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Rotary Table/Rack & Pinion Style

Series MSQ
Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200
CRB2
-Z

CRBU2
CRB1
MSU
CRJ
CRA1
-Z

CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX

MRQ

D-

297

Compact Rotary Table with Low Table Height


Large rolling element
bearing
3 to 4 times higher axial load

Easy mounting of workpiece.


Table I.D/O.D tolerances
Basic type: MSQB H9/h9
High precision type: MSQA H8/h8

Table inside and outside diameters


For alignment of rotation center and work piece

(compared with series CRQ)

Positioning pin hole


Hollow axis

Rolling bearing

Accommodates wiring and piping


for equipment mounted on the table

Positioning
pin hole
For position of
rotation direction

Hollow axis
Size
1
2
3
Hollow axis 3.5 3.8 5
Size
10
Hollow axis 6

Pivoting angle
adjustment range:

20
9

Basic type

7
6

30 50 70 100 200
12 13 16 19 24

MSQB

0 to 190

With internal
shock absorber
2 to 5 times more kinetic energy
(compared with an adjustment bolt)

Easy mounting of body


Reference dia: Boss, Hole
Positioning pin hole

Mounting from 2 directions

Movement in direction of table's


radial thrust:

0.01mm or less

By using high precision bearing, the movement in the


direction of tables radial thrust is reduced.

Pin hole

High precision type

High precision type

MSQA

High precision
bearing

Reference diameter
(boss)

Reference diameter
(hole)

Pin hole

d
e

298

n
o

c
ti

d
id
e
S

po

on

directi

rt

ir

Front

po

po

rt

rt

Si
d

Piping position can be selected


accommodate mounting
conditions

ir
A ecti
po on
rt

Piping from 2 directions (front and side) is possible

Rotary Table

Series MSQ
Rack & Pinion Style

Small sizes 1, 2, 3, and 7


Small size and light weight

CRB2
-Z

CRBU2
CRB1

MSU
CRJ
Measure
C

mm

Size

Model

1
2
3
7

MSQB1A
MSQB2A

Full size (Picture of MSQB1A)

50.5

28

25

16

56

30

28

18

MSQB3A

60

34.5

30.5

20.5

MSQB7A

73.5

41

34.5

23

Weight (g)

CRA1

70
105
150
250

CRQ2
MSQ

Variety of installation options for space saving

MSZ

Offers maximum space saving installation by taking advantage of the compact body, space saving wiring and piping.

Easy center alignment at mounting Wiring and piping can be selected according to mounting conditions

Free mount
Top mounting

Bottom mounting

Reference dia (Boss)

Side mounting

CRA1
-Z

Example of auto switch and speed controller mounting

CRQ2X
MSQX

MRQ

Pin hole

Reference dia (Hole)


Pin hole

External shock absorber types


Total length shortened
4 to 10 times more allowable kinetic energy
(Compared with internal shock absorber type)

2 types of shock absorbers are available, for low energy and


high energy.

Longitudinal mounting space is reduced because there is


no protrusion from adjustment bolts or internal shock absorbers.

Allowable kinetic energy comparison (for size 30)


1

Moment of inertia (kgm2)

With external shock absorber


0.1

nerg

igh e

For h

w
For lo

Table height is the same for both types with adjustment bolts or internal shock absorbers.

energ

Rotation angle:

90, 180

0.01

With internal shock absorber

Left / Right symmetric type


A port

With adjustment bolt

0.001

Standard type

90
B port

B port

0.0001

0.2

0.3

0.4

0.5

0.6

0.7

0.8 0.9 1.0

180

Symmetric type

Rotation time (s/90)


A port

299

D-

Series MSQ
Table Displacement (Reference values)
100

The following graphs show the displacement


at point A, which is 100 mm apart from the
center of rotation, where the load is applied.

Load
Displacement

MSQ1A

MSQ10

(Ba

1A

QB

80

MS

60
40

(H

1A

QA

MS

20
1

pe)

n ty

isio

rec

p
igh

Displacement m

Displacement m

e)

typ

sic

100

5
Load N

h
0 (Hig
MSQA1
5

10

n type)

precisio

15
Load N

20

25

30

MSQ20

80

B2

Q
MS

60

ic
as

(B

40

cision

igh pre

A (H
SQA2

20
2

300

e)

typ

Displacement m

100
Displacement m

350
40
30
20
10

e)

typ

B1

Q
MS

MSQ2A

6
Load N

type)

10

e)

yp

ic t

s
(Ba

B2

250

Q
MS

200
190
40
30
20
10

MSQA20

12

ision type

(High prec

10

20

30
Load N

40

50

MSQ30

MSQ3A

3A

B
SQ

80

c ty

si

(Ba

60
40

igh
3A (H

pe)

ion ty

precis

A
MSQ

20
2

e)

300

pe)
Displacement m

100
Displacement m

400

ic

s
Ba

ic
as

250

12

14

16

150
130
50

18

(B

3
QB

200

MSQA30
8
10
Load N

typ

10

ision type

(High prec

20

30

40
Load N

50

60

70

MSQ50

MSQ7A

350

7A

QB

MS

80

pe
ic ty

60

MS

n
cisio

pe)

ty

re

hp

Hig

A(

7
QA

40

300

(Ba

Displacement m

Displacement m

100

20

250

sic

200
150

300

10 12 14
Load N

16

18

20

22

24

120
50
0

e)

typ

B5

Q
MS

MSQA50
0

a
(B

20

ion type)

(High precis
40

60
Load N

80

100

120

Rotary Table/Rack & Pinion Style

Series MSQ

Table Displacement (Reference values)


The following graphs show the displacement
at point A, which is 100 mm apart from the
center of rotation, where the load is applied.

100
Arm

Load
Displacement

80

80

70

70

60
50
40
30

80

100

120

CRA1
-Z

30

10
60
Load N

CRJ

40

10
40

MSU

50

20

20

CRB1

60

20

CRBU2

MSQB100

Displacement m

Displacement m

MSQB70

CRB2
-Z

CRA1
0

20

40

60

80

100 120
Load N

140

160

CRQ2

180

MSQ

MSQB200

MSZ

90
Displacement m

80

CRQ2X
MSQX

70
60

MRQ

50
40
30
20
10
0

50

100

150
Load N

200

250

300

Rotation Accuracy: Displacement Values at 180 (Reference values)


Rotating amount of table top

Rotating amount of table side

mm
Measuring plate

MSQA

MSQB

Rotating amount of table top

0.03

0.1

Rotating amount of table side

0.03

0.1

Values in the table are actual values and not guaranteed values.

D-

301

Rotary Table/Rack & Pinion Style

Series MSQ
Size: 1, 2, 3, 7

How to Order

MSQA 1 A
MSQB 1 A

High precision type

Basic type

M9BW
M9BW
Number of auto switches

Size

Nil
S
n

1
2
3
7

Auto switch type


Without auto switch (built-in magnet)
Nil
Refer to the table below for auto switch types.
The auto switch is included in the package (unmounted).

With adjustment bolt

2 pcs.
1 pc.
n pcs.

Port location
End port

Moisture
Control Tube
Series IDK

Nil

When operating an actuator with a small diameter


and a short stroke at a high frequency, the dew
condensation (water droplet) may occur inside the
piping depending on the conditions.
Simply connecting the moisture control tube to the
actuator will prevent dew condensation from occurring. For details, refer to Series IDK in the
WEB catalog.

Front port

The port location cannot be changed


after the delivery of the product.

Type

Special function

Electrical
entry

Indicator
light

Applicable Auto Switches/Refer to pages 807 to 856 for detailed auto switch specification.
Auto switch model

Load voltage

Wiring
(Output)

DC

AC

Perpendicular

M9NV
M9N
F8N

M9PV
M9P
F8P

M9BV
M9B
F8B

M9NWV M9NW
M9PWV M9PW
M9BWV M9BW
M9NAV M9NA
M9PAV M9PA
M9BAV M9BA

3-wire (NPN)

Solid state auto switch

5 V, 12 V

3-wire (PNP)
12 V

2-wire
Grommet Yes
Diagnostic indication
(2-color display)
Water resistant
(2-color indication)

3-wire (NPN)
3-wire (PNP)
2-wire
3-wire (NPN)
3-wire (PNP)
2-wire

24 V
5 V, 12 V
12 V
5 V, 12 V
12 V

In-line

Lead wire length (m)


0.5
(Nil)

1
(M)

3
(L)

5
(Z)

Pre-wired
connector

Applicable load

IC
circuit

IC
circuit

Relay,
PLC

IC
circuit

Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction.
Auto switches marked with are made to order specification.
Lead wire length symbols: 0.5 m Nil (Example) M9NW
1 m M (Example) M9NWM
3 m L (Example) M9NWL
Refer to pages 843 and 844 for the details of solid
5 m Z (Example) M9NWZ
state auto switch with pre-wired connector.
Note 1) When using D-F8, mount it at a distance of 10 mm or more from magnetic substances such as iron.
Auto switches are shipped together, (but not assembled).

302

Rotary Table/Rack & Pinion Style

Series MSQ

Specifications
1

Size

Fluid

Maximum operating pressure

0.7 MPa

Minimum operating pressure

CRB2
-Z

0.1 MPa
0 to 60C (with no freezing)

Ambient and fluid temperature


Cushion

Basic type

Air (non-lube)

None

CRBU2

Rubber bumper

0 to 190

Angle adjustment range

CRB1

190

Maximum rotation

Cylinder bore size

Port size

10

M3 x 0.5

12

MSU

M5 x 0.8

CRJ

Allowable Kinetic Energy and Rotation Time Adjustment Range

High precision type

Symbol

Size

Allowable kinetic energy (J)

1
2
3
7

0.001

CRA1
-Z

Rotation time adjustment range for suitable operation (s/90)


0.2 to 0.7

0.0015

CRQ2

0.002
0.006

CRA1

0.2 to 1.0

Note) If operated where the kinetic energy exceeds the allowable value, this may cause damage to the
internal parts and result in product failure. Please pay special attention to the kinetic energy levels
when designing and during operation to avoid exceeding the allowable limit.

Weight
(g)

Size

Basic type

75

105

150

250

High precision type

80

115

165

265

MSQ
MSZ
CRQ2X
MSQX

MRQ

Note) Excluding the weight of auto switches

Clean Series
Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

How to Order

Specifications

11 MSQ B 1 A E M9BW S

Particle generation grade Suction flow rate (example)

Clean Series
Vacuum type
A
B

Number of
auto switches

Auto switch

High precision type


Basic type

Nil

E
A

1 L/min (ANR)

Note 1) Please refer to Pneumatic Clean Series


catalog for further details.

Port location
Size
1
2
3
7

Grade 1 Note 1)

11-MSQA is identical to the high precision type and


11-MSQB is identical to the basic type.

End port
Front port

With adjustment bolt

Dimensions
Clean series products do not have a hollow axis.

Basic type
11-MSQBA

PA
(Vacuum port)

BK

High precision type


11-MSQAA

Size

BK

PA

1
2
3
7

5.3

M3 x 0.5

7.5

M3 x 0.5

9.5

M3 x 0.5

M5 x 0.8

D-

Dimensions other than above are identical to


the basic type and the high precision type.

303

Series MSQ
Rotation Direction and Rotation Angle
The rotary table turns in the clockwise direction when the A port is pressurized, and in the counter-clockwise direction when the B port is pressurized.
By adjusting the adjustment bolt, the rotation end can be set within the range shown in the drawing.

Positioning pin hole

Counter-clockwise

er
-c
en lock
d a wis
d ju e
stme
nt range 95
22.5

Adjustment bolt B
(For clockwise
rotation end adjustment)

e
wis
lo
Clock
c
t
ju kwi
un on
stm se
Cootati
en rotation e d
r
n
19
t ra
nge 95
ge

ran
n
o
Maximum rotati

C d
a

A port

Clockwise

B port

B port

Adjustment bolt A
(For counter-clockwise
rotation end adjustment)

With adjustment bolt, internal shock absorber


Adjustment angle per rotation of
angle adjustment screw
8.2
10.0
10.9
10.2

Size

1
2
3
7

Note) The drawing shows the rotation range of the positioning pin hole.
The pin hole position in the drawing shows the counter-clockwise
rotation end when the adjustment bolts A and B are tightened
equally and the rotation is adjusted 180.

Rotation Range Example


Various rotation ranges are possible as shown in the drawings below using adjustment bolts A and B.
(The drawings also show the rotation ranges of the positioning pin hole.)
Adjustment amount by
adjustment bolt A

Positioning pin hole


Adjustment bolt A
(For counter-clockwise
rotation end adjustment)
Adjustment bolt B
(For clockwise
rotation end adjustment)
Adjustment amount by
adjustment bolt B

Pin hole rotation range

190 (Maximum) Rotation

180 Rotation

Adjustment amount by
adjustment bolt A

90 Rotation

304

Adjustment amount
by adjustment bolt B

Adjustment amount
by adjustment bolt B

Adjustment amount
by adjustment bolt B

Adjustment amount by
adjustment bolt A

90 Rotation

90 Rotation

Adjustment amount by
adjustment bolt A

Rotary Table/Rack & Pinion Style

Series MSQ

Construction

CRB2
-Z

CRBU2
CRB1
MSU
CRJ
o

@2

q
!8

!0
!8

!7

@0

!3
u

!4
@1

!5
!6

@4
!1

@3

CRA1
-Z

CRA1

!2

CRQ2

!7

MSQ
MSZ
CRQ2X
MSQX

MRQ
MSQAA
(High precision type)

!9

Component Parts
No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24

Description
Body
Cover
Plate
Seal
End cover
Piston
Pinion
Hexagon nut
Adjustment bolt
Cushion pad
Table
Bearing retainer
Magnet

Size: 3, 7

Wear ring
Piston seal
Deep groove ball bearing
Basic type
Deep groove ball bearing
High precision type
Special bearing
Size: 1 to 3
Round head Philips screw No.0
Basic type
Size: 7
Round head Philips screw
Round head Philips screw High precision type
Round head Philips screw No.0
Hexagon socket head set bolt
Parallel pin
Seal washer
Hexagon socket head set screw
O-ring

Material
Aluminium alloy
Aluminium alloy
Aluminium alloy
NBR
Aluminium alloy
Stainless steel
Chrome molybdenum steel
Steel wire
Steel wire
Rubber material
Aluminium alloy
Aluminium alloy

Resin
NBR
Bearing steel

Note
Anodized
Anodized

Chromated
Anodized

Anodized
Anodized

Bearing steel
Steel wire
Steel wire
Stainless steel
Carbon steel
NBR
Stainless steel
NBR

D-

23 The hexagon socket head set screws are tightened at different positions
depending on the position of the connecting port.
The component parts cannot be shipped individually.

305

Series MSQ
Dimensions/Size 1, 2, 3, 7
Basic type/MSQBA
BJ

High precision type/


MSQAA

2 x JF depth JG

WB

BI

DI
DH
DJ

ctive

1
1

th W

XA

dep

WA

4 x JJ depth JK

FE
HA
(UV)

effe

8 x WD depth WE
(Circumference: 8 equivalents)

2 x J through
JA depth of counter bore JB

22.5

BE

DL

BD
BA

Effective depth FB

DD
D
DE

1
2
3
7

DI

DJ

DL

FE HA UV

27h8 27.5h8 14H8 4.5H8 8.2 13.5 29.5


29h8 29.5h8 14H8 5 H8 9.7 15.5 33.5
33h8 34h8 17H8 6 H8 9.7 15.5 36
39h8 40h8 20H8 7 H8 9.5 16.5 39.5

2xP
End port
(Plugged with a hexagon
socket head set screw
when front ports are used.)

(through)

AX
BB
S

AU
(Max. approx. SU)

BH

2xP
Front port
(Plugged with a hexagon
socket head set screw
when end ports are used.)

DG

AV
SF
A

(UU)

BC

DF

JD

AY

SD

Effective
depth 1.2

AW

2 x JU

Size DH

FD
FA

2 x JC
Depth from bottom
(not including JD) JE

XB effective depth XC

(mm)

WF

BG

(mm)

AU AV AW AX AY BA BB

YA

1
2
3
7

A
28

2.8 11

8.2 5.5

1.5

35

39.6

30

3.6 12.6

9.2 7

37

45.1

34.5 4.4 15.5 10.5 8

2.5

43

46.7

Size

41

50

59.2

YB effective depth YC

BI

BJ

8.2

30

4.5 27h9 27.5h9 14H9 3.5 4.5H9 4.8

9.2

35

4.8 18.4 12.2 10

(mm)
Size BC BD BE BG BH

1
2
3
7

11

DD DE DF DG FA FB

FD

JA

JB

JC

JD

JE

JF

3.7

JG

3.3

3.5

M4 x 0.7

2.2

5.3

M4 x 0.7

4.5 29h9 29.5h9 14H9 3.8 5 H9 5.3

2.5

4.2 10

3.3

3.5

M4 x 0.7

2.2

5.3

M4 x 0.7

4.5

32

17

5.5

34

18.5 12.6

5.5

38

23

15.5 10.5

40

4.5 33h9 34 h9 17H9 5

6 H9 5.3

2.5

4.2 10

4.2

7.5

4.5

M5 x 0.8

2.5

M4 x 0.7

5.5

45

30

18.4 12.2

50

7 H9 6.5

2.5

4.5 11.5 4.2

7.5

4.5

M5 x 0.8

2.5

M5 x 0.8

39h9 40 h9 20H9 6

(mm)
Size

1
2
3
7

306

JJ

JK

JU

SD SF SU UU WA WB WC

M3 x 0.5 3.5

M3 x 0.5 M3 x 0.5 16

50.5 10.8 24.4 9.4 25

M3 x 0.5 3.5

M4 x 0.7 M3 x 0.5 18

56

M3 x 0.5 3.5

M5 x 0.8 M3 x 0.5 20.5 60

M4 x 0.7 4.5

M6 x 1

M5 x 0.8 23

WD

WE WF XA XB XC YA YB YC
20 22.5 2H9

11

2H9

10

2H9

M3 x 0.5 5.3

21 24.5 2H9

11.5 2H9

11.8 30.5 12

2H9

M3 x 0.5 5.3

25 27

2H9

13.5 2H9

73.5 15.4 37.4 14.9 34.5 14

3H9

M4 x 0.7 6.5

29 32.5 3H9

15.5 3H9

13.4 26.2 11.3 28


15.2 31

9.5 2H9

M3 x 0.5 4.8

Rotary Table/Rack & Pinion Style

Series MSQ

Size: 10, 20, 30, 50, 70, 100, 200


CRB2
-Z

How to Order

CRBU2
CRB1

Size
10
20
30
50

MSU
CRJ

High Precision Type

MSQ A 10 A

M9BW

Basic Type

MSQ B 10 A

M9BW

CRA1
-Z

CRA1
CRQ2
Thread type

Size

End port type


Nil
M5
Nil
Rc 1/8
-XF
G 1/8
-XN
NPT 1/8

10
20
30
50
70
100
200

A
R

MSQ

Size
10, 20
30, 50,
70, 100,
200

MSZ
CRQ2X
MSQX

Side ports are all M5.

MRQ

Number of auto switches


Nil
S
n

With adjustment bolt


With internal shock absorber

2 pcs.
1 pc.
n pcs.

Auto switch type


Nil

Without auto switch (built-in magnet)

Refer to the table below for auto switch types.

Reed auto switch

Solid state auto switch

Special function

Diagnostic indication
(2-color display)
Water resistant
(2-color indication)

Electrical
entry

Indicator
light

Type

Applicable Auto Switches/Refer to pages 807 to 856 for detailed auto switch specification.
Load voltage

Wiring
(Output)

3-wire (NPN)
3-wire (PNP)
2-wire
3-wire (NPN)
Grommet Yes 3-wire (PNP)
2-wire
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire
Yes (NPN equiv.)
Grommet
2-wire
No

DC

Auto switch model


AC

Perpendicular

M9NV
M9N
M9PV
M9P
M9BV
M9B
M9NWV M9NW
M9PWV M9PW
M9BWV M9BW
M9NAV1 M9NA1
M9PAV1 M9PA1
M9BAV1 M9BA1

5 V, 12 V
12 V
24 V

5 V, 12 V
12 V
5 V, 12 V
12 V

5V

24 V

12 V

A96V

A93V2
100 V
100 V or less A90V

In-line

Lead wire length (m)


Pre-wired
0.5 1 3 5
connector
(Nil) (M) (L) (Z)

Applicable load

A96

IC
circuit

A93
A90

IC circuit

Relay,
PLC

IC
circuit

IC
circuit

Relay,
PLC

IC
circuit

1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction.
2 1 m type lead wire is only applicable to D-A93.
Lead wire length symbols: 0.5 m Nil (Example) M9NW
1 m M (Example) M9NWM
3 m L
(Example) M9NWL
5 m Z
(Example) M9NWZ
Auto switches are shipped together, (but not assembled).

Auto switches marked with a are produced upon receipt of orders.

D-

Refer to pages 843 and 844 for the details of solid


state auto switch with pre-wired connector.

307

Series MSQ
Specifications
10

Size

20

30

50

Maximum With adjustment bolt


operating
pressure With internal shock absorber
Minimum Basic type
operating
pressure High precision type 0.2 MPa

Basic type/MSQB

Cushion

200

Note 1)

0.1 MPa
0.1 MPa

0 to 60C (with no freezing)

With adjustment bolt

Rubber bumper

With internal shock absorber

Shock absorber

Shock absorber RBA0805


model
-X692

RBA1006-X692

RBA1411
-X692

RBA2725
-X821

Note 2)

190

Maximum rotation

Port size

RBA2015-X821

0 to 190

Angle adjustment range


Cylinder bore size

Symbol

100

1 MPa
0.6 MPa

Ambient and fluid temperature

High precision type/MSQA

70

Air (non-lube)

Fluid

15

18

21

25

M5 x 0.8

End ports

28

32

40

Rc 1/8, G 1/8, NPT 1/8


M5 x 0.8

Side ports

Note 1) The maximum operating pressure of the actuator is restricted by the maximum allowable thrust
of the shock absorber.
Note 2) Be careful if the rotation angle of a type with internal shock absorber is set below the value in the
table below, the piston stroke will be smaller than the shock absorber's effective stroke, resulting
in decreased energy absorption ability.
Size
Minimum rotation angle that will not allow
decrease of energy absorption ability

10

20

30

50

70

100 200

52

43

40

60

71

62

82

The service life of the shock absorber may be different from the rotary table body depending on
the operating conditions. Refer to Specific Product Precautions for the suitable replacement
period.
End ports
Side ports

Allowable Kinetic Energy and Rotation Time Adjustment Range


Allowable kinetic energy (J) Note 1)

Rotation time adjustment range for stable operation (s/90)

Size

With
adjustment bolt

With
internal shock absorber

10
20
30
50
70
100
200

0.007

0.039

0.025

0.116

0.048

0.116

0.081

0.294

0.240

1.100

0.2 to 1.5

0.320

1.600

0.2 to 2.0

0.560

2.900

0.2 to 2.5

With
adjustment bolt

With Note 2)
internal shock absorber

0.2 to 1.0

0.2 to 0.7

0.2 to 1.0

Note 1) If operated where the kinetic energy exceeds the allowable value, this may cause damage to the
internal parts and result in product failure. Please pay special attention to the kinetic energy
levels when designing and during operation to avoid exceeding the allowable limit.
Note 2) When the rotation time of the type with an internal absorber is set longer than the time shown in
the table above, energy absorption of the shock absorber greatly decreases.

Weight
(g)

Size
With adjustment bolt

10

20

30

50

70

100

200

500

940

1230

1990

2880

4090

7580

With internal shock absorber

510

940

1230

2010

2890

4100

7650

High precision With adjustment bolt


type
With internal shock absorber

530

1040

1350

2150

540

1040

1350

2170

Basic type

Note) Values above do not include auto switch weight.

308

Rotary Table/Rack & Pinion Style

Series MSQ

Rotation Direction and Rotation Angle


The rotary table turns in the clockwise direction where the A port is pressurized, and in the counter-clockwise direction when the B port
is pressurized.
By adjusting the adjustment bolt, the rotation end can be set within the ranges shown in the drawing.
The rotation angle can also be set on a type with internal absorber.

o
Cl dj
a

c
us kw
tm ise
en rot
t ra ation
nge end
95

Size

10
20
30
50
70
100
200

10.2
7.2
6.5
8.2
7.0
6.1
4.9

k
Cloc

e
wis

g
an

CRA1

CRB1
MSU
CRJ
CRA1
-Z

Clockwise

Adjustment angle per rotation of


angle adjustment screw

C
ro oun
ta te
tio r-c
n e lock
wi
nd
19
adju se
0
stment range 95

Adjustment bolt B
(For clockwise
rotation end adjustment)

With adjustment bolt, internal shock absorber

CRBU2

22.5

Adjustment bolt A
(For counter-clockwise
rotation end adjustment)

B port

CRB2
-Z

Positioning pin hole

Counter-clockwise
A port

um
Maxim

ati
rot

r
on

CRQ2

Note) The drawing shows the rotation range of the positioning pin hole.
The pin hole position in the drawing shows the counter-clockwise
rotation end when the adjustment bolts A and B are tightened
equally and the rotation is adjusted 180.

MSQ
MSZ

Rotation Range Example

CRQ2X
MSQX

Various rotation ranges are possible as shown in the drawings below using adjustment bolts A and B.
(The drawings also show the rotation ranges of the positioning pin hole.)

MRQ

The rotation angle can also be set on a type with inertial absorber.
Adjustment amount by
adjustment bolt A

Positioning pin hole


Adjustment bolt A
(For counter-clockwise
rotation end adjustment)
Adjustment bolt B
(For clockwise
rotation end adjustment)

Adjustment amount
by adjustment bolt B

Pin hole rotation range

190 (Maximum) Rotation

Adjustment amount by
adjustment bolt A

180 Rotation

Adjustment amount by
adjustment bolt A

Adjustment amount by
adjustment bolt A

D-
Adjustment amount
by adjustment bolt B

Adjustment amount
by adjustment bolt B
90 Rotation

Adjustment amount
by adjustment bolt B
90 Rotation

90 Rotation

309

Series MSQ
Clean Series
Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

Specifications

How to Order

M9BW

11 MSQ B 10 A
Clean series
Vacuum type
A
B

Grade 1 Note 1)

1 L/min (ANR)

11-MSQA is identical to the high precision type and


11-MSQB is identical to the basic type.

Number of
auto switches

High precision type


Basic type

Note 1) Please refer to Pneumatic Clean Series


catalog for further details.

Auto switch type


Nil Without auto switch (built-in magnet)
Refer to page 307 for auto switch types.

Size
10
20
30
50
A
R

Particle generation grade Suction flow rate (example)

Thread type
End port type
M5
Nil
Nil
Rc 1/8
-XF
G 1/8
-XN
NPT 1/8

With adjustment bolt


Shock absorber

Size
10, 20
30, 50

Side ports are all M5.

Dimensions
Clean series products do not have a hollow axis.

Basic type
11-MSQBA
11-MSQBR

DA
DB

M5 x 0.8 depth 5
(Vacuum port)
(mm)

(HD)
HC

11.5

5.5

HB

DC

Size

DA(h9)

DB(h9) DC(H9) DD(h9)

HB

HC

HD

10
20
30
50

46

45

20

61

60

28

35

20

59

40

22

67

65

65

32

48

22

77

75

68

35

54

24

77

Dimensions other than above are identical to the basic type.


DD

High precision type


11-MSQAA
11-MSQAR

DA
DB

M5 x 0.8 depth 5
(Vacuum port)

DC

(mm)

HB
(HD)
HC

HE

HA

Size

10
20
30
50

DA(h8) DB(h8) DC(H8) DD(h8)

HA

HB

HC

HD

46

45

20

35

15.5

24

63

9.5

61

60

28

40

19.5

30

73

13.5

67

65

32

48

19.5

30

76

13.5

77

75

35

54

21.5

34

87

15.5

Dimensions other than above are identical to the high precision type.
DD

310

HE

Rotary Table/Rack & Pinion Style

Series MSQ

Construction

CRB2
-Z

CRBU2
CRB1
MSU
#1

o i @7 @8 t !0

MSQ R
(With internal shock absorber)

!3 #0

@0

y !6 !7 !8 !1 @5 e r w@4

@9 q @2 @0 @3

CRJ
CRA1
-Z

u @6 !9 !4 !5 !2 @1

CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX

MSQA
(High precision type)

MRQ

Parts list
No.
1 Body

Description
Clean Series
Except Clean Series

Cover

3
4

Plate
Seal

End cover

6
7

Piston
Pinion
Compact hexagon nut
Hexagon nut
Adjustment bolt
Cushion pad

Seal retainer
Gasket
Gasket
Table
Bearing retainer
Magnet
Wear ring
Piston seal

8
9
10
11
12
13
14
15
16
17
18

Material
Aluminium alloy

Note
Anodized
Nickel plated
Plated

Aluminium alloy

Chromated

Aluminium alloy
NBR
Clean Series
Except Clean Series

Nickel plated
Plated

Aluminium alloy
Stainless steel
Chrome molybdenum steel

Size: 10 to 50
Size: 70 to 200

Description
Bearing
Size: 10 to 50
Needle bearing
Size: 70 to 200
Bearing
Basic type
20
Angular bearing
High precision type

No.

Material

19

Bearing steel

Size: 20 to 50
21 Round head philips screw No.0
Size: 70 to 200

22
23

Steel wire

Chrome molybdenum steel Chromated


Rubber material

Size: 10 to 50
Aluminium alloy
Chromated
Size: 70 to 200
NBR
NBR
Aluminium alloy
Anodized
Aluminium alloy
Anodized

Resin
NBR

24
25
26
27
28
29
30
31

Round head philips screw Size: 10


Hexagon thin socket head bolt Size: 20 to 50
Hexagon socket head set bolt Size: 70 to 200
Hexagon socket head set bolt
Size: 10 to 70
Hexagon socket
head set bolt
Size: 100 to 200
Bushing nut
Size: 10 to 50
Type CS retaining ring Size: 70 to 200
Parallel pin
Size: 10 to 50
Parallel key
Size: 70 to 200
Seal washer
Plug
O-ring
Size: 70 to 200 only
Steel balls
Size: 70 to 200 only
Shock absorber

Note

Bearing steel
Steel wire
Stainless steel
Steel wire
Steel wire
Stainless steel
Stainless steel
Steel wire
Stainless steel
Carbon steel
NBR
Steel wire
Nickel plated
NBR
Stainless steel

The component parts cannot be shipped individually.

Replacement parts
Description

Size

10

20

30

50

70

100

200

Seal kit

P523010-5
P523020-5
P523030-5
P523040-5
P391050-5
P391060-5
P391070-5
No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty.
4 Seal
1 4 Seal
1 4 Seal
1 4 Seal
1 4 Seal
1 4 Seal
1 4 Seal
1
12 Gasket
1 12 Gasket
1 12 Gasket
1 12 Gasket
1 12 Gasket
4 12 Gasket
4 12 Gasket
4
Parts included
13 Gasket
1 13 Gasket
1 13 Gasket
1 13 Gasket
1 17 Wear ring
4 17 Wear ring
4 17 Wear ring
4
in seal kit
17 Wear ring
4 17 Wear ring
4 17 Wear ring
4 17 Wear ring
4 18 Piston seal
4 18 Piston seal
4 18 Piston seal
4
18 Piston seal
4 18 Piston seal
4 18 Piston seal
4 18 Piston seal
4 27 Seal washer 2 27 Seal washer 2 27 Seal washer 2
27 Seal washer 2 27 Seal washer 2 27 Seal washer 2 27 Seal washer 2 29 O-ring
4 29 O-ring
4 29 O-ring
4
A grease pack (10 g) is included. When only a grease pack is needed, order with the following part number.
Grease pack part no: GR-S-010 (10 g)

311

D-

Series MSQ
Dimensions/Size 10, 20, 30, 50

2
2

WC

XA WA

45

4 x JJ depth 8
2 x J through
JA counter bore
depth JB

th
dep
ctive
effe
e
iv
ct
fe
ef XC

XB epth

8 x WD depth WE
(Circumference: 8 equivalents)

WB

Basic type/MSQBA

BE

22.5

WF
2 x M5 x 0.8
Port (Plugged)

2 x JC depth JD

FA

CA

Effective
depth FB

2xP
Port

BB

BD
DD
D
DE

AY
AX
AV
SF
A
AA

DF

(Through)

AU

BA

BA

DG

Effective
depth FC

CB

AW
BC

SD SE

FD

Q
H
(UU)

2 x JU

YA

YB effective
depth YC

(Max. approx. SU)

View

With internal shock absorber High precision type


MSQAR
MSQAA/With adjustment bolt
MSQBR
MSQAR/With internal shock absorber

FE
HA

DI
DH
DJ
(mm)

10
20
30
50

(Max. approx. FU)

(mm)

(UV)

Size FU
31.5
34.7
34.7
51.7

DK (Through)
DL

Size DH

10
20
30
50

DI

DJ DK DL FE HA UV

45h8 46h8 20H8

6 15H8 10

60h8 61h8 28H8

9 17H8 15.5 26

18.5 52.5
63

65h8 67h8 32H8 12 22H8 16.5 27

67

75h8 77h8 35H8 13 26H8 17.5 30

76

(mm)
Size AA

10
20
30
50

AU AV AW AX AY BA BB BC BD BE CA CB

55.4

50

6.6 20

70.8

65

75.4

70

85.4

80

12

7.6 27.5 16

14

12

46

7.6 29

18.5

14

12

50

22

19

15.5 63

10

38

15.5

9.5 34.5 27.8

DD DE DF DG FA FB

FC FD

JA

JB

60

27

4.5 28.5 45h9 46h9 20H9

6 15H9

4.5

13

6.8

11

6.5

30

76

34

9 17H9 10

2.5

6.5

17

8.6

14

8.5

32

84

37

6.5 33.5 65h9 67h9 32H9 12 22H9 10

4.5

6.5

17

8.6

14

8.5

7.5

20

10.5

18

10.5

37.5 100

50 10

30.5 60h9 61h9 28H9

37.5 75h9 77h9 35H9 13 26H9 12

(mm)
Size

10
20
30
50

JC

JD

JJ

M8 x 1.25 12

M5 x 0.8

M10 x 1.5 15

M6 x 1

M10 x 1.5 15

M6 x 1

JU

M8 x 1

S
92

WD

3H9 3.5 M5 x 0.8

WE WF XA XB XC YA YB YC

M5 x 0.8

34

13

45 17.7 47 15

32

27 3H9 3.5

19 3H9 3.5

M10 x 1 M5 x 0.8
M10 x 1 Rc 1/8

37

117 10

12

60 25

54 20.5 4H9 4.5

M6 x 1

10

43

36 4H9 4.5

24 4H9 4.5

40

127 11.5 14

65 25

57 23

M6 x 1

10

48

39 4H9 4.5

28 4H9 4.5

M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8

46

152 14.5 15

75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12

55

45 5H9 5.5

33 5H9 5.5

In addition to Rc 1/ 8, G 1/ 8 and NPT 1/ 8 are also available.

312

SD SE SF SU UU WA WB WC

4H9 4.5

Series MSQ

Rotary Table/Rack & Pinion Style

Dimensions/Size 70, 100, 200


WB

XB

Basic type/MSQBA

ed
ctiv

iv
e

CRBU2

45

XA

CRB2
-Z

WA

XC

hW
ept

h
pt
de

4 x JJ depth JK

CRB1

22.5

2 x J through
JA counter bore
depth JB

effe

ct
fe
ef

8 x WD depth WE
(Circumference: 8 equivalents)

BE

MSU
CRJ

WF

CRA1
-Z

BD

AV

(Through)

BA

DG

(Max. approx. SU)

SF

BA

FA

MSQ
MSZ
CRQ2X
MSQX

Effective
depth FC

FD
DF

AY

AX

CRQ2

2 x JU

BC

CB

AW

15

DE

2 x M5 x 0.8 (plug)
Port

30

SD

Q
H
(UU)

2 x Rc 1/8
Port

BB

CRA1

DD

2 x JC depth JD

Effective
depth FB

AB

MRQ

YA

View

With shock absorber


MSQBR

YB effective
depth YC

AA

(mm)
Size FU

70 55.4
100 55.5
200 79.5
(Max. approx. FU)

(mm)
Size AA AB

70 90 92 84
100 101 102 95
200 119 120 113

AV AW AX AY BA BB BC BD BE CB
42

25.5

27

17

50

29.5

60

36.5

27

36

10

DD DE DF DG FA FB

FC FD

JA

JB

75 44.5 110

57

36 88h9 90h9 46H9 16 22H9 12.5

3.5

22

10.4 17.5 10.5

17

85 50.5 130

66

42 98h9 100h9 56H9 19 24H9 14.5

3.5

12

27

10.4 17.5 10.5

24

103 65.5 150

80

57 116h9 118h9 64H9 24 32H9 16.5

5.5

15

32

14.2 20

12.5

(mm)

JC
70 M12 x 1.75
100 M12 x 1.75
200 M16 x 2

Size

JD
18

JJ

JK

JU

SD SF SU UU WA WB WC

WD

D-

WE WF XA XB XC YA YB YC

M8 x 1.25 10 M20 x 1.5 53

170 18

79 34.2

75 32.5 5H9 5.5 M8 x 1.25 12.5 67

54 5H9 3.5

39 5H9 3.5

18

M8 x 1.25 10 M20 x 1.5 59

189 22

90 34.3

86 37.5 6H9 6.5 M10 x 1.5 14.5 77

59 6H9 4.5

49 6H9 4.5

25

M12 x 1.75 13 M27 x 1.5 74

240 29 108 40.2 106 44

8H9 8.5 M12 x 1.75 16.5 90

69 8H9 4.5

54 8H9 6.5

In addition to Rc 1/ 8, G 1/ 8 and NPT 1/ 8 are also available.

313

Rotary Table/Rack & Pinion Style

Series MSQ

With External Shock Absorber


Size: 10, 20, 30, 50
How to Order

MSQ B 10 L 2

M9BW
Made to Order or port type

A
B

Refer to page 320 for the Made to Order details.

High precision type


Basic type

Number of
auto switch

Size
10
20
30
50

Nil
S
n

2 pcs.
1 pc.
n pcs.

End port type


Size
10, 20
M5
Rc 1/8
30, 50
G 1/8
NPT 1/8
Side ports are all M5.
Combination with Made to Order
is not available.

Nil
Nil
-XF
-XN

Shock absorber type


Shock absorber for low energy
Shock absorber for high energy

Auto switch type


Nil

Port location/Rotation
Standard
type

180
90
Symmetric 180
type
90
Refer to the table to the right.

Rotation
180

3: Standard type, 90

4: Symmetric type, 180

5:Symmetric type, 90
Connecting port

Standard
Made to Order

90

2: Standard type, 180

Connecting port

Connecting port position


Symmetric type Standard type

Nil
X

Port location/Rotation

Connecting port

2
3
4
5

Without auto switch (Built-in magnet)

Refer to the table below for auto switch types.

Connecting port

L
H

Reed auto switch

Solid state auto switch

Special function

Diagnostic indication
(2-color display)
Water resistant
(2-color indication)

Electrical
entry

Indicator
light

Type

Applicable Auto Switches/Refer to pages 807 to 856 for detailed auto switch specification.
Load voltage

Wiring
(Output)

3-wire (NPN)
3-wire (PNP)
2-wire
3-wire (NPN)
Grommet Yes 3-wire (PNP)
2-wire
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire
Yes (NPN equiv.)
Grommet
2-wire
No

DC

Auto switch model


AC

Perpendicular

M9NV
M9N
M9PV
M9P
M9BV
M9B
M9NWV M9NW
M9PWV M9PW
M9BWV M9BW
M9NAV1 M9NA1
M9PAV1 M9PA1
M9BAV1 M9BA1

5 V, 12 V
12 V
24 V

5 V, 12 V
12 V
5 V, 12 V
12 V

5V

A96V

In-line

A96

Lead wire length (m)


Pre-wired
0.5 1 3 5
connector
(Nil) (M) (L) (Z)

A93
A93V2
100 V

24 V
12 V

A90
100 V or less A90V

1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction.
2 1 m type lead wire is only applicable to D-A93.
Lead wire length symbols: 0.5 m Nil (Example) M9NW
1 m M (Example) M9NWM
3 m L
(Example) M9NWL
5 m Z
(Example) M9NWZ
Auto switches are shipped together, (but not assembled).

314

Applicable load
IC
circuit

IC
circuit

Relay,
PLC

IC
circuit

IC
circuit

IC circuit

Relay,
PLC

Auto switches marked with a are produced upon receipt of orders.


Refer to pages 843 and 844 for the details of solid
state auto switch with pre-wired connector.

Rotary Table/Rack & Pinion Style

Series MSQ

Specifications
Size

10

20

Maximum operating pressure

1 MPa

Minimum operating pressure

0.2 MPa

CRB2
-Z

CRBU2

Shock absorber

Cushion
Shock absorber For low energy
type
For high energy

RB0805

RB1006

RB1411

RB0806

RB1007

RB1412

CRB1
MSU

90, 180

Rotation

Each rotation end 3

Angle adjusting range


Cylinder bore size
Port size

50

0 to 60C (with no freezing)

Ambient and fluid temperature

Symbol

30

Air (non-lube)

Fluid

15

End ports

18

21

M5 x 0.8

CRJ

25

Rc 1/8, G 1/8, NPT 1/8

Side ports

CRA1
-Z

M5 x 0.8

The service life of the shock absorber may be different from the rotary table body depending on the
operating conditions. Refer to Specific Product Precautions for the suitable replacement period.

CRA1
CRQ2

Side ports

End ports

MSQ
MSZ
CRQ2X
MSQX

MRQ

Allowable Kinetic Energy and Rotation Time Adjustment Range


Made to Order

(Refer to page 320 for details)


Symbol

-X232

Specifications/Description
With external adjustment bolt

Size

Allowable kinetic energy (J) Note 1)


Shock absorber for low energy Shock absorber for high energy

10
20
30
50

0.161

0.231

0.574

1.060

0.805

1.210

1.310

1.820

Rotation time adjustment range


for stable operation (s/90)

0.2 to 1.0

Note 2)

Note 1) If operated where the kinetic energy exceeds the allowable value, this may cause damage to the
internal parts and result in product failure. Please pay special attention to the kinetic energy
levels when designing and during operation to avoid exceeding the allowable limit.
Note 2) Values above indicate the time between the start of rotation and the deceleration caused by the
shock absorber. Although the time required by the rotary table to reach the rotation end after
deceleration differs depending on the operating conditions (inertial moment of the load, rotation
speed and operating pressure), approximately 0.2 to 2 seconds are required. The range of
angles within which the shock absorber operates is between the rotation end and the values
shown below.

Size
For low energy

10

20

30

7.1

6.9

6.2

50
9.6

For high energy

8.6

8.0

7.3

10.5

Weight
(g)

Size
90 specification

10

20

30

50

600

1150

1460

2390

180 specification

570

1090

1390

2280

High precision 90 specification


type
180 specification

670

1340

1690

2720

640

1290

1620

2600

Basic type

D-

Note) Values above do not include auto switch weight.

315

Series MSQ
Rotation Direction and Rotation Angle
. The rotary table turns in the clockwise direction where the A port is pressurized, and in the counter-clockwise direction when the B port is pressurized.
. By adjusting the shock absorber, the rotation end can be set within the ranges shown in the drawing.

Standard type
For 180

For 90

Positioning pin hole

Positioning pin hole

Counter-clockwise

A port

A port

A port

22.5

rot
atio
n ran
ge 84
90
rot
atio
n r an
ge 96

um

ax
im

in
im

ge

18
6

Minimum

um

17
4

an
nr
tio
rota
ge

an
180 ion r
t
a
t
m ro
Maximu

Clockwise

se
Clockwi

Positioning pin hole

22.5

3
se
Clockwi

B port

Positioning pin hole

Position of bottom positioning pin hole

Position of bottom positioning pin hole

Symmetric type
For 180

For 90

Positioning pin hole

Positioning pin hole


3

B port

Positioning pin hole

se
Clockwi

tion r
ange 96

rota

rot
a
um

A port

ax

18

Clockwise

n
ra
on
tati
o
r
ge
m
Minimu

an
180 ion r
tat
o
r
m
Maximu

in
im

17

ge

A port

se
Clockwi

90

tion
range 84

22.5

22.5

A port

im
um

Counter-clockwise

Positioning pin hole

Position of bottom positioning pin hole

Position of bottom positioning pin hole

With external shock absorber


Size

10
20
30
50

316

Adjustment angle per rotation of angle adjustment screw


1.4
1.2
1.1
1.3

Note) The drawings show the rotation range for the top positioning pin
hole of the table.
The pin hole position in the drawing shows the counter-clockwise
rotation end when the shock absorbers are tightened equally
and the rotation is adjusted to 180 and 90.

Rotary Table/Rack & Pinion Style

Series MSQ

Construction

CRB2
-Z

CRBU2
CRB1
MSU
CRJ
CRA1
-Z

CRA1

CRQ2
MSQ
MSZ
CRQ2X
MSQX

MRQ
Component parts
No.
1
2
3
4
5
6
7
8
9

Material
Aluminium alloy
Aluminium alloy
Chrome molybdenum steel
Aluminium alloy
Stainless steel
Stainless steel
Steel wire
Steel wire

Description

End cover
Table
Arm
Shock absorber holder

Hexagon socket head set bolt


Hexagon socket head set bolt
Taper plug
Hexagon nut
Shock absorber

Note
Painted
Anodized
Nickel plated
Anodized

The component parts cannot be shipped individually.

Replacement parts
Description
Seal kit

Kit no.

10

20

30

50

P523010-6

P523020-6

P523030-6

P523040-6

Note

Seal washer @7 is excluded from the kit contents described on page 311.

A grease pack (10 g) is included. When only a grease pack is needed, order with the following part number.
Grease pack part no: GR-S-010 (10 g)

D-

317

Series MSQ
Dimensions/With External Shock Absorber Size: 10, 20, 30, 50
ng
ing
at
er
op

rm

WF
GE

(A

ND

EC

ED

GA

GB

WC

22.5

depth

EB

tive
2 x J through
JA counter bore depth JB

2xK
Shock absorber

BD
EF

YA

WA

effec

(Max. approx. EE)

Note 1

EB

2 x M5 x 0.8
Port (Plugged)

Piping port

WB

YB effective depth YC

ra

8 x WD depth WE
(Circumference: 8 equivalents)

(Max. approx. EA)

Symmetric type

e)

Basic type/MSQBL
H

Position of bottom positioning pin hole


DD
D
DE

CB

DF

CA

SF
A
AA

(Through)

BA

BA

DG

Effective
depth FC

SD

BC

SE

FD

Q
(UU)

NC

FA

NA

NB

2xP
Port

BB

GD

GC 0.5

2 x JC depth JD

Effective
depth FB

Note 1

YA

High precision type


MSQAL

YB effective
depth YC

Note 1) This part is not available with 180 specification.

View

FE
HA

NF
NE

DI
DH
DJ

(UV)

(mm)
Size DH

10
20
30
50

DK (Through)
DL

DI

DJ DK DL FE HA NE NF
18.5 11

UV

45

46 20H8

6 15H8 10

18

52.5

60

61 28H8

9 17H8 15.5 26

17

25.5 63

65

67 32H8 12 22H8 16.5 27

18

26.5 67

75

77 35H8 13 26H8 17.5 30

18.5 29.5 76

(mm)
Size AA

10
20
30
50

55.4 50

BA BB BC BD CA CB
9.5 34.5 27.8

60 4.5 28.5 45

46 20H9

6 15H9 53

61 28H9

9 17H9 61.9 55.3 43

70.8 65 12

46

30

76 6

75.4 70 12

50

32

84 6.5 33.5 65

85.4 80 15.5 63

DD DE DF DG EA EB EC ED EE EF FA FB FC FD GA GB GC GD GE

30.5 60

37.5 100 10

37.5 75

97.3

44.3 33.5 14

80

4.5

20 15.6 11

7.5 45.2 13

117.2 100

10

2.5

6.5

25 19.5 14

9.5 56.4 17

67 32H9 12 22H9 62.1 60.3 46

19.5 122.4 110

10

4.5

6.5

27 21.5 14

9.5 61.5 17

77 35H9 13 26H9 86.8 71.4 56

22

158.2 130

12

7.5

32 28

18

18 11.5 72.9 20
(mm)

Size

10 6.8
20 8.6
30 8.6
50 10.5

JA JB

JC

JD

NA NB NC ND

318

S SD SE SF UU WA WB WC

6.5 M8 x 1.25 12

M8 x 1

10

5.5 12.5

M5 x 0.8

34

13

45

47 15

32

19 3H9 3.5

8.5 M10 x 1.5 15

M10 x 1

14

16.5

37

117 10

12

60

54 20.5 4H9 4.5

M6 x 1

10

43

24 4H9 4.5

14

8.5 M10 x 1.5 15

M10 x 1

14

16.5

M5 x 0.8
Rc 1/8

40

127 11.5 14

65

57 23

M6 x 1

10

48

28 4H9 4.5

Rc 1/8

46

152 14.5 15

75

66 26.5 5H9 5.5 M8 x 1.25 12

55

33 5H9 5.5

8.5 19.5

3H9 3.5 M5 x 0.8

WE WF YA YB YC

14

18 10.5 M12 x 1.75 18 M14 x 1.5 19

92

WD

11

In addition to Rc 1/ 8, G 1/ 8 and NPT 1/ 8 are also available.

4H9 4.5

Rotary Table/Rack & Pinion Style

Series MSQ

Proper Auto Switch Mounting Position at Rotation End


Size:

1 to 7
CRB2
-Z

CRBU2
CRB1
B

Rotation

1
2
3
7

190
190
190
190

CRJ

When D-F8 is used

When D-M9 is used

Size

MSU

CRA1
-Z

Solid state auto switch


D-M9(V), D-M9W(V)
D-F8
Operating Hysteresis
Operating Hysteresis
A
B
angle
angle m
angle
angle m
20.9
22.8
24.4
28.7

10
10
10
10

49
50
47
31

16.9
18.8
20.4
24.7

20
20
15
15

CRA1
CRQ2

10
10
10
10

MSQ
MSZ

Operating angle m : Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
Hysteresis angle
: Value of auto switch hysteresis converted to an angle.
Note) Since the above values are only provided as a guideline, they are not guaranteed.
In the actual setting, adjust them after confirming the auto switch operating condition.

Size:

10 to 200

CRQ2X
MSQX

MRQ

B
A

Magnet

Operating range at proper


mounting position (Lm/2)
Most sensitive position

Operating range of
single auto switch Lm

Reed auto switch


Size

Solid state auto switch

D-A9, D-A9V

Rotation

Operating Hysteresis
angle m
angle
10
90
10
80
10
65
10
50
10
45
10
40
10
35

D-M9(V), D-M9W(V)

Operating Hysteresis
B angle m
angle
45
27
49
31
10
42
190
62
35
66
39
10
35
190
68
39
72
43
10
30
190
83
49
87
53
10
24
190
95
54
99
58
10
22
190
61 108
65 112
10
19
190
81 139
85 143
10
14
190
Operating angle m : Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
A

10
20
30
50
70
100
200

D-

Hysteresis angle
: Value of auto switch hysteresis converted to an angle.
Note) Since the above values are only provided as a guideline, they are not guaranteed.
In the actual setting, adjust them after confirming the auto switch operating condition.

319

Series MSQ

Made to Order

Please contact SMC for detailed specifications, lead times and prices.

Symbol

1 With External Adjustment bolt

-X232

By reducing the effective stroke of the shock absorber, the absorption time will be reduced, enabling the cycle time to be improved.

How to Order

MSQ B 10 L 2 X M9BW X232


A
B

High precision type


Basic type

Auto Switch

Refer to page 314 for auto switch.

Size

Made to Order

10
20
30
50

Port location/Rotation
2
3
4
5

Shock absorber type


L
H

With External
Adjustment bolt

Shock absorber for low energy


Shock absorber for high energy

Standard
type
Symmetric
type

180
90
180
90

Specifications
Size
10
20
30
50

Allowable kinetic energy (J)


Shock absorber for high energy
Shock absorber for low energy
0.231
0.161
1.060
0.574
1.210
0.805
1.820
1.310

Note 1) The allowable kinetic energy indicated in the table is the value for the case where the full stroke of the shock absorber is used. Note that if the effective stroke
of the shock absorber is shortened using the adjustment bolt, the allowable energy will be lower than the value in the table.
Note 2) If you wish to adjust the stroke of the shock absorber in order to reduce the cycle time, first set the shock absorber to the position where the shock absorber is
to be used in the full stroke, then while observing the operating condition of the product, gradually adjust the stroke in the direction such that the effective
stroke decreases.
Note 3) The shock absorber is a consumable part. If there are signs, such as bounding of the shock absorber at the motion end point, that the energy absorption
performance of the shock absorber has deteriorated, readjust the position of the shock absorber so as to increase its effective stroke. If bounding still occurs
even when the full stroke is used, it is necessary to replace the shock absorber with a new one.

Dimensions

Effective stroke

Note)

Symmetric type
Shock absorber
Adjustment bolt

NG

Adjustment bolt

Note) This part is not available with 180 specification.

320

EG
(mm)
Size

EG

NG

10
20
30
50

47.4

4.5

62

4.5

67.6

4.8

80

Dimensions other than the above are


the same as standard.

Series MSQ

Rotary Table
Specific Product Precautions 1
Be sure to read before handling.

Speed Adjustment

Warning

1. Perform speed adjustment gradually from the low


speed side.
Speed adjustment from the high speed side can cause product
damage leading to human injury and damage to equipment
and machinery.

Caution

1. When operating at high speed with a large load


weight, a large amount of energy is applied to the
actuator and can cause damage.
Refer to the model selection on page 22 to find the proper
operating time.

2. Do not machine the fixed orifice of the port to


enlarge its size. If the fixed orifice size is enlarged,
the actuator operating speed and impact force will
increase and cause damage.

Rotation Adjustment

Caution

CRB2
-Z

2. Series MSQ is equipped with a rubber bumper or shock


absorber. Therefore, perform rotation adjustment in the
pressurized condition (minimum operation pressure: 0.1 MPa
or more for adjustment bolt and internal shock absorber types,
and 0.2 MPa or more for external shock absorber type.)

Shock Absorber

Rotation Adjustment

Caution

1. As a standard feature, the rotary table is equipped with a


rotation adjustment screw (adjustment bolt or shock absorber)
that can be used to adjust the rotation. The table below shows
the rotation adjustment per single rotation of the rotation
adjustment screw.
Please refer to following pages for the rotation direction,
rotation angle and rotation angle range.
MSQ size1 to 7
page 304
MSQ size10 to 200
page 309
MSQ with external shock absorber page 316
With adjustment bolt, With external shock absorber
Size

1
2
3
7
10
20
30
50
70
100
200

Rotation adjustment per single rotation of rotation adjustment screw


8.2
10.0
10.9
10.2
10.2
7.2
6.5
8.2
7.0
6.1
4.9

With external shock absorber


Size

10
20
30
50

Rotation adjustment per single rotation of rotation adjustment screw


1.4
1.2
1.1
1.3

MSU
CRA1

1. Refer to the table below for tightening torques of the shock -Z


absorber setting nut.
Size
Tightening torque
N.m

10

20

1.67

30

50

70

10.8

3.14

100

200
62.8

23.5

2. Never rotate the bottom screw of the shock absorber. (It is not
an adjustment screw.) This may cause oil leakage.
Bottom screw cannot be rotated

Caution
This product is lubricated with grease at the factory, and further
lubrication will result in a failure to meet the product's specifications.

CRB1
CRJ

Caution

Lubrication

1. Use the product without lubrication.

CRBU2

3. When rotation of the rotary table with internal shock absorber


is set at a value smaller than the table below, the piston stroke
becomes smaller than the shock absorber's effective stroke
and energy absorption capacity decreases.
Size

10

20

30

50

70

100 200

Minimum rotation without energy


absorption capacity decrease

52

43

40

60

71

62

CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX

MRQ

82

4. Products with shock absorber are not designed to smooth stop


but to absorb the kinetic energy of the load. If the load has to
be stopped smoothly, a shock absorber of the optimum size
meeting the operating conditions must be installed external to
the equipment.

5. Shock absorbers are consumable parts. When a decrease in


energy absorption capacity is noticed, it must be replaced.
With internal shock absorber
Size

10
20
30
50
70
100
200

Shock absorber model


RBA0805-X692
RBA1006-X692
RBA1411-X692
RBA2015-X821
RBA2725-X821

With external shock absorber


Size

10
20
30
50

Type
For low energy
For high energy
For low energy
For high energy
For low energy
For high energy
For low energy
For high energy

Shock absorber model


RB0805
RB0806
RB1006
RB1007
RB1006
RB1007
RB1411
RB1412

D-

The rotation adjustment range for the external shock absorber


is 3 at each rotation end. When adjusted beyond this range,
note that the shock absorber's durability may decrease.

321

Series MSQ

Rotary Table
Specific Product Precautions 2
Be sure to read before handling.

Service Life and Replacement Period of Shock Absorber

Caution

Caution

1. Allowable operation time under the specifications


set in this catalog is 1 million.
Note) Specified service life (suitable replacement period) is the value at
room temperature (20 to 25C). The period may vary depending on
the temperature and other conditions. In some cases the absorber
may need to be replaced before the allowable operation time above.

External Shock Absorber

Caution
The threaded orifices shown below are not connecting ports.
Never remove the plugs as this will cause malfunction.

Threaded orifices

Speed Controller and Fittings

Caution
Size 1, 2, and 3 use M3 x 0.5 piping ports. When connecting a
speed controller or fittings directly, use the following series.
Speed controller
AS121F/Elbow type
AS131F/Universal type
One-touch fitting
One-touch miniature fittings Series K J
Miniature fittings Series M3

Auto switch

Caution
In case of sizes 1, 2, 3 and 7, when 2 pieces of auto switches are
installed in one switch groove, the minimum detectable rotation
angles are as follows.
Size

1
2
3
7

322

Maintenance and Inspection

Minimum detectable rotation


25
25
20
20

Since sizes 1, 2, 3 and 7 require special tools, they cannot be


disassembled.
Since sizes 10, 20, 30 and 50 have the table press fit into an
angular type bearing, they cannot be disassembled.

Series

1122-

MSQ

Rotary table: Rack & Pinion type


Size: 1, 2, 3, 7, 10, 20, 30, 50

How to Order

Size: 1, 2, 3, 7
Clean series
11 Vacuum suction type

A
B

High precision style


Basic style

Size

Nil
E

1
2

Side ported
Front ported

3
7

11 - M S Q

- M9B
Number of auto switches

With adjustment bolt

Auto switch
Reed switch
Solid state switch

2 pcs.
1 pc.
n pcs.

Nil
S
n

A90
M9B, M9N, F8B, F8N

Size: 10, 20, 30, 50

Clean series

Size

11 Vacuum suction type

10
20
30
50

11 - M S Q

10

A - M9B

22 - M S Q

10

A - M9B

Copper, fluorine and


silicon-free +
Low particle generation

Number of auto switches

A High precision style


B
Basic style

Nil
S
n

22 Vacuum suction type

2 pcs.
1 pc.
n pcs.

Auto switch
A
R

With adjustment bolt


With internal shock absorber

Reed switch
Solid state switch

A90
M9B, M9N

Auto switch specifications


Type

Auto switch model

Reed switch

D-A90

Solid state
switch

2-wire
3-wire

D-M9B, D-F8B
D-M9N, D-F8N

Load voltage
24 VAC or less, 48 VAC or less, 100 VAC or less
24 VDC or less, 48 VDC or less, 100 VDC or less
24 VDC (10 to 28 VDC)
24 VDC (4.5 to 28 VDC)

Refer to page 212 for a list of applicable auto switches.

204

Load current range

Indicator light

Applicable load

50mA, 40mA, 20mA

No

IC circuit,
Relay, PLC

2.5 to 40 mA
40 mA or less

Yes
Yes

24 VDC relay, PLC


24 VDC relay, PLC

Rotary table 1122-MSQ

Specifications
7
10
20
30
50
Air (Non-lube)
0.7MPa
1MPa
Not available
0.6MPa
0.1MPa
0.1MPa
0.2MPa
0.1MPa
0 to 60C (No freezing)
Not available
Rubber bumper
Shock absorber
Not available
1
1.5
2
6
7
25
48
81
39 116 116 294
Not available
0 to 190C
190C
0.2 to 0.7 s/90
0.2 to 1.0 s/90
Not available
0.2 to 0.7 s/90
M3 x 0.5
M5 x 0.8
Rc 1/8, M5 x 0.8

Size

Suction flow rate l/min (ANR)

1/2/3/7
10/20/30/50

11-: Fluorine grease


22-: Lithium soap based grease
11-: Grade 1
22-: Grade 1

Grease
Particle generation grade
(Refer to front matter pages 13 to 22 for details.)

Rotation range example

Size: 10 to 50
Counterclockwise

Flow control
equipment

The rotary table turns in the clockwise direction when the A port is pressurized, and in the counterclockwise direction when the B port is pressurized.
By adjusting the adjustment bolt, the rotation end can be set within the ranges shown in the drawing for the desired rotation angle.
The rotation angle can also be set on a type with internal absorber.
Size: 1 to 7

Air cylinder

Rotary actuator

With adjustment bolt


Maximum
operating pressure With internal shock absorber
Basic style
Minimum
operating pressure High precision style
Ambient and fluid temperature
With adjustment bolt
Cushion
With internal shock absorber
Allowable kinetic With adjustment bolt
energy (mJ)
With internal shock absorber
Angle adjustment range
Maximum rotation
With adjustment bolt
Rotation time
adjustment range With internal shock absorber
Port size

Air gripper

Directional control
valve

Size
Fluid

Suction flow rate of vacuum


suction type (Reference values)

Counterclockwise

A port

B port

Clockwise

wis

u
Maxim

on
ati
rot

c
dj k w is
us e
t m r o ta
e n tio n e
t ra
nge 9nd
5

n
ra

Note) The drawing shows the rotation range of the positioning pin hole.
The pin hole position in the drawing shows the counterclockwise rotation end when
the adjustment bolts A and B are tightened equally and the rotation is adjusted 180.

With adjustment bolt, internal shock absorber


Adjustment angle per rotation of angle adjustment bolt
8.2
10.0
10.9
10.2

Cloc

kw

Maxi

ise

mu

Fittings & Tubing

Adjustment bolt A
(For counterclockwise
rotation end adjustment)
Adjustment bolt B
(For clockwise rotation
end adjustment)

o
Cl A

C
o
dj u nt
us erc
tm lo c
ge
e n k w is
e
t ra
end
19
nge 9 rotation
0
5

2 2 .5

Clock
C
A d lo c k
jus wise
tm
e n t r o t a ti o n e n d
ran g e 9 5

C
Ad oun
jus ter
2 2.5
ng
tm clo c
e n t k w i s e r o t a ti o n e n d
e
19
ra n g
0
e 95

Adjustment bolt B
(For clockwise rotation
end adjustment)

Size
1
2
3
7

Positioning pin hole

on
ati
rot

Air preparation
equipment

Positioning pin hole


Adjustment bolt A
(For counterclockwise
rotation end adjustment)

ra

Note) The drawing shows the rotation range of the positioning pin hole.
The pin hole position in the drawing shows the counterclockwise rotation end when
the adjustment bolts A and B are tightened equally and the rotation is adjusted 180.

With adjustment bolt, internal shock absorber


Size
10
20
30
50
70
100
200

Adjustment angle per rotation of angle adjustment bolt


10.2
7.2
6.5
8.2
7.0
6.1
4.9

205

Pressure switch

A port

Clockwise

Clean gas filter

B port

Filter, Pressure
control equipment

B port

1122-

Rotary table

MSQ

Proper auto switch mounting position at rotation end


Size: 1 to 7

B
D-F8

D-F9, M9

Solid state switch


Size

Rotating angle

1
2
3
7

190
190
190
190

DM9
Operating angle m Hysteresis angle
55
10
45
10
40
10
40
10

A
20.9
22.8
24.4
28.7

B
16.9
18.8
20.4
24.7

DF8
Operating angle m Hysteresis angle
20
10
20
10
15
10
15
10

Operating angle m: Converts the operating range (Lm) of the auto switch into the rotation angle
Angle of hysteresis: The hysteresis of the auto switch is converted to degrees.

Size: 10 to 50
B
A

Magnet

Operating range at proper


mounting position (Lm/2)
Most sensitive position

Operating range of
single auto switch Lm

Reed switch
Size

Rotating angle

10
20
30
50

190
190
190
190

A
17
23
27
33

B
36
50
66
68

DA9, DA9V
Operating angle m Hysteresis angle
90
10
80
10
65
10
50
10

Solid state switch

A
21
27
31
37

Operating angle m: Converts the operating range (Lm) of the auto switch into the rotation angle
Angle of hysteresis: The hysteresis of the auto switch is converted to degrees.

206

B
40
54
60
72

DM9
Operating angle m Hysteresis angle
60
10
50
10
50
10
40
10

Rotary table 1122-MSQ

Dimensions: Size 1, 2, 3, 7

FE
HA
(UV)

WA

4 x JJ depth JK

e
ctiv
effe
WB th WC
dep

BI

XA

2 x J through

JA counterbore depth JB

27h8 27.5h8 14H8 4.5H8 8.2 13.5 29.5

29h8 29.5h8 14H8 5 H8 9.7 15.5 33.5

33h8 34h8 17H8 6 H8 9.7 15.5 36

39h8 40h8 20H8 7 H8 9.5 16.5 39.5

BA
2xP
Side port
(Plugged with a hexagon
socket head set screw
when front ports are used)

Effective
depth FB

Vacuum suction port

JD

AX

BB
S

AU
(Max. approx. SU)

BH

Q
(UU)

BG

2xP
Front port (Plugged with a
hexagon socket head set
screw when side ports are used)

Fittings & Tubing

AY

BC
BK

SD

Effective
depth
1.2

AW

2 x JU

(mm)

AU AV AW AX AY BA BB

28

2.8 11

8.2 5.5

1.5

35

39.6

30

3.6 12.6

9.2 7

37

45.1

34.5 4.4 15.5 10.5 8

2.5

43

46.7

41

50

59.2

BI

BJ BK

4.8 18.4 12.2 10

YA

Size

YB effective depth YC
(mm)

Size BC BD BE BG BH
1

4.5

32 17

5.5

34 18.5 12.6

11

5.5

5.5

DD

DE FA FB FD

JA JB

8.2 30

4.5

5.3 27h9 27.5h9 14H9 4.8

3.7

3.3

3.5

9.2 35

4.5

7.5 29h9 29.5h9 14H9 5.3

2.5

4.2 10

3.3

3.5

38 23

15.5 10.5 40

4.5

9.5 33h9 34 h9 17H9 5.3

2.5

4.2 10

4.2

7.5

4.5

45 30

18.4 12.2 50

2.5

4.5 11.5 4.2

7.5

4.5

39h9 40 h9 20H9 6.5

JC
M4 x 0.7
M4 x 0.7
M5 x 0.8
M5 x 0.8

JD JE
2.2
2.2
2.5
2.5

JF
JG
5.3 M4 x 0.7 4
5.3 M4 x 0.7 4
M4 x 0.7 4
6
M5 x 0.8 5
6

Air preparation
equipment

PA

DD
D
DE

FD
FA

2 x JC
Depth from bottom
(not including JD) JE

Directional control
valve

Flow control
equipment

DJ DL FE HA UV

Pressure switch

XB effective
depth XC

BE

BD

DI

Filter, Pressure
control equipment

22.5

(mm)
Size DH

Air gripper

DL

WF

AV
SF
A

Rotary actuator

BJ

DI
DH
DJ

2 x JF depth JG

8 x WD depth WE
(Circumference: 8 equivalents)

Air cylinder

High precision style: MSQAA

Basic style: MSQBA

JK
3.5
3.5
3.5
4.5

JU
M3 x 0.5
M4 x 0.7
M5 x 0.8
M6 x 1

P
M3 x 0.5
M3 x 0.5
M3 x 0.5
M5 x 0.8

PA
M3 x 0.5
M3 x 0.5
M3 x 0.5
M5 x 0.8

S SD SF SU UU WA WB WC

16

50.5 10.8 24.4 9.4 25

18

56

23

10

2H9

11.8 30.5 12

2H9

73.5 15.4 37.4 14.9 34.5 14

3H9

20.5 60

13.4 26.2 11.3 28

9.5 2H9

15.2 31

WD
M3 x 0.5
M3 x 0.5
M3 x 0.5
M4 x 0.7

WE WF XA XB XC YA YB YC
4.8

20 22.5 2H9

11

2H9

5.3

21 24.5 2H9

11.5 2H9

5.3

25 27

2H9

13.5 2H9

6.5

29 32.5 3H9

15.5 3H9

207

Clean gas filter

(mm)

JJ
Size
M3
x 0.5
1
2 M3 x 0.5
3 M3 x 0.5
7 M4 x 0.7

Rotary table 1122-MSQ

Dimensions: Size 10, 20, 30, 50

2
XA

2
WA

45

2-J through
JA counterbore depth JB

WB ctive
effe

8-WD (Circumference:
8 equivalents) depth WE
4-JJ depth 8

e
iv
ct
fe
ef XC
h
XB ept
d

Basic style: 1122- MSQBA

BE

22.5

th
dep
WC
WE

BD
M5 x 0.8 depth 5
(Vacuum suction port)
Effective
depth FB

DD
D
DE

BB

11.5

5.5

BC

FC

SD

AW

SE

2-JU

(UU)

HB

2-JC depth JD

2-P
Piping port

FA

2-M5 x 0.8
Piping port (Plugged)

AY
AU

AX

DF

BA

(Max. approx. SU)

BA

S
YC

AV
SF

YA

View

High precision style


1122- MSQAA
1122- MSQAR

DH
DG

Size
10
20
30
50

Size
10
20
30
50

AA
55.4
70.8
75.4
85.4

Size
10
20
30
50

JJ
M5 x 0.8
M6 x 1
M6 x 1
M8 x 1.25

208

A
50
65
70
80

(mm)
FU
31.5
34.7
34.7
51.7

AU AV AW
8.6 20 15.5
10.6 27.5 16
10.6 29 18.5
14 38 22
JU
M8 x 1
M10 x 1
M10 x 1
M14 x 1.5

Size
10
20
30
50

DG
45h8
60h8
65h8
75h8

DH
46h8
61h8
67h8
77h8

DI
20H8
28H8
32H8
35H8

DJ
35h8
40h8
48h8
54h8

FD
15.5
19.5
19.5
21.5

FE
9.5
13.5
13.5
15.5

AX AY BA BB BC BD
12 4 9.5 34.5 27.8 60
76
14 5 12 46 30
84
14 5 12 50 32
19 6 15.5 63 37.5 100

BE
27
34
37
50

D
45h9
60h9
65h9
75h9

DD
46h9
61h9
67h9
77h9

SF
45
60
65
75

SU
17.7
25
25
31.4

UU
59
65
68
77

WA WB
15 3H9
20.5 4H9
23 4H9
26.5 5H9

P
M5 x 0.8
M5 x 0.8
Rc 1/8
Rc 1/8

Q S SD SE
34 92 9 13
37 117 10 12
40 127 11.5 14
46 152 14.5 15

HA
24
30
30
34

(mm)
UV
63
73
76
87

DE DF
20H9 35h9
28H9 40h9
32H9 48h9
35H9 54h9
WC
3.5
4.5
4.5
5.5

FA
8
10
10
12

HA
(UV)

(Max. approx. FU)

FD

DI

FE

With internal shock absorber


1122- MSQAR
1122- MSQBR

YB effective
depth

A
AA

DJ

FB FC HB J
5 20 6.8
4
6 22 8.6
6
4.5 6 22 8.6
7 24 10.5
5

WD
M5 x 0.8
M6 x 1
M6 x 1
M8 x 1.25

WE
8
10
10
12

WF
32
43
48
55

XA
27
36
39
45

(mm)
JD
JA JB
JC
11 6.5 M8 x 1.25 12
14 8.5 M10 x 1.5 15
14 8.5 M10 x 1.5 15
18 10.5 M12 x 1.75 18
XB
3H9
4H9
4H9
5H9

XC
3.5
4.5
4.5
5.5

YA
19
24
28
33

YB
3H9
4H9
4H9
5H9

YC
3.5
4.5
4.5
5.5

Rotary actuators: Precautions 1

6. Consider the possibility of power source related


malfunctions that could occur.
On the pieces of equipment that rely on power sources such as
compressed air, electricity, or hydraulic pressure, adopt a
countermeasure that will prevent these pieces of equipment from
causing hazards to humans or damage to equipment in the event
of a malfunction in these power sources.
7. If a speed controller is provided in the exhaust restrictor,
implement a safety design taking the residual pressure into
consideration.
If air pressure is applied to the air supply side without residual
pressure in the exhaust side, the rotary actuator will operate at
abnormally high speeds, which could pose a hazard to humans
and damage the machinery and equipment.
8. Consider the behavior of the rotary actuator in the event of
an emergency stop.
Devise a system that ensures safety so that if a person engages
the emergency stop, or if a safety device is tripped during a
system malfunction such as a power outage, the halting of the
machine will not cause the movement of the rotary actuator to
pose a hazard to humans or damage the equipment.
9. Consider the behavior of the rotary actuator when restarting
after an emergency stop.
Devise a design that ensures safety so that the restarting of the
rotary actuator will not pose a hazard to humans or damage the
equipment.
When the actuator has to be reset at the starting position, install
safe manual control equipment.

3. Do not stop or hold the product at midpoint by keeping air


pressure in the product.
With the product lacking an external stopping mechanism, if the
directional control valve is closed to keep the air pressure in the
product in an attempt to stop the product at midpoint, it might not
be possible to maintain that stopped position due to an air
leakage. As a result, it could pose a hazard to humans and
damage machinery and equipment.

Caution
1. Do not operate the product in a low speed range below the
speed adjustment range specified for the product.
If the product is used in the low speed range below the specified
speed adjustment range, it could cause the product to stick, slip,
or to stop its movement.
2. Do not apply an external torque to the product that exceeds
the rated output.
If an external force that exceeds the product's rated output is
applied to the product, it could damage the product.
3. The holding torque of the rotating end of the double piston
style
With a double piston product, if the internal piston is stopped by
coming into contact with the angle adjustment screw or the cover,
the holding torque at the rotating end is one-half that of the actual
output.
4. If it is necessary to provide repeatability of the rotation angle,
directly stop the load externally.
Even with a product that is equipped with an angle adjuster, there
are times in which the initial rotation angle could change.
5. Do not use the product under hydraulic pressure.
The product will be damaged if it is used by applying hydraulic
pressure.
6. With the vane style product, if it is necessary to ensure a
rotation angle, make sure to use a minimum pressure of 0.3
MPa.

209

Rotary actuator
Air gripper
Directional control
valve
Flow control
equipment

5. Consider the possibility of a reduction in the circuit air


pressure that could be caused by power outages.
When actuator is used as clamping mechanism, there is a danger
of workpiece dropping if there is a decrease in clamping force due
to a drop in circuit pressure caused by a power outage.
Therefore, safety equipment should be installed to prevent
damage to machinery and bodily injury.

2. Provide a shock absorber if the kinetic energy that is applied


to the product exceeds the allowable value.
If the product is used in a state in which the kinetic energy
exceeds the allowable value, it could damage the product, which
could pose a hazard to humans and damage the machinery and
equipment.

Filter, Pressure
control equipment

4. There may be cases in which a speed reduction circuit or a


shock absorber is required.
If the driven object moves at high speeds or has a large weight, it
will be unfeasible for the rotary actuator's cushions alone to
absorb shocks. Therefore, provide a speed-reduction circuit to
reduce the rotary actuator's speed before the thrust is applied to
the cushions, or an external shock absorber to dampen the
shocks. If these countermeasures are taken, make sure to take
the rigidity of the mechanical equipment into consideration.

Warning
1. Select a speed within the product's allowable energy value.
If the product is used in a state in which the kinetic energy of the
load exceeds the allowable value, it could damage the product,
which could pose a hazard to humans and damage the
machinery and equipment.

Fittings & Tubing

3. Make sure that the secured portions will not loosen.


Be sure to adopt a reliable connecting method if the rotary
actuator is used very frequently or if it is used in a location that is
exposed to a large amount of vibrations.

Selection

Air preparation
equipment

2. If there is a chance that it will pose a hazard to humans,


install a protective cover.
If the moving portion of the product will pose a hazard to humans
or will damage machinery or equipment, provide a construction
that prevents direct contact with those areas.

Warning
10. Do not use the product as a shock absorber.
If an abnormal pressure or air leakage occurs, the rotary
actuator's speed reduction capability could become severely
effected, which could pose a hazard to humans and damage the
machinery and equipment.

Pressure switch

Warning
1. If the operation involves load fluctuations, ascending /
descending movements, or changes in frictional resistance,
make sure to provide safety measures.
Operating speed will increase, and bodily injury may occur, or
damage to the machinery itself may occur.

Caution on design

Clean gas filter

Caution on design

Air cylinder

Be sure to read before handling. Refer to main text for more detailed precautions on every series.

Rotary actuators: Precautions 2


Be sure to read before handling. Refer to main text for more detailed precautions on every series.

Mounting

Warning

Precautions when using external stoppers

1. Before adjusting the angle by supplying air pressure, take


appropriate measures to prevent the equipment from
rotating unnecessary.
When an adjustment is performed under air pressure, the
equipment could rotate and fall during the adjustment, depending
on the mounted posture of the equipment. As a result, it could
pose a hazard to humans and damage the machinery and
equipment.
2. Do not loosen the angle adjustment screw beyond the
allowable adjustment range.
The angle adjustment screw could pull out if it is loosened beyond
its allowable adjustment range, which could pose a hazard to
humans and damage the machinery and equipment.
3. Do not place a magnetic object near the product.
The auto switch is a magnetic sensing type. If a magnetic object
is placed close to it, the rotary actuator could operate suddenly,
which could pose a hazard to humans and damage the
machinery and equipment.
4. Do not modify the product.
By modifying the product, its strength could be affected, which
could lead the product to break. As a result, it could pose a
hazard to humans and damage the machinery and equipment.

If the kinetic energy that is generated by the load exceeds the


actuator's threshold value, an external dampening function must
be provided to absorb the energy.
Furthermore, with the CRA1 series, which is a single rack pinion
type, there is a backlash (within 1 at the rotation end) of the rack
pinion mechanism. Thus, an external stopper is required in order
to determine the correct angle.
External stopper
Provide a buffer angle

Provide a
buffer angle

Angle controlled
by the external
stopper

External
stopper
Figure 10

5. Do not enlarge the fixed throttle by modifying the pipe


connectors.
If the hole diameter is enlarged, the product's rotation speed
increases, causing the shock force to increase and damage the
product. As a result, it could pose a hazard to humans and
damage the machinery and equipment.
6. If shaft couplings are to be used, use those with angular
freedom.
If shaft couplings that lack angular freedom are used, they could
scrape due to eccentricity, leading to equipment malfunction and
product damage. As a result, it could pose a hazard to humans
and damage the machinery and equipment.
7. Do not apply to the shaft a load that exceeds the values
given.
If a load that exceeds the allowable value is applied to the
product, it could lead to equipment malfunction, which could pose
a hazard to humans and damage the machinery and equipment.
Provided that a dynamic load is not generated, a load that is
within the allowable radial/thrust load can be applied. However,
applications in which the load is applied directly to the shaft
should be avoided wherever possible. The methods such as
those described below are recommended to prevent the load
from being applied directly to the shaft in order to ensure a proper
operating condition.
Load

Thrust bearing

Load

Flexible coupling

Bearing

8. Place an external stopper in a position that is away from the


rotating shaft.
If the stopper is placed near the rotating shaft, the torque that is
generated by the product itself causes a reaction force that is
directed to the stopper to be applied to the rotating shaft, thus
leading the rotating shaft and the bearing to break. As a result, it
could pose a hazard to humans and damage the machinery and
equipment.

210

Rotation angle of actuator without


external stoppers
For external stopper use, some are provided with
an actuator with rotation angles of 100, 190
and 280, depending on the model.

External
stopper
becomes a fulcrum, and
the load's inertial force
is applied to the shaft as
a bending moment.

If an external stopper is
installed on the shaft
side opposite the load,
the
inertial
force
generated by the load is
applied directly to the
shaft.

Caution
1. Do not use organic solvent to wipe the area of the nameplate
that shows the model.
It will erase what is indicated on the nameplate.
2. Do not hit the rotating shaft by securing the body or hit the
body by securing the rotating shaft.
These actions could cause the shaft to bend or damage the
bearing. When a load must be coupled to the rotating shaft,
secure the rotating shaft.
3. Do not place your foot directly on the shaft or on the
equipment that is coupled to the shaft.
Placing one's weight directly onto the rotating shaft could cause
the rotating shaft or the bearing to become damaged.
4. If a product is equipped with an angle adjustment function,
use it within the specified adjustment range.
If the product is used outside the specified adjustment range, it
could lead to equipment malfunction or product damage. Refer to
the product specifications for details on the adjustment range of
the products.

Rotary actuators: Precautions 3


Air cylinder

Be sure to read before handling. Refer to main text for more detailed precautions on every series.

Air supply

Speed and bumper adjustment

1. Use clean air.


Do not use compressed air that contains synthetic oil, salt, and
corrosive gases in which chemicals and organic solvents are
present, because it could cause equipment damage or
malfunction.

1. To make a speed adjustment, gradually adjust starting from


the low speed end.
If the speed adjustment is performed from the high speed end, it
could damage the product. As a result, it could pose a hazard to
humans and damage the machinery and equipment.

Warning
1. Do not use the rotary actuator in an environment or location
that poses the risk of corrosion.
Refer to the respective construction diagram for details on the
materials used in the rotary actuator.

Rotary actuator
Air gripper
Directional control
valve
Flow control
equipment

Maintenance

Warning
1. Follow the procedures given in the operation manual to perform
a maintenance inspection. Improper handling could lead to
malfunction or damage the machinery and equipment.
2. During a maintenance inspection, do not disassemble the
equipment with electrical power or with an air supply applied.
3. After the product has been disassembled for inspection,
make sure to perform the appropriate functionality
inspection.
The product specifications cannot be met unless a functionality
inspection is performed.

Caution
1. For lubrication, use the type of grease that is used for the
respective product.
The use of a non-designated lubricant could damage the seals.
2. Series MSQ: Because sizes 1, 2, 3 and 7 require special tools,
they cannot be disassembled. Because sizes 10, 20, 30 and
50 have the table press fit into an angular type bearing, they
cannot be disassembled.

Filter, Pressure
control equipment

Operating environment

4. Do not apply an excessive force to loosen the cushion needle.


The needle itself is provided with a pull stop; however the pull
stop could be damaged if the needle is loosened through the
application of excessive force. As a result, it could pose a hazard
to humans and damage the machinery and equipment.

Fittings & Tubing

3. Ensure that the fluid and ambient temperature are within the
specified range.
If the fluid temperature is less than 5C, the moisture in the circuit
could freeze, causing damage to the seals and leading to
equipment malfunction. Therefore, take appropriate measures to
prevent freezing.

3. Do not use the rotary actuator with its cushion needle in the
fully closed state.
This could tear the seal, which could pose a hazard to humans
and damage the machinery and equipment.

Air preparation
equipment

2. Take countermeasures to ensure air quality, such as by


installing an aftercooler, air dryer, or drain catch.
Compressed air that contains a large amount of drainage could
cause the rotary actuator or other types of pneumatic equipment
to malfunction. Therefore, take appropriate measures to ensure
air quality, such as by proving an aftercooler, air dryer, or drain
catch.

2. The cushion needle is not adjusted at the time of shipment.


Therefore, an adjustment must be made in accordance with
the operating speed and the moment of inertia of the load.
The absorption of kinetic energy by the bumper is regulated by
the adjustment of the needle. An improper adjustment could lead
to damage of the equipment and the product. As a result, it could
pose a hazard to humans and damage the machinery and
equipment.

Pressure switch

Caution
1. Install an air filter.
Install an air filter upstream, near the valve. Select an air filter
with a filtration degree of 5 m or finer.

Warning

Clean gas filter

Warning

211

Low-Speed Rotary Table


Rack & Pinion Style

Series MSQX
Size: 10, 20, 30, 50

CRB2
-Z

How to Order
Basic

MSQ X B 10

CRBU2
CRB1

M9BW

MSU

Made to Order

Size

Low-speed specification

Refer to page 370 for details.

10
20
30
50

Number of
auto switches
Nil

S
n

Thread type
Port type
Size
M5
10, 20
Nil
Rc 1/8
G 1/8
TF
30, 50
NPT 1/8
TN
TT NPTF 1/8

CRA1
-Z

2 pcs.
1 pc.
n pcs.

CRA1
CRQ2

Auto switch
Nil

Standard
Made to Order

Without auto switch (Built-in magnet)


Nil
For applicable auto switch models, refer to the
table below.

With adjustment bolt

Diagnostic indication
(2-color display)
Water resistant
(2-color indication)

Indicator
light

Type
Solid state auto switch

Reed
auto switch

Electrical
entry

Load voltage

Wiring
(Output)

3-wire (NPN)
3-wire (PNP)
2-wire
3-wire (NPN)
Grommet Yes 3-wire (PNP)
2-wire
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire
Yes (NPN equiv.)
Grommet
2-wire
No

DC

Auto switch model


AC

Perpendicular

M9NV
M9N
M9PV
M9P
M9BV
M9B
M9NWV M9NW
M9PWV M9PW
M9BWV M9BW
M9NAV1 M9NA1
M9PAV1 M9PA1
M9BAV1 M9BA1

5 V, 12 V
12 V
24 V

5 V, 12 V
12 V
5 V, 12 V
12 V

24 V

5V
12 V

MSQ
MSZ
CRQ2X
MSQX

Applicable Auto Switches/Refer to pages 807 to 856 for detailed auto switch specification.
Special function

CRJ

A96V

A93V2
100 V
100 V or less A90V

In-line

Lead wire length (m)


Pre-wired
0.5 1 3 5
connector
(Nil) (M) (L) (Z)

MRQ
Applicable load

A96

IC
circuit

A93
A90

IC circuit

Relay,
PLC

IC
circuit

IC
circuit

Relay,
PLC

IC
circuit

1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction.
2 1 m type lead wire is only applicable to D-A93.
Auto switches marked with a are produced upon receipt of orders.
Lead wire length symbols: 0.5 m Nil (Example) M9NW
1 m M (Example) M9NWM
3 m L
(Example) M9NWL
5 m Z
(Example) M9NWZ
Refer to pages 843 and 844 for the details of solid
Auto switches are shipped together, (but not assembled).
state auto switch with pre-wired connector.

D-

369

Series MSQX
Specifications
10

Size

20

Fluid

30

50

Air (Non-lube)

Max. operating pressure

1 MPa

Min. operating pressure

0.1 MPa

Ambient and fluid temperature

0 to 60C (No freezing)

Cushion

Not attached

Angle adjustment range

0 to 190

Maximum rotation angle

190

End port

Port size

M5 x 0.8

Rc 1/8, G 1/8, NPT 1/8, NPTF 1/8


M5 x 0.8

Side port

Output (N m)

0.89

1.8

2.7

4.6

Output under the operating pressure at 0.5 MPa. Refer to page 341 for further information.
Front port

Side port

Symbol

Allowable Kinetic Energy and


Rotation Time Adjustment Range
Made to Order

Refer to page 376 for details.


Symbol

Specifications/Content
-X15 With external stopper

Size

Allowable kinetic energy (J) Stable operational rotation time adjustment range (s/90)

10

0.007

20

0.025

30

0.048

50

0.081

1 to 5

Note) If operated where the kinetic energy exceeds the allowable value, this may cause damage to the
internal parts and result in product failure. Please pay special attention to the kinetic energy levels
when designing, adjusting and during operation to avoid exceeding the allowable limit.

Weight
(g)

Size

10

20

30

50

Basic

500

940

1230

1990

Not including the weight of auto switch.

370

Low-Speed Rotary Table


Rack & Pinion Style

Series MSQX

Rotation Direction and Rotation Angle


The rotary table turns in the clockwise direction when the A port is pressurized, and in the counter-clockwise direction when the B port is pressurized.
By adjusting the adjustment bolt, the rotation end can be set within the range shown in the drawing for the desired rotation angle.

Counter-clockwise

22.5

Adjustment bolt B
(For clockwise
rotation end adjustment)

Clockwise

oc
Cl dju
a

i se
kw
Cloc

k
st wis
m er
en ot
t ra ation
nge end
95

With Adjustment Bolt


Adjustment angle per rotation of
angle adjustment screw

Size

10
20
30
50

m
imu
Max

10.2
7.2
6.5
8.2

CRBU2

o
ta unte
tio r-c
n e loc
nd kwise
ng
a d ju
e
stment
19
range 95
0

Adjustment bolt A
(For counter-clockwise
rotation end adjustment)

B port

CRB2
-Z

Positioning pin hole

A port

CRB1
MSU
CRJ
CRA1
-Z

ro

ro t

on
ati

CRA1

ra

CRQ2

Note) The drawing shows the rotation range of the positioning pin hole.
The pin hole position in the drawing shows the counter-clockwise
rotation end when the adjustment bolts A and B are tightened
equally and the rotation is adjusted 180.

MSQ
MSZ
CRQ2X
MSQX

Rotation Angle Range Example

MRQ

Various rotation ranges are possible as shown in the drawings below using adjustment bolts A and B.
(The drawings also show the rotation ranges of the positioning pin hole.)
The rotation angle can also be set on a type with inertial absorber.
Adjustment range by
adjustment bolt A

Positioning pin hole

Adjustment bolt A
(For counter-clockwise
rotation end adjustment)
Adjustment bolt B
(For clockwise
rotation end adjustment)

Adjustment range
by adjustment bolt B

190 (Maximum) Rotation

Pin hole rotation range


180 Rotation
Adjustment range by
adjustment bolt A

Adjustment range by
adjustment bolt A

Adjustment range by
adjustment bolt A

D-
Adjustment range
by adjustment bolt B

Adjustment range
by adjustment bolt B
90 Rotation

Adjustment range
by adjustment bolt B
90 Rotation

90 Rotation

371

Series MSQX
Table Displacement (Reference values)
The following graphs show the displacement
at point A, which is 100 mm apart from the
center of rotation, where the load is applied.

100
Arm

Load
Displacement

MSQXB10A

MSQXB20A

300

Displacement (m)

Displacement (m)

400

250

350

200

300
0

10

15

20

25

30

10

20

Load (N)

30

40

Load (N)

MSQXB30A

MSQXB50A
350

300

300

Displacement (m)

Displacement (m)

250

200

150

200

150

100

100
0

10

20

30

Load (N)

372

250

40

50

20

40

60

Load (N)

80

100

Low-Speed Rotary Table


Rack & Pinion Style

Series MSQX

Construction

CRB2
-Z

CRBU2
CRB1
MSU
CRJ
o i @5 @6 t
!1

!4 y !5 !6

@3 e r w@2

q @0 !8 @1 u @4 !2 !3 !7

CRA1
-Z

CRA1

!0 !9

CRQ2
MSQ
MSZ
CRQ2X
MSQX

MRQ
Component Parts

Component Parts

Description

No.

Material

No.

Description

Material

Body

Aluminum alloy

15

Wear ring

Cover

Aluminum alloy

16

Piston seal

Plate

Resin

17

Bearing

Bearing steel

Seal

NBR

18

Bearing

Bearing steel

End cover

Aluminum alloy

19

Cross recessed screw No. 0

Piston

Stainless steel

Pinion

Chrome molybdenum steel

Hexagon small nut

Adjustment bolt

10

20

Resin
NBR

Cross recessed screw

Steel wire

Size: 10

Stainless steel

Hexagon this socket head bolt Size: 20 to 50

Chrome molybdenum steel

Steel wire

21

Hexagon socket head cap screw

Stainless steel

Chrome molybdenum steel

22

Hexagon socket head cap screw

Stainless steel

Gasket

NBR

23

Push nut

Stainless steel

11

Gasket

NBR

24

Parallel pin

12

Table

Aluminum alloy

25

Seal washer

13

Bearing retainer

Aluminum alloy

26

Plug

14

Magnet

Carbon steel
NBR
Steel wire

Individual part cannot be shipped.

Replacement Parts
Part no.

Description
Seal kit
No.
Parts included
in seal kit

10

20

30

50

P523010-20
Description

P523020-20
Description

P523030-20
Description

P523040-20
Description

Qty. No.

Qty. No.

Qty. No.

Qty.

Seal

Seal

Seal

Seal

10

Gasket

10

Gasket

10

Gasket

10

Gasket

11

Gasket

11

Gasket

11

Gasket

11

Gasket

15

Wear ring

15

Wear ring

15

Wear ring

15

Wear ring

16

Piston seal

16

Piston seal

16

Piston seal

16

Piston seal

25

Seal washer

25

Seal washer

25

Seal washer

25

Seal washer

A set includes all parts above.


A grease pack (10 g) is included. When only a grease pack is needed, order with the following part number.
Replacement parts/Grease pack part no: P523010-21 (10 g)

373

D-

Series MSQX
Dimensions

tive
ffec

XA

t
dep

45

WA

e
WB h WC

4 x JJ depth 8
2xJ
JA counter bore depth JB

e
iv
ct
fe
ef XC

8 x WD depth WE (Circumference: 8 equivalents)

XB pth
e

Basic: MSQXBA

BE

22.5

WF

DD
D

BB

DE

CA

2 x JC depth JD

CB
AU

DG

BA

(Max. approx. SU)

Effective depth FC

DF
(Through)

AY
AX
AV
SF
A
AA

BA

YA

YB effective depth YC

SD

SE

AW
BC

FD

2 x JU

(UU)

2xP
Port

FA

Effective depth FB

BD

2 x M5 x 0.8
Port (plugged)

View

(mm)
Size AA

10
20
30
50

AU AV AW AX AY BA BB BC BD BE CA CB

55.4

50

6.6 20

70.8

65

75.4

70

85.4

80

12

7.6 27.5 16

14

12

46

7.6 29

18.5

14

12

50

22

19

15.5 63

10

15.5

38

9.5 34.5 27.8

DD DE DF DG FA FB

FC FD

JA

JB

60

27

4.5 28.5 45h9 46h9 20H9

15H9

4.5

13

6.8

11

6.5

30

76

34

17H9

10

2.5

6.5

17

8.6

14

8.5

32

84

37

6.5 33.5 65h9 67h9 32H9

12 22H9

10

4.5

6.5

17

8.6

14

8.5

37.5 100

50

13 26H9

12

7.5

20

10.5

18

10.5

10

30.5 60h9 61h9 28H9


37.5 75h9 77h9 35H9

(mm)
Size

JC

JD

JJ

10
20
30
50

M 8 x 1.25

12

M5 x 0.8

M10 x 1.5

15

M6 x 1

M10 x 1.5

15

M6 x 1

M12 x 1.75

18

M8 x 1.25

JU

M 8x1

M5 x 0.8

34

13

45

17.7 47

15

32

27

3H9 3.5

19

3H9 3.5

M10 x 1

37

117 10

12

60

25

54

20.5 4H9 4.5

M6 x 1

10

43

36

4H9 4.5

24

4H9 4.5

M10 x 1

M5 x 0.8
Rc 1/8

40

127 11.5 14

65

25

57

23

M6 x 1

10

48

39

4H9 4.5

28

4H9 4.5

M14 x 1.5

Rc 1/8

46

152 14.5 15

75

31.4 66

M8 x 1.25

12

55

45

5H9 5.5

33

5H9 5.5

92

SD SE SF SU UU WA WB WC

In addition to Rc 1/ 8, G 1/ 8, NPT 1/ 8 and NPTF 1/ 8 are also available.

374

3H9 3.5
4H9 4.5

26.5 5H9 5.5

WD
M5 x 0.8

WE WF XA XB XC YA YB YC

Low-Speed Rotary Table


Rack & Pinion Style

Series MSQX

Auto Switch Proper Mounting Position (at Rotation End Detection)


B
A

CRB2
-Z

CRBU2
CRB1
MSU

Magnet

Most sensitive
position

CRJ

Operating range at
proper mounting position (Lm/2)

CRA1
-Z

Operating range of
single auto switch (Lm)

CRA1
CRQ2

Size

10
20
30
50

Reed switch
Operating angle Hysteresis
angle
( m)

Solid state switch


Operating angle Hysteresis
B
angle
( m)

Rotation
angle

190

27

45

90

10

31

49

42

10

190

35

62

80

10

39

66

35

10

190

39

68

65

10

43

72

30

10

190

49

83

50

10

53

87

24

10

MSQ
MSZ
CRQ2X
MSQX

Operating angle m: Value of the operating range of single auto switch (Lm) as represented by rotation angle for shaft
Hysteresis angle: Value of the auto switch hysteresis as represented by angle

MRQ

Note) Since the above values are only provided as a guideline, they are not guaranteed.
In the actual setting, adjust them after confirming the auto switch operating condition.

D-

375

Series MSQX

Made to Order Specifications:


Please contact SMC for detailed specifications, lead times and prices.

Symbol

X150/X151/X152/X153

With External Stopper


Prevent holding torque from being halved at the rotation end.

How to Order

MSQXB 10
Port type
M5
Nil
Rc 1/8
G 1/8
TF
NPT 1/8
TN
NPTF 1/8
TT

Size
10, 20

Nil

X150
X151
X152
X153

Without auto switch (Built-in magnet)

Refer to page 369 for the part no. of


auto switches.

Standard, 180
Standard, 90
Symmetric type, 180
Symmetric type, 90

30, 50

Rotation angle
180
X150: Standard, 180

50

Weight
(g)

10

20

30

50

600
570

1150
1090

1460
1390

2390
2280

X152: Symmetric type, 180

X153: Symmetric type, 90


Connection port

30

90, 180
Each rotation end +3
5

Connection port

20

90

X151: Standard, 90

Connection port

10

Specifications other than the above are the same as standard.

Size
90 spec.
180 spec.

Connection port location and rotation angle

Auto switch

Specifications
Size
Rotation angle
Angle adjustment range

X150

Connection port

10
20
30
50

Port type

Connection port location


Symmetric type
Standard

Size

AX M9BW

Values not including the auto switch weight.

Dimensions
ng

ti
era

Ar

op

EB

ED

2xK
Hexagon socket head set screw

NA

NC

NB

EC

GB

ND

GA

(Max. EA)

EF
GD

ran

22.5

(Max. EE)

(
GE

GC 0.5

ge

Note)

EB

Note) This component does not exist for 180 type.

(mm)

GA

GB

GC

GD

GE

NA

NB

NC

ND

47.1
44.3
33.5
14
91.4
80
20
57.1
55.3
43
18
100
25
112.4
58.4
60.3
46
19.5 118.7
110
27
74.4
71.4
56
22
145.8
130
32
Dimensions other than the above are the same as standard.

15.6
19.5
21.5
28

11
14
14
18

7.5
9.5
9.5
11.5

45.2
56.4
61.5
72.9

M8 x 1
M10 x 1
M10 x 1
M14 x 1.5

10
14
14
19

5.5
8
8
8.5

12.5
16.5
16.5
19.5

4
4
4
6

Size

10
20
30
50

376

EA

EB

EC

ED

EE

EF

Series CRQ2X/MSQX

Specific Product Precautions


Be sure to read before handling.
Refer to front matter 35 for Safety Instructions and pages 4 to 14 for Rotary
Actuator and Auto Switch Precautions.

Selection

Caution

CRB2
-Z

1. Changes in speed occur in applications in which


there are changes to the load during operation, such
as the load being lifted (lowered) against gravity.
2. The purpose of this product is stable rotation at
low-speed.

CRBU2
CRB1
MSU

It does not provide any function to cushion the impact at the


operation start or end.

CRJ

3. Speed may vary at the rotation end depending on


operating conditions. (This phenomenon can be
avoided by using the external stopper.)

CRA1
-Z

CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX

MRQ

D-

377