Index

Abb6 error 319 best-fit straight line 38

abrasive processes 109 boring 109
accuracy improvement 328 broaching 103, 109
amplitude distribution 71 built-up edge (BUE) 100
amplitude parameters 50, 84
angle, effect of changing 126 caliblock 346
areal assessment 78 caliper system 21
2D characterization 78 cantilever mode 172
3D, plateau honing 79 capacitance micrometer 208
areal filtering 92 centre line average 69
parameters 83, 87 characteristic grinding value 115
and profile 81 characterization 94
sampling 92 chart
summit 91 height deviations 7
arithmetic average 69, 84 viewing angle 8
asymmetric hinge 337 chatter 117
atomic bit processes 125 chemical machining polishing 125
atomic force microscope (AFM) 165,203, climb milling 194
204, 209 clinometer 224
atomic force probe 210 circle spanning crests 31
autocorrelation function 71, 73, 74 cols 81
2D characterization 78 conality 298
3D, plateau honing 79 concentricity 284
areal assessment 78 confocal system 197
mechanism 74 constant diameter figure 241
autocorrelation and grinding 135 contact phenomena 145
mechanism 74 chemical 145
and unit events 134 tribology 146
autocovariance function 74 cosine instrument error 319, 320
average wavelength 57 crankshaft geometry, errors 291
390 Surfaces and their measurement

cross-axial problem 178 electrostatic force microscope (EFM) 204

cumulative sum method 127 et seq electrothermal processes 122
curvature measurement 225 engineer's flat 221
curves 58 envelope system 30
cusum techniques 127 et seq errors of application 365
cutting mechanism domain 139 errors of form 214 et seq, 291
cylinder characterization 215
ambiguous fits 300 cylindrical 293
asperity 300 straightness 215
axial symmetry 302 waviness 214
coaxiality 299
measurement 294 face milling 103
radial symmetry 302 FECO method 197
referred 297 feed, effect of 108
surface, referred 298 filter calibration 353
tilted 298 filter, Gaussian 26
cylindrical grinding 114 filtering 42
cylindricity 290 analogue 44
assessment 295 using convolutional transformation 43
definition 296 determining roughness profile 65
error specification 297 end effect 42
Goto method 296 ISOs 67
and sphericity 290 et seq and M system 40
phase corrected 45, 46
defect, singular 144 standard electrical 2RC 44, 45, 65
deformation 25 and surface texture 41
and surface texture 10 two-dimensional 92
depth of focus 186 finish, nomenclature by process 71
design, optimized 326 flow, and texture 149
Deutschke method 176 force and metrology loops 133
diamond turning 102 force regime map 143
diffractometer 190 form geometry, constraints 217
metrological freak 191 form and texture, integrated method 274
digital areal analysis 89 Fourier coefficient, fitting 40
directionality 83, 159 fractal surfaces 93
downcut milling 104 friction errors 334
drawings, representation on 367 frictional coefficient 148
dressing lead 116 function 3, 6
drilling 109 map 142, 215
dwell distance 152 and metrology 12, 13
and surface lay 148
eccentricity assessment 292 function summary 154
elastic design 334 functional parameters 85, 86, 87
elastic emission machining (EEM) 124
elastic spring fixtures 336 Gabor function 138
electronic spirit level 224 gap properties 142
electrochemical machining (ECM) 123 Gaussian filter 26
electrodischarge machining (EDM) 123 gloss meter 189
curvature measurement 225 grinding 110
 Index 391

centreless 112 Kelvin clamp 316

conventional 9
and surface finish 111 Lambert's Law 158
and surface texture 117 lapping 110, 120
laser force microscope (LFM) 204
handheld instrument 177 lay pattern 160
hardness detection 160
wheel 116 symbols 80
workpiece 116 length
height calibration 348 assessment 20
A1 standards 348 measurement 10
crystallographic method 349 sampling 20, 21, 22, 25, 40
step height method 349 traversing 19
height roundness calibration 351 linear movement tube 315
heterodyne linear spring mechanisms 336
follower 195, 196 linear symmetrical movement 338
method 195 load carrying capacity 148
optical follower 195 lobing 241
Sommargen heterodyne probe 196 local depth reference 37
hexapod systems 318
high spot count (HSC) 56 M system, and filtering 40
honing 110, 119 machining, unconventional 121
multipurpose 24 magnetic force microscope (MFM) 204
plateau 9, 119 manufacture measurement, and function 4
hybrid parameters 57 materials ratio 8, 71, 153
hysteresis 334 curve 60, 64
material selection 323
index 93 thermal effects 324
instrument calibration 166, 342 et seq mean line terminology 41
calibration specimens 343 measurement 96, 158 et seq
comparisons 166 friction 175
criteria 167 history 164
early 167 in-process 176
factors 166 in situ 177
integrated 179 loop 321
ISOs 342 I nanohardness 175
stylus 345,347 small 322
instrument performance, decline 310 trends in 200
interferometer, Mireau type 197 types o f 163
interferometry 192 mechanical processes 122
and surfaces 193 mechanical stability 326
intrinsic filtering 39 mechano-mechanical machining 124
intrinsic reference 134 metrology chain 144
inverse method 328 metrology instrument design 310 et seq
ion beam sputtering 125 error reduction
ISO standards 14 kinematic translation system 315
isotropy 160 kinematics 312, 313
metrology loop properties 320
(JIS) ISO 10 point height parameter 54 micrometer measurements 31
392 Surfaces and their measurement

micropositioning 208 polynomial fitting 39

milling and broaching 103 power analysis harmonics 136
mobility 318 power spectrum 135
motif methods 33 probability density curve 59
and function 155 process 5
parameters 35, 155 control 127
procedure 36 and surface finish 97
roughness 34 profile
waviness35 classification from parameters 48, 49
multiple tooth milling 107 filters 18
multistep method 330 at fixed spacing 6
non-periodic profile 28
n bearing ratio 86 optical methods 17
N values 70 parameter characterization 48, 49
nanogrinding 118 periodic 29
Nanostep 181 primary 19
near field scanning optical microscope filtered and unfiltered 66
(NSOM) 205 record 161
noise dissipation 323 reference planes 18, 19
Nomarsky differential method 197, 198 roughness, 10, 19, 48
non-roundness parameters 283 sine wave 5
numerical analysis 361 et seq total 19
numerical convergence 91 traced 19
triangular approximation 5
oil drop 160 waviness 19, 48
optical types 50
edge enhancement 187 pseudo-kinematic design 317
methods 165, 186 et seq
stylus 188 R3y55
tactile 199 R3z55
path length 186 R parameter 51
penetration 186 R53
probe 187 R value 53
Rt53
parameters R/;54
classification 69 R,m 54
determination of 62 Ru54
dynamic 155 Rv53
rash 69 R 54
simple 69 random process analysis 71, 72, 73
static 155 reaming 109
peak count Pc 56 reference 169
peak counting 152 curved 170
peak loading 152 intrinsic 170
peripheral milling 103 software 169
pick-up weight 182 reference line
piezoelectric devices 208 E line system 30, 32
polishing 120 shape of 30
polygonation 242 regulating wheel, truing 114
 Index 393

Releaux triangle 241 limacon 257 et seq

relocation, to measure wear 162 magnification and zero suppression
repeat method 331 255
resolution, optical 186 multiple floating skid method 247
reversal method 328 partial arc determination 270
root mean square 84 best-fit reference 271
roughness 27 radial slope 248
effect of feed 108 rotating spindle method 249, 250
evaluation 47 rotating table 251
and finishing processes 8 standards 368
grades 70 stylus tree 250
and processes 97 stylus, use of 237
profile 47, 49 terminology 42
by filtering 65 and texture 236
parameters, measurement 28 tilt 287
surface pattern 106 turning 9
types 50 variable error removal method 247
turning 98 vee-block method 245
roundness 325 et seq run-out total 301
assessment 263 et seq
best fit parameters 266 saddle points 81
least squares method 263 sample guides 367
minimum zone method 264, 267 sampling 361 et seq
plug guage 264 criteria 363
ring guage method 263 traversing 19
atypical indentation 280 sampling length 20, 21, 22, 25, 27, 40
average wavelength 281 assessment 20
checks 290 choice of 65
chordal methods 245,246 implementing concept 26
coordinates, choice of 240 measurement 10
curvature 273 roughness 27
diametral methods 243, 244 scanning electron microscope (SEM) 165
display 238 scanning ion conductance microscope
Cartesian 239 (SICM) 204
filtering 277 scanning microscopes 202 et seq
polar 239 electron scanning mode (ESM) 202
dr~dO 272 'horns' of metrology 211
Fourier analysis, use of 242 scanning thermal microscope (STM) 204
and function 237 scanning tunnelling microscope (STM) 165,
functional 278 203,205 et seq
harmonic problems 279 Shewhart chart 127
alternatives 281 side acting gauge 172
and manufacture 236 skew 84
measurement skewness 58
axes alignment and misalignment 286 skids 170
caliper system 253 effect of 171
direction 237 smoothing 121
eccentricity 287 software 361 et seq
horizontal surface, around 285 space frequency functions 88, 136, 138
394 Surfaces and their measurement

spacing parameter 55 caliper system 21

spanzipfel 101 deviations 2
spark-out 115 errors 2
spectral analysis sub-harmonic and total and function 13
spectrum 137 nature of 7
sphericity 302 roles of 3
coordinate system 303 simulated system 82
minimum zone measurement mehod 305 and statistics 143
partial 304 texture, and function 141
sputtering 125 usefulness 2
standards, chain 357 uses 4
out of roundness 357 surface models 151
straightness 218 surface parameters, types of 143
assessment and classification 225 surface skin, cross section 9
best-fit line 226 surfaces
least-fit methods 226 true and distorted 8
straight edge, use of 229
measurement 218 Talystep 180, 327
angular method 223 teeth setting 105
direct approach 219 template stack 156
laser 229 tenpoint height 84
surface plate 230 texture 88
three-corner plate 231 and flow 149
triangular cell 232 tilted cylinder 333
'Union Jack' method tool angle 106
zonal methods 227 tool geometry, effect of 99
Steifal exchange 228 tolerances 150
strict stylus system 323 total integrating sphere 190
stylus 165, 168 transducer
alignment 332 arcuate 180
damage 172 axial 180
fast tracking 181 traversing direction 68
methods 165 tribology, examples
slope effect 169 contact 146
usage 174, 332 corrosion 150
summit appearance 90 lubrication 147
superfinishing 119 running-in, shakedown 149
surface bandwidth 171 tolerances 150
surface damage index 174 trigonal sampling 91
surface finish, and process 97 type D standards 354
instrumentation 163
measurement 158 et seq, 163 unit event 145
surface geometry, quality regimes 216 and autocorrelation 134
surface information 79 upcut milling 104
surface lay 148
surface measurement, in manufacture 3 variables
properties, and scale of size 12 process 113
surface metrology, nature of 2 set-up 113
breakdown 11 system 113
 Index 395

vectorial tolerancing 151 profile 48, 49

vibrating tables 355 and surface texture 10
visual kurtosis 162 wedge technique 221
visual skew 162 wheel tool vibration modes 138
visualization 7, 16 Wigner distribution 88
analysis 138
Wankel epitrochoid 307 function 138
wavelength 200 workpiece cleaning 339
wavelet filters 88
wavelet function 138 X-ray interferometer 350
wavelet theory 88
waviness 1O, 24 zonal points