Operation of the new Implantation Chamber at the GLM

branch of ISOLDE
Christoph Pohl1), Dr. Juliana Schell2), Dr. Matthias Nagl3)
1)Universitt Leipzig, 2)CERNISOLDE; Universitt Essen, 3)Universitt Gttingen

Start of the measurement

sequence by the user User Interactions:
The interactions of the user are mostly limited to exchanging the
sample and selecting the implantation parameters through a
webbrowser. This greatly enhances the saftey of the new
Is the chamber sealed off
from the outside?
implantation chamber.

yes no

Hardware and Software:

Seal the turbo-pumps Alert user and
Every part of the chamber is connected to a Single Board
from the fore-pump; abort measurement Computer (SBC), which runs a web-application that manages the
Open the valve of the sequence interactions with user. Multiple safety-locks prevent damage to
bypass system to start components of the chamber through misuse.
the evacuation
Reconnect the
turbopumps to
the fore-pump
Continuous
surveillance of
the pressure in
Vacuum System:
the sample The vacuum system consists of two turbopumps, as well as one
loading chamber fore-pump. The system is designed in a way that makes an
Disconnect bypass
and bypass evacuation of the sample loading chamber in less than 10 minutes
system and open valves
system
connecting turbopumps possible. Every step of the evacuation process is monitored by
and sample loading pressure gauges.
chamber

Connect beam and sample Sample Transportation System:

chamber by opening the gate valve Two lineare stages mounted face-to-face on a gear wheel
transport the sample into the beam line chamber. There, the
sample can be rotated to facilitate tilted implantations.
The sample is placed inside the chamber with the help of a
Move sampleholder
manipulator to protect the user. During implantations,
in the right position into
the beam chamber with temperature and ion current on the sample can be measured.
the sample transport
system

Are tilted Beam Line Chamber:

implantations This chamber is always evacuated and can only be connected to
necessary? yes the sample chamber or the beam line when the pressure is below
a certain threshold.
Rotate sample
no
holder to the
Ion optical components allow for beam tuning inside and further
desired angle downstream of the chamber.

Continuous Open valve connecting the

measurement of beam chamber to the GLM line;
ion current and Start of the implantations
sample
temperature

Move sample
holder back into the
sample loading
chamber

Close all valves

connecting to the
sample loading
chamber

Open venting valve;

Repressurize the sample
loading chamber Circuit diagram of the new ISOLDE implantation chambers layout.
Reprinted from NextGeneration Perturbed Angular Correlation Spectroscopy, M. Nagl,
2014