What is a SEM?

SEM stands for scanning electron microscope. The SEM is a microscope that uses electrons instead
of light to form an image. Since their development in the early 1950's, scanning electron microscopes
have developed new areas of study in the medical and physical science communities. The SEM has
allowed researchers to examine a much bigger variety of specimens.
The scanning electron microscope has many advantages over traditional microscopes. The SEM has
a large depth of field, which allows more of a specimen to be in focus at one time. The SEM also has
much higher resolution, so closely spaced specimens can be magnified at much higher levels.
Because the SEM uses electromagnets rather than lenses, the researcher has much more control in
the degree of magnification. All of these advantages, as well as the actual strikingly clear images,
make the scanning electron microscope one of the most useful instruments in research today.

How does a SEM work?

Diagram courtesy of Iowa State University

The SEM is an instrument that produces a largely magnified image by using electrons instead of light
to form an image. A beam of electrons is produced at the top of the microscope by an electron gun.
The electron beam follows a vertical path through the microscope, which is held within a vacuum. The
beam travels through electromagnetic fields and lenses, which focus the beam down toward the
sample. Once the beam hits the sample, electrons and X-rays are ejected from the sample.

Detectors collect these X-rays, backscattered electrons, and secondary electrons and convert them
into a signal that is sent to a screen similar to a television screen. This produces the final image.

How is a sample prepared?

Because the SEM utilizes vacuum conditions and uses electrons to form an image, special
preparations must be done to the sample. All water must be removed from the samples because the
water would vaporize in the vacuum. All metals are conductive and require no preparation before
being used. All non-metals need to be made conductive by covering the sample with a thin layer of
conductive material. This is done by using a device called a "sputter coater."
The sputter coater uses an electric field and argon gas. The sample is placed in a small chamber that
is at a vacuum. Argon gas and an electric field cause an electron to be removed from the argon,
making the atoms positively charged. The argon ions then become attracted to a negatively charged
gold foil. The argon ions knock gold atoms from the surface of the gold foil. These gold atoms fall and
settle onto the surface of the sample producing a thin gold coating.

What are the radiation safety concerns?

The radiation safety concerns are related to the electrons that are backscattered from the sample, as
well as X-rays produced in the process. Most SEMs are extremely well shielded and do not produce
exposure rates greater than background. However, scanning electron microscopes are radiationgenerating devices and should be at least inventoried. The Indiana State Department of Health
requires that the machines be registered with their office using State Form 16866, Radiation Machine
Registration Application. It is also important that the integrity of the shielding is maintained, that all
existing interlocks are functioning, and that workers are aware of radiation safety considerations.

The main reasons for developing a SEM safety plan are:

to keep accurate inventory of all SEM's on campus (manufacturer/model, serial number,

location, contact person and phone number)

to warn workers of the risk of interfering with any safety devices (investigator needs to have
permission to override any interlocks or warning devices)
to make sure shielding is not compromised (exposure rate not greater than 0.5 mrem/hr at 5
cm from any surface of machine)
to let workers know who to contact in an emergency or if they have any questions

Scanning Electron Microscope Radiation Safety

Guidelines
1.
2.
3.
4.

5.

Safety evaluations will be performed initially when machine is

purchased and after machine has been moved.
Each machine should be key controlled when not in use. Interlocks,
if present, must remain operational unless approved by the RSO.
Shielding must be sufficient to maintain exposure rates less than 0.5
mrem/hr at 5 cm.
The Radiation Safety Office will keep inventory and survey
information on file in their offices. The SEM user should keep logbook of
any maintenance done on machine. RSO must be notified if any
modifications are made to the interlocks or any other safety devices.
The SEM user should also keep a copy of operating and emergency
procedures at the accelerator panel.
No survey meters or personnel dosimetry are required .

References:

Encyclopedia.Com

Iowa State SEM Homepage

Lawrence Livermore Radiation Safety Regulation, App. B, Summary of Radiation Generating

Devices, Radiation Safety Requirements
Virginia Tech Radiation Safety Pages

The disadvantages of a Scanning Electron Microscope start with the size and cost.
SEMs are expensive, large and must be housed in an area free of any possible electric,
magnetic or vibration interference.
Maintenance involves keeping a steady voltage, currents to electromagnetic coils and
circulation of cool water.
Special training is required to operate an SEM as well as prepare samples.

The preparation of samples can result in artifacts. The negative impact

can be minimized with knowledgeable experience researchers being able
to identify artifacts from actual data as well as preparation skill. There is
no absolute way to eliminate or identify all potential artifacts.
In addition, SEMs are limited to solid, inorganic samples small enough to
fit inside the vacuum chamber that can handle moderate vacuum
pressure.
Finally, SEMs carry a small risk of radiation exposure associated with the
electrons that scatter from beneath the sample surface.
The sample chamber is designed to prevent any electrical and magnetic
interference, which should eliminate the chance of radiation escaping the
chamber. Even though the risk is minimal, SEM operators and researchers
are advised to observe safety precautions.