis unit

1
Indicator lamp
Operation panel of analysis

unit
Handle for chamber open/

close
Sample chamber door unlock

levers
Indicates the state of XGT-7000V.

1.3.3 Indicator of analysis unit (page 5).
It is equipped with a timer, dimming control, and vacuum leak switch.
For more information, refer to 1.3.4 Operation panel of analysis unit
(page 7).
While pulling down the sample chamber door unlock levers, pull the
both handles toward you. The sample chamber door will open. The
door will start moving down after pulling it fully to the front. To close the
door, lift the door to the point where it can move horizontally, and then
slide the door toward the back until it is locked.
Pulling down these levers at the both sides unlocks the sample
chamber door.
1.3.2
Right side of analysis unit
Fig. 3 Right side of analysis unit

5
XYZ stage
Sample holder
This is a unit to move the sample into 3 axis directions.

This is a holder to set samples. It is necessary to change the holder
height depending on the sample height.
Reference
Refer to 3.1 Mounting sample (page 16).
7
8
9
Whole image observation

camera
Detailed image observation
camera
Sample height adjustment
camera
10 Vacuum piping interface
The whole image observation camera is a CCD camera to display the

whole image of the sample in optical image window.
The detailed image observation camera is a CCD camera to display
the magnified image of the sample in optical image window.
The sample height adjustment camera is a camera to adjust sample
height.
For vacuuming, connect the part to vacuum pump with metal flexible
tube.
1.3.3
Indicator of analysis unit
Fig. 4 Indicator of analysis unit
11
Liquid nitrogen (LN) check

lamp
A lamp to indicate the remained volume of liquid nitrogen and the

detector state.
Green lamp lit: liquid nitrogen left
Red lamp lit: No liquid nitrogen left, detector is not returned to room
temperature
Orange lamp lit: No liquid nitrogen left, detector is at room temperature
Note
When there is no liquid nitrogen left, replenish it by referring to 4.1 Replenishing liquid nitrogen
(page 33).
12
X-ray circuitry reset button

ERR)
13 X-ray indicator (X-RAYS ON)
This is the lamp to be lit when an error has occurred.

It illuminates when the equipment cannot be vacuumed within a set
time or no X-rays are generated.
When the lamp is lit, troubleshoot it referring to 5
TROUBLESHOOTING (page 44).
The X-ray indicator lights up when X-rays are being radiated. This
indicator is linked to the open-close switch for the sample chamber
cover and to the start/stop of the measurement.
When this indicator dies, X-ray is not generated any longer. As long as
the indicator is normal, pressing the switch will make the indicator lit. If
pressing the switch does not make the indicator lit, replace the
indicator because it is out of operation.
CAUTION
If the X-ray indicator remains lit even when the sample chamber cover is open (to insert a sample or
for any other reason), discontinue use of the XGT-7000V immediately, to prevent possible damage to
hands or fingers inside the chamber.
Note
Do not press the switch when the X-ray indicator light is on. The X-ray stops generating and
measurement stops.
Vacuum pump switch/Vacuum A switch to turn ON/OFF the vacuum pump to evacuate the chamber.
14 indicator for chamber
The color changes depending on the status of the equipment. Refer to
(VAC C)
Table 1 for details.
Note
Generally, the lamp turns to green (vacuum status) with approx. 2 minutes.
If the vacuum pump switch/vacuum indicator (VAC) for chamber does not turn to green even after 3
minutes have passed since the vacuum pump was turned ON, the pump is automatically turned OFF
also. In those situations, refer to 5 TROUBLESHOOTING (page 44).
A switch to turn ON/OFF the vacuum pump to evacuate the surroundVacuum pump switch/Vacuum
ings of XGT and Si detector.
15 indicator for analysis probe
The color changes depending on the status of the equipment. Refer to
(VAC P)
Table 1 for details.
Note
Generally, the lamp turns to green (vacuum status) with approx. 10 seconds.
Table 1 Status of the vacuum indicator

Switch
Color of indicator
Green
Under vacuum pressure
Red
Under normal pressure

The pump does not start operating even if you press
the button. This status is caused by the following:
z The lid of the sample chamber is open.
z The analysis probe window has been installed.
z The vacuum leak switch is set to AIR.
Orange

The vacuum pump starts operating by pressing the
button. It will turn green when the equipment has
reached a vacuum.
VAC C
Green
Under vacuum pressure
Red

The pump does not start operating even if you press
the button. This status is caused by the following:
z No analysis probe window has been installed.
z The vacuum leak switch is set to AIR.
Orange

The vacuum pump starts operating by pressing the
button. It will turn green when the equipment has
reached a vacuum.
VAC P
Status
1.3.4
Operation panel of analysis unit
Fig. 5 Operation panel of analysis unit

16 Hour meter
17 Vacuum leak switch
The hour meter lets you to see the operating hours of the X-ray generator.
The vacuum leak switch is the switch with a lock which returns the
pressure around the XGT and the Si detector to air pressure. If this
switch is turned upwards, the pressure returns to air pressure with the
solenoid valve open.
Pull down the edge of the toggle before switching the switch.
Note
Be sure to turn OFF the vacuum pump before operation. Check that this switch is turned downwards
before turning ON the vacuum pump.
Whole image illumination

volume
Detailed image illumination
19
volume
18
20 Transmit illumination volume

21
Sample chamber illumination

volume
The whole image illumination volume is a control volume to adjust

brightness of the entire images.
The detailed image illumination volume is a control volume to adjust
brightness of the minute images.
The transmit illumination volume is a control volume to adjust
brightness in observing the detailed images by transmitted
illumination.
The sample chamber illumination volume allows you to control the
brightness in the sample chamber.
1.3.5
XGT controller
Emergency stop switch
Power switch (key switch)
Z-axis stage operation switch
This switch is used to pause the operation of the equipment when it is

malfunctioning. Pressing this button causes power shutdown and
emergency stop of the analysis unit. To restart it, turn OFF the power
switch, return the button to the original state by rotating the red flange,
and then turn ON the power switch. And reboot the PC.
This is the key switch for turning ON the equipment power.
Turning it to the back turns ON the power while turning it to the front
turns OFF the power.
This is the switch for moving the sample stage up and down. With the
switch at the top of the lever pressed down, the stage goes up by tilting
the lever toward the back and goes down by tilting the lever toward the
front.
The more the lever is tilted, the faster the stage moves. If the switch at
the top of the lever is released, the stage stops moving regardless of
the angle of the lever.
Note
Move the stage while checking with eyes. Do not move up the stage once the detailed image is
focused, as that position is the upper limit of the movement. Otherwise, the sample and/or
equipment may be damaged.
XY axes stage operation

switch
This switch is used for manually moving the sample stage right and left
(X-axis) as well as front and back (Y-axis). The more the lever is tilted,
the faster the stage moves.
Note
If the key is lost, you can no longer start up the equipment. Take maximum care for it.
Please contact us when you lost it. We will reissue it.
1.4
Installation conditions
To enable the proper use of the XGT-7000V, pay attention to the following installation
conditions.
Temperature
z Operating temperature: 5C to 40C
z Temperature to guarantee performance: 10C to 35C
Note
The effects of ambient temperature may alter image position. Minimize fluctuation of ambient
temperature to within 3C when measuring minute areas.
When the equipment is continuously used at temperatures of 35C or higher, lower the tube current
and tube voltage so that the temperature of the X-ray tube will not rise too high.
When the equipment is used at temperatures of 10C or lower, it takes more time to evacuate the
equipment. If the evacuation has failed to finish by the set time with the ERR lamp illuminated, press
the ERR lamp to cancel the error and reactivate the vacuum pump.
Humidity
z Maximum relative humidity 80% for temperatures up to 31C from 5C decreasing linearly
to 50 relative humidity at 40C.
Power
z Voltage: Single phase,100 V, 120 V, 220 V, 240 V AC 10%
z Frequency: 50 Hz/60 Hz 1.0%
z Power consumption: Below 1.5 kVA (60 Hz), Below 1.8 kVA (50 Hz)
(Including vacuum pump, but excluding PC, LCD, and printer)
Note
z If using in a different power supply voltage from the time of shipment, contact the nearest
HORIBA sales representatives.

z Prepare 1 set of AC 3 P plug. Refer to Fig. 15 Wiring (XGT-7000V) (page 55).
z To prevent electric shock, ground the XGT-7000V.
Installation space
2.4 m 1.3 m or wider
(Leave approximately one additional meter of space around the periphery of the XGT-7000V
to allow for maintenance work.)
Note
z The total mass of this unit is about 260 kg. Install the XGT-7000V in a horizontal and solid
location.
z Vibration may cause a jumbled image. Install the XGT-7000V in a vibration-free location.
1.5
Precautions
1.5.1
Modification
Do not disassemble or modify the internal workings of the XGT-7000V.
1.5.2
Power cable
Do not use the power code that comes with the product for other instruments.
1.5.3
Grounding
WARNING
Electric Shock
To prevent electric shock, ground this unit.
However, never ground it using a hazardous medium such as gas pipe.
To prevent electric shock and to ensure proper performance of the XGT-7000V, be sure the
system is grounded.
1.5.4
Physical shock (impact)

Ensure that the analyzer receives no external shock.
Do not allow the analyzer to experience strong shock from external sources. The inner surface
of the liquid nitrogen filler port is especially delicate, so use special care when filling the dewar
with liquid nitrogen.
The personal computer has a built-in hard disk. Hard disks are sensitive to shock, so use
sufficient care around this unit.
1.5.5
User of XGT-7000V software

This software should be used by the user authorized as Administrator.
1.5.6
Power setting on PC
Set the power supply setting to "System standby: No" in the control panel. Otherwise, it may
cause the XGT-7000V to malfunction.
1.5.7
Installing other applications

The operation of the XGT-7000V cannot be guaranteed if software applications other than the
XGT-7000V application are installed. If the XGT-7000V does not operate well with another
software application, discontinue the use of that application.
1.5.8
Handling of liquid and powder samples

DO NOT vacuum the sample chamber when a liquid or powder sample is measured.
Otherwise, it may spray the sample in the chamber, causing the breakdown of the equipment.
When measuring such samples, be sure to install an analysis probe window.
10
1.5.9
Handling liquid nitrogen

WARNING
Extremely Low Temperature (-196C)
When replenishing liquid nitrogen (-196C), make sure to wear safety glasses and thermal insulated
Oxygen Deficiency
CAUTION
1.5.10 Connecting detector cables

There are proper procedures for connecting and disconnecting the detector cables from the
analyzer and from the detector. If these procedures are not followed correctly, the detector
may be damaged. Refer to Fig. 15 Wiring (XGT-7000V) (page 55).
1.5.11 Vacuum pump

Do not keep running the pump with air open as it may cause the malfunction.
11
1.6
Filling dewar with liquid nitrogen

To check the remained volume of the liquid nitrogen, Liquid nitrogen (LN) check lamp
(page 5) of the analysis unit explanation.
Liquid nitrogen can cause frostbite and suffocation. Use with sufficient care when handling
liquid nitrogen. Be sure to read 1.5.8 Handling of liquid and powder samples (page 10),
before filling the dewar with liquid nitrogen.
When no liquid nitrogen is left, the liquid nitrogen (LN) check lamp changes from green lamp
to red lamp. When the detector becomes at room temperature, the orange lamp lights.
When the orange lamp is lit, turn off the power of the whole system and replenish the liquid
nitrogen. Wait for more than an hour and then turn on the power of the whole system.
If the elapsed time is within an hour after the red lamp is lit, turn off the power of the whole
system and replenish the liquid nitrogen. The system will be ready to use after waiting for
approximately 30 minutes.
If the elapsed time is more than an hour after the red lamp is lit, wait until the orange lamp
lights and then replenish the liquid nitrogen.
It takes about 10 hours to change from red light to orange light (the time differs by ambient
temperature). If the analyzer is used in high frequency, we recommend to replenish the liquid
nitrogen on every third day of operation before the liquid nitrogen runs out.
The capacity of the dewar is 3 L. The consumption of the liquid nitrogen is 1 L per day
maximum.
At continuous measurements, replenish the liquid nitrogen at least every three days is
recommended.
Note
Even if the elapsed time is more than an hour after the red lamp is lighted, the liquid nitrogen can be
replenished and be used before the lamp changes to orange.
However, ice may form inside the dewar tank (the amount of ice depends on the water content of
liquid nitrogen and the ambient humidity).
When ice forms inside the Dewar tank, the detector element cannot be cooled. An electrical noise
will be generated because the small parts of ice move inside the dewar tank. This may cause a
temporary decline in the performance of energy resolution.
As to the above, we recommend to resupply liquid nitrogen after the lamp turns to orange.
If the decline of performance happens in energy resolution, return the Dewar tank to room
temperature and remove all water content from inside the tank. Then replenish with liquid nitrogen
again.
The Xerophy detector has a built-in protection circuit that prevents damage to the detector
even if the power of the unit is turned ON with no liquid nitrogen in the detector.
Reference
If no liquid nitrogen is remained, replenish by referring to 4.1 Replenishing liquid nitrogen (page
33).
12
2 BASIC OPERATIONS
BASIC OPERATIONS
2.1
Starting
Before turning the power ON, check the following points:
z Is the detector filled with liquid nitrogen?
Fill the detector with liquid nitrogen at least one hour before starting the analysis. The
detector does not function without liquid nitrogen.
z Is the consumption of liquid nitrogen increasing?
If the detector malfunctions and the amount of internal vacuum deteriorates, the
consumption of liquid nitrogen will increase. (e.g., Although the dewar was full the
previous day, it became empty the following day.) When this occurs, stop using XGT7000V and contact the nearest HORIBA sales representatives.
z The ambient temperature must no exceed the guaranteed operating temperature.
Operation procedure
1. Turn ON the key switch for the XGT controller.
Power is ON for analyzing unit, data processing unit, vacuum pump, and printer.
2. Turn ON the power switch located on the personal computer.
Windows starts up.
3. Click the program start up menu and select Horiba and XGT-7000V.
XGT-7000V starts up.
4. Select Spectrum
ple
or Mapping
button on Navigator and click Sam-
button.
5. Click Origin Search
button.
Origin Search dialog box appears.
6. Click on the OK button.

The origin search is performed.
7. Measure the provided copper plate and perform the warm-up operation.
Set the provided copper plate to the XGT-7000V and perform the measurement with the
measurement conditions of X-ray tube vol. 50 kV, Current 1 mA, Process time 1, and
10 mXGT for approx. 1000 seconds.
Reference
For how to operate the software, refer to the help documentation that comes with the software.
13
2 BASIC OPERATIONS
2.2
How to shut-down
Q
Exiting XGT-7000V program

Terminate the XGT program by performing the following steps, returning to the Windows
screen:
1. Click on the
button in the upper right corner of the title bar in the Spectrum
window.
2. Quit Windows after shutdown of the program.
Turning OFF XGT-7000V power switch

1. Turn OFF the key switch.
Note
Turning OFF the power when still accessing a floppy or hard disk may damage the disk.
14
2 BASIC OPERATIONS
2.3
Opening/closing sample chamber door

The locking mechanism is provided for the sample chamber door of XGT-7000V taking the
safety into consideration.
To open the door, therefore, it is necessary to pull down the sample chamber door unlock
lever.
2. Pull toward you.
1. Pull down the unlock lever toward you.
3. Push down.
4. Lift it horizontally and push it
until you hear a click sound.
When opening the sample chamber door:

1. While pulling down the sample chamber door unlock levers, pull the sample
chamber door toward you.
2. After pulling the sample chamber door to the front, push it downward.
When closing the sample chamber door:
1. Hold the handles with both hands, lift the sample chamber door to the point where
it can move horizontally, and then push it toward the back.
2. Push it until you hear a click sound.
Note
Both the right and left lock levers must be unlocked.
Be careful not to pinch the hand when you lower it.
15
3 SAMPLE SETUP AND VACUUMING
SAMPLE SETUP AND VACUUMING
3.1
Mounting sample
The XGT-7000V is capable of measuring samples with a thickness of up to 100 mm using the
20-mm-thick sample holders.
Note
To measure a sample with an uneven surface, focus the highest portion of the surface and never lift
the probe any more. Otherwise, the analysis probe may come into contact with the sample.
3.1.1
Samples with a thickness of less than 15 mm

Use sample mounting tray P and four sample holders.
Operation procedure
1. Affix the sample onto sample mounting tray P using tapes such as carbon tape and
dual-sided adhesive tape.
Be sure the surface of sample is as horizontal as possible.
2. Mount sample mounting tray P onto a sample holder and secure it with the four
screws.
3. Mount the sample holder that contains the sample mounting tray onto the other
three holders that have been piled up.
4. Click the [Move to sample exchange position] in the Sample window of the XGT7000V software.
The XYZ stage will move toward you.
5. Open the sample chamber door of the analysis unit.
6. Pull down the Z stage operation switch and lower the XYZ stage to the bottom.
16
7. Mount the sample holders on the XYZ stage and secure it with the knurl screws at
the front and the right side.
8. Close the sample chamber door.
9. Click the [Height regulation camera] button in the Sample window of the XGT-7000V
software.
The view is switched to that of the height regulation camera and the sample is shown on
the screen.
10. Adjust the height of the stage using the stage Z axis precision feed switch so that
the highest point of the sample comes under the standard line for height.
11. Click the [Whole Image] in the Sample window of the XGT-7000V software.
Confirm that the whole image of the sample is displayed on the screen.
Top of XY stage
Sample holder
Screws
17
3.1.2
Samples with a thickness of 15 mm to 33 mm

Use sample mounting tray P and three sample holders.
Operation procedure
screws.
3. Mount the sample holder that contains the sample mounting tray onto the other two
holders that have been piled up.
software.
the screen.
18
Top of XY stage
Sample holder
Screws
19
3.1.3

Use sample mounting tray P and two sample holders.
Operation procedure
screws.
3. Mount the sample holder that contains the sample mounting tray onto the other
holder.
software.
the screen.
20
Top of XY stage
Sample holder
Screws
21
3.1.4

Use sample mounting tray P and one sample holder.
Operation procedure
screws.
software.
the screen.
22
Top of XY stage
Sample holder
Screws
23
3.1.5

Use sample mounting tray P and one sample holder.
Operation procedure
screws.
5. Secure the sample holder with the knurl screws at the front and the right side with
the sample mounting tray placed at the bottom.
6. Mount the sample.
software.
the screen.
24
Top of XY stage
Sample holder
Screws
25
3.1.6
Samples with low-contrast transmission X-ray

When you analyze a very thin sample or one susceptible to the influence from acrylic sample
mounting tray in terms of X-ray absorption, use sample mounting tray L.
How to affix the sample

1. Affix the X-ray transmission film on the center hole (50 mm square) of sample
mounting tray L using tapes.
2. Affix the sample onto the center of the X-ray transmission film using tapes such as
carbon tape and two-sided adhesive tape.
Sample holder
Use different sample holders for samples with different thicknesses as shown below.
Note
Sample holders need to be changed according to the thickness of the sample due to the limitation of
the stage stroke in Z-axis.
26
3.1.7
Transmitted X-ray Filter Insertion

When a transmitted X-ray image is reversed, insert a transmitted X-ray filter.
Note
z Normally, remove the transmitted X-ray filter when using.
z When the reversed image does not improve even by transmitted X-ray filter insertion, decrease
the current value to obtain a good image. Refer to the help documentation for how to adjust the
current value.
Operating procedure
1. Open the chamber door.
2. Push the changeover knob shown in Fig. X toward the stage side.
3. When removing the transmitted X-ray filter, pull the changeover knob in the
opposite direction of the stage.
Transmitted X-ray filter
Changeover knob
When taking it off

When inserting it
Fig. 6 Changing the transmitted X-ray filter (Figure showing the XGT with the filter inserted)
27
3.2
Evacuating the analysis probe and sample chamber

Evacuating the analysis probe and sample chamber produces a vacuum around the sample,
making light elements (11Na to 13Al) detectable.
Operation procedure
1. Check that either one of the vacuum pump switch/vacuum indicator (VAC) for
analysis probe or chamber is lit in orange.
The vacuum indicator for the analysis probe is lit in orange when the vacuum holding film
is used, while the vacuum indicator for the chamber is lit when no vacuum holding film is
used.
Note
No indicator will illuminate in orange when the vacuum leak switch is set to the AIR side or the
sample chamber door is not fully closed. When both the indicators are lit in red, check both the
vacuum leak switch and the sample chamber door.
2. Press the vacuum pump switch lit in orange.

The vacuum pump will turn ON and start vacuuming. The vacuum pump turns OFF if you
press the switch once again.
Note
z If the vacuum pump switch/vacuum indicator (VAC) for analysis probe does not turn to green
even after 30 seconds have passed since the vacuum pump was turned ON, the pump is
automatically turned OFF. If the vacuum pump switch/vacuum indicator (VAC) for chamber does
not turn to green even after 3 minutes have passed since the vacuum pump was turned ON, the
pump is automatically turned OFF also. In those situations, refer to 5 TROUBLESHOOTING
(page 44).
Once the analysis probe is vacuumed, it will not return to the atmospheric pressure unless the
vacuum leak switch is used. To return it to the atmospheric pressure in cases where the
analysis probe window is removed or X-ray transmission film is replaced, pull the top of the
vacuum leak switch toggle upward and then push down the switch upward.
Note
DO NOT vacuum the sample chamber when a liquid or powder sample is measured. Otherwise, it may
spray the sample in the chamber, causing the breakdown of the equipment. When measuring such
samples, be sure to install an analysis probe window.
28
3.3
Adjustment of Optical Image Window
3.3.1
Setting of X-ray applied position

This is the setting which the actual X-ray applied position corresponds to the crossing point of
the cross maker to show the applied position. Perform the setting when there is a gap
between the crossing point of the cross maker and X-ray applied position.
For the detailed explanation on the operating procedure, refer to the help documentation.
Operation procedure
For 10 m XGT:
1. Set the sample for calibration of X-ray applied position and adjust the focus.
2. Move the stage so that the center of the hole to adjust XGT which diameter is 10 m
corresponds to the cross point of cross marker indicating the X-ray applied
position.
Adjustment for XGT

with diameter of 10 m
Adjustment for XGT

with diameter of 100 m
Slit with 105 m + 5 m width

(horizontal/vertical)
part is W: formation membrane part of tungsten)
45 m 5 m dia. hole
(
Fig. 7 Magnified image of calibration sample
29
3. Map the calibration sample for irradiation position using the following conditions.
XGT diameter:
X-ray tube voltage:
X-ray tube current:
Repeatability:
Live time:
Pixels:
Width:
10 m
50 kV
1 mA
1
200 seconds
256 pixels 256 pixels
0.512 mm
4. Move the X-ray applied position to the center point of the calibration sample for
irradiation position based on the acquired image.
5. Adjust the X-ray applied position in accordance with the settings of [Option] - [Setting of Video Windows].
For 100 m XGT:
1. Perform the same procedure with 10 m XGT. Set the sample for calibration of Xray applied position. Move the stage so that the center of the hole to adjust XGT
which diameter is 100 m corresponds to the cross point of cross marker
indicating the X-ray applied position.
2. Perform the operation by following the same procedure of 10 m XGT.
XGT diameter:
X-ray tube voltage:
X-ray tube current:
Repeatability:
Live time:
Pixels:
Width:
30
100 m
15 kV
1 mA
1
200 seconds
256 pixels 256 pixels
0.512 mm
3.3.2
Compensate stage moving distance

The followings are the explanation of how to calibrate the actual stage moving distance in
accordance with the distance on the optical microscope image.
For the explanation on the operating procedure, refer to the help documentation.
3.3.3
Whole image position calibration

This compensates the image position moving by clicking the [Whole image] button.
Note
Before executing this function, set the whole image calibration sample, switch to the detailed image
and focus the camera.
3.3.4
Adjustment of height standard line

The following is the adjustment procedure of height standard line displayed in adjusting the
height.
31
4 MAINTENANCE
MAINTENANCE
In order to use the unit in good accuracy, periodical maintenance is needed.
Check item
32
Maintenance period
Note
Replenishing liquid nitrogen
Daily
page 33
Checking vacuum condition
Daily
page 36
Checking X-ray generator
Monthly
page 37
Checking vacuum pump oil level
Every 3 months
page 37
Cleaning the fan filters
Every 6 months
page 40
Replacing vacuum pump oil
Every year
page 37
Applying grease to the XY stage
Once a year
(recommended)
page 38
Replacing the X-ray indicator (X-RAYS ON) lamp
When the lamp burns

out
page 39
Replacing the analysis probe window
When the film breaks
page 41
4 MAINTENANCE
4.1
Replenishing liquid nitrogen

WARNING
Extremely Low Temperature (-196 )
When replenishing liquid nitrogen (-196 ), make sure to wear safety glasses and thermal insulated
Oxygen Deficiency
CAUTION
For the replenish of liquid nitrogen, be sure to check the color of the liquid nitrogen (LN) check
lamp. Liquid nitrogen (LN) check lamp (page 5).
Operation procedure
1. Remove the stopper cap of the liquid nitrogen holding vessel on the top surface of
the rear of the analysis unit.
33
4 MAINTENANCE
2. Insert the special funnel exclusive for replenishing liquid nitrogen into the opening
with the overflow hose draped on the left side of analysis unit.
3. Press gently the rubber part of the funnel so that it may block the opening fully.
4. Place the beaker under the end of the overflow hose to catch any excess liquid
nitrogen.
The beaker is intended only to prevent the overflow from spattering on the floor.
Do not use it to replenish liquid nitrogen.
34
4 MAINTENANCE
5. Supply liquid nitrogen.

Use an insulated container to carry liquid nitrogen and supply it until it reaches the upper
level marked on the funnel.
6. Stop pouring in liquid nitrogen when it has started coming out of the overflow hose
and into the beaker. Do not remove the funnel until all liquid nitrogen has drained
out of it.
CAUTION
In replenishing liquid nitrogen, the funnel and beaker are cooled to a very low temperature. Hold the
upper part of the funnel and the grip of the beaker.
Do not apply any force on the frozen funnel and beaker. They can be broken easily. If the funnel or
beaker is cracked, replace it with new one.
If liquid nitrogen overflows from the inlet, do not force the lid onto the inlet, and just wait for liquid
nitrogen to evaporate naturally.
35
4 MAINTENANCE
4.2
Checking vacuum condition
4.2.1
Checking vacuum condition of the analysis probe
Meaning of lamp color:

Green lamp lit: vacuum condition
Red lamp lit: not ready for vacuuming
Orange lamp lit: ready for vacuuming
The vacuuming for the analysis probe cannot be done without the X-ray window mounted.
Before vacuuming, check that the X-ray window is mounted and the lamp turns in orange.
Before measuring a sample, check that the analysis probe is evacuated (vacuuming) by
turning ON the vacuum switch for analysis probe. When the XGT-7000V is in normal status,
the lamp color will change to green (Vacuum status) with approx. 10 seconds.
If the probe is not evacuated, or the VAC lamp continues lighting red, perform the operations
of 4.6 Replacing the X-ray indicator (X-RAYS ON) lamp (page 39) and 4.4 Checking
vacuum condition of sample chamber (page 37).
Note
X-ray transmission film is resin, and it is damaged from an X-ray.
Replace the film regularly, once a week for continuous operation.
4.2.2
Checking vacuum condition of the sample chamber
Meaning of lamp color:

Green lamp lit: vacuum condition
Red lamp lit: not ready for vacuuming
Orange lamp lit: ready for vacuuming
The vacuuming for the sample chamber cannot be done with the X-ray window mounted.
Before vacuuming, check that the X-ray window is removed and the lamp turns in orange.
(Vacuuming the sample chamber simultaneously evacuates inside the analysis probe.)
Before measuring a sample, check that the sample chamber is evacuated (vacuuming) by
turning ON the vacuum switch for analysis probe. When the XGT-7000V is in normal status,
the lamp color will change to green (Vacuum status) with approx. 2 minutes.
36
4 MAINTENANCE
If the chamber is not evacuated, perform the operations described in 4.4 Checking vacuum
condition of sample chamber (page 37) .
4.3
Checking X-ray generator

Check the time shown by the hour meter located on the front of the analysis unit (refer to
Hour meter (page 7)).
The lifetime of the X-ray generator depends on the conditions. Prepare for the replacement of
the X-ray generator when the elapsed operating time is either (shorter) one of approximately
2000 hours or 1 year. And contact the nearest HORIBA sales representatives before
performing the replacement.
4.4
Checking vacuum condition of sample chamber

If the vacuum pump oil level is too low, the degree of vacuum cannot increase. If the vacuum
pump oil level is too high, oil may be expelled from the exhaust tube. Check the oil level in
order to maintain an appropriate degree of vacuum.
Note
The vacuum pump oil is an expendable item. Replace the oil every 1 year.
For how to replace it, refer to the instruction manual for the vacuum pump.
Fig. 8 Checking vacuum pump oil

There is an oil level gauge on the front of the vacuum pump.
Check to make sure that the oil level can be seen inside the red circle.
When the oil level is below the red circle, remove the oil mist trap and supply pump oil.
Before checking the oil level, make sure the pump is stopped and the pump suction mouth is
in atmospheric pressure.
37
4 MAINTENANCE
4.5
Applying grease to the XY stage

The XY Stage needs regular greasing. (Recommended interval: Once a year)
Note
When applying grease to the XY stage, contact us.
38
4 MAINTENANCE
4.6
Replacing the X-ray indicator (X-RAYS ON) lamp

When the X-RAYS ON lamp (see page 4) is blown-out, replace it using the lamp replacement
kit (P/N: 9038002700). The life of the lamp is approximately 10,000 hours.
Note
Be sure to turn off the power switch on the front before replacing the lamp.
1. Hold the concave portion of the lamp lens and pull it to remove the lens.
2. Insert the attached standard lamp set (screwdriver) into the square-hole portion on
top of the lamp holder and pull the lamp holder to remove it.
Pull the lamp downward from the holder to remove it.
3. Pull out the lamp from the lamp holder.
4. Insert a new lamp into the holder and mount the lamp holder to the main body.
When mounting the lamp holder, align the direction of metal bracket in the main body with
that of square-hole portion of the lamp holder, press the root of the lamp holder (around
the lamp) downward using the screwdriver, and lock the square-hole portion to the lug of
the metal bracket.
5. Push the lens of the lamp into the main body.

When mounting the lens, push it in while aligning the concaved portion of lens rear side
with the position of lug of the main body.
39
4 MAINTENANCE
4.7
Cleaning the fan filters

Detach the filters from the top and back of the XGT to clean them by removing the dirt using a
vacuum cleaner every six months or so. Wash them with water once a year or so. (After the
wash, be sure to dry them before reinstalling them.)
Note
The cleaning intervals for the filters depend on the service conditions. The guidelines above assume
that the degree of dirt is similar to the one for office furniture.
Filter on top
Filter at rear
40
4 MAINTENANCE
4.8
Analysis probe window

The analysis probe window is used for measurements in which only the analysis probe is
vacuumed.
When analyzing a sample in the air, install the analysis probe window, and then vacuum only
the analysis probe for analysis. When analyzing a sample in a vacuum, remove the analysis
probe window, and then vacuum the entire sample chamber for analysis.
4.8.1
Installation procedure for analysis probe window

Operating procedure
1. Place the X-ray transmission film on the X-ray transmission film holder, and screw
the locking rings with O-rings to assemble the analysis probe window.
Use this procedure also when replacing the X-ray transmission film.
Fig. 9 Assembling the analysis probe window
Note
z Use an X-ray transmission film (diameter: 64 mm - part No. 9068001000). No cell window
(diameter: 80 mm; part No. 9038000200) is applicable.

z The X-ray transmission film holder has 6 screw holes, two times the number of screws used to
fasten the X-ray transmission film securing ring. This allows the X-ray transmission film
securing ring to be alternatively fastened in the completely opposite orientation. Whichever 3
screw holes may be used to fasten the ring.
41
4 MAINTENANCE
2. Insert the analysis probe window into the analysis probe with the window oriented
to fit the installation jaws of the probe.
Analysis probe
window installation
jaw
Fig. 10 Analysis probe window
3. Turn the analysis probe window approximately 45 degrees until it hits the end.
Top in the sample chamber
X-ray transmission
film holder
4. After turning the vacuum leak switch to the VAC side, turn ON the vacuum pump,
and then check that the vacuum indicator is lit in green.
Note
If the vacuum indicator is not illuminated in green, remove the X-ray transmission film holder and
reassemble it. If the O-ring is found to have any flaw, replace it with the spare O-ring.
If the above action does not solve the problem, contact the nearest HORIBA sales representative.
42
4 MAINTENANCE
4.8.2
How to remove the analysis probe window

Operating procedure
1. Turn OFF the vacuum pump, turn the vacuum leak switch to the AIR side, and then
turn OFF the XGT after one minute or so.
2. Hold the analysis probe window, and turn it approximately 45 degrees until it hits
the end.
3. Pull the analysis probe window downward to remove it.
4. Flip over the probe window, loosen the screws (3 pieces) on the film securing ring,
and then remove the ring.
5. Remove the X-ray transmission film and clean the holder.

It is not necessary to apply grease to the O-ring.
6. Turn the vacuum leak switch to the VAC side.
Note
The XGT cannot be vacuumed with the vacuum leak switch set to the AIR side.
Be sure to return the switch to the VAC side after removing the window.
43
5 TROUBLESHOOTING
TROUBLESHOOTING
5.1
Alarm
Alarm
Countermeasures
When the equipment has failed to reach a vacuum by the set time with the ERR
lamp lit, troubleshoot it referring to Vacuum is not achieved. in 5.4 Other troubles (page 47).
When the ERR lamp is lit due to a problem not related to the vacuum condition,
press the X-ray ON lamp (X-RAYS ON) switch.
If the X-ray indicator lamp does not light, the lamp is out. Replace the lamp.
The ERR alarm is lit.
Reference
4.6 Replacing the X-ray indicator (X-RAYS ON) lamp (page 39)
If you can perform the measurement normally, there is no problem.
Press the reset button and wait for one minute. If the alarm lights up again soon,
there may be a mechanical problem. Contact the nearest HORIBA sales
representatives.
This alarm is output if the detector is not cooled enough when the power is turned
ON.
The cooling condition of the detector can be checked by the liquid nitrogen (LN)
check lamp of the analysis unit. If the lamp is green, the detector is cooled
The hardware error of "Detector not
enough. If the lamp is red or orange, the detector is not yet cooled.
cooled"occurs when
To avoid this alarm, turn on the power after the detector is cooled enough.
measurement starts.
If the lamp is red or orange when the power is turned ON, replenish liquid
nitrogen carefully by following the procedures in " 1.5 Filling Dewar with Liquid
Nitrogen " on page 9. When the lamp turns green, turn OFF the power of the
analyzer and wait for 10 seconds. Then turn ON the power.
44
5 TROUBLESHOOTING
5.2
Power supply troubles
Symptom
Inspection part
Power supply cable
Power supply switch
No power
Inspection details
Action
Confirm that respective cables for

the XGT-7000V analysis unit,
personal computer, data processor,
LCD, printer, and vacuum pump are
correctly connected.
Connect the cables correctly.
Confirm that power is supplied.
Supply power.
Confirm that respective switches for

the data processor, personal
computer, LCD, printer, and vacuum
pump are turned ON.
Turn ON the power supply switches.
When the emergency stop switch is

left depressed, turn OFF the power
Be sure to check that the emergency using the key switch, release the
stop switch is not left depressed.
emergency stop state by turning the
button, and then turn ON the key
switch again.
Be sure to check that the key switch
has been turned ON again after
releasing the emergency stop state.
No power is supplied just by

releasing the emergency stop state.
You must turn OFF and ON the key
switch after that.
When no abnormality is found in the above inspection parts, the fuse may be blown out. Contact the
nearest HORIBA representatives.
Vacuum pump
does not
operate
Data processor power

supply
Power switch on main

body of pump
Confirm that the power supply cable

of the data processor is correctly
connected.
Connect the power supply cable

correctly.
Confirm that power is supplied.
Supply power.
Confirm that the breaker of the data

processor is ON.
Turn the breaker ON.

If the breaker is thrown soon again,
stop the use and contact the nearest
HORIBA representatives.
Confirm that power supply of the

Turn ON the power supply switch.
main body of the pump is turned ON.
45
5 TROUBLESHOOTING
5.3
Operation troubles
Symptom
The detailed image cross cursor

does not match up with the sample
measurement position.
Action
Set the X-ray applied position.
An unidentifiable peak appears in

This is not an error. It is a Compton diffusion peak caused by the Rh-K rays of the
the vicinity of 18.9 keV and 21.5 keV
X-ray tube target.
in the spectrum.
A peak appears in the area of
1 keV or below in the spectrum.
This is the effect of external noise or vibration. Remove the source of noise or
vibration or relocate the analyzer.
Auto current cannot be adjusted.
X-ray intensity is too low. Adjust the current manually.
46
5 TROUBLESHOOTING
5.4
Other troubles
Symptom
Inspection details
Action
Measurement point
Confirm that the measurement point

meets the X-ray irradiation point
correctly.
Adjust the X-ray irradiation to the

measurement point using the optical
image window.
Piping in the vacuum

system
Confirm that the vacuum hose

connection is correct.
Connect the piping correctly.
Vacuum pump oil
Confirm that there is enough oil.
Replace or resupply the oil annually.
X-ray transmitting film
Confirm that the X-ray transmitting

film is not broken.
If the X-ray transmitting film is broken

or any of the problems mentioned
above is not found, replace the film
(See 4.6 Replacing the X-ray
indicator (X-RAYS ON) lamp (page
39)).
O-ring for the sample

chamber door
Check that the O-ring for damage

and amount of grease applied.
When the O-ring is damaged,

replace it. When the amount of
grease is insufficient, apply grease to
it.
Ambient temperature
Check that the ambient temperature

is within the guaranteed operating
temperature range.
When the ambient temperature is

below the guaranteed operating
temperature range, the performance
of the vacuum pump becomes low,
resulting in failure to reach a vacuum
within the set time. In such a case,
press the ERR button to reset the
error, and vacuum the equipment
again.
No X-ray is
generated.
X-Ray ON lamp
Press the X-RAY ON lamp with the

sample chamber closed, and then
confirm that the lamp lights.
If the lamp does not light up, replace

it.
Mapping is
interrupted.
SYNC cable
Check the cable connection.
Reconnect the cable.
Confirm that the emergency stop

switch is not pressed.
Turn OFF the power switch and

rotate the red flange of the
emergency stop switch to return it to
the original state.Then turn ON the
power switch. And reboot the PC.
Measurement
result is
different from
expected.
Vacuum is not
achieved.
The software is
inoperative.
Inspection part
47
6 APPENDIX
APPENDIX
6.1
Measurement Principles
The XGT-7000V is designed as follows:
(a) The X-rays generated in the X-ray tube are converged into a very thin X-ray beam with the
X-ray guide tube (XGT).
(b) This beam is irradiated to the sample while its surface is being scanned.
(c) The X-ray transmitted image of the sample and the distribution images of its elements are
then obtained.
The X-ray transmitted image is obtained from the fluorescent X-rays which have transmitted
the sample, using the Si semiconductor detector. The measurement data and the position
information obtained when the sample was scanned are used to form an image with the data
processor and then display it on the LCD.
Fig. 11 Block diagram of the XGT-7000V
48
6 APPENDIX
What Is the X-ray?

The X-ray belongs to one of the electromagnetic waves such as visible radiation, but its wave
length is very short. (approximately 10-8 to 10-11 m.)
Like other electromagnetic waves, the X-ray has the characteristics of both "waves" and
"particles." Therefore, it is expressed using its energy (E) for those of energy particles. The
following equation holds between l and E:
E = 124/l (E:keV, l:nm)
This means that as the wavelength is shorter, the energy is larger.
What Is the X-ray Fluorescence?

When X-rays are irradiated to atoms, the electrons on the orbit of the internal shell are
expelled to the outside and then the orbit becomes vacant. Now the electrons on the orbit of
the external shell fall on the vacant orbit and the X-rays equivalent to the energy difference
between both orbits are generated. This is called X-ray fluorescence (see Fig. 12).
Since the energy difference between the orbits has a value specific to the atom, the generated
X-rays are called the characteristic X-rays or specific X-rays. On the other hand, the irradiated
X-rays are called the primary X-rays or excitation X-rays.
Fig. 12 Generation of X-rays fluorescence
Generation of X-rays
For the source of the primary X-rays to generate the X-ray fluorescence, an X-ray tube or
radioactive isotopes (R1) are generally used. The XGT-7000V uses an X-ray tube.
The X-ray tube is a certain type of vacuum tube, consisting of a tungsten filament, a target,
and a beryllium window (see Fig. 13).
Fig. 13 Structure of X-ray tube
49
6 APPENDIX
When the tube current flows through the filament with voltage applied between the filament
and the target, thermions are generated, accelerated, and then hit against the target. Now Xrays are generated and irradiated through the beryllium window.
The characteristics of the generated X-rays greatly vary depending on the substance of the
target, the applied tube voltage and current. The XGT-7000V uses rhodium (Rh) for the target.
Converging the X-rays

The X-ray guide tube (XGT) has a hollow glass tube, in which all the fluorescent X-rays are
reflected on the inner surface. This tube thus ensures that the X-rays are sent without
sacrificing their intensity. A high-bright micro X-ray beam is irradiated to the sample by cutting
the exit end of the XGT small, so that even a very small area can be analyzed.
Si Detector
The characteristic X-rays generated from the sample are detected by the Si detector. The
detector, which is configured as shown in Fig. 14, outputs current pulses to the outside with
the energy of the incoming X-rays. The current pulses proportional to the energy of the X-rays
are converted to voltage by the preamplifier, amplified by the proportional amplifier, and then
enter the multichannel wave height analyzer (MCA). The pulses are classified by the height
and the classified pulses are counted.
Pulse height:Corresponds to the energy of X-rays
Pulse count:Corresponds to the intensity of X-rays with that energy
Fig. 14 Si detector
50
6 APPENDIX
6.2
Specifications
6.2.1
Analyzer
X-ray microbeam generator

Two-dimension resolution
X-ray generator
100 m (100 m dia. XGT, FWHM when WD=1 mm) and

10 m (10 m dia. XGT, FWHM when WD= 1 mm)
X-ray tube (target: Rh)
Tube voltage: 15 kV, 30 kV, or 50 kV (changeable)
Tube current: 0.002 mA to 1.0 mA (changeable)
X-ray tube life guarantee time: 2000 hours or 1 year (shorter one)
Detector
Si detector
Detector
Detectable elements
Effective area
Energy resolution
P/B ratio (1 keV)
Cooling method
Detection window
High-purity silicon detector, XEROPHY

Na (Z=11) to U (Z=92)
38.5 mm2
150 eV or less (Mn, in Processing Time P6)
10000 : 1 or more
Liquid nitrogen
Be window
Nal detector
X-ray light-sensitive element
Signal amplifier
Detection window
Na (Tl) crystal
Photomultiplier tube
Be window
Sample stage
Sample size and mass
340 mm (W) 250 mm (D) 80 mm (H) or 100 mm (W) 100 mm (D) 100 mm (H)
Max. mass 1 kg or less
Scanning range
Min.: 256 m 256 m to Max.: 100 mm 100 mm
Min. feeding pitch: 2 m
51
6 APPENDIX
Optical microscope
CCD camera
Whole image
Detailed image
Sample height
z
z
z
6.2.2
Q
Moving the stage from the whole image/ detailed image to the specified position using a
mouse cursor is possible.
The detailed image is pictured in the same axis as the X-axis.
Adjusting the sample height by looking into the CCD camera image is possible.
Data processor
Display
Size
Matching
Multi-point Analysis
Saving and call-up of
spectrum data
40 keV (10 eV/channel)

Possible to switch between linear scale or Log scale
Characteristic X-ray peak
Element symbols are displayed on spectrum.
Peak search and element identification
The hard disk is searched for a spectrum with a composition similar to that of
the sample.
Specify multiple measurement points on the mapping image of which was
measured by using the whole image, or detailed image, and automatically
performs subsequent measurement.
Spectrum data is saved on and called up from the hard disk.
Quantitative analysis
FPM Quantitative Analysis
52
Pentium (3.0 GHz) or upper

1 GB or more
40 GB or more
WindowsXP
Qualitative analysis (spectrum measurement)

Energy range
Vertical axis scale
KLM marker
Peak label
Automatic qualitative analysis
17-inch LCD
Computer
CPU
Memory
Hard disk
OS
Magnifying scale: approx. 2 times (on 17 inches LCD)

Indication area: approx. 130 mm 100 mm
Indication area: approx. 2 mm 1.6 mm
Indication area: approx. 130 mm 100 mm
Standard less, 1-point calibration
6 APPENDIX
Mapping analysis
Can specify the mapping position by optical image (whole image/ detailed image)
Can move the stage to the specified position by using the image cursor on each image
Mapping range
Image display
Image processing
Image saving and calling up
Smart Map
100 mm 100 mm stage

256 m 256 m to 100 mm 100 mm
Scale marker, image cursor, contrast adjustment
Pseudo-color, RGB, image line analysis
Save or call up each mapping image to a disc.
Add/delete the element after mapping.
Color printer
Included as standard item
6.2.3
Ambient conditions
Temperature
Humidity
6.2.4
Operating temperature
Performance guarantee temperature
Temperature range between 5C and 31C
Temperature range between 31C and 40C
Power source
Voltage
Frequency
Power consumption
Plug
Grounding
6.2.5
100 V, 120 V, 220 V, or 240 V AC 10%

50 Hz /60 Hz 1.0%
Below 1.5 kVA (60 Hz), Below 1.8 kVA (50 Hz)
(Including vacuum pump, but excluding PC, LCD, and printer)
Two independent 3-pin sockets (with grounding)
A set of main unit + vacuum pump and PC with accessories
Grounding resistance of 100 or less (equivalent to Class 3 grounding)
Mass
Analyzer unit
Data processor
XGT controller
Vacuum pump
6.2.6
5 to 40
10 to 35
Max. relative humidity 80%
Linearly decreases until relative humidity
reaches 50%
Approx. 200 kg
Approx. 30 kg
Approx. 1.5 kg
Approx. 30 kg
Dimensions
Main unit
Data processor
700 (W) 900 (D) 800 (H) mm

240 (W) 560 (D) 510 (H) mm
53
6 APPENDIX
6.3
Wiring
The cable wirings between units are connected as shown in the wiring diagram Fig. 15
Wiring (XGT-7000V) (page 55).
For installation and removal of the wirings and pipings, contact the nearest HORIBA sales
representatives.
Wiring between data processor and SI detector

Note
Make sure to turn OFF the power switch before wiring.
Connect the detector cable to the connector (PSI, HV) of the rear panel for XGT-7000V data
processor and to the connector (PSI, HV) of the detector.
Be sure to ground them.
Wiring procedure is as follows. For removing the wiring, take the reverse procedure.
1. Grounding
2. Connecting the PSI connector
Be sure to screw the PSI connector tightly.
3. Connecting the HV connector
The HV connector is a BNC-type connector. Be sure to lock it by turning its plug to the
right when wiring.
The detector cable and the Si detector connector (PSI, HV) are connected inside the analyzer.
Normally you do not need to remove the wirings. In times of removal, take the reverse
procedure of the above procedure (3. to 1.).
Note
If a high voltage is applied when the PSI connector is unconnected, this will cause breakage of the
detector. Do not mistake the order of connection.
54
6 APPENDIX
Fig. 15 Wiring (XGT-7000V)
55
7 ACCESSORIES
ACCESSORIES
Product No.
Name
Specifications
Application
Appearance
Min. Qty.
9068000400
Sample
For use with 100
mounting tray P mm sample stage
Used for normal samples
1 pc.
9068000800
Sample
For use with 100
mounting tray L mm sample stage
Used for thick samples or

samples with low
transmitted image contrast
1 pc.
9068001000
X-rays
transmission
film
Exclusive film
64 mm dia.
Analysis probe window
100 sheets per box
1 box
F0020861200
Silicone grease
SH111
50 g tube
For application on seals
1 tube
9068000900
Pump oil
Oil for vacuum

pump
500 mL per bottle
Used to replenish vacuum

pump oil
1 bottle
9068001700
PC support
Clear resin
X-rays transmission film

support
1 pc.
9038002700
Lamp: 4 pcs.
Lamp
Replacement tool:
replacement set
1 pc.
X-RAYS ON lamp
1 set
56
2 Miyanohigashi, Kisshoin Minami-ku, Kyoto 601-8510 Japan

http://www.horiba.com

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X-RAY ANALYTICAL MICROSCOPE

Warranty and Responsibility

2007 HORIBA, Ltd.

the EMC Directive 89/336/EEC, in accordance with Article 10

Information on Disposal of Electrical and Electronic Equipment

For your safety

Meaning of warning messages

Description of what should never be done, or what is prohibited

Extremely Low Temperature (-196C)

Disposal of the product

Description in this manual

BEFORE USING THE XGT-7000V . . . . . . . . . . . . . . . . . . . . .

Appearance of the XGT-7000V . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Name and explanation of analysis unit . . . . . . . . . . . . . . . . . . . . .

Filling dewar with liquid nitrogen . . . . . . . . . . . . . . . . . . . . . . . . . .

Opening/closing sample chamber door . . . . . . . . . . . . . . . . . . . .

SAMPLE SETUP AND VACUUMING . . . . . . . . . . . . . . . . . . .

Samples with a thickness of less than 15 mm . . . . . . . . . . . . . . . . . .

Evacuating the analysis probe and sample chamber . . . . . . . . . .

Adjustment of Optical Image Window . . . . . . . . . . . . . . . . . . . . . .

Setting of X-ray applied position . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Replenishing liquid nitrogen . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Checking vacuum condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Checking vacuum condition of the analysis probe . . . . . . . . . . . . . .

Checking X-ray generator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Checking vacuum condition of sample chamber . . . . . . . . . . . . .

Applying grease to the XY stage . . . . . . . . . . . . . . . . . . . . . . . . .

Replacing the X-ray indicator (X-RAYS ON) lamp . . . . . . . . . . . .

Cleaning the fan filters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Analysis probe window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Installation procedure for analysis probe window . . . . . . . . . . . . . . .

Power supply troubles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1 BEFORE USING THE XGT-7000V

BEFORE USING THE XGT-7000V

1 BEFORE USING THE XGT-7000V

Appearance of the XGT-7000V

Fig. 1 View of the XGT-7000V

1 BEFORE USING THE XGT-7000V

Name and explanation of analysis unit

Fig. 2 Analysis unit

Operation panel of analysis

Handle for chamber open/

Sample chamber door unlock

Indicates the state of XGT-7000V.

1 BEFORE USING THE XGT-7000V

Right side of analysis unit

Fig. 3 Right side of analysis unit

This is a unit to move the sample into 3 axis directions.

Whole image observation

10 Vacuum piping interface

The whole image observation camera is a CCD camera to display the

1 BEFORE USING THE XGT-7000V

Indicator of analysis unit

Fig. 4 Indicator of analysis unit

Liquid nitrogen (LN) check

A lamp to indicate the remained volume of liquid nitrogen and the

X-ray circuitry reset button

13 X-ray indicator (X-RAYS ON)

This is the lamp to be lit when an error has occurred.

1 BEFORE USING THE XGT-7000V

Table 1 Status of the vacuum indicator

Under vacuum pressure

Under normal pressure

Under normal pressure