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M E A S U R E M E N T G E N E R A L C ATA L O G
High Precision Measurement

General Catalog
Laser Displacement Sensors | 2D/3D Laser Displacement Sensors | Spectral-Interference Laser Displacement Meters |
Laser Confocal Displacement Meters | Optical Micrometers | 2D Measurement Sensors
K E Y E N C E M e a s u r e m e n t
KEYENCE Measurement
Technology Evolution
KEYENCE Corporation has continuously developed measurement
technolog y for over 40 years. Each generation of measurement systems
provided additional capabilities and significant improvements in
inspection quality.
E3CMOS 2D Laser
Newly developed high
sensitivity receiver enables
highly stable and accurate
2D measurement.
Surface Scanning
Laser Confocal
Surface scanning provides a new
Confocal System level of stability and flexibility. CCD Triangulation
Revolutionary system enables
CCD based receiver element
new measurement capabilities for
enables stable measurement
transparent materials.
on any material.
LED+PSD System
Small sensor head and
robust controller. LASER+PSD System
Semiconductor laser enables
small sensor head and high CCD Optical Micrometer
stability on shiny targets. Innovative CCD based system
enables high repeatability and
1980
high speed.
History of development
2
T e c h n o l o g y E v o l u t i o n
Spectral Interferometry
Original principle provides nanometer level
measurement in a small sensor head design.
High-speed
2D/3D Laser Scanner
64000 profiles per second allow
precision inspection of even the most
difficult parts.
Ultra High Speed Laser

Displacement
Completely original design device achieves
worlds fastest sampling rate (392 kHz).
High-speed Optical Micrometer

Stable measurement thanks to 16000 samples per
second, the fastest in its class.
The original optical design makes possible
2D Micrometer long-term stability and high maintainability,
Inline imaging system measures
providing the ultimate in on-site usability.
2 dimensions in with sub-micron
precision.
2014 and Beyond

3
INDEX
Laser Triangulation
Ultra High-Speed/High-Accuracy
LK-G5000 Series
Laser Displacement Sensor
High-Speed, High-Accuracy
LK-G3000 Series
CCD Laser Displacement Sensor
High-speed 2D/3D Laser

LJ-V7000 Series
Scanner
High-Accuracy 2D Laser
LJ-G Series
Displacement Sensor
Spectral Interferometer
Micro-Head Spectral-Interference
SI-F1000 Series
Laser Displacement Meter
Spectral-Interference
SI-F80R Series
Wafer Thickness Meter
Confocal Laser
Surface Scanning Laser
LT-9000 Series
Confocal Displacement Meter
Optical Micrometer
LS-9000 Series High-Speed Optical Micrometer
LS-7000 Series CCD Optical Micrometer
High-Speed
TM-3000 Series
2D Measurement Sensor
4
LK-G5000 Series
P.10
I Fastest in the World 392 kHz
I Best linearity in its Class 0.02% of F.S.
I Connect up to 12 sensor heads/network capable
I Sampling rate of 50 kHz
LK-G3000 Series
P.18
I Linearity of 0.05% of F.S.
I Repeatability down to 0.01m 0.0004 Mil
I Can measure diffuse, specular, transparent or translucent targets
I Wide beam spot models are available
LJ-V7000 Series
P.24
I An emphasis on inline measurement
I The world's fastest at 64,000 profiles/sec.
I Blue laser optical system
I Linearity of 0.1% of F.S.
P.32
LJ-G Series
I High-speed sampling
I Simultaneous measurement/judgment of up to 8 features
I Stable measurement for all targets
SI-F1000 Series
P.38
I Resolution of 0.001 m 0.00004 Mil
I Micro-head size of 2 mm 0.08"
I Spectral interference method
SI-F80R Series
P.44
I Resolution of 0.001 m 0.00004 Mil
I Sampling speed of 5 kHz
I Working distance 80 mm 3.15"
LT-9000 Series
I Precise 2 m 0.08 Mil diameter beam spot
I 0.01 m 0.0004 Mil resolution P.46
LS-9000 Series
I High-speed 16000 samples/second
I
I
I
Smallest detectable object 10 m 0.39 Mil
Tilt correction and transmitter/receiver position measurement
Equipped with a wide variety of measurement functions
P.50 LS-7000 Series
P.58
I High repeatability 0.06m 0.002 Mil
I High speed 2400 samples/second
I Maintenance-free design
TM-3000 Series
P.64
I Multi-point 2D measurement
I Tilt correction for inline measurement
I High-speed sampling of 5.5 ms
5
PRINCIPLE
PRINCIPLE
LK-G5000 Series Measurement Principle (Triangulation type) HIGH-SPEED WIDE RANGE

The semiconductor laser emits the laser beam to the target as shown below. The light reflected off the target is focused by the ernostar
lens and forms an image on the light-receiving element. The position of the beam spot on the receiving element varies with the distance
to the target. This variation is evaluated and converted into a measurement of target position.
At the reference distance At a short distance At a long distance
Semiconductor Light-receiving Semiconductor Light-receiving Semiconductor Light-receiving

laser element laser element laser element
Transmitter Transmitter
lens lens
Transmitter
lens Ernostar Ernostar Ernostar
lens lens lens
Light-receiving Light-receiving Light-receiving

element element element
LJ-V7000 Series Measurement Principle
Cylindrical lens
Semiconductor Lasers
Measurement principle
GP64-Processor A laser beam that has been expanded into a band
shape is diffusely reflected from the surface of
the target. This reflected light is formed on the
HSE3-CMOS and by detecting changes in the
position and shape of the reflection, it is possible
2D Ernostar lens to measure the position of various points along the
surface of the target.
HSE3-CMOS
SI Series measurement principles (Spectral-Interference type) micro-head ultra high accuracy
Spectroscopic unit
SI-F01U
Sensor head
Polarization maintaining
Light source (SLD)
optical fiber
SI-F01
Spectro-
scope Interference light Emitted light
Waveform Reference reflection surface Target
Actual size analysis
Diffraction
CCD grating
Displacement data SLD: Super Luminescent Diode
SLD Optical interference method Spectroscopic analysis

Part of the broad wavelength light The two reflected light beams interfere Splitting the returned light into different
emitted from the SLD is reflected by with each other. The intensity of the light wavelengths with a diffraction grating
the reference reflector mounted in the with a specific wavelength is determined produces an optical intensity distribution
sensor head, while the part that passes according to the distance between the for a specific wavelength band. The
the reference surface is mirror-reflected reference surface and the target. The distance to the target is obtained by
on the target and returns into the head. relative maximum interference is reached carrying out waveform analysis on this
when the determined distance is an distribution.
integral multiple of the wavelength.
6
LK-G5000 Series
LT-9000 Series Measurement Principle (Confocal type) CLEAR TARGET THICKNESS HIGH-ACCURACY
High-accuracy measurement method uses the confocal principle and tuning fork
The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of
a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By
LK-G3000 Series
measuring the exact position of the objective lens when the light enters the light-receiving element, the target height can be determined.
The sensor measures the distance to the target surface accurately without being affected by the material, color, or angle of the target.
When the focal point is not on the target surface When the focal point is on the target surface
Semiconductor Semiconductor
laser laser
Light-receiving Light-receiving
LJ-V7000 Series
element element
Pinhole The received light Pinhole The received light
Tuning fork intensity is low. Tuning fork intensity is low.
Sensor Sensor
A small amount of received light All of the received light passes

passes through the pinhole. through the pinhole.
LJ-G Series
LS-9000 Series Measurement Principle (Thrubeam type) HIGH-ACCURACY LONG LIFE
High-speed exposure CMOS

Proprietary designed measurement High-intensity Green-LED
CMOS features an integrated High-intensity Green LED lasts longer
amplifier to maximize performance than traditional LED light sources
and speed. while providing high intensity and
SI-F1000 Series
evenly-distributed lighting.
Target Position CMOS
The CMOS measures the position High performance condenser
between the transmitter and Lens unit efficiently focuses LED light.
receiver
Monitor CMOS
The Monitor CMOS tracks
workpiece inclination to
automatically correct for tilt errors.
SI-F80R Series
Light-receiving element Improvement over the laser-scanning method
The green LED light is distributed as a uniform, parallel beam and
is applied to a target. The edges between the bright and dark
areas on the CCD detected and used to calculate a measurement
value. The conventional scanning method as shown in the figure
LT-9000 Series
on the left uses a high speed motor, which limits the sensor's
Polygon mirror Motor
durability and stability. The solid state LS-9000 Series solves this
problem and ensures excellent durability.
TM Series measurement principles (2D Thrubeam type) MICRO-HEAD ULTRA HIGH ACCURACY
LS-9000 Series
Telecentric optical system
Telecentric lens system ensures that the
target image on the receiver element does not
depend on target position.
Principle of measurement
A collimated green LED beam is used to generate a shadow
on the high precision CMOS receiver. This shadow is then
analyzed to produce two dimensional measurements of
LS-7000 Series
distances, angle, etc.
Telecentric lens Collimator lens
Mirror Mirror
TM-3000 Series
Target Lens
High luminance InGaN green LED Lens
Diffusion
The newly developed InGaN LED system unit
provides consistent, noise resistant
illumination. In addition, because the Receiver Transmitter
system is LED based, there are none CMOS LED
of the optical hazards associated with
lasers.
7
SUCCESSFUL APPLICATIONS
SUCCESSFUL APPLICATION
Thickness
Substrate thickness measurement of Measurements of glass sheet thickness, Thickness measurement of a wafer
solar cells curvature, and parallelism
LK-G5000 Series P.10 LK-G5000 Series P.10 SI-F80R Series P.44
Height and Step Height
HDD arm assembly position Height and width measurement of rubber Height control of dispenser
overlap
LK-G5000 Series P.10 LJ-V7000 Series P.24 LK-G3000 Series P.18
Width and Outside Diameter
Drill bit outer diameter measurement Roller outer diameter measurement Film width measurement
TM-3000 Series P.64 LS-9000 Series P.50 LS-7000 Series P.58
8
LK-G5000 Series
Eccentricity and Vibration
LK-G3000 Series
LJ-V7000 Series
Disk rotor warpage measurement Tire runout measurement Ultrasonic welder monitoring
LK-G5000 Series P.10 LK-G5000 Series P.10 LK-G5000 Series P.10
LJ-G Series
Position Measurement
SI-F1000 Series
SI-F80R Series
Precision stage positioning Feedback control of a welder Position tracking of high temperature steel
LT-9000 Series
pipe
SI Series P.38 LJ-V7000 Series P.24 LK-G3000 Series P.18
Profile and Contour
LS-9000 Series
LS-7000 Series
TM-3000 Series
Warpage measurement of a circuit board Ampoule shape inspection Thermal expansion of a lithium-ion battery.
LK-G5000 Series P.10 TM-3000 Series P.64 LJ-V7000 Series P.24
9
LK-G5000 Series
Ultra High-Speed/HighAccuracy
Laser Displacement Sensor
NEW
LK-G5000 Series
Features
Fastest in the World 392 kHz
Best linearity in its Class 0.02% of F.S.
Connect up to 12 sensor heads/network capable
Expert Engineering Sites

A new site with answers to all of your difficult
measurement application questions
www.keyence.com/products/
measure/index.jsp
Best specifications in class
Highest Repeatability in its Class Highest Accuracy in its Class Fastest in the World
0.005 m 0.0002 Mil 0.02 % 392 kHz

The need to improve product quality makes High-linearity enhances the LK-G5000's The world's fastest sampling rate not only
high performance critical. The LK-G5000 capabilities. By taking advantage of new captures displacement of moving or rotating
Series provides the highest repeatability in its technology, the series provides high targets, but also increases stability in all
class and is highly capable in any application. performance with the high accuracy that is manner of applications.
increasingly required.
Selectable variations
Wide spot type Focused spot type Specular reflection type

(2.5x conventional models) (25 m 0.98 Mil) Transparent/mirror surface
Stable measurement on coarse targets Optimal for fine or profile measurements measurement
Surfaces that may appear flat, once magnified The smallest spot diameter in its class of The LK-G5000 Series includes a group of
will often contain minute projections and 25 m 0.98 Mil (LK-H022) can measure heads specifically designed for use on highly
depressions. This microscopic surface any target, from fine components to profile reflective targets such as glass or other mirror
roughness can often cause measurement measurements, with the highest level of surfaces. These heads are available with wide
errors with conventional focused spot accuracy in the industry. or focused beam spots and are ideally suited
sensors. By using a sensor head with a wide for high accuracy measurements on such
beam spot, the surfaces.
effect of the
uneven surface
is averaged
and stable
measurements
of even coarse
targets are
possible.
2x wider than
conventional model
10
LK-G5000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
Active layer measurement of solar modules Position control of an air knife Measurements of glass board thickness,
warpage, and parallelism
Lineup
LJ-G Series
Sensor Head
Measurement type Reference Distance & Measurement Range Repeatability Model
80.5 mm 0.32" 0.02" 0.005 m 0.0002 Mil LK-H008W
203 mm 0.79" 0.12" 0.02 m 0.0008 Mil LK-H027
SI-F1000 Series
WIDE SPOT TYPE 5010 mm 1.97" 0.39" 0.025 m 0.001 Mil LK-H057
8018 mm 3.15" 0.71" 0.1 m 0.004 Mil LK-H087
15040 mm 5.91" 1.57" 0.25 m 0.01 Mil LK-H157
80.5 mm 0.32" 0.02" 0.005 m 0.0002 Mil LK-H008
203 mm 0.79" 0.12" 0.02 m 0.0008 Mil LK-H022
FOCUSED SPOT TYPE 5010 mm 1.97" 0.39" 0.025 m 0.001 Mil LK-H052
SI-F80R Series
8018 mm 3.15" 0.71" 0.1 m 0.004 Mil LK-H082
15040 mm 5.91" 1.57" 0.25 m 0.001 Mil LK-H152
80.5 mm 0.32" 0.02" 0.005 m 0.0002 Mil LK-H008(W)
16.12.8 mm 0.63" 0.11" 0.02 m 0.0008 Mil LK-H027K
SPECULAR REFLECTION TYPE 46.35.2 mm 1.82" 0.20" 0.025 m 0.001 Mil LK-H057K
LT-9000 Series
76.7 -17.6 mm/+14.5 mm 3.02" -0.69"/+0.57" 0.1 m 0.004 Mil LK-H087 & LK-F3
147.5 -39.5 mm /+24.4 mm 5.81" -1.56"/+0.96" 0.25 m 0.01 Mil LK-H157 & LK-F2
Main controller Display
LS-9000 Series
TM
All-in-one type Separate display type Additional head unit CC-Link unit DeviceNet unit Touch panel display Compact display
LK-G5001(P)V LK-G5001(P) LK-HA100 LK-CC100 LK-DN100 LK-HD1001 LK-HD500
LS-7000 Series
Configuration Cable Neutral density filter

Software
Sensor head-to- Extension cable between Controller-to-display I/O Cable and For LK-H08x
controller cable the head and controller connection cable Connector
TM-3000 Series
LK-Navigator2 LK-F3
LK-H2 (0.7, 2, 5, 10, 20, 30 m) cable (5, 10 m) 0.33 m 1.08' : OP-84427 OP-51657 For LK-H15x
(2.30', 6.56', 16.4', (16.4', 32.81') 3 m 9.84': OP-51655
32.81',65.62', 98.43') LK-F2
CB-AxxE 10 m 32.81': OP-51656 Ethernet cable
CB-Axx
OP-66843
11
LK-G5000 Series
Convenient calculation functions

Instantly calculates values based on measurements obtained by more than one head, enabling the user to easily set complicated calculations inside
the controller that were conventionally done with PLCs or PCs.
Standard Step Measurement Maximum/Minimum Measurement Flatness Measurement

Calculates the differences Calculates the maximum Calculates the difference
between a reference and/or minimum values. between the maximum
point and each B B and minimum values B
measuring point. among the
A A A C
C C measurement
points.
Measured value1=B-A Measured value2=B-C Measured value1=MAX (A,B,C...) Measured value1=MAX (A,B,C...)MIN (A,B,C...)...
Measured value3=A-C Measured value2=MIN (A,B,C...)
Warpage Measurement Multi-Point Thickness Measurement Average Height Measurement

Calculates the Calculates the Calculates the
amount of warpage. thickness with each average height.
C pair of sensors. A B C B C
A B
A D
D E F
Measured value1=B-(A+C)/2 Measured value1=X+ (A+D) Measured value2=Y+ (B+E) Measured value1=Ave (A,B,C,D,...)
Measured value3=Z+ (C+F)...
Measurement of Velocity (m/s), Acceleration (m/s2)

The LK-G5000 Series is equipped with a function to directly measure the speed (m/s)
and acceleration (m/s2) of targets. Just select the type of measurement: displacement,
speed, or acceleration. Using the differential processing circuit inside the controller, it
is possible to directly output or evaluate measurements that were previously calculated
externally. The LK-G5000 Series is suitable for lightweight, easily deformed, and high-
temperature targets which are difficult to measure with contact accelerometers.
Example of measurement of stage movement
Displacement Speed Acceleration Vibration test of high-temperature-muffler
Data filter functions made easy

4 types of easy to use data processing filters are incorporated directly in the controller. The filters are user selectable for ease of use.
Median filter High pass filter

Removes any intermittent noise in the output. Captures sudden changes and removes low frequency variations.
Unfiltered wave pattern Wave pattern when using the Unfiltered wave pattern Wave pattern when using the high
median filter pass filter
Moving average filter Low pass filter

Averages the measured values to reduce high the overall noise level in the mea- Captures moderate changes while removing high frequency noise.
surement.
Unfiltered wave pattern Wave pattern when using the Unfiltered wave pattern Wave pattern when using the low
average filter pass filter
12
LK-G5000 Series
LK-G5000 Series
Specifications
Controller
Main unit/head expansion unit
Single unit type LK-G5001V LK-G5001PV
Model LK-HA100
Separate type LK-G5001/LK-HD500 LK-G5001P/LK-HD500
LK-G3000 Series
Designation Main controller Head expansion unit
Sensor head compatibility Compatible
No. of connectable sensor heads 2 1
Minimum display unit 0.001 m 0.0001 Mil
Display
Display range 999.999 m to 9999.99 mm 9.99999 Mil to 99.9999" (7 settings selectable) N/A
(LK-HD500)
Display cycle Approx. 10 times/sec.
Display port Either the display unit (LK-HD500) or N/A

Display
LJ-V7000 Series
dedicated touch panel (LK-HD1001) can be connected
interface
LED indicator LASER ON POWER ON, STABILITY, BRIGHT, DARK
Analog voltage output 10 V output, Output impedance: 100
Analog current output 4 to 20 mA, Maximum load resistance: 350
No. of analog outputs 2 1
TIMING1 input*1 Non-voltage input Voltage input
Terminal RESET1 input*1
block Auto-zero1 input*1 Non-voltage input Voltage input
LJ-G Series
Laser control input*2 N/A
Laser remote input Non-voltage input
Alarm output
NPN open-collector output PNP open-collector output
Pass/Fail Output
TIMING input Non-voltage input Voltage input
RESET input
Auto-zero input
SI-F1000 Series
Non-voltage input Voltage input
Expansion Program switch input
N/A
connector Binary selection input
Alarm output
Comparator output NPN open-collector output PNP open-collector output
Binary output
Baud rate: 9600 to 115200 bps
RS-232C interface
Data length: 8 bits Stop bit length: 1 bit Parity: None/even/odd
N/A
SI-F80R Series
USB interface USB 2.0 Hi-Speed compliant*3
Ethernet interface*4 100Base-TX/10Base-T
Head expansion unit connector Up to 10 head expansion units can be connected to one main controller
Expansion unit connector Either of the CC-Link unit (LK-CC100) or DeviceNetTM unit (LK-DN100) can be connected N/A
Power supply voltage 24 VDC10% 24 VDC10% (Supplied from the controller)
Power supply
Maximum current consumption 0.6 A or less with 1 head/3.5 A or less with 12 heads
When one or less head expansion unit is connected: 0 to 50C 32 to 122F
Environment Ambient temperature
When two or more head expansion units are connected: 0 to 40C 32 to 104F
LT-9000 Series
resistance
Relative humidity 35 to 85%RH (No condensation)
Weight Approx. 600 g Approx. 300 g
*1 This input is applied to all of the synchronized OUT.
*2 When the laser class 3B sensor head is connected, a key-operated switch must be used for the input to this terminal. The laser is emitted only when the key-operated switch is set to the ON position.
(Select a key which can be removed only when it is set to the OFF position.) When the laser class 2/3R sensor head is connected, the laser turns on when this terminal is opened and turns off when it is short-circuited.
*3 When a PC supporting USB 1.1 or USB 2.0 full speed is connected, the data refresh cycle and other operations may slow down.
*4 Use the Ethernet interface only for direct connections with a PC or for local network connections with a PC or LK-G5000 Series units.
NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
PNP open-collector output rating: 50 mA max. (30 V max.), Residual voltage: 0.5 V max.
Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
LS-9000 Series
Voltage input rating: Maximum input rating: 26.4 V, ON voltage: 10.2 V, OFF current: 0.6 mA
Part of the input/output circuit of the LK-G5000 Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external devices.
For details, refer to "Precautions on wiring" in the User's Manual.
LK-H2 (LK-Navigator2) Operating environment

CPU Pentium III 1 GHz or higher (1.7 GHz or higher recommended)
LS-7000 Series
Supported OS Windows 7*1 Windows Vista*2 Windows XP*3 Windows 2000 Professional*4
Memory capacity 256 MB or more (1 GB or more recommended)
Display resolution 1024 x 768 pixels, 24-bit full color or better
Available hard disk space 1 GB or more
The PC must be equipped with one of these interfaces:
Interface USB: 2.0 Hi-Speed (USB 1.1 compatible full speed)*5
LAN: 100BASE-TX, 10BASE-T*6
*1 Editions supported: Ultimate, Professional and Home Premium.
TM-3000 Series
*2 Editions supported: Ultimate, Business, Home Premium, and Home Basic.

*3 Supports Professional SP2 and Home Edition SP2 or later.
*4 Supports SP4 or later.
*5 Does not support connection via a USB hub.
*6 Does not support connection via private LANs or routers. Use in a 1:1 or local connection.
* Windows is a registered trademark of Microsoft Corporation of America.
* Pentium is a registered trademark of Intel Corporation.
13
Sensor heads
LK-G5000 Series
Coarse target measurement (wide spot type)

Model LK-H008W LK-H025 LK-H027 LK-H055 LK-H057 LK-H085 LK-H087 LK-H155 LK-H157
Mounting mode Specular reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection
Reference distance 8 mm 0.32" 20 mm 0.79" 20 mm 0.79" 50 mm 1.97" 50 mm 1.97" 80 mm 3.15" 80 mm 3.15" 150 mm 5.91" 150 mm 5.91"
Measurement range*1 0.5 mm 0.02" 3 mm 0.12" 3 mm 0.12" 10 mm 0.39" 10 mm 0.39" 18 mm 0.71" 18 mm 0.71" 40 mm 1.57" 40 mm 1.57"
Red semiconductor laser
Light source
Wavelength 655 nm
Laser IEC 60825-1 Class 1 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2
class FDA (CDRH) Part 1040.10 Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II
Output 0.3 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW
Spot diameter (at reference distance) 20 m 550 m 25 m 1400 m 50 m 2000 m 70 m 2500 m 120 m 4200 m
0.05% of F.S. 0.02%of F.S. 0.02% of F.S. 0.02% of F.S. 0.02% of F.S.
Linearity*2
(F.S.=1 mm 0.04") (F.S.= 6 mm 0.24") (F.S.= 20 mm 0.79") (F.S.= 36 mm 1.42") (F.S.= 80 mm 3.15")
Repeatability*3 0.005 m (0.001 m) 0.02 m (0.01 m) 0.025 m 0.1 m 0.25 m
Sampling cycle 2.55/5/10/20/50/100/200/500/1000 s (9 steps selectable)
0.02% of F.S./C 0.01% of F.S./C 0.01% of F.S./C 0.01% of F.S./C 0.01% of F.S./C
Temperature fluctuation
Enclosure rating IP67
Environment resistance
Incandescent lamp
Ambient light Incandescent lamp or fluorescent lamp: 10000 lux max. or fluorescent lamp:
5000 lux max.
Ambient temperature 0 to +50C 32 to 122F *4 0 to +50C 32 to 122F 0 to +50C 32 to 122F*4
Vibration resistance 10 to 55 Hz, 1.5 mm 0.06" double amplitude in X, Y, and Z directions, 2 hours respectively
Material Aluminum die-cast
Weight Approx. 240 g Approx. 230 g Approx. 260 g Approx. 280 g Approx. 300 g
*1 Measurement range when the sampling cycle is 20 s or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W) is measured in the normal measurement
mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W) is measured at the reference distance with the number of averaging measurements set to 16384. The
value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 s. *4 When the ambient temperature rises to 40C 104F or more, mount this on a metal plate before use.
Fine target measurement (focused spot type)

Model LK-H008 LK-H020 LK-H022 LK-H050 LK-H052 LK-H080 LK-H082 LK-H150 LK-H152
Mounting mode Specular reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection
Reference distance 8 mm 0.32" 20 mm 0.79" 20 mm 0.79" 50 mm 1.97" 50 mm 1.97" 80 mm 3.15" 80 mm 3.15" 150 mm 5.91" 150 mm 5.91"
Measurement range*1 0.5 mm 0.02" 3 mm 0.12" 3 mm 0.12" 10 mm 0.39" 10 mm 0.39" 18 mm 0.71" 18 mm 0.71" 40 mm 1.57" 40 mm 1.57"
Light source
Wavelength 655 nm
Laser IEC 60825-1 Class 1 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2
class FDA (CDRH) Part 1040.10 Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II
Output 0.3 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW
Spot diameter (at reference distance) 20 m 25 m 50 m 70 m 120 m
0.05% of F.S. 0.02% of F.S. 0.02% of F.S. 0.02% of F.S. 0.02% of F.S.
Linearity*2
Temperature fluctuation
Incandescent lamp
Ambient light Incandescent lamp or fluorescent lamp: 10000 lux max. or fluorescent lamp:
5000 lux max.
Ambient temperature 0 to +50C 32 to 122F *4 0 to +50C 32 to 122F 0 to +50C 32 to 122F*4
*1 Measurement range when the sampling cycle is 20 s or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is measured in the normal measurement
mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is measured at the reference distance with the number of averaging measurements set to 16384. The
value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 s. *4 When the ambient temperature rises to 40C 104F or more, mount this on a metal plate before use.
Transparent/mirror target measurement (specular reflection type)

Model LK-H008 LK-H008W LK-H022K LK-H027K LK-H052K LK-H057K LK-H082 LK-H087 LK-H152 LK-H157
Mounting mode Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection*4 Specular reflection*4
Reference distance 8 mm 0.32" 8 mm 0.32" 16.1 mm 0.63" 16.1 mm 0.63" 46.3 mm 1.82" 46.3 mm 1.82" 76.7 mm 3.02" 147.5 mm 5.81"
0.5 mm 0.5 mm 2.8 mm 2.8 mm 5.2 mm 5.2 mm 17.6 mm to +14.5 mm 39.5 mm to +24.4 mm
Measurement range*1
0.02" 0.02" 0.11" 0.11" 0.20" 0.20" -0.69" to +0.57" -1.56" to +0.96"
Light source
Wavelength 655 nm
Laser IEC 60825-1 Class 1 Class 2
class FDA (CDRH) Part 1040.10 Class II
Output 0.3 mW 0.95 mW
Spot diameter (at reference distance) 20m 20 m550 m 25 m 25 m1400 m 50 m 50 m2000 m 70 m 70 m 2500 m 120 m 120 m 4200 m
Linearity*2 0.05% of F.S. (F.S.= 1 mm 0.04") 0.02% of F.S. (F.S.= 6 mm 0.24") 0.02% of F.S. (F.S.= 20 mm 0.79") 0.02% of F.S. (F.S.= 36 mm 1.42") 0.02% of F.S. (F.S.= 80 mm 3.15")
Temperature fluctuation 0.02% of F.S./C (F.S.=1 mm 0.04") 0.01% of F.S./C (F.S.= 6 mm 0.24") 0.01% of F.S. (F.S.= 20 mm 0.79") 0.01% of F.S. (F.S.= 36 mm 1.42") 0.01% of F.S. (F.S.= 80 mm 3.15")*6
*6

Incandescent lamp or fluorescent

Ambient light Incandescent lamp or fluorescent lamp: 10000 lux max.
lamp: 5000 lux max.
Ambient temperature 0 to +50C 32 to 122F *5
0 to +50C 32 to 122F 0 to +50C 32 to 122F*5
Relative humidity 35 to 85% RH (No condensation)
*1 Measurement range when the sampling cycle is 20 s or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/LK-H008W) is measured in the
normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/LK-H008W) is measured at the reference distance with the number
of averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 s. *4 Use one of the following dark filters when
measuring a transparent or mirror surface object: LK-H082/LK-H087: LK-F3, LK-H152/LK-H157: LK-F2 *5 When the ambient temperature rises to 40C 104F or more, mount this on a metal plate before use.
14 *6 Value measured at the event of diffuse reflection installation. Please contact us for the case of regular reflection installation.
LK-G5000 Series
LK-G5000 Series
LK-CC100 (CC-Link unit)
Model LK-CC100
Designation CC-Link communication unit dedicated to LK-G5000 Series
Supported CC-Link*1 version Ver. 1.10 (Extended cyclic setting: Single) Ver. 2.00 (Extended cyclic setting: Double or more)*2
Master unit CLPA-certified master unit (CC-Link Ver. 2.00/Ver. 1.10)
No. of occupied stations 1 to 4
Network
Communication speed 156 kbps, 625 kbps, 2.5 Mbps, 5 Mbps, 10 Mbps
connection
Connection cable Dedicated CC-Link cable supporting Ver. 1.10 (Shielded 3-core twisted-pair cable: OP-79426, OP-79427)
LK-G3000 Series
Maximum total cable extension length 156 kbps: 1200 m 3937', 625 kbps: 900 m 2952.7', 2.5 Mbps: 400 m 1312.3', 5 Mbps: 160 m 524.93', 10 Mbps: 100 m 328.08'
Station type Remote device station
When one or less head expansion unit is connected: 0 to 50C 32 to 122F.
When two or more head expansion units are connected: 0 to 40C 32 to 104F.
resistance
Relative humidity 35 to 85 %RH (No condensation)
Rated voltage 24 VDC10 % (supplied from controller)
Current consumption 200 mA max.
Weight Approx. 300 g
LJ-V7000 Series
*1 CC-Link is a registered trademark of Mitsubishi Electric Corporation.
*2 The LK-G5000 Series supports the "extended cyclic transmission" and "station-to-station cable length relaxation" of CC-Link Ver. 2.00.
LK-DN100 (DeviceNetTM unit)

Model LK-DN100
Designation DeviceNetTM communication unit dedicated to LK-G5000 Series
Communication protocol DeviceNetTM*1 compliant
Master unit ODVA-certified master unit
LJ-G Series
Transmission speed 500 kbps, 250 kbps, 125 kbps
Device type Generic
Network Transmission medium Dedicated 5 cables (2 signal cables, 2 power supply cables, 1 shielding cable)
connection Thick cable: 500 m 1640.4' (at transmission speed of 125 kbps)/250 m 820.21' (at 250 kbps)/
Maximum trunk line cable length
125 m 410.11' (at 500 kbps) Thin cable: 100 m 328.08' (at all transmission speed settings)
Communication type I/O communication (Poll) Explicit message communication
Power supply 11 VDC to 25 VDC
Current consumption 10 mA max. (when network power supply 24 V is applied)
SI-F1000 Series
When one or less head expansion unit is connected: 0 to 50C 32 to 122F.
When two or more head expansion units are connected: 0 to 40C 32 to 104F.
resistance
Rated voltage 24 VDC 10% (supplied from controller)
Current consumption 200 mA max.
*1 DeviceNetTM is a registered trademark of ODVA (Open DeviceNet Vendor Association).
SI-F80R Series
LK-G5000 Series Touch Panel Display
Model LK-HD1001
Name LK-G5000 Series Touch Panel Display
Display elements TFT color LCD
Display color 32,768 colors
Display panel Pixels (W x H pixels) 640 480
Display area (W x H mm) 170.9 128.2 6.73' x 5.04'
LT-9000 Series
Service life (normal temperature and humidity) Approx. 50,000 hours
Type White LED
Backlight lamp
Service life Approx. 50,000 hours
Number of switches 40 x 30 per 1 image
Mode Matrix resistance membrane mode
Touch switch
Operating force 0.98N or less
Service life More than one million times
Communication function Available only with the LK-G5000 Series
LS-9000 Series
Structure Panel built-in type, IP65f equivalent dust-proof, waterjet-proof on only front panel
Operating environment Limit dust and corrosive gas
Ambient temperature 0 to 50C 32 to 122F
35 to 85%RH (no condensation) When the ambient temperature is higher than 40C 104F,
Ambient humidity
limit the absolute humidity to 85%RH at 40C 104F.
Storage temperature -10 to +60C 14 to 140F (no freezing)
35 to 85%RH (no condensation) When the ambient temperature is higher than 40C 104F,
Storage humidity
limit the absolute humidity to 85%RH at 40C 104F.
Vibration resistance 10 to 57 Hz, 0.3 mm 0.01" double amplitude/57 to 500 Hz, 2G, 3 hours in each direction (X, Y, and Z)
LS-7000 Series

Rated voltage 24 VDC 10%
Current consumption 1 A or less
Extension cable between the head and

Head-to-controller cable controller cable
TM-3000 Series
Model CB-A07 CB-A2 CB-A5 CB-A10 CB-A20 CB-A30 Model CB-A5E CB-A10E
Cable length 0.7 m 2.30' 2 m 6.56' 5 m 16.40' 10 m 32.81' 20 m 65.62' 30 m 98.43' Cable length 5 m 16.40' 10 m 32.81'
Weight Approx. 100 g Approx. 200 g Approx. 400 g Approx. 750 g Approx. 1400 g Approx. 2000 g Weight Approx. 400 g Approx. 750 g
15
LK-G5000 Series
Dimensions
Unit: mm inch
0.55"
Head 14
LK-H008/LK-H008W 0.55"
LK-H020/LK-H022/LK-H023
14 LK-H025/LK-H027/LK-H028
55
2.17"
55 500
2.17" 19.69"
500 0.28"
11 0.43" 7
19.69"
31.2 1.23" LASER ON/STABILITY LED 15 13.4
0.28"
22.8 0.90" 7 0.59" 0.53"
12.7 13.5 0.53" 13 max.
13.5 max. 0.5" LASER ON/STABILITY LED 0.51"
0.53"
0.5 0.02"
0.5
0.02"
62 53.4
2.44" 2.1"
73.5 57.5
2.89" 2.26" 24.4 0.17"
Mounting hole
40
90 20 4.4 2x4.4
0.46"11.8
0.79" 0.17" Mounting hole
8 0.32"
0.36" 9.2
12.3 0.48" 0.48" 12.2
66 0.17"4.4 51.4 2.02"
2.60" 27.5 60 2.36" 33.4
1.08" 1.32"
14 0.55"
LK-H022K/LK-H027K LK-H050/LK-H052/LK-H053 55
LK-H052K/LK-H057K
LK-H055/LK-H057/LK-H058 2.17"
75.9 2.99" 74.8 2.94"

500
4.6 66.6 2.62" 19.69" 37.6 1.48"
0.18" 0.28"
7
LASER ON/STABILITY LED 22.1
10.1 max. 13.4
0.87"
0.40" 0.53"
7.7 max. 24 2x4.4 0.17"
0.30" 0.94" Mounting hole
0.5
89 max. 0.02"
3.50" 77.7 89.9 max.
3.06" 3.54"
55.4 68
2.18" 68.5 2.68"
2.70" 59.9
22.8 2.36"
0.90" 0.40"
40 10.1
16.1 0.63"
30 30
35.8 1.41" 4.4
50 0.17" 46.3
1.97" 1.82"
9.2 12.2
0.36" 0.48"
68 7.7 max. 33.4 37.4

2.68" 0.30" 1.32" 1.47"
LK-H080/LK-H082/ 14 0.55"
LK-H150/LK-H152/ 14 0.55"
LK-H085/LK-H087 LK-H155/LK-H157
55 55
2.17" 2.17"
500 500
19.69" 19.69"
80.3
0.28" 3.16" LASER ON/STABILITY LED 0.16" 86.6
7 35.4 0.28" 3.41"
LASER ON/STABILITY LED 10.1 max. 1.39" 3.24" 4 7 20.6
13.5 82.2 0.81"
7.7 max. 24 2x 4.4 0.17" 0.40" 0.53" 22.7
0.89" 20.2 33.3 10.1
0.30" 0.94" Mounting hole 0.8" 2x 4.4 0.17"
0.02" 1.31" 0.40"
0.6 Mounting hole
0.5
0.02" 76.2
90.5 3"
70 61.4 max. 68 84.3
3.56" 69 2.68" 67.3 3.32"
2.76" 2.42" 2.65"
2.72"
9 6.8
0.27"
0.35"
4.4 4.2
0.17" 0.17"
24 8.2 18
24 0.32" 0.71"
80
3.15" 76.7
3.02"
9.2 12.3
0.36" 0.48" 150
5.91" 147.5
0.30" 5.81" 17
7.7 17
75 max. 33.5 38.5
2.95" 1.32" 1.52"
16
LK-G5000 Series
LK-G5000 Series
Unit: mm inch
Head-to-controller cable Extension cable

[Cable between the head and controller] [To extend the distance between head and controller]
CB-A07/CB-A2/CB-A5/CB-A10/CB-A20/CB-A30 CB-A5E/CB-A10E
7 0.28" 7 0.28"
0.55" 0.55"
Cable length 14 Cable length (5 m, 10 m) (16.40', 32.81') 14
(0.7 m, 2 m, 5 m, 10 m, 20 m, 30 m)
LK-G3000 Series
33 (2.30', 6.56', 16.40', 32.81', 65.62', 98.42') 55 2.17" 55 2.17"
1.30" 14 0.55"
55 2.17"
1.02" 26
0.45" 11.5
LJ-V7000 Series
Controller
LK-G5001(P)V LK-G5001(P) LK-HA100
65 128 (65) 65 (65) 105.5 26.3 128 (65) 26.3 (65) 105.5
2.56" 5.04" (2.56") 2.56" (2.56") 4.15" 1.04" 5.04" (2.56") 1.04" (2.56") 4.15"
DIN-rail DIN-rail
mounting mounting
position position
124 124 35.9 124 124
4.88" 4.88" 1.41" 4.88" 35.9
4.88" 1.41"
62.1
2.44" 62.1 2.44"
LJ-G Series
6 0.24" 6 0.24"
0.24"
6 0.53" 6 M4 Depth: 6
47 47 1.85" 0.24" 13.5 0.24"
1.85"
9 0.35" 9 0.35"
34.5 79.5 14 79.5 4xM4 Depth: 6 M4 Depth: 6 0.24" 0.53" 13.5
4xM4 Depth: 6 0.24"
1.36" 3.13" 0.55" 3.13" 114 4.49" 14
0.24" 0.55"
LK-CC100 LK-DN100
SI-F1000 Series
(0.52") (0.52") (0.52") (0.52")
26.3 128 (13.2) 26.3 (13.2) 105.5 26.3 128 (13.2) 26.3 (13.2) 105.5
1.04" 5.04" 1.04" 4.15" 1.04" 5.04" 1.04" 4.15"
DIN-rail DIN-rail
mounting mounting
position position
124 124 35.9 124 124
4.88" 4.88" 1.41" 4.88" 4.88" 35.9
1.41"
62.1 62.1
2.44" 2.44"
SI-F80R Series
6 0.24" 6 0.24" 6 0.24" 6 0.24"
M4 Depth: 6 M4 Depth: 6
(3.2) 0.24" (3.2) 0.24"
(0.13") 13.5 (0.13") 13.5
0.53" 0.53"
13.5 13.5
0.53" (3.2) 0.53" (3.2)
(0.13")
M4 Depth: 6 14 M4 Depth: 6 (0.13") 14
114 4.49" 0.55" 114 4.49" 0.24" 0.55"
0.24"
LT-9000 Series
LK-HD1001 Touch Panel Display LK-HD500 PANEL CUTOUT DIMENSIONS
Panel thickness
0.5 to 5 Panel 62 min. 2.44"
237 9.33" 0.24" mounting
62 2.44" 0.02" to 0.20" 0.51"
170.9(Effective display area) 6 43 ring
46 1.81" 13
6.73" 1.69"
+0.6
75 0
2.95"+0.02"
0
5.05"
178 128.2 167 91 74.5
80
LS-9000 Series
7.01" (Effective 6.57" 3.58"3.15"
2.93"
display area) 100 min.
3.94" 45 +0.6
0
0.33" 8.5 1.77" +0.02"

0
51
25
2.01" 0.98"
LS-7000 Series
Warning
The LK-G Series conforms to the following FDA and IEC standards:
LK-H008/ LK-H022/H022K/H027/H027K/H052/H052K/ LK-H020/H025/H050/H055/
Model
LK-H008W LK-H057/H057K/H082/H087/H152/H157 LK-H080/H085/H150/H155
FDA (CDRH) Part 1040.10 Class ll Laser Product Class ll Laser Product Class llla Laser Product
TM-3000 Series
IEC60825-1 Class 1 Laser Product Class 2 Laser Product Class 3R Laser Product
FDA CAUTION
LASER RADIATION-
AVOID EXPOSURE DO NOT STARE INTO BEAM
SEMICONDUCTOR LASER
LASER RADIATION WAVELENGTH 655nm
IS EMITTED FROM
THIS APERTURE.
MAXIMUM OUTPUT 0.3mW
CLASS LASER PRODUCT
17
LK-G3000 Series
High-Speed, High-Accuracy
CCD Laser Displacement Sensor
LK-G3000 Series
Features
Sampling rate of 50 kHz
Linearity of 0.05% of F.S.
Repeatability down to 0.01 m 0.0004 Mil
Can measure diffuse, specular, transparent, or translucent targets
Wide beam spot models are available

measure/index.jsp
The newly-developed algorithms support various applications
RPD* ALGORITHM
Laser light tends to react differently with translucent targets, Light from
generating diffused reflections, which result in gradual broadening subduction
of the received light waveform. The RPD algorithm cancels the Light from
influence of the broadened waveform and detects the true peak (Real subduction
Peak).
* RPD=Real Peak Detect
Translucent object
MULTI-ABLE CONTROL Waveform obtained by optimizing

the 1st surface using ABLE
The reflected light at each layer is sensed to optimize the
intensity of laser light. Highly accurate thickness measurements
are enabled by optimizing the optical setting for each layer.
Waveform synthesized
by the multi-ABLE
function
Waveform obtained by
optimizing the 2nd
The 1st surface using ABLE
surface
The 2nd Saturation

Glass surface level
MRC* ALGORITHM
When two or more peaks are generated by multiple reflections,
the algorithm compares the waveforms to the most recent Normal reflection
received-light waveform and determines the one with the most
similarity to the correct waveform.
* MRC=Multiple Reflection Cancel
Light from
multiple reflections
Multiple reflections
18
LK-G3000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
Detecting the runout of a HDD Thickness measurement of a glass plate Height measurement of PCB resin
Lineup
LJ-G Series
Type Model Laser Class Measuring range Repeatability Spot diameter
8 mm 0.31"
Transmitter/
0.01 m
receiver separate Small spot LK-G08 Class 1 (IEC) 20 m 0.79 Mil
0.0004 Mil
type
Measuring range 8 0.8 mm 0.31" 0.03"
SI-F1000 Series
Small spot LK-G10 20 m 0.79 Mil
10 mm 0.39"
Compact/ Class II (FDA) 0.01 m
Super Precision Class 1 (IEC) Measuring range 10 1 mm 0.39" 0.04" 0.0004 Mil
20 x 500 m
Wide beam LK-G15
0.79 x 19.69 Mil
SI-F80R Series
25 mm 0.05 m
High Accuracy
0.98" 30 mm 1.18" 0.002 Mil
35 mm 1.38"
30 x 850 m
Wide beam LK-G37
Measuring range 30 5 mm 1.18" 0.2" 1.18 x 33.46 Mil
LT-9000 Series
0.2 m
Multi-purpose 65 mm 80 mm 95 mm 0.008 Mil
2.56" 3.15" 3.74"
70 x 1100 m
Wide beam LK-G87
2.76 x 43.31 Mil
Measuring range 80 15 mm
3.15" 0.59"
LS-9000 Series
Class II (FDA) 110 mm 150 mm 190 mm 0.5 m

Long Distance
Class 2 (IEC) 4.33" 5.91" 7.48" 0.02 Mil
Measuring range 120 x 1700 m

Wide beam LK-G157
150 40 mm 4.72 x 66.93 Mil
5.91" 1.57"
LS-7000 Series
High-speed 300 mm 400 mm500 mm 2 m

Long Distance 11.81" 15.75" 19.69" 0.08 Mil

Wide beam LK-G407
400 100 mm 11.42 x 326.77 Mil
15.75" 3.94"
TM-3000 Series
Ultra 250 mm 500 mm 1000 mm 2 m

Long Distance 9.84" 19.69" 39.37" 0.08 Mil

Wide beam LK-G507
500 -250/+500 mm 11.81 x 374.02 Mil
19.69" -9.84"/+19.69"
19
LK-G3000 Series
Specifications
Sensor heads
Model LK-G08 LK-G10/G15 LK-G32/G37 LK-G82/G87 LK-G152/G157
Diffused Specular Diffuse Specular Diffuse Specular
Mounting mode
reflection reflection reflection reflection reflection reflection
147.5 mm
Reference distance 8 mm 0.31" 10 mm 0.39" 30 mm 1.18" 23.5 mm 0.93" 80 mm 3.15" 75.2 mm 2.96" 150 mm 5.91"
5.81"
4.5 mm 15 mm 14 mm 40 mm 39 mm
Measuring range *1 0.8 mm 0.03" 1 mm 0.04" 5 mm 0.2"
0.18" 0.59" 0.55" 1.57" 1.54"
Wavelength 655 nm (visible light)
Light source Laser Class Class II (FDA (CDRH) Part 1040.10), Class 1 (IEC 60825-1) Class II (FDA (CDRH) Part 1040.10), Class 2 (IEC 60825-1)
Output 0.3 mW 0.95 mW
Approx. 20 x 500 m Approx. 30 x 850 m Approx. 70 x 1100 m Approx. 120 x 1700 m
Approx. 20 m 0.79 x 19.69 Mil (G15), 1.18 x 33.46 Mil (G37), 2.76 x 43.31 Mil (G87), 4.72 x 66.93 Mil (G157),
Spot diameter (at reference distance)
0.79 Mil Approx. 20 m 0.79 Mil Approx. 30 m 1.18 Mil Approx. 70 m 2.76 Mil Approx. 120 m 4.72 Mil
(G10) (G32) (G82) (G152)
0.05% of F.S. 0.03% of F.S. 0.05% of F.S. 0.05% of F.S. 0.05% of F.S.
Linearity *2
(F.S.= 0.8 mm 0.03") (F.S.= 1 mm 0.04") (F.S.= 5 mm 0.2") (F.S.= 15 mm 0.59") (F.S.= 40 mm 1.57")
0.02 m 0.0008 Mil
Repeatability *3 0.05 m *4 0.002 Mil 0.2 m *4 0.008 Mil 0.5 m *4 0.02 Mil
(0.01 m 0.0004 Mil)
Sampling time 20/50/100/200/500/1000 s (Selectable from 6 levels)
LED display Near the center of the measurement: Green lights, Within the measurement area: Orange lights, Outside the measurement area: Orange flashing
Temperature characteristics
(F.S.= 0.8 mm 0.03") (F.S.= 1 mm 0.04") (F.S.= 5 mm 0.2") (F.S.= 15 mm 0.59") (F.S.= 40 mm 1.57")
Enclosure rating IP67 (IEC60529)
Incandescent lamp or
Ambient luminance Incandescent lamp or fluorescent lamp: 10000 lux max. fluorescent lamp: 5000 lux
max.
Ambient temperature +10 to 40C 50 to 104F 0 to 50C 32 to 122F
Relative humidity 35 to 85%, No condensation
Vibration resistance 10 to 55 Hz, double amplitude 1.5 mm 0.06"; two hours in each direction of X, Y, and Z
Material Aluminum Aluminum die-cast
Weight (including the cable) Approx. 245 g Approx. 190 g Approx. 280 g Approx. 380 g Approx. 290 g
*1 The value is obtained by measuring KEYENCEs standard target (ceramic).
LK-G10/G15: When the sampling rate is 20 s, the value becomes +0.37 +0.01" (FAR side) to -1 mm -0.04" (NEAR side).
LK-G32/G37: When the sampling rate is 20 s, the value becomes +1.8 +0.07" (FAR side) to -5 mm -0.20" (NEAR side) for diffuse reflection, and +1.6 +0.06" (FAR side) to -4.5 mm -0.18" (NEAR side) for specular reflection.
LK-G82/G87: When the sampling rate is 20 s, the value becomes -9 -0.35" (NEAR side) to -15 mm -0.59" (NEAR side) for diffuse reflection, and -8.7 -0.34" (NEAR side) to -14 mm -0.55" (NEAR side) for specular reflection.
LK-G152/G157: When the sampling rate is 20 s, the value becomes -22 -0.87" (NEAR side) to -40 mm -1.57" (NEAR side) for diffuse reflection, and -22 -0.87" (NEAR side) to -39 mm -1.54" (NEAR side) for specular reflection.
*2 The value is obtained by measuring KEYENCEs standard target (ceramic) with the Standard mode.
*3 The value is obtained by measuring KEYENCEs standard(SUS) with 4096 times of averaging at the reference distance. The value in parenthesis is the typical repeatability obtained by measuring the target with 16384.
*4 Consult your nearest KEYENCE representative for the Class IIIa type with increased repeatability.
Model LK-G402/G407 LK-G502/G507

Mounting mode Diffused reflection Specular reflection Diffused reflection Specular reflection
Reference distance 400 mm 15.75" 398 mm 15.67" 500 mm 19.69" 497.5 mm 19.59"
Measuring range*1 100 mm 3.94" 99 mm 3.90" -250 to +500 mm -9.84" to 19.69" -249 to +498 mm -9.80" to 19.61"
Wavelength 655 nm (visible light)
Light source Laser Class Class II (FDA (CDRH) Part 1040.10), Class 2 (IEC 60825-1)
Output 0.95 mW
Approx. 290 x 8300 m 11.42 x 326.77 Mil (G407) Approx. 300 x 9500 m 11.81 x 374.02 Mil (G507)
Approx. 290 m 11.42 Mil (G402) Approx. 300 m 11.81 Mil (G502)
0.05% of F.S. ( 250 m 9.84 Mil) *4*5 -250 to +250 mm -9.84" to +9.84"
<high-accuracy range> 0.02% of F.S. ( 100 m 3.93 Mil)
Linearity *2 0.05% of F.S.(F.S.= 100 mm 3.94") -250 to -50 mm -9.84" to -1.97"
<long range> 0.1% of F.S. ( 500 m 19.7 Mil)
-250 to +500 mm -9.84" to +19.69" (F.S. = 250 mm 9.84")
Repeatability *3 2 m 0.08 Mil
Sampling time 20/50/100/200/500/1000 s (Selectable from 6 levels)
Near the center of the measurement: Green lights
LED display Within the measurement area: Orange lights
Outside the measurement area: Orange flashing
Temperature characteristics 0.01% of F.S./C (F.S.= 100 mm 3.94") 0.01% of F.S./C (F.S.= 250 mm 9.84")
Vibrations resistance 10 to 55 Hz, double amplitude 1.5 mm 0.06"; two hours in each direction of X, Y, and Z
Weight (including the cable) Approx. 380 g
*1 The value is obtained by measuring KEYENCEs standard target (ceramic).
<LK-G407/G402>
When the sampling rate is 20 s, the value becomes -70 mm -2.76" (NEAR side) to -100 mm -3.94" (NEAR side) for diffuse reflection.
When the sampling rate is 20 s, the value becomes -70 mm -2.76" (NEAR side) to -99 mm -3.90" (NEAR side) for specular reflection.
<LK-G507/G502>
*2 The value is obtained by measuring KEYENCEs standard target (ceramic) with the Standard mode.
*3 The value is obtained by measuring KEYENCEs standard (SUS) with 4096 times of averaging at the reference distance.
*4 All are calculated at F.S. = (250 mm 9.84" ).
*5 High accuracy range and long range refer to the linearity when those ranges are used.
20
LK-G3000 Series
LK-G5000 Series
Controller
Type All-in-one model Separate monitor model *1
NPN LK-G3001V LK-G3001/LK-GD500
Model
PNP LK-G3001PV LK-G3001P/LK-GD500
LK-G3000 Series
Head compatibility All LK-G sensor heads are compatible
Number of connectable sensors Maximum of 2 units
Display

Display range 9999.99 mm to 9999.99 m (Selectable from six levels)
Refresh rate 10 times/sec
Analog voltage output 10 V x 2 outputs, output impedance: 100
Analog current output 4 to 20 mA x 2 outputs, maximum load resistance: 350
Terminal block
LJ-V7000 Series
Timing/Reset/Auto-zero input For OUT1, non-voltage or voltage input *3
Laser remote interlock input Non-voltage input *3
Comparator output For OUT1, NPN or PNP open-collector output *2
Alarm output For OUT1, NPN or PNP open-collector output *3 (N.C.)
Timing/Reset/Auto-zero input For OUT2, non-voltage or voltage input *3
Program switching input Non-voltage or voltage input *3 x 3 inputs
Expansion connector
Laser-Off input For Head A/Head B, non-voltage or voltage input *3

Comparator output For OUT2, NPN or PNP open-collector output *2
LJ-G Series
Alarm output For OUT2, NPN or PNP open-collector output *2(N.C.)
Binary output Measured data output (21 bits), OUT1/OUT2 selectable, NPN or PNP open-collector output *2
Strobe output NPN or PNP open-collector output *2
Binary
Binary selector output NPN or PNP open-collector output *2
Binary selector input Non-voltage or voltage input *3
RS-232C interface Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable)
SI-F1000 Series
USB interface In conformity with USB Revision 2.0 Full speed (USB1.1 compatible)
2 OUT simultaneous measurement, Operation, Averaging, Filter, Calibration, Measurement, AUTO ZERO,
Sampling frequency setting, Mutual interference prevention, Data storage, 8-program memory, ECO mode,
Major functions
ABLE setting, Target setting, ABLE tuning, Selection of measurement surface of transparent target,
Statistics processing, Connection of setting support software, Selectable head-mounting, etc.
Power supply voltage 24 VDC10%, Ripple: 10% (P to P) or less
Current consumption 500 mA or less with 1 head/600 mA or less with 2 heads
SI-F80R Series
Weight Approx. 480 g (LK-G3001V/G3001PV), Approx. 370 g (LK-G3001/G3001P), Approx. 60 g (LK-GD500)
*1 LK-G3001(P) can be operated singly. The measured value display and setting modifications can be performed on the display panel (LK-GD500) or via the setting support software (LK-H1W).
*2 The rating of the NPN open-collector: 50 mA max. (40 V max.), residual voltage of 0.5 V max. The rating of the PNP open collector: 50 mA max. (30 V max.), residual voltage of 0.5 V max.
*3 (NPN model) The rating of non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current. (PNP model) The rating of voltage input: 10.2 V or more ON voltage (26.4 V max.) 0.6 mA or less OFF current.
Hardware environment
Item Hardware requirements
CPU Pentium III, 400 MHz or higher
LT-9000 Series
Windows 7*1/Windows Vista*2
Supported OS
Windows XP*3/Windows 2000 Professional
Memory capacity 64 Mbytes or more
Display 800 x 600 pixels, 256 colors or more
Hard disk space 10 Mbytes or more
RS-232C (serial port) or
Interface*4
USB2.0/1.1*5 must be installed.
*1 Home Premium, Professional and Ultimate editions are supported.
*2 Ultimate, Business, Home Premium, Home Basic editions are supported. For Windows Vista, Ver. 1.5 and later versions are supported.
LS-9000 Series
*3 Professional and Home edition are supported.
*4 Select one for communication. Multiple interfaces cannot be used for communication at the same time.
*5 Operations are not guaranteed when connected through a USB hub. Use under an environment that exceeds the recommended environment of the your OS.
Windows is a registered trademark of Microsoft Corporation of America.
Pentium is a registered trademark of Intel Corporation.
Sensor head-to-controller cable

LS-7000 Series
Model LK-GC2 LK-GC5 LK-GC10 LK-GC20 LK-GC30

Cable length 2 m 6.6' 5 m 16.4' 10 m 32.8' 20 m 65.6' 30 m 98.4'
Display panel cable

Model OP-51654 OP-51655 OP-51656
TM-3000 Series
Cable length 0.3 m 0.98' 3 m 9.8' 10 m 32.8'
21
LK-G3000 Series
Dimensions
Unit: mm inch
14 0.55" 14 0.55"
Sensor heads Sensor heads
LK-G08 LK-G10/G15
55
2.17" 55
2.17"
500
19.69" 500
7 19.69"
7 0.28" 0.28"
54 2.13"
32 1.26" 45 1.77"
7 0.28" 28 1.10" 41 1.61" 1.04" 26.3
22.8
2-4.4 0.17" 0.90"
Mounting hole
108 51.2
0.28" 3-4.4 0.17" 0.94" 4.25" 71.7
7 (Mounting hole) 24 100 2.02"
2.82"
0.29" 16 0.63" 3.94"
7.4
35 31 11 10 15 0.59"
1.38" 1.22" 27 0.39"
1.06" 0.43" 9 to 11
75
7.2 to 8.8 0.35" to 0.43"
0.28" to 0.35" 4 0.16"
27 11.5 0.45"
1.06"
22 0.87"
31.5 0.39"
1.24" 10 7 0.28"17 0.67"
14 0.55"
LK-G32/G37 LK-G82/G87 14 0.55"
Diffused reflection type mounting Diffused reflection type mounting

55 55
2.17"
2.17"
7
7 0.28"
500
0.28" 19.69" 500
2-4.5 0.18"
1.42" 19.69"
85 26 1.02" Mounting hole 36
2-4.5 0.18" 25 3.35"
0.6 95 3.74"
Mounting hole 0.98" 0.02" 25 0.98"
76
2.99"
76 67 67
2.99" 2.64" 2.64"
4
40 25 to 35 0.16"
4 25 65 to 95
0.16" 0.98" to 1.38"
2.56" to 3.74"
13.5
0.53"
13 0.51"
13.5 18
0.53" 0.71"
14 0.55"
14 0.55"
LK-G152/G157 LK-G402/G407/G502/G507
Diffused reflection type mounting Data in ( ) applies to LK-G407/G402
55
2.17"
Diffused reflection type mounting
55
2.17"
4 500 500
0.16" 19.69"
7 19.69"
82.2 3.24" 0.28"
33.3 1.31" 108 4.25" 1 0.04" 7
2-4.4 0.17" 20.2 0.28"
0.80" 0.03" 20
Mounting hole 0.7 0.79"
2 - 4.4 0.17"
85
76.2 68 3.35" 76 mounting hole
3.00" 2.68" 2.99"
4.5 8.2 0.32"

4.2 0.17" 19.2
0.18"
8.2 18 0.76"
0.32" 0.71" 10.2
36.2
1.43"
250 to 1000
110 to 190 (300 to 500)
17 4.33" to 7.48" 9.84" to 39.37"
(11.81" to 19.69")
22
LK-G3000 Series
LK-G5000 Series
Unit: mm inch
Controllers
LK-G3001V/LK-G3001PV LK-G3001/LK-G3001P
62 117 (65) 62 (65) 95
2.44" 4.61" (2.56") 2.44" (2.56") 3.74"
LK-G3000 Series
DIN-rail
mounting position
124 124
4.88" 4.88" 35.9
1.41"
66.1
2.60"
LJ-V7000 Series
6 0.24" 6 0.24"
43 1.69"
43
1.69"
9.5 0.37" 9.5 0.37"

1.30" 2.76"
LJ-G Series
13.5 70
33 70 4-M4 screws, 4-M4 screws,
0.53" 2.76"
Depth: 6 0.24"
Depth: 6 0.24"
SI-F1000 Series
Cable between the head and controller
LK-GC2/LK-GC5/LK-GC10/LK-GC20/LK-GC30
7 0.28"
Cable length 0.55"
(2 m, 5 m, 10 m, 20 m, 30 m) 14
33 (6.56', 16.40', 32.81', 65.62', 98.42')
1.30"
55 2.17"
1.02" 26
SI-F80R Series
0.45" 11.5
LT-9000 Series
Display panel
LK-GD500 Panel cutout dimensions
62 2.44"
Panel thickness min.
62
0.5 to 5 0.02" to 0.2"
2.44"
46 13 0.51"
LS-9000 Series
1.81" Panel-mounting ring
+0.6
75 0
+0.02"
2.95" 0
91 80 74.5
3.58" 3.15" 100 +0.6
2.93" 45
3.94" 0
1.77" +0.02"
min. 0
LS-7000 Series
0.33"
8.5
25
0.98"
TM-3000 Series
23
LJ-V7000 Series
High-speed 2D/3D Laser Scanner
NEW
LJ-V7000 Series
Features
An emphasis on inline multi-point measurement
The world's fastest at 64,000 profiles/sec.
Blue laser optical system

measure/index.jsp
240 times greater than conventional devices

64,000 profiles/sec. sampling 12,800,000 points/sec. World's fastest
The LJ-V7000 Series was designed to achieve the worlds fastest

sampling speed. No other laser based 3D measurement system on the
market even comes close.
The LJ-V7000 can measure products moving on high-speed lines with
high precision and no loss of data.
For example, the LJ-V7000 can measure targets moving at 6.4 m/s with a
profile pitch of 0.1 mm 0.0039".
64 times the dynamic range of conventional devices

Overwhelming responsiveness to target properties to optimize output stability Industry best
Normally, detection stability is inversely proportional to speed. However,

the LJ-V7000 Series incorporates cutting edge technology that greatly
improves both variables. Shapes are accurately measured even where
there is a high variation in target reflectivity under the same optical axis.
24
LJ-V7000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
Bearing seal inspection Pre-weld assembly and weld Rolled steel defect inspection Extrusion geometry inspection
Bearings are rotated to inspect seal
bead inspection The advanced processing High speed 3D extrusion
integrity and perform a variety of The onboard processing capability algorithms of the LJ-V7000 make inspection is made possible by
other measurements. The LJ-V7000 of the LJ-V7000 Series systems multi-head setups easy. Obtaining the revolutionary advancement in
Series provides the high sampling allows onboard inspection of profiles at 64,000 Hz, it is possible available sampling rates. Various
rates necessary to perform all both pre-weld assembly quality to detect even minute defects over targets can be measured precisely
inspections at full production and postweld bead condition. In a wide area. and at high speed, including rubber,
LJ-G Series
speeds. addition, the robust IP67 structure metal, ceramics, concrete, and food
of the head allows the system to be products.
installed in environments not usually
suitable for optical systems.
Lineup
SI-F1000 Series
Ultra high-accuracy
Ultra high-accuracy High-accuracy
High-accuracy Middle rangeMiddle range Long range Long range Ultra-long range
Ultra-long range
LJ-V7020 LJ-V7020 LJ-V7060 LJ-V7060 LJ-V7080 LJ-V7080 LJ-V7200 LJ-V7200 LJ-V7300 LJ-V7300
(mm) (mm) (mm) (mm) (mm) (mm) (mm) (mm) (mm) (mm)
(inch) (inch) (inch) (inch) (inch) (inch) (inch) (inch) (inch) (inch)
100 100 100 100 450 450 450 450 450 450
3.94" 3.94" 3.94" 3.94" 17.72" 17.72" 17.72" 17.72" 17.72" 17.72"
SI-F80R Series
50 50 50 50 400 400 400 400 400 400
1.97" 1.97" 1.97" 1.97" 15.75" 15.75" 15.75" 15.75" 15.75" 15.75"
17.4 mm 0.69" 17.4 mm 0.69"Width: 6.5 mm 0.26" 52 mm
Width: 6.5 mm 0.26"2.05" 52 mm 2.05"
20 mm 0.79" 0 20 mm 0.79" 60 mm 2.36" 60 Width: Width: 13.5 mm 0.53"
mm 2.36"13.5 mm 0.53"
0 0 mm 2.68"0 68 Width: Width: 350
mm 2.68"15 mm 0.59" 15 mm 0.59" 350 350 350 350 350
22.6 mm 0.89" 22.6 mm 0.89" Width: 7 mm 0.28"Width: 7 mm680.28" Width: 15 mm 0.59"Width: 15 mm 0.59" 13.78"
0 0 Width: range 0
Width: 7.5 mmMeasurement
7.5 mm 0.30" 0.30" 0 13.78" 13.78" 13.78" 13.78" 13.78"
Measurement rangeMeasurement Measurement range
range
20 2.6 mm 0.79"20 2.6 mm 0.79" 0.10"
0.10" 60 8 mm 2.36" 0.31"
60 8 mm 2.36" 0.31"
Measurement Z-axis 20 2.6 mmZ-axis

Measurement 20 2.6 mm 0.79"
0.79" 0.10" 0.10"
Measurement Z-axis 60 8 mm 2.36"Z-axis
Measurement 0.31" 60300
8 mm 2.36" 0.31" 300 300 300 300 300
15511.81"
mm 155 mm
11.81" 11.81" 11.81" 11.81" 11.81"
range range 7 mm 0.28"
X-axis X-axis 7 mm 0.28" range range 15 mm 0.59"
X-axis X-axis 15 mm 0.59" 6.10" 6.10" Width110 mm Width110 mm
4.33" 4.33"
Repeatability Z-axis 0.2 m 0.01 Mil
0.2 m 0.01 Mil
Repeatability Z-axis Repeatability Z-axis 0.4 m 0.02 Mil 0.4 m 0.02 Mil
Repeatability Z-axis 250 250 250 250 250 250
L
LJ-V Ser
X-axis 2.5 m 0.10 2.5 m 0.10 Mil
X-axisMil X-axis 5 m 0.20 Mil 59.84"
X-axis m 0.20 Mil 9.84" 9.84" 9.84" 9.84" 9.84" S
Selection g
LT-9000 Series
200 200 200 200 200 200
Ultraspecular
Ultra high-accuracy high-accuracy specular reflection
reflection High-accuracy
High-accuracy specular7.87"
specular target target 7.87" 7.87" 7.87" 7.87" 7.87"
LJ-V7020K LJ-V7020K LJ-V7060K LJ-V7060K
(mm) (mm) (mm) (mm) 150 150 150 150 150 150
300 mm 300 mm
(inch) (inch) (inch) (inch) 5.91" 5.91" 5.91" 5.91" 5.91" 5.91"
11.81" 11.81" Width180 mm Width180 mm
7.09" 7.09"
100 100 100 100 100 100 100 100 100 100
3.94" 3.94" 3.94" 3.94" 3.94" 152 mm3.94"
5.98" 152 mm 5.98"
3.94" 3.94" 51 mm 2.01" 3.94"
3.94"
Width51 mm 2.01"Width
50 50 50 50 50 50
57 mm 2.24" 57 mm 2.24" 50 200 mm 7.87"50 200 mm 7.87" 50 50
1.97" 1.97" 1.97" 1.97" 1.97" 1.97" Width25 mm 0.98" 1.97"
Width25 mm 0.98" 1.97" 62 mm 2.44" 1.97"
Width62 mm 2.44"Width
1.97"
LS-9000 Series
80 mm 3.15" 80 mm 3.15"
21.9 mm 0.86" 21.9 mmWidth:
0.86" 6.5 mm 0.26" 47 mm 1.85"
Width: 6.5 mm 0.26" 47 mm 1.85"
8 mm 0.31"Width: 8 mm 0.31" Width 32 mm Width
1.26" 32 mm 1.26"
24.2 mm 0.95" 0 24.2 mmWidth: 54.6 mm 2.15" 54.6Width:
0.95" 7 mm 0.28"Width: 70 mm 0.28" mm 2.15" 103 mm 4.06"0 103 mm 4.06"
17.52" 17.52"
0 62.2 mm 02.45" 62.2 Width: Width: 014 mm 0.55"
14 mm 0.55" 0 248 mm 9.76" 0 248 mm 9.76" 0 445 mm 0 445 mm
26.5 mm 1.04" 0 26.5 mmWidth:
1.04" 7.5 mm 0.30"
Width: 7.5 mm 2.45" Width39 mm 1.54"
Width39 mm 1.54" Width73 mm 2.87"Width73 Width240 mm Width240 mm
0 0 mm 0.30" 0 Width: 8 mm 0.31"Width: 80 mm 0.31" 0 0 0 0 mm 2.87" 0
Measurement range
Measurement range Measurement range
Measurement range 9.45" 9.45"
24.2
24.2 2.3 mm 0.95" 2.3 mm 0.95" 0.09"
0.09" 54.6
54.6 7.6 mm 2.15" 7.6 mm 2.15" 0.3"
0.3" 80 23 mm 3.15" 80 23 mm 3.15" 0.91"
0.91" 200 48 mm 7.87"200 48 mm 7.87" 1.89"
1.89" 3005.71"
300 145 mm 11.81" 145 mm 11.81" 5.71"
Measurement Z-axis 24.2 2.3 Z-axis

Measurement 24.2 2.3 mmMeasurement
mm 0.95" 0.09" 0.95" 0.09" Z-axis Z-axis
54.6 7.6 mm
Measurement 54.6 7.6 mmMeasurement
2.15" 0.3" 2.15" 0.3" Z-axis 80 23 mmZ-axis
Measurement 80 23 mm 3.15" 0.91"
3.15" 0.91" Z-axis 200 48 mmZ-axis
Measurement Measurement 200 48 mm Measurement
7.87" 1.89" 7.87" 1.89" Z-axis 300 145 mm
Measurement Z-axis 300 145 mm 11.81" 5.71"
11.81" 5.71"
range range 7 mm 0.28"
X-axis X-axis 7 mm 0.28" range range 14 mm X-axis
X-axis 0.55" 14 mm 0.55" range range 1.26" 32 mm 1.26"
X-axis 32 mm X-axis range range 2.44" 62 mm 2.44"
X-axis 62 mm X-axis range range 180 mm
X-axis 7.09"180 mm 7.09"
X-axis
0.2 mZ-axis 0.2 m 0.01 Mil
0.01 Mil 0.4 m Z-axis 0.4 m 0.02
0.02 Mil Mil Z-axis 0.5 mZ-axis 0.5 m 0.02 Mil
0.02 Mil Z-axis 1 m 0.04 Mil 1 m 0.04
Z-axis Mil 5 m 0.20 Mil 5 m 0.20 Mil
Repeatability Z-axis
Repeatability
Z-axis
Repeatability Repeatability
Z-axis
Repeatability Repeatability Repeatability Repeatability Repeatability Repeatability Z-axis
X-axis 2.5 mX-axis 2.5 m 0.10 Mil
0.10 Mil Mil 5 m 0.20 Mil
X-axis
X-axis 5 m 0.20 X-axisMil10 m 0.39 Mil
X-axis 10 m 0.39 X-axisMil20 m 0.79 Mil
X-axis 20 m 0.79 2.36 Mil60 m 2.36 Mil
X-axis 60 m X-axis
LS-7000 Series
Optio
Optional accesso
Controller Controller Monitor Monitor Cable connector
Cable connector
24 VDC constan
Controller Controller Display output DisplayTouch
output Touch panel monitor
panel monitor Sensor head cable Sensor head cable Sensor head extensionSensor cable
head extension cable
Touch Touchcable
panel monitor panel monitor cable power supply
LJ-V7001(P) LJ-V7001(P) unit unit CA-MP120T CA-MP120T CB-B3 (3(10
CB-B3 (3 m 9.8')/ CB-B10 mm9.8')/ CB-B10
32.8') (10 m 32.8')
CB-B5E CB-B5E (5 m 16.4')OP-87258 (3 m OP-87258
(5 m 16.4') 9.8') (3 m 9.8') CA-U3
Controller variation
Controller variation LJ-VM100 LJ-VM100 CB-B10E (10 m CB-B10E
32.8') (10 m 32.8')
OP-87259 (10 mOP-87259
32.8') (10 m 32.8')
CB-B20E (20 m CB-B20E
65.6') (20 m 65.6')
NPN output typeNPN output type LJ-V7001
LJ-V7001
output type LJ-V7001P
LJ-V7001P
PNP output typePNP
TM-3000 Series
Settings monitorSettings monitor USBConsole

USB cable cable Console Specialized
Specialized monitor stand monitor stand Display monitorDisplay
cable monitor cableRS-232C cable RS-232C cable D-sub9 pin connector
D-sub9 pin connector
software software (LJ-H2
(LJ-H2 accessory) accessory) OP-87504
OP-87504 EtherNet/IPTM OP-87262
EtherNet/IPTM
OP-87262 OP-66842 (3(10mm9.8')/OP-87055
OP-66842 (3 m 9.8')/OP-87055 (10 m 32.8')
32.8') OP-96368 OP-96368
(2.5 m 8.2') (2.5 m 8.2')
OP-26401 OP-26401
LJ-H2 LJ-H2
OP-66844 OP-66844 unit unit
CB-EP100 CB-EP100
PROFINET PROFINET
unit unit
CB-PN100 CB-PN100
25
Blue laser optical system Provides optimal stability and accuracy on a wide variety of targets. Worlds first
LJ-V7000 Series
The LJ-V7000 Series is the first 3D laser inspection system in the world to adopt a blue laser. A
sharp line beam is formed on the light-receiving element by focusing a short wavelength 405 nm
laser to its diffraction limit with a 2D Ernostar lens. This generates a stabilized high-precision profile
ensuring optimal accuracy and limiting image blur. Also, the output intensity of the laser source has
been optimized to provide a clear return even on targets with a wide range of reflectivities.
Red laser (conventional) Blue laser (LJ-V)
With a conventional red laser, beam With a blue laser, the target image is
focus is severely limited resulting tightly focused with minimal blurring
in a diffuse image of the part that or other sources of error.
contributes to measurement errors.
HSE3*-CMOS Provides enhanced stability on any target, even at high speed Newly developed/worlds greatest
The LJ-V7000 Series is equipped with the newly developed HSE3-CMOS. In addition to improved
speed, the dynamic range has been further enhanced to be well above that of conventional light
receiving elements. Even with an extremely short exposure time of 15.6 s, the LJ-V7000 can
reliably measure a range of surfaces from black (small amount of reflection) surfaces to those with
luster (large amount of reflection) simultaneously.
* HS=High Speed E3 =Enhanced Eye Emulation
When using low-speed sampling When using high-speed sampling
CMOS
(Conventional
2D systems)
Dynamic range
Measurement is impossible due Could not be measured at all. 300x
to insufficient light intensity.
E3-CMOS
(High-end 2D
Dynamic range
systems)
All ranges could be measured. The exposure time is short, so 64x

inclines could not be measured.
HSE3-CMOS
Reflectivity and light intensity in the
(LJ-V7000)
horizontal axis will change greatly
depending on the shape, color, material,
or sampling speed (exposure time) of the
All ranges could be measured. Even though the exposure time
target. is short, all ranges could be
measured without issue.
GP*64-Processor Next generation system designed for high speed data processing Newly developed
The custom developed GP64 processor, exclusive to the LJ-V7000, is designed to provide high
speed parallel data processing. This allows the system to maintain a 64 kHz output frequency while
maximizing output stability and accuracy.
CMOS image capture Reading (1) Reading (2)
High-resolution
Subpixel (1) Subpixel (2)
subpixel processing
High-accuracy Linearization (1) Linearization (2)
linearization processing
Data output Data output (1)
64 kHz 64 kHz
26
74 discrete measurement modes LJ-V7000 Series
16 channels of independent measurement The industrys greatest flexibility
LK-G5000 Series
With 13 types of data extraction tools and 7 types of feature definition tools, a single LJ-V7000 can provide a total of 74 distinct measurement
definitions. This allows a single system to provide the level of flexibility necessary to adapt to constant changes in production requirements.
Types of measurements Types of measurement targets for each measurement
LK-G3000 Series
LJ-V7000 Series
Any 16 dimensions can be measured simultaneously with a measurement mode that has been selected from the 74 types that are available.
The LJ-V7000 can perform onboard profile analysis at a previously impossible rate.
HMI Touch Panel
LJ-G Series
CA-MP120T
Center position
Angle
Height
SI-F1000 Series
Distance
Height difference
Width
Bottom height/position
SI-F80R Series
Cross-section area
LT-9000 Series
Continuous profile data output at a top speed of 64 kHz Publicly open communications library
LS-9000 Series
Profile data Max. 64,000 profiles/sec.
LS-7000 Series
Gigabit Ethernet
Profile data
The LJ-V7000 Series has now been equipped with a TOE (TCP/IP off-load
Height data that has been
engine) specifically for processing high-speed communication. This achieves
linearized at 20 bits for each point
TM-3000 Series
high throughput that does not affect CPU load. With this it is possible to maintain
a 64,000 Hz output frequency.
In addition to advanced on-board processing capabilities, the LJ-V7000 also
provides full support for external processing of acquired profile data. In addition
to published interface libraries, sample interface code is available in several
programming languages. Pixel pitch
27
LJ-V7000 Series
Specifications
Controller
Model LJ-V7001 LJ-V7001P
No. of connectable sensors Max. 2 units
Minimum display unit 0.1 m 0.0004 Mil, 0.00001 mm2, 0.01
Display
Maximum display range 99999.9 mm 3937.00", 999999 mm2
Laser remote interlock input No-voltage input
Encoder input NPN open-collector output, voltage output (5 V/12 V/24 V), and line-driver output all supported
Trigger inputs
Timing 1, 2 input
Auto-zero1, 2 input
Input terminal
Reset 1, 2 input
block Non-voltage input Voltage input
Start measurement/stop input
Start storage/stop input
Clear memory input
Laser OFF input
Program switch input No-voltage input x 4 inputs Voltage input x 4 inputs
Analog voltage output 10 V x 2 outputs, Output impedance: 100
NPN open collector output x 12 outputs PNP open collector output x 12 outputs
OUT comparator output
(Can freely assign 16 OUTs x 3 stage judgment results) (Can freely assign 16 OUTs x 3 stage judgment results)
Output Strobe output

terminal block Disable trigger output
NPN open collector output PNP open collector output
Memory FULL output
Ready output
Error output NPN open collector output (N.C.) PNP open collector output (N.C.)
Ethernet interface 1000BASE-T/100BASE-TX
USB Interface USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible)
RS-232C interface Measurement data output and control I/O (Can select a baud rate of up to 115,200 bits/s)
Voltage Includes 24 VDC 10% ripple (P-P)
Rating
Maximum current consumption 1.3 A or less when connected to 1 head/ 1.9 A or less when connected to 2 heads
Environmental Operating ambient temperature 0 to +50C 32 to 122F

resistance Operating ambient humidity 20 to 85% RH (No condensation)
The rating for NPN open-collector output is up to 50 mA (40 V or less), residual voltage of up to 1 V
The rating for PNP open-collector output is up to 50 mA (30 V or less), residual voltage of up to 1 V
The rating for non-voltage input is up to 1 V for ON voltage and up to 0.6 mA for OFF current
The rating for voltage input is a maximum input voltage of 26.4 V, a minimum ON voltage of 10.8 V, and up to 0.6 mA for OFF current
Display output unit

Model LJ-VM100
Analog RGB XGA (1024 768)

Monitor output
Touch panel monitor (CA-MP120T), specialized connector included
Voltage Supplied from the controller
Power consumption 2.5 W or less
Environmental Operating ambient temperature 0 to +50C 32 to 122F

LJ-H2 (LJ-Navigator 2) operation system environment

Item Minimum system requirements
Ethernet*1 1000BASE-T/100BASE-TX
PC Interface
USB*1 USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible)
Windows7 (Home Premium, Professional, Ultimate)

Supported OS Windows Vista (Home Basic, Home Premium, Business, Ultimate)
Windows XP (SP2 or later) (Home Edition, Professional Edition)
Supported languages*2 Japanese, English, German, French, Simplified Chinese, Traditional Chinese
CPU Core i3 2.3 GHz or higher
Memory capacity 2 GB or more
2D cache memory 2 MB or more
Free space on hard disk 10 GB or more
Display resolution XGA (1024 x 768) or higher
*1 Connections through a hub are not covered under warranty.

*2 Only Japanese and English are currently supported. Other languages are expected to receive support in the near future.
Windows is a registered trademark of the Microsoft Corporation, U.S.A.
Core is a registered trademark of the Intel Corporation.
28
Sensor Head/communication unit LJ-V7000 Series
PROFINET unit EtherNet/IP unit TM
LK-G5000 Series
Model CB-PN100 Model CB-EP100
Compatible network PROFINET IO communication EtherNet/IPTM and displacement sensor-specific protocols
Compatible network
Compliant standards IEEE 802.3u *1 (socket communication)
Compliant standards IEEE 802.3 (10BASE-T), IEEE 802.3u (100BASE-TX)
Ethernet
Transmission speed 100 Mbps, full duplex (100BASE-TX)

Transmission media STP or Category 5e or higher UTP Transmission speed 10 Mbps (10BASE-T), 100 Mbps (100BASE-TX)
STP or Category 3 or higher UTP (10BASE-T),
Maximum cable length 100 m 328.1' Ethernet Transmission media
STP or Category 5 or higher UTP (100BASE-TX)
Data I/O communication Maximum cable length 100 m 328.1' (Distance between the unit and Ethernet switch)
Supported functions
Record data communication Maximum number of
LK-G3000 Series
Number of connectable 4 hubs (10BASE-T), 2 hubs (100BASE-TX)
connectable hubs*1
PROFINET IO
1
PROFINET IO controllers Cyclic communication (Implicit messaging), Message
Update time 2 ms to 2048 ms Supported functions communication (Explicit messaging), Compatible with
GSDML Version 2.25 UCMM and Class 3
Conformance class Conformance Class A compliant Number of connections 64
Conformance test version Based on Version 2.2.4 RPI 0.5 ms to 10000 ms (in 0.5 ms)
EtherNet/IPTM Tolerable communication
Applicable protocol LLDP, DCP bandwidth for cyclic 6000 pps
24 V 10% communication
Power supply voltage
(supplied from the controller unit of the laser scanner) Message communication UCMM, Class 3
LJ-V7000 Series
Power consumption 0.12 A max. Conformance test Compatible with Version A9
Weight Approx. 470 g 24 VDC, including 10% ripple (P-P)
(supplied from the controller unit of the laser scanner)
*1 A lthough this unit conforms to IEEE 802.3u and can establish 100 Mbps full duplex communication using AutoNegotiation
function, it does not have AutoCrossOver and AutoPolarity functions that are normally required for the PROFINET IO Power consumption 0.12 A max.
standard. Select a straight or cross cable according to the Ethernet port of the device to be connected. Environmental Operating ambient temperature 0 to +50C 32 to 122F
*1 The number of connectable hubs is not limited when using a switching hub.
Sensor head
LJ-G Series
Model LJ-V7020K*11 LJ-V7020*11 LJ-V7060K LJ-V7060 LJ-V7080 LJ-V7200 LJ-V7300
Mounting conditions Specular reflection Diffuse reflection Specular reflection Diffuse reflection
Reference distance 24.2 mm 0.95" 20 mm 0.79" 54.6 mm 2.15" 60 mm 2.36" 80 mm 3.15" 200 mm 7.87" 300 mm 11.81"
2.3 mm 0.09" 2.6 mm 0.10" 7.6 mm 0.30" 8 mm 0.31" 23 mm 0.91" 48 mm 1.89" 145 mm 5.71"
Measurement range
Z-axis (height)
(F.S.=4.6 mm 0.18") (F.S.=5.2 mm 0.20") (F.S.=15.2 mm 0.60") (F.S.=16 mm 0.63") (F.S.=46 mm 1.81") (F.S.=96 mm 3.78") (F.S.=290 mm 11.42")
NEAR side 6.5 mm 0.26" 6.5 mm 0.26" 8 mm 0.31" 13.5mm 0.53" 25 mm 0.98" 51mm 2.01" 110 mm 4.33"
X-axis
Reference distance 7 mm 0.28" 7 mm 0.28" 14 mm 0.55" 15 mm 0.59" 32 mm 1.26" 62 mm 2.44" 180 mm 7.09"
(width)
Far side 7.5 mm 0.30" 7.5 mm 0.30" 8 mm 0.31" 15 mm 0.59" 39 mm 1.54" 73 mm 2.87" 240 mm 9.45"
SI-F1000 Series
Blue semiconductor laser
Wavelength 405 nm (visible beam)
Light source Laser class IEC60825-1 Class 2M
FDA(CDRH) Class 2M Laser Product* 12 Class 2 Laser Product Class 2 Laser Product
Laser Product*12
Part 1040.10*1
Output 10 mW 4.8 mW 10 mW 4.8 mW
Approx. 14 mm x 35 m Approx. 21 mm x 45 m Approx. 48 mm x 48 m Approx. 90 mm x 85 m Approx. 240 mm x 610 m
Spot size (reference distance)
0.55" x 1.38 Mil 0.83" x 1.77 Mil 1.89" x 1.89 Mil 3.54" x 3.35 Mil 9.45" x 24.02 Mil
Z-axis (height)* 3
0.2 m 0.008 Mil 0.4 m 0.016 Mil 0.5 m 0.02 Mil 1 m 0.04 Mil 5 m 0.20 Mil
Repeatability*2
SI-F80R Series
X-axis (width)*4 2.5 m 0.10 Mil 5 m 0.20 Mil 10 m 0.39 Mil 20 m 0.79 Mil 60 m 2.36 Mil
Linearity Z-axis (height)*5 0.1% of F.S. 0.05 to 0.15% of F.S.*6
Profile
X-axis (width) 10 m 0.39 Mil 20 m 0.79 Mil 50 m 1.97 Mil 100 m 3.94 Mil 300 m 11.81 Mil
Data interval
Sampling cycle (trigger interval)*7 Top speed: 16 s (high-speed mode) Top speed: 32 s (advanced function mode)
Temperature characteristics 0.01% of F.S./C
Enclosure rating*8 IP67 (IEC60529)
Ambient operating illuminance*9 Incandescent lamp: 10000 lux max.
Environmental Ambient temperature*10 0 to +45C 32 to 113F
LT-9000 Series
resistance Operating Ambient humidity 20 to 85% RH (No condensation)
Impact resistance 15G/6 msec
Material Aluminum
*1 T he laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50. 110 4.33"
*2 T his value is from a case in which measurement has been performed with a reference distance with 4096 times of averaging.
*3 T he measurement targets are KEYENCE standard targets. This value is from a case in which the average height of the default setting area has been measured in height mode. All other settings are default.
*4 T he measurement target is a pin gauge. This value is from a case in which the position of the intersection between the rounded surface of the pin gauge and the edge level has been measured in position
LS-9000 Series
mode. All other settings are default. 145 0.05% of F.S.
5.71"
*5 T he measurement targets are KEYENCE standard targets. The profile data is from a case in which measurement has been performed with 64 times of smoothing and 8 times of averaging. All other settings are default.
*6 T he linearity will differ depending on the measurement area. (See the diagram on the right.) 180
*7 For high-speed mode, when the measurement area is at its minimum, binning is ON, image capture mode is set to standard, and parallel image capture is ON. All other settings are default. For advanced 7.09"
function mode, when the measurement area is at its minimum, binning is ON and image capture mode is set to standard. All other settings are default.
*8 T his value is from a case in which the sensor head cable (CB-B*) or extension cable (CB-B*E) has been connected.
*9 T his is the illuminance for the light-receiving surface of the sensor head during white paper measurement when light has been shined onto the white paper.
*10 T he sensor head must be mounted on a metal plate for use. 145 0.1% of F.S.
*11 T he double polarization function cannot be used. 5.71"
*12 Do not look into the beam directly using any optical instruments (such as eye loupes, magnifiers, microscopes, telescopes, or binoculars).
Viewing the laser output with an optical instrument may pose an eye hazard. 240
9.45"
LS-7000 Series
0.15% of F.S.
Cables
TM-3000 Series
Model CB-B3 CB-B10 CB-B5E CB-B10E CB-B20E

Cable type Head cable Extension cable
Minimum bend radius 22 mm
Enclosure rating*1 IP67 (IEC60529)
Material (outer covering) PVC
*1 This value is from a case in which the sensor head has been connected. However, the controller side connector is not included. 29
Regarding cable extension between the head and controller: Up to 2 cables can be connected with the CB-BxxE, and these cables should be kept to a total length of 30 m 98.4' or less.
Dimensions
LJ-V7000 Series
Sensor head Unit: mm inch
Ultra high-accuracy specular reflection model Ultra high-accuracy model

LJ-V7020K LJ-V7020
4 0.16" 96 3.78"
21 11 0.43" 21 11 0.43"
0.83" 0.83"
20 0.79" 20 0.79"
M4 2 x M4 2 x M4
M4
Effective depth: 2.8 Effective depth: 4.7 Effective depth: 2.8 Effective depth: 4.7
0.11" 0.19" 0.11" 0.19"
42 1.65" 111.3 4.38" 42 1.65" 110 4.33" 75 2.95"

13 16 106.6 4.20" 13 16 4 0.16" 81 3.19"
0.51" 0.63" 4.6
0.51" 0.63"
0.18"
4 x M3
Effective depth: 3
0.12"
103.3 70
4.07" 30 2.76"
4 x M3 1.18" 71
Effective depth: 3 2.80"
0.12" 20 2 x 4.4 0.17"
2 x 4.4 0.17" 30 0.79"
60.5 1.18" Mounting hole
2.38" Mounting hole 0.39" 10
0.47"
18.5 0.73" 4 45
25.9 20 2.6 0.16" 12
1.02" 0.79" 0.10" 6.5 0.26" Measurement 0.79" 20 0.10"
2.6
7 0.28" area
2.6 7.5 0.30" 2.6
24.2 18.5 0.73" 24.2 2.3 45 0.10" 0.10"
0.95"2.3 6.5 0.26" Measurement 0.95" 0.09"
0.09"
2.3 7 0.28" area 2.3 0.95 0.04"
0.09" 7.5 0.30" 0.09"
0.95 0.04"
48.3 1.90"
High-accuracy specular target model High-accuracy model

LJ-V7060K LJ-V7060
22 65 2.56"
0.87"
11 0.43" 11 0.43"
0.83" 21 0.83" 21
20 0.79" 20 0.79"
M4 2 x M4 M4 2 x M4
Depth: 4.2 Depth: 2.8 Depth: 4.2 Depth: 2.8 0.11"
0.17" 0.11" 0.17"
114.3 4.50"
42 1.65" 83.5 3.29" 2 x 4.4 0.17" 42 1.65" 110 4.33" (75 2.95")
13 16 48.6 1.91" Mounting hole 13 16 4 x M3 28 59 2.32" 2 x 4.4 0.17"
0.51" 0.63" 0.51" 0.63" Depth: 3.5 0.14" 1.10" Mounting hole
4 x M3
Depth: 3.5 80
0.14" 30 3.15"
104.1 1.18" 71
4.10" 2.80"
96.7 25
3.81" 0.98"
4
0.16"
18.5 12
11.3 0.44" 0.73" 0.47"
60 60 35
2.36" 2.36"
18.5
0.73" 35 13.5 0.53"
54.6 54.6
2.15" 2.15" 8 0.31" 15 0.59" 8 0.31"
8 0.31" 8 0.31" Measurement 8 0.31"
14 0.55" 15 area
7.6 0.30" 7.6 0.30"
7.6 0.30" Measurement 7.6 0.30" 0.59"
area
2.4 2.4
8 52.6 0.09" 0.09"
0.31"
2.07"
Long range model

LJ-V7200
42 1.65" 145 5.71" (75 2.95")
32 1.26" 105 4.13"
13 16 4 x M3 32 1.26" 105 4.13" 3 x 4.4 0.17"
0.51" 0.63" Depth: 3.5 Mounting hole
0.14"
0.43" 11
0.79" 20
77
30 3.03"
1.18"
68 4 x M4
2.68" Depth: 2.8 0.11"
25
0.98"
4
0.16"
18 12
0.71" 0.47"
200 24.2
7.87"
200
7.87"
51 2.01"
48 48
1.89" 1.89"
62 2.44"
Measurement 48
48 area
1.89" 1.89"
73 2.87"
30
LJ-V7000 Series
LK-G5000 Series
Unit: mm inch
Mid-range model Ultra-long range model

LJ-V7080 LJ-V7300
0.16"
4 84 3.31" 38 1.50" 100 3.94"
LK-G3000 Series
11 0.43" 16 0.63"
0.83" 21
20 0.79"
25 0.98"
M4 2 x M4
Depth: 2.8 Depth: 6 0.24"
0.11" 4 x M4
Depth: 2.8 0.11"
57 2.24" 173 6.81" (75 2.95")

42 1.65" 96 3.78" (75 2.95")
16 25 4 x M3 38 1.50" 100 3.94" 3 x 5.4 0.21"
14 16 4 x M3 0.16" 4 71 2.80" 0.63" 0.98" Depth: 3.5 Mounting hole
0.55" 0.63" Depth: 3.5 0.14"
0.14"
LJ-V7000 Series
71
30 2.80" 79
50 3.11"
1.18" 62 1.97"
2.44" 88
3.46"
20 0.79"
0.79" 20
18 4 12 2 x 4.4 0.17" 4
0.16" 0.16"
0.71" 0.47" Mounting hole 30 12
24 1.18" 0.47"
80 80
3.15" 3.15"
25 0.98"
23
0.91" 32 1.26" 23 0.91" 21.2
LJ-G Series
23 Measurement
0.91" 23 0.91"
area
39 1.54"
110 4.33"
300 300
11.81" 11.81"
Measurement
area
145 145
5.71" 5.71"
SI-F1000 Series
180 7.09"
145 145
5.71" 5.71"
SI-F80R Series
240 9.45"
Controller
Multi-function controller Display output unit EtherNet/IPTM unit
LJ-V7001(P) LJ-VM100 CB-EP100
LT-9000 Series
88.8 3.50" (70 2.76") 153.5 6.04"
26.3 26.3 150.6

1.04" 1.04" 5.93"
DIN rail DIN rail DIN rail

mounting unit mounting unit mounting unit
178 35.9
LS-9000 Series
7.01" 1.41" 153 35.9 153 35.9
6.02" 1.41" 6.02" 1.41"
83.3
3.28" 83.3 83.3
3.28" 3.28"
6 0.24"
6 6
4 x M4 0.24" 2 x M4 0.24"
2 x M4
Depth: 6 0.24" Depth: 6 0.24" Depth: 6 0.24"
13.2 0.52" 13.2 0.52"

LS-7000 Series
60 16.5
2.36" 80 3.15"
80 3.15" 16.5 0.65"
0.65"
14.4 0.57"
80 3.15" 16.5
0.65"
Head connection cable Head connection extension cable

CB-B3/CB-B10 CB-B5E/CB-B10E/CB-B20E
TM-3000 Series
51 2.01"
41 1.61" 7.6 0.30" 55 2.17"
0.55"
31 1.22" 7.6 0.30" 55 2.17" 14 Cable length (5 m, 10 m, 20 m) 0.71" 18
Cable length (3 m, 10 m) 0.71"18 (16.4', 32.8', 65.6')
(9.8', 32.8') 0.65"16.5 0.55"14 14 0.55" 16.5 0.65"
32
1.26" 14 0.55" 16.5 0.65"
(CB-B cable side) (Sensor head side)
0.51" 13
31
LJ-G Series
High-Accuracy
2D Laser Displacement Sensor
LJ-G Series
Features
Linearity of 0.1% of F.S.
High-speed sampling
Simultaneous measurement/judgment of up to 8 features
Stable measurement for all targets

measure/index.jsp
8-point simultaneous measurement/judgment Best in its class
Measurements
The LJ-G Series provides 8-point simultaneous measurement in various
measuring modes (height, width, height difference, angle, profile, cross-
Peak height Bottom height Average height Gap
section area, etc.). Desired measuring points can be specified relative to a
profile waveform. Furthermore, the LJ-G Series provides outputs of individual
Width/Position Section area Angle/Intersection Profile comparison
measured values and upper/lower tolerance comparator outputs.
Measurement menus Useful Adjustment Functions
HEIGHT Peak WIDTH/

POSITION
Position (XZ coordinate) POSITION ADJUSTMENT FUNCTION
Measures height in
a specified range.
Average Measures width/
position with a
After the adjustment, the LJ-G Series can provide
specified stable measurements though the targets are not
condition.
Bottom neatly arranged or positioned.
Width
STEP Measured point SECTION AREA

Section area
Determines the Measures the area Displacement of target
height difference Step on the basis of the
between a reference surface.
measured point Reference surface
and the reference Reference point
point. Measuring Measuring
range range
Adjustment
ANGLE/ PROFILE
INTERSECTION COMPARISON Master profile
Angle
Measures the Compares the
angle or target profile with
intersection of Position of the master profile
intersection Measurement value
detected lines. (XZ coordinate)
to measure the Since the workpiece is not in the measuring The measuring range moves according to
largest difference. range, a precise measurement cannot be the displacement of the workpiece for
carried out. precise measurement.
32
LJ-G Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
Confirmation of PCB mounting height Confirmation of door/hood mounting accuracy
LJ-G Series
SI-F1000 Series
Confirmation of sealant coating profile Pre-weld position feedback
SI-F80R Series
Lineup
Sensor head
LJ-G015K LJ-G015 LJ-G030 LJ-G080 LJ-G200
LT-9000 Series
250 9.84"
200 7.87"
LS-9000 Series
150 5.91"
Measuring range
200 48 mm
7.87"1.89"
100 3.94"
LS-7000 Series
152 mm w: 51 mm 2.01"
Measuring range 5.98"
80 23 mm
50 1.97" 3.15"0.91"
Measuring range
Measuring range 15 2.6 mm
15 2.3 mm Measuring range 200 mm w: 62 mm 2.44"
0.59"0.1" 30 10 mm 57 mm 2.24" w: 25 mm 0.98" 7.87"
0.59"0.09"
1.18"0.39"
20 mm 0.79" w: 20 mm 0.79" 80 mm 3.15" w: 32 mm 1.26"
12.7 mm 0.50" 12.4 mm 0.49"
15 mm 0.59" 15 mm 0.59" 30 mm 1.18" w: 22 mm 0.87"
17.3 mm 0.68" w: 7 mm 0.28" 17.6 mm 0.69" w: 7 mm 0.28" 40 mm 1.57" w: 25 mm 0.98" 103 mm 4.06" w: 39 mm 1.54" 248 mm w: 73 mm 2.87"
TM-3000 Series
9.76"
Z-axis (Height) 15 2.3 mm 0.59"0.09" 15 2.6 mm 0.59"0.1" 30 10 mm 1.18"0.39" 80 23 mm 3.15"0.91" 200 48 mm 7.87"1.89"
X-axis (Width) 7 mm 0.28" 7 mm 0.28" 22 mm 0.87" 32 mm 1.26" 62 mm 2.44"
Z-axis repeatability 0.2 m 0.008 Mil 0.2 m 0.008 Mil 1 m 0.04 Mil 1 m 0.04 Mil 2 m 0.08 Mil
X-axis repeatability 2.5 m 0.10 Mil 2.5 m 0.10 Mil 5 m 0.20 Mil 10 m 0.39 Mil 20 m 0.78 Mil
33
LJ-G Series
E3-CMOS providing ultra-wide dynamic range First in the world
The E3-CMOS provides ultra-wide dynamic range which is approximately 300 times wider than conventional modes. The LJ-G Series enables target
profile measurement and the measurement of different target materials, such as black rubber (low reflected light intensity) and reflective metal (high
reflected light intensity).
* E3-CMOS sensor: Enhanced Eye Emulation CMOS image sensor
Laser light reflection Light intensity Profile measurement

Light-receiving
High
sensitivity range
Sensor
head
Conventional
Out of
measurement
Low
Traditional light receiving elements do not The edges of the profile are not measured
have enough sensitivity to cover the entire because the light intensity is far less on the
range. Light-receiving angled surfaces than the flat surfaces.
sensitivity range
Target object is 300 times larger.
High
The reflected light intensity
changes according to the
shape, color, and material
of the target. 3
E -CMOS
Low
The dynamic range is 300 times larger than The entire profile is measured.
the conventional model and covers the entire
range.
ASAP (Automatic Sensitivity Adjustment by Pixel) NEW
This function adjusts the sensitivity and laser power of the E3-CMOS to obtain suitable waveform data for each
measurement position that has a different reflectance. The obtained data is merged as a single measurement profile. Dynamic range
6000x
Target with an extremely different Sensitivity: Small Sensitivity: Medium Sensitivity: Largest Measurement profile
reflectance at each position
High capacity memory for saving data Best in its class
High capacity memory is built into the controller. A memory card slot is included to store the production records of mass-produced products.
Handling many product types Profile saving

The built-in memory can store up to 16 programs. When the memory card For analyzing NG records or production history.
is used, up to 160 programs can be stored to handle various product
types.
MemoryCard
17.221
OUT01 GO
Measure
Program setting Profile saving Data storage

Program01 ZERO [mm]
OK
30.000mm OUT01 MemoryCard
X : [ 5.000mm/div]
Program01 15.982 ZERO
GO
[mm]
Measure
X : [ 10.000mm/div]
OK
X : [ 5.000mm/div] OUT1 GO
Internal memory 16 1024 x 2 65536 x 8 Program01 10.121 Measure

ZERO
GO
[mm]
OUT3 GO
OK
Program01 16.382 ZERO

Measure GO
[mm]
X : [ 10.000mm/div] OUT2
OUT3
GO
GO
OUT4 GO
OUT5 GO
CF(1GB) 160 1024 x 300 65536 x 3200 OK

X : [ 5.000mm/div] OUT1 GO OUT6 GO
Program01 ZERO14.268 Measure GO

[mm]
OUT3 GO
OUT4
OUT5
GO
GO
OUT7 GO
OUT8 GO
OK
X : [ 5.000mm/div] OUT1 GO OUT6 GO
Program01 ZERO 15.393 Measure GO

[mm]
X : [ 10.000mm/div] OUT2
OUT3
GO
GO
OUT4 GO
OUT5 GO
OUT7 GO
OUT8 GO
ALL OUT
OK
30.000mm X : [ 5.000mm/div] OUT1 GO OUT6 GO
OUT4 GO ALL OUT
X : [ 10.000mm/div] OUT2 GO OUT7 GO Trg interval
OUT5 GO
OUT3 GO OUT8 GO 5 ms
-30.000mm OUT1 GO OUT6 GO
OUT4 GO ALL OUT Process time
-20.000mm OUT2 GO OUT7 GO 20.000mm 5 ms
OUT5 GO Trg interval
OUT3 GO OUT8 GO 5 ms
-30.000mm OUT6 GO
OUT4 GO ALL OUT Process time
-20.000mm OUT7 GO 20.000mm 5 ms
OUT5 GO Trg interval
OUT8 GO 5 ms
-30.000mm OUT6 GO
ALL OUT Process time
-20.000mm OUT7 GO 20.000mm 5 ms
Trg interval
OUT8 GO 5 ms
-30.000mm
ALL OUT Process time
-20.000mm 20.000mm 5 ms
Trg interval
5 ms
-30.000mm
Process time
Handles 160 types 1024 profiles

-20.000mm 20.000mm 5 ms
Trg interval
5 ms
-30.000mm
Process time
-20.000mm 20.000mm 5 ms
34
LJ-G Series
LK-G5000 Series
Specifications
Model LJ-G015K LJ-G015 LJ-G030 LJ-G080 LJ-G200

Type Specular reflective Diffuse reflective
Reference distance 15 mm 0.59" 30 mm 1.18" 80 mm 3.15" 200 mm 7.87"
Z-axis (Height) 2.3 mm 0.09" 2.6 mm 0.1" 10 mm 0.39" 23 mm 0.91" 48 mm 1.89"
LK-G3000 Series
Measuring Near 6.5 mm 0.26" 20 mm 0.79" 25 mm 0.98" 51 mm 2.01"
range X-axis
Reference distance 7.0 mm 0.28" 22 mm 0.87" 32 mm 1.26" 62 mm 2.44"
(Width)
Far 7.5 mm 0.30" 25 mm 0.98" 39 mm 1.54" 73 mm 2.87"
Wavelength 655 nm (Visible light)
Light source
Laser Class Class II Laser Product (FDA (CDRH) PART1040.10), Class 2 Laser Product (IEC 60825-1)
Output 0.95 mW
Approx. 32 m x 12 mm Approx. 40 m x 25 mm Approx. 80 m x 46 mm Approx. 180 m x 70 mm
LJ-V7000 Series
1.26 Mil x 0.47" 1.57 Mil x 0.98" 3.15 Mil x 1.81" 7.09 Mil x 2.76"
Z-axis (Height) *2 0.2 m 0.007 Mil 1 m 0.04 Mil 1 m 0.04 Mil 2 m 0.08 Mil
Repeatability*1
X-axis (Width) *3 2.5 m 0.10 Mil 5 m 0.20 Mil 10 m 0.39 Mil 20 m 0.78 Mil
Linearity Z-axis (Height) *2 0.1% of F.S.
Sampling frequency (Trigger interval) *4 3.8 ms
Temperature characteristics 0.02% of F.S./C
Ambient light *5 Incandescent lamp or fluorescent lamp: 5000 lux max.
LJ-G Series
Environmental resistance Ambient temperature 0 to 50C 32 to 122F
Vibration 10 to 55 Hz, double amplitude 1.5 mm 0.06", two hours in each direction of X, Y, and Z
Material Aluminum
Weight Approx. 260 g Approx. 290 g Approx. 350 g Approx. 480 g
*1 The value obtained after 64 times averaging at the reference distance.
*2 The target is KEYENCE standard object. (White diffusing material). The value is the average of the widths in the Height mode.
SI-F1000 Series
*3 The target is 10 mm 0.39" pin gauge. The value is the edge in the Position mode after 16 times of the Smoothing.
*4 With initial setting, minimum measuring range, and single smoothing processing
*5 The illumination on the receiver of the sensor head when targeting an illuminated white paper.
SI-F80R Series
LT-9000 Series
LS-9000 Series
LS-7000 Series
TM-3000 Series
35
LJ-G Series
Controller
Model LJ-G5001 LJ-G5001P
Number of connectable sensors 2 units max.
Minimum display unit 0.1 m *1, 0.001 mm2, 0.01 (Inch mode : 0.01 Mil, 0.00001 inch)
Display
Maximum display range 99999.9 mm, 999999 mm2, 99999.9 (Inch mode : 9999.99 Mil, 999.999 inch)
Laser remote interlock input Non-voltage input
Input Trigger input For sensor head A, non-voltage input For sensor head A, voltage input
terminal Timing 1 input
block
Auto-zero 1 input Non-voltage input Voltage input
Reset input
Total judgment output NPN open-collector output PNP open-collector output
Output
Error output NPN open-collector output (N.C.) PNP open-collector output (N.C.)
terminal
block Process output NPN open-collector output PNP open-collector output
Trigger input enable output
For sensor head A, NPN open-collector output For sensor head A, PNP open-collector output
Adjusted error output
Timing 2 input
Auto-zero 2 input
Trigger input For sensor head B, non-voltage input For sensor head B, voltage input
Program switching input Non-voltage input, 4 inputs Voltage input, 4 inputs
Memory card save input Non-voltage input Voltage input
Expansion Laser-Off input For sensor head A/B, non-voltage input For sensor head A/B, voltage input
connector
3-level judgment output: OUT1 to OUT8, total judgment output 3-level judgment output: OUT1 to OUT8, total judgment output
Judgment/Binary output *2 Binary output: OUT1 to OUT8 measured data output (21 bits) Binary output: OUT1 to OUT8 measured data output (21 bits)
Strobe output NPN open-collector output PNP open-collector output
For sensor head B, NPN open-collector output For sensor head B, PNP open-collector output
Analog RGB monitor output SVGA (800 x 600 pixels)
USB interface In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible)
Ethernet interface 100BASE-TX/10BASE-T
Memory card Compatible with NR-M32 (32 MB), GR-M256 (256MB), and NR-M1G (1GB). (with FAT32)
Sensor heads calculation, Profile adjustment, Filter, Smoothing, Averaging,
Position adjustment, OUT name change, Measurement mode selection
(Height, position, gap, width, center position, section area, intersection, angle, profile comparison, profile tracking),
Major functions Scaling, Average, Measurement, Measured value alarm, Tolerance setting, Auto-zero, Storage (data/profile),
Memory card saving, Program memory, Trigger mode change, Mutual interference prevention, Measuring range change,
Calibration, Laser light adjustment, Sampling time setting, Mask, Profile alarm setting, Inclination adjustment, Height adjustment,
Display language switch, Setting support software connection, Trigger pitch/Measuring time display, etc.
Power supply voltage 24 VDC 10%, Ripple: 10% (P to P) or less
Ratings
Current consumption 800 mA or less with 1 sensor head/1 A or less with two sensor heads
Environmental Ambient temperature 0 to 50C 32 to 122F
resistance Relative humidity 35 to 85%, No condensation
*1 When LJ-G015 or LJ-G015K is connected only. When other sensor heads are connected, the minimum display unit is 1 m.
*2 Time-sharing output of judgment results or binary measured data.
The rating of the NPN open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max. The rating of the PNP open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max.
The rating of the non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 1 V or less ON voltage, 1.0 mA or less OFF current)
The rating of the voltage input: 26.4 V maximum rating, 10.8 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 26.4 V maximum rating, 10.8 V or less ON voltage, 1.0 mA or less OFF current)
Hardware environment for the LJ-H1W (LJ-Navigator)

Model LJ-H1W
CPU Pentium III, 400 MHz or higher
Windows 7*1/Windows Vista*2/Windows XP Professional Edition/
Supported OS
Home Edition/Windows 2000 Professional
Memory capacity 128 MB or more
Display XGA (1024 x 768 pixels) or greater, 256 colors or greater
Hard disk space 30 MB or more
Includes one of the following:
Interface*3
USB 2.0/1.1*4, Ethernet*5, RS-232C (Serial port)
Windows is a registered trademark of Microsoft Corporation of America.
*3 Select one for communication. Multiple interfaces cannot be used for communication at the same time.
*4 Operations are not guaranteed when connected through a USB hub.
*5 Operations are not guaranteed when connected through a router or a LAN connection.
36
LJ-G Series
LK-G5000 Series
Dimensions
Unit: mm inch
Sensor head
14 0.55"
Ultra high-accuracy specular reflection Ultra high-accuracy
LJ-G015K LJ-G015 55
LK-G3000 Series
2.17"
500
16.69"
0.28"
7
2 x 0.17" 82.6 3.25" 34 0.34" 68 2.68" 9.9 0.39"

34 1.34" 2 x 0.17"
2 x 4.4 19.3 20.3
2 x 4.4 22 0.87"
(mounting hole) 0.76" 0.80" (mounting hole)
0.37" 9.5 0.03" 0.7
LJ-V7000 Series
48
82.8 1.89"
3.26"43.5 70 50
1.71" 25 25 2.76"
19.5
18 0.71"
20.8
0.82" 0.59"
0.77" 0.10"
0.09" 15 2.6
6.5 0.26" 19.5 15 19.5
2.3 0.26" 6.5
0.59" 0.77" 2.6
0.28" 7 2.3 0.28" 7 0.10"
8 0.31"
LJ-G Series
0.09"
1.3 0.05"
Z-axis measurement range 7.5 0.30"
7.5 0.30" Z-axis measurement range
X-axis measurement range X-axis measurement range
14 0.55"
14 0.55"
LJ-G030 LJ-G080 2.17"55

2.17" 55
0.28"
SI-F1000 Series
0.28" 500 2 x 0.17" 7
1.65" 500
7 19.69" 2 x 4.4
2 x 0.17" 42 88 3.47" 8.9 19.69"
1.34" 88 8.9 (mounting hole) 23 0.91" 0.35"
34 2 x 4.4 3.47" 9 0.35"
0.35" 0.03" 0.7
(mounting hole) 0.91"
0.28" 0.7 23
10
2.76" 70 0.39"
70
2.76" 62
2.44"
62 45
2.44"
4 2 0.08"
0.77" 24 0.16"9
19.5 9 0.35" 0.94" 0.35" 25
SI-F80R Series
20 0.79" 1.18" 30 4 0.16" 80
22 0.87"
10 0.39" 25 0.98" 3.15"
10 0.39"
23 0.91"
25 Z-axis measurement range 32 1.26"
0.98"
X-axis measurement range 23 0.91"
39 Z-axis measurement range

1.54"
14 0.55" X-axis measurement range
LJ-G200 2.17"55
Controller
LT-9000 Series
0.28"
500
19.69"
LJ-G5001(P)
3 x 0.17" 5.43" 7
1.50" 138 4.2 5.20"
38 3 x 4.4 3.24"
(mounting hole) 114.5 4.51" 0.17" 82.4 132
27 1.06"
0.03" 0.7
DIN rail
76 mounting
2.99" position
68
2.68"
153 35.9
6.02" 1.41"
9
LS-9000 Series
19 0.75" 4 0.35" 83.3
0.16" 3.28"
65.3
2.57"
25
200
7.87" (65) 117
200 6 4.61"
0.24" 2.56" 4 x M4
7.87"
Depth: 6 0.24"
51
2.01" 60 2.36"
48
1.89"
LS-7000 Series
62
2.44"
48 80 17
1.89" 3.15" 0.67"
73
Cable between the sensor head and the controller
Z-axis measurement range
2.87"
X-axis measurement range
LJ-GC2/5/10/20/30
7 0.28"
1.30" Cable length: 2 m 6.6', 0.55"
33 5 m 16.4', 10 m 32.8', 2.17" 14
Cable between the sensor head and the controller
TM-3000 Series
20 m 65.6', 30 m 98.4'
55
1.02" 26
Model LJ-GC2 LJ-GC5 LJ-GC10 LJ-GC20 LJ-GC30
0.45" 11.5
37
SI-F1000 Series
Micro-Head Spectral-Interference
Laser Displacement Meter
SI-F1000 Series
Features
Resolution of 1 nm 0.00004 Mil
Micro-head size of 2 mm 0.08"
Spectral interference method

measure/index.jsp
Spectral interface method First in the Industry
Development of a new principle can meet incompatible needs for small size with high accuracy that was previously impossible.
Spectroscopic unit
SLD Interference light Spectroscopic analysis
SI-F01U Sensor head Part of the broad wavelength The two reflected light beams interfere Splitting the interference light into
Polarization maintaining SI-F01
Light source (SLD)
optical fiber light emitted from the SLD with each other. The intensity of different wavelengths with the
is reflected by the heads the interference light with a specific spectroscope produces an optical
Spectro-
scope Interference light Emitted light reference surface, while the wavelength is determined according intensity distribution for a specific
Waveform Reference reflection surface Target part that passes the reference to the distance between the reference wavelength. The distance to the
analysis
Diffraction
grating
surface is mirror-reflected on surface and the target. The relative target is obtained by carrying out
CCD
the target and returns into the maximum interference is reached when waveform analysis on the
head. the determined distance is an integral distribution.
Displacement data SLD: Super Luminescent Diode
multiple of the wavelength.
No heat generation and no noise

Advantages of the optical fiber head structure
The measurement head consists of only optical fibers and lenses, with no electronic parts.
Small size, light weight, and heat resistant No heat generation Not influenced by electromagnetic noise
These features greatly reduce the constraints on selecting an An exothermic body is one of the error-causing The measurement head contains no electrical circuits.
installation area. A micro-head of this type can be used with factors in high-accuracy measurement. The Because of this, it is not influenced by electromagnetic
a wider range of measurement applications because it can be optical fiber head structure produces no heat noise, which is difficult to isolate and remove.
installed in places where conventional units cannot. generation in the head section.
Resolution of 1nm (0.001m 0.00004 Mil) Highest in its class Head size of 2mm 0.08" Worlds smallest
High resolution of 1nm (0.001m 0.00004 Mil) has been realized by The simple fiberoptic structure for the
the development of new principles and the application of sophisticated measurement head has allowed KEYENCE
controllers. This resolution can fully respond to a variety of needs for high to develop the world's smallest sensor
accuracy. head without any heat generation problems
associated with compact electronics.
In addition as the sensor head has no
electronic components, it is immune to
electromagnetic noise.
Actual Size
38
SI-F1000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
Measuring the behavior of critical components Positioning of high precision stages Measuring the thickness of glass discs
inside an assembled device
Lineup
Type Model Major technical data
Measurement range 0.05 to 1.1 mm 0.002" to 0.04"

Micro-Head Type
LJ-G Series
Resolution 0.001 m 0.00004 Mil
Best suited for measurements Head size
requiring ultra high-accuracy, SI-F01 2 mm 0.08"
compact spaces, or high Linearity 0.2 m 0.008 Mil
temperatures.
Measurement range Head size 2 mm 0.08"
0.05 to 1.1 mm 0.002" to 0.04"
Measurement range 11.3 to 12.35 mm 0.04" to 0.49"
SI-F1000 Series
Head size
Long Distance Type 8 mm 0.32" Resolution 0.01m 0.0004Mil
Long-distance measurement with SI-F10 Measurement
high accuracy. range Linearity 0.3 m 0.01 Mil
11.3 to
12.35 mm
0.44" to 0.49" Head size 8 mm 0.32"
Setting distance 80 to 81.1 mm 3.15" to 3.19"
Measurable thickness 0.05 to 1.1 mm 0.002" to 0.04"
SI-F80R Series
Thickness (Gap) Measurement Head size
Type 12 mm 0.47"
SI-F80 Resolution 0.001 m 0.00004 Mil
High accuracy achieved by Measurement
targeting thickness measurement. Setting distance thickness
Linearity 0.2 m 0.008 Mil
80 mm 3.15" 0.05 to 1.1 mm
0.002" to 0.04"
Head size 12 mm 0.47"
Sensor head Optional unit
LT-9000 Series
Micro-head type Long distance type Thickness measurement type Spectrum unit Head mounting jig (For SI-F01)
SI-F01 SI-F10 SI-F80 SI-F01U/ OP-84480
SI-F10U/
SI-F80U
LS-9000 Series
(One spectroscopic unit is needed for each
sensor head.)
Controller
Single unit type Separate type Expansion controller Spectrum unit spacer
SI-F1001V SI-F1001 SI-FA100 OP-84474
LS-7000 Series
Back surface
(Supplied together with the spectroscopic unit)
Display Cable Software

TM-3000 Series
Display panel Controller-to-sensor head unit Controller-to-spectrum unit Dedicated PC software "SI-Navigator"
SI-FD500 connecting cable extension cable SI-H1
CB-A07/CB-A2/CB-A5/ CB-A5E/CB-A10E
CB-A10/CB-A20/CB-A30 Display-to-controller cord
0.33 m 1.08' : OP-84428
3 m 9.84': OP-51655
10 m 32.81': OP-51656
39
SI-F1000 Series
Specifications
Sensor head
Type Micro-head type Long distance type Thickness measurement type
Sensor head SI-F01 SI-F10 SI-F80
Model
Spectrum unit SI-F01U SI-F10U SI-F80U
0.05 to 1.1 mm
0.05 to 1.1 mm 11.3 to 12.35 mm 0.002" to 0.04" *2
Measurement range
0.002" to 0.04" *1 0.04" to 0.49" *1 (Possible detection distance :
80 to 81.1 mm 3.15" to 3.19")
Infrared SLD Central wavelength 820 nm Output 0.6 mW,
Light source
Class 1 Laser product (IEC60825-1, FDA (CDRH) Part 1040.10 *8 )
20 m 40 m 20 m
Beam spot diameter*3
0.79 Mil 1.57 Mil 0.79 Mil
0.2 m 0.3 m 0.2 m
Linearity
0.008 Mil *4 0.01 Mil *4 0.008 Mil *5
0.001 m 0.01 m 0.001 m
Resolution
0.00004 Mil *6 0.0004 Mil *6 0.00004 Mil *7
Sampling cycle 200 s
Red semiconductor laser Wavelength 650 nm Output 0.1 mW,
Light source for guide
Class 1 Laser product (IEC60825-1, FDA (CDRH) Part 1040.10 *8)
Target near center of measurement range: green lights.
LED display Target within measurement range: orange lights.
Target outside measurement range: Flashes orange.
Temperature
Spectrum unit 0.01% of F.S./C
fluctuation
Enclosure rating Sensor head IP67 IP64 IP64
0 to +85C 0 to +40C 0 to +50C
Sensor head
Ambient 32 to 185F 32 to 104F 32 to 122F
temperature 0 to +35C
Environment Spectrum unit
resistance 32 to 95F
Relative Sensor head 35 to 85%RH (No condensation)
humidity Spectrum unit 35 to 80%RH (No condensation)
Sensor head 10 to 55 Hz, 1.5 mm 0.06" double amplitude in X, Y, and Z directions, 2 hours respectively
Vibration
Spectrum unit 10 to 55 Hz, 0.5 mm 0.02" double amplitude in X, Y, and Z directions, 2 hours respectively
Sensor head SUS
Material
Spectrum unit Polycarbonate
Sensor head (including cable) Approx. 24 g Approx. 38 g Approx. 39 g
Weight
Spectrum unit Approx. 1 kg
*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to 0.2 mm 0.01".
*2 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range.
*3 Indicates the minimum beam spot diameter within the measurement range.
*4 This value is obtained when the measurement target is a glass plate with the number of averaging measurements set to 256.
*5 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256.
*6 This value is obtained by measuring a glass plate surface located at the center of the measurement range with the number of averaging measurements set to 4,096.
*7 This value is obtained by measuring a 0.3 mm 0.01" thick glass target within the possible detection distance with the number of averaging measurements set to 4,096.
*8 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
40
SI-F1000 Series
LK-G5000 Series
Controller
Type Main Controller Expansion controller*1
Single unit type SI-F1001V
Model SI-FA100
Separate type*2 SI-F1001/SI-FD500
LK-G3000 Series
No. of connectable spectrum units 2 1
0.001 m
Minimum display unit
0.00004 Mil
999.999 m to 9999.99 mm,
Display Display range 999.999 Mil to 9999.99 Mil N/A
(7 settings selectable)
Display cycle 10 times/sec.
Laser remote interlock input
TIMING1 input
LJ-V7000 Series
RESET1 input Non-voltage input N/A
Auto-zero1 input
Terminal Laser control input
block 10 V x 2 outputs, 10 V x 1 output,
Analog voltage output
Output impedance: 100 Output impedance: 100
4 to 20 mA x 2 outputs, 4 to 20 mA x 1 output,
Analog current output
Maximum load resistance: 350 Maximum load resistance: 350
Alarm output NPN open-collector output (N.C.)
N/A
LJ-G Series
General comparator output NPN open-collector output
TIMING input Non-voltage input 2
RESET input
Non-voltage input
Auto-zero input
Program switch input Non-voltage input x 3 inputs
Expansion
Measured value data output (21 bits) OUT selectable N/A
connector Binary output
SI-F1000 Series
NPN open-collector output
Comparator/ Strobe output NPN open-collector output
binary Binary selection
output NPN open-collector output
output
Binary selection
Non-voltage input
input
Measured data output and control input/output
RS-232C interface
(Baud rate selectable to 115,200 bps max.)
USB 2.0 high speed compliant N/A
USB interface
(USB 1.1 Full-SPEED compatible)
SI-F80R Series
Ethernet interface 100Base-TX/10Base-T
12 Out simultaneous measurement
calculation, average, filter, scaling measurement, measured value alarm,
Major functions
tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
interferometer mode, mask, connection of setting support software, etc.
Power supply voltage 24 VDC10% Ripple 10% (P-P) max.
Power supply Supplied from the main controller
Maximum current consumption One head connected: 0.6 A or less. Six heads connected: 1.5 A or less.
0 to +50C
Ambient temperature*3
32 to 122F
LT-9000 Series
Environment
resistance Relative humidity 35 to 85%RH (No condensation)
Vibration*4 10 to 55 Hz, 0.5 mm 0.02" double amplitude in X, Y, and Z directions, 2 hours respectively
*1 Up to four expansion controllers can be connected to the main controller.
*2 The SI-F1003 can be used independently. The measured value display and setting change can be done with the display panel (SI-FD500) and setup support software (SI-H3).
*3 When two or more expansion controllers are connected, the ambient temperature is 0 to 40C 32 to 104F.
*4 When two or more expansion controllers are connected, the vibration resistance is "10 to 55 Hz, 0.3 mm 0.01" double amplitude in X, Y, and Z directions, 2 hours respectively".
NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
LS-9000 Series
Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
Operating environment required to use SI-H1 (SI-Navigator)

Item Minimum system requirements
CPU Pentium III, 1 GHz or higher (1.7 GHz or higher is recommended)
Windows 7*1/ Windows Vista*2/ Windows XP*3/
OS
Windows 2000 Professional*4
LS-7000 Series
Memory capacity 256 MB or higher (1 GB or more is recommended)

Display resolution 1024 x 768 pixels, 24-bit full color or higher
Free hard disk space 1 GB or larger
One of the following interfaces is required.
- USB: Revision 2.0, high-speed (full speed in USB1.1 compatible mode)*5
Interface
- LAN: 100BASE-TX or 10BASE-T*6
- RS-232C (serial port)
The other system requirements must meet those recommended for your OS.
TM-3000 Series
*2 Ultimate, Business, Home Premium and Home Basic editions are supported.
*3 Professional SP2 and later versions and Home Edition SP2 and later versions are supported.
*4 SP4 and later versions are supported.
*5 Connections via a USB hub are not supported.
*6 Connections via an in-house LAN or a router are not supported. Direct or local connections must be used.
* Windows is a registered trademark of Microsoft Corporation.
* Pentium is a registered trademark of Intel Corporation.
41
Dimensions
SI-F1000 Series
Unit: mm inch
Sensor head
Micro-head type Long distance type

SI-F01 SI-F10
0.43" +39.37" +39.37"

11 433.07" 0 433.07" 0
11.3 to 12.35 42.3
+1000 +1000
11000 0 0.44" to 0.49" 1.67" 11000 0
0.05 to 1.1 1 25 (Measurement range) (19.2) 25
(10) 0.39"
0.002" to 0.04" 0.04" 0.98" (0.76") 0.98"
(Measurement range)
8.3
8.3 0.33" 0.33"
0.9 0.04" 0.9 0.04"
-0.0004"
0 0.08 0 8 -0.01
-0.05 0.32" -0.002" (Optical fiber)
2 -0.008 -0.0003" (Optical fiber)
9
9 0.35"
0.35"
1.250.01 0.05" 0.0004"
Thickness measurement type

SI-F80
+39.37"
0" to 0.04" 433.07" 0
0 to 1.1 80 21 28 +1000
(19) 11000 0
(Detection range) 3.15" 0.83" 1.1" (0.75")
25
0.05 to 1.1 0.98"
0.002" to 0.04"
(Measurement range)
8.3 0.33"
0.9 0.04"
0.47"-0.0004"12 -0.01 8-0.01 0.32" -0.0004"
-0.002" (Optical fiber)
-0.002" -0.05 -0.05
9 0.35"
Head mounting jig (For SI-F01)

OP-84480
M2 Set screw
10.5 0.41"
0.12" 2 x 2.5 0.1
3
0.14" 3.5 Spot facing: 5 0.2, Depth: 2.5 0.1"
0.24"
6 6 0.24"
12 0.47"
C1 3 0.12"
3.1 max. 7 0.28" SUS304

0.12"
Spectrum unit
SI-F01U/SI-F10U/SI-F80U
(With decorative panel) (Without decorative panel)
65 127.5 (63) 65 (63) 105

2.56" 5.04" (2.56") 2.56" (2.56") 4.13"
DIN rail
124 124
4.88" 4.88" 35.9 1.41"
62.1 2.24"
6 0.24" 6 0.24"
47 47 1.85"
1.85"
9 0.35"
9 34.5 4xM4 13.5 79.5
79.5 4xM4
0.35" 1.36" 3.13" Depth: 6 0.24" 0.53" 3.13"
Depth: 6 0.24"
42
SI-F1000 Series
LK-G5000 Series
Controller Unit: mm inch
Single unit type Separate type

SI-F1001V SI-F1001
2.56" 5.04" (2.56") 2.56" (2.56") 4.15"
65 128 (65) 65 (65) 105.5
LK-G3000 Series
DIN rail
124 124
4.88"
4.88" 35.9 1.41"
62.1 2.44"
6 6 0.24"
LJ-V7000 Series
0.24"
47 1.85" 47 1.85"
9 0.35"
4xM4 9 0.35" 0.55" 14 79.5 4xM4
34.5 79.5
1.36" 3.13" Depth: 6 0.24" 3.13" Depth: 6 0.24"
LJ-G Series
Expansion controller
SI-FA100
SI-F1000 Series
(With decorative panel) (Without decorative panel)
1.04" 5.04" (2.56") 1.04" (2.56") 4.15"

26.3 128 (65) 26.3 (65) 105.5
DIN rail
124 124
4.88" 4.88" 35.9 1.41"
SI-F80R Series
62.1 2.44"
6 0.24" 13.5 0.53" 6 0.24" M4

Depth: 6 0.24"
M4
LT-9000 Series
114 4.49" 0.53" 13.5 14
Depth: 6 0.24" 0.55"
LS-9000 Series
Display Additional accessories
Display panel Controller-to-spectroscopic unit connection cable

SI-FD500 CB-A07/CB-A2/CB-A5/CB-A10/
CB-A20/CB-A30
LS-7000 Series
7 0.28"
Cable length
Panel cutout (0.7 m, 2 m, 5 m, 10 m, 20 m, 30 m)
2.44" 0.51" 62min. (2.30', 6.56', 16.40', 32.81', 65.62', 98.42')
62 13 Display panel 2.44"
46 Panel thickness:
1.81" 0.5 to 5 mm attachment ring 1.30" 14 0.55"
0.02" to 0.2" 33 2.17"
55
75 +0.6
0
1.02" 26
91 74.5 2.95"+0.02"
3.58" 2.93" 0
TM-3000 Series
80 100min. 0.45" 11.5

3.15" +0.6
3.94" 45 0
7 0.28"
1.77" +0.02" Cable length (5 m, 10 m)
0 0.55"
0.33" 8.5 14 (16.40', 32.81') 14 0.55"
2.17"
25 55 55 2.17"
0.98"
43
SI-F80R Series
Spectral-Interference
Wafer Thickness Meter
NEW
SI-F80R Series
Features
Resolution of 1 nm 0.00004 Mil
Sampling speed of 5 kHz
Working distance 80 mm 3.15"

measure/index.jsp
Accurately measure wafer thickness Not influenced by wafer patterns

The SI-F80R Series employs a near- Variations from wafer surface patterns and measurement alarms can be
infrared SLD that can penetrate held to a minimum by decreasing the spot beam diameter and surface
through Si, GaAs, SiC, InP, a-Si, aberrations inside the beam spot.
and other semiconductors. It can
Patterned Si wafer thickness profile data [m]
accurately measure wafer thickness, 200
even when covered with BG 195
Near-infrared light
(backgrind) tape. 190
185
Setting distance
80mm (3.15") 180
175
p-p 1 to 2 m
(0.04 to 0.08 mil) 170
Semiconductor wafer
BG tape 165
Measurement thickness
160
-150 -100 -50 0 50 100 150
-5.90" -3.93" -1.97" 0" 1.97" 3.94" 5.91" Min. beam spot
Measurement position (mm inch) diameter
25 m (0.98 Mil) Patterned wafer
Surface pattern BG tape
Simple, accurate measurements Constant monitoring in process

in-process With a small head that can be
installed 80 mm 3.15" from the
The sensor can easily make wafer, wafer thickness can be
measurements just by being constantly monitored inside
positioned 80 mm 3.15" from equipment while polishing.
wafers.
Non-contact, so wafers are not
damaged.
The sensor can directly
measure just wafer thickness,
so measurements are not
influenced by BG tape
thickness.
44
SI-F80R Series
LK-G5000 Series
Lineup
Components External device

Sensor head Spectrum unit IR sensor card
Wafer thickness SI-F80RU
measurement type
SI-F80R
LK-G3000 Series
Specifications
LJ-V7000 Series
Type Wafer thickness measurement type
Sensor head SI-F80R
Model
Spectrum unit SI-F80RU
Measurement range *1 10 to 310 m 0.39 Mil to 12.2 Mil (when n=3.5)
Possible detection distance 80 to 81.1 mm 3.15" to 3.19"
Light source Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10 *5 )
Beam spot diameter *2 25 m 0.98 Mil
Linearity *3 0.1 m 0.004 Mil (when n=3.5)
Resolution *4 1 nm 0.00004 Mil
Sampling cycle 200 s
LJ-G Series
Target near center of measurement range: green lights. Target within measurement range: orange lights.
LED display
Target outside measurement range: flashes orange.
Temperature
Spectrum unit 0.01% of F.S./C
fluctuation
Enclosure rating Sensor head IP64
Sensor head 0 to +50C 32 to 122F
Ambient temperature
Spectrum unit 0 to +35C 32 to 95F
SI-F1000 Series
Sensor head 35 to 85% RH (No condensation)
Relative humidity
Spectrum unit 35 to 85% RH (No condensation)
Sensor head 10 to 55 Hz, 1.5 mm 0.06" double amplitude in X, Y, and Z directions, 2 hours respectively
Vibration
Spectrum unit 10 to 55 Hz, 0.5 mm 0.02" double amplitude in X, Y, and Z directions, 2 hours respectively
Sensor head SUS
Material
Spectrum unit Polycarbonate
Sensor head (including cable) Approx. 70 g
Weight
Spectrum unit Approx. 1.2 kg
SI-F80R Series
The sensor head and spectrum unit are calibrated as a pair. They are not interchangeable.
*1 Indicates the thickness measurement range when the refractive index is 3.5. (The thickness measurement range is 35 to 1100 m 1.38 to 43.31 Mil when the refractive index is 1.)
*2 Indicates the minimum beam spot diameter within the measurement range.
*3 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256, converted to a refractive index of 3.5.
*4 This value is obtained by measuring a 0.3 mm 0.01" thick glass target within the possible detection distance with the number of averaging measurements set to 4096.
*5 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
Dimensions
LT-9000 Series
Unit: mm inch
SI-F80R 0 to 1.1 0.04"
80 21 28 18 (26) 11000 +1000
0
Detection range 1.10" 1.02"
3.15" 0.83" 0.71" 433.07" +39.37"
0 25
0.05 to 1.1
0.002" to 0.04" 0.98"
Measurement range
8.3
0.33"
-0.01 -0.01
2.0 0.08"
12 -0.05 8 -0.05 (Optical fiber)
-0.0004" -0.0004" 7.50.1
0.47" -0.002" 0.31" -0.002" 0.30"0.004"
LS-9000 Series
9
0.35"
SI-F80RU
91.3 127.5 (63) 91.3 (63) 105
3.59" 5.02" 2.48" 3.59" 2.48" 4.13"
LS-7000 Series
DIN rail mount

124 124
4.88" 4.88" 35.9 1.41"
62.1 2.44"
6 6
0.24" 0.24"
34.5 79.5
1.36" 3.13"
TM-3000 Series
0.35" 9
22.5 0.89"
1.85" 47
47 1.85"
0.89" 22.5
9 0.35"
5xM4 5xM4
79.5
Depth: 6 0.24" 13.5 3.13" Depth: 6 0.24"
0.53"
45
LT-9000 Series
Surface Scanning Laser

Confocal Displacement Meter
LT-9000 Series
Features
recise 2 m 0.08 Mil diameter beam spot
P
0.3 m 0.01 Mil resolution
X and Z axis scanning

measure/index.jsp
The surface scanning method allows Profile measurement NEW

measurements of all types of targets
The surface profile can be traced accurately using the oscillation unit.
A tuning fork unit and oscillation unit are combined to create a surface OUT1:A1 RUN PRG0
scanning laser. This results in advanced displacement and profile
measurements that are unaffected by target color or angle.
+75.00 GO PROFILE
UP LIMIT
+40.00
Z-axis scanning X-axis scanning LO LIMIT

-40.00
POSITION
A1:DIFF
Vertical A2:AVE
The surface profile can be traced using the double-scanning method.

The height difference between the two points can be measured.
Horizontal
The coaxial optical system improves

measurement performance.
Wide scanning enables various
measurements.
Transparent object thickness measurement
The surface condition and thickness of transparent objects can be
measured stably by utilizing the confocal principle.
High angular Measurement of Profile Angular
characteristics film thickness measurement measurement OUT1: +100.00 RUN PRG0
OUT2: +40.00 DISTANCE
[+1P +2P]
OUT1
N
E THICK
A
The first R
surface
The second
surface
Angle measurement
The third PKx :100
NEW surface
PKx :105
PROG : 80
An angle can be measured in Multi-surface measurement function

The thickness of transparent
increments of 0.01 degrees
disks can be measured. In NEW
based on the measurement
addition, the slant correction The first surface
values of two or more points The second surface
function enables more reliable
obtained by scanning the laser The third surface
measurements.
beam spot. The fourth surface
The peak value of light intensity of
up to four target surfaces can be
detected with one measurement unit.
The selected measurement surface
can be measured with high accuracy.
46
LT-9000 Series
LK-G5000 Series
Applications
OUT1:A1 RUN PRG0 OUT1: +100.00 RUN PRG0

+75.00 GO PROFILE OUT2: +40.00
[+1P +2P]
DISTANCE
OUT1
UP LIMIT
+40.00
N
E THICK
A
The first R
LO LIMIT surface
-40.00 The second
LK-G3000 Series
POSITION surface
The third PKx :100
surface
A1:DIFF PKx :105
A2:AVE PROG : 80
LJ-V7000 Series
Measuring the profile of solder paste on a PWB Measuring the thickness of an optical disc
The profile of lead-free solder can be measured for detecting The intermediate layer of an optical disc can be measured.
abnormalities such as cracks, bridges, and insufficient soldering.
LJ-G Series
SI-F1000 Series
Measuring the parallelism of a CCD Measuring the cross-sectional area of Measuring the height of bond wire
and cover glass liquid sealing material The height of narrow pitch bonding wire can
The inclination of a CCD surface against the The profile and cross-sectional area of be measured reliably.
rear surface of the glass can be measured sealing material applied for bonding glass
accurately using the newly developed substrates.
relative angle measurement.
SI-F80R Series
Lineup (Measuring unit)
LT-9000 Series
Type High-accuracy Long-range
Model LT-9011M LT-9031M
Measurement range 0.3 mm 0.01" 1 mm 0.04"
Reference distance 6 mm 0.24" 30 mm 1.18"
LS-9000 Series
Appearance
LS-7000 Series
Scan width 0 to 1100 m 0 to 43.3 Mil (6 steps) 0 to 560 m 0 to 22.0 Mil (6 steps)
Interval 1 to 10 m 0.04 to 0.39 Mil (4 steps) 1 to 8 m 0.04 to 0.31 Mil (4 steps)
Resolution 0.3 m 0.01 Mil 0.3 m 0.01 Mil
Linearity 0.5% of F.S. 0.3% of F.S.

TM-3000 Series
47
LT-9000 Series
Specifications
Controller
Controller LT-9501H/LT-9001H LT-9501HSO(5654)/LT-9001HSO(5655)
Model
Measuring unit LT-9011M/LT-9011 LT-9031M/LT-9031
Measuring unit compatibility Measuring units are interchangeable without factory recalibration.
Minimum display unit 0.1 m*5 0.004 Mil, 1 m2, 0.01 0.1 m*5 0.004 Mil
Display range 9999.99 m 393.70 Mil, 999999 m2, 9999.99 9999.99 m 393.70 Mil
Display
Microscope function Available (LT-9501H/LT-9011M only) Available (LT-9501HSO(5654)/LT-9031M only)
Display cycle*1 10 times/sec.
Analog output 10 V x 2 outputs, output impedance: 100
Terminal
Timing input/Reset input/Auto-zero input Non-voltage input
block
Monitor dedicated power supply*2 24 VDC, 1 A
Limits mode*3 3-step limits output For OUT1 and OUT2, and NPN open collector output
Measured data output (21 bits), OUT1/OUT2/PROFILE selectable
Binary output
NPN open collector output
Binary mode *3 Strobe output NPN open collector output
Control I/O Binary selection output NPN open collector output
Binary selection input Non-voltage input
Stability output NPN open collector output
Laser remote input Non-voltage input
Program change input Non-voltage input x 3 inputs
RS-232C interface Measured data output and control I/O (Selectable up to baud rate 115200 bps.)
Video output NTSC compliant (PIN connector)
Distance measurement, Transparent object thickness
Distance measurement, Transparent object thickness
measurement, Angle measurement, Relative angle measurement,
Distance mode*4 measurement, Surface selection, Dark-out, Mask, Trend graph
Surface selection, Dark-out, Mask, Trend graph display, and Scan
display, and Scan width/interval change
width/interval change
Main Area selection (Average, Maximum, Minimum, Maximum-to-
function Profile mode*4 minimum, Area) Area calculation, Scan width/interval change,
Dark-out, Smoothing, Averaging, and Profile data output
Light intensity accumulation, Microscope (LT-9501H, LT-9501HSO(5654) only), Tolerance
Common judgment, 8-program registration, Calibration, Averaging, Hold modes, Auto-zero, and
interface language selection
Power supply voltage 100 to 240 VAC 10% 50/60 Hz
Current consumption 110 VA or lower
Rating
Overvoltage category II
Pollution degree 2
Ambient temperature 0 to 35C 32 to 95F, No condensation
Weight (Controller) Approx. 2.4 kg
*1 Varies depending on the setting
*2 Dedicated power supply for the monitor specified by KEYENCE.
*3 Select either the Limits mode or the Binary mode.
*4 Select either the Distance mode or the Profile mode. (Distance mode is only available with the LT-9501HSO(5654) and LT-9001HSO(5655).)
The rating of the NPN open-collector output is 30 mA (30 V or lower) maximum, and residual voltage is 0.5 V.
The rating of the Non-voltage input is ON voltage 1 V or lower, and OFF current 0.6 mA or lower.
*5 Display changes every 0.3 m 0.01 Mil.
Measuring unit
Type High-accuracy Long-range
Model LT-9011M LT-9011 LT-9031M LT-9031
Measurement range 0.01" 0.3 mm 0.04" 1.0 mm
Reference distance 0.20" 6 mm 1.18" 30 mm
Visible red semiconductor laser
Wavelength 670 nm
Light source Output 170 W (IEC)/3.0 W (FDA)
Laser Class Class IIa (FDA CDRH 21CFR Part 1040.10), Class 1 (IEC60825-1)
Spot diameter Approx. 0.08 Mil 2 m Approx. 0.27 Mil 7 m
0 to 42.9 Mil 0 to 1100 m (6 steps)/ 0 to 21.8 Mil 0 to 560 m (6 steps)/
Scan width/interval
0.04 to 0.39 Mil 1 to 10 m (4 steps) 0.04 to 0.03 Mil 1 to 8 m (4 steps)
Resolution 1. 0.0004 Mil 0.01 m 0.004 Mil 0.1 m
Linearity 1. 0.5% of F.S. 0.3% of F.S.
Sampling cycle 3. 640 s to 356 ms (14 steps) 640 s to 187 ms (14 steps)
Temperature characteristics
0.5% of F.S. 0.25% of F.S.
(+20 to +30C(+68 to +86F))
Available Unavailable Available Unavailable
Microscope 0.05" x 0.04" 0.10" x 0.08"
Field of view
function 1.3 mm x 1.05 mm 2.5 mm x 2.0 mm
Infrared LED Infrared LED
Illumination light source
(wavelength: 870 nm) (wavelength: 870 nm)
Ambient light Incandescent lamp/fluorescent lamp: 10000 lux max.
Ambient temperature 0 to 35C (32 to 95F), No condensation
1. The value when the measurement target is an mirrored surface object that is measured in displacement mode, scan width/interval 4.8 Mil (120 m)/0.08 Mil (2 m), and 8-times average
2. The value when the FINE mode is set to OFF.
3. Sampling cycle differs according to the manufacturing variation of individual measuring units.
48
LT-9000 Series
LK-G5000 Series
Dimensions
Controllers Unit: mm inch
LT-9501H/9001H, LT-9501HSO(5654)/9001HSO(5655)
LK-G3000 Series
60 2.36" 67 2.64"
177 49 137
6.97" 1.93" 5.39"
220
LJ-V7000 Series
210 (100)
8.66" 8.27" (3.94")
Measuring units Sensor head cable

LT-9011M/9011
65
Cable between the measuring unit and the controller
2.56" LT-C2/LT-C10
43 43
56 1.69" 1.69"
6.3 Cable length: 500
LJ-G Series
2.20"
0.25" 19.69"
4.5 0.18"
14.7 0.58" 14 0.55"
22
0.87"
0.25"
6.3 Cable length:
2 m, 10 m 6.56', 32.81'
52.5 2.07"
SI-F1000 Series
94 3.70" Remote control console
3 x 4.5 0.18" 37 1.46" (Standard OP-51542)
mounting hole
28.8
1.13"
15
47 2.1 0.08" 17.1 0.67"
0.59" 6 0.5 (Reference distance)
0.24" 0.02" 1.85"
46
1.81" 5.5 0.22"
SI-F80R Series
33
1.30"
17.1 0.67"
15 0.59" 11.2 0.44"
20 78 3.07"
0.79"
112.7 4.44"
LT-9000 Series
LT-9031M/9031
65
2.56" 4 0.16" 4.5 0.18"
Cable length: 3 m 9.8'
56 11 0.43"
6.3 Cable length: 500 2.20"
0.25" 19.69"
4.5 0.18"
LS-9000 Series
22
0.87"
52.5 2.07"
135 5.31"
LS-7000 Series
3 x 4.5 0.18"
mounting hole
78 3.07"
30 2 (Reference distance)
15 1.18" 0.08"
0.59"
46
TM-3000 Series
1.81"
33
1.30"
26.4 1.04"
49
LS-9000 Series
High-Speed Optical Micrometer
LS-9000 Series
High-accuracy optical micrometer that flexibly
supports runout and inclination with the ultimate
performance required for on-site measurement.
Features
High-speed 16000 samples/second
The smallest detectable object 10 m 0.39 Mil
Equipped with the tilt correction and transmitter/receiver
position measurement, etc.

measure/index.jsp
Principle
3-CMOSGreen-LED system
[Principle] Green-LED light is emitted
as a uniform collimated
beam. The CMOS detects
the position of the edge
between light and dark
edges of the received light
and calculates measured
values. High-intensity
Green-LED
High performance
condenser
Monitor CMOS Target Position High-speed exposure

CMOS CMOS
Three separate CMOS sensors provide advanced inspection capabilities
High-speed CMOS Monitor CMOS Target positioning CMOS

*1
16000 Hz sampling Alignment adjustment Transmitter/receiver direction and
position measurement*2
By integrating the peripheral circuits of the Recognizes the misalignment of a workpiece With the additional data obtained from the
measurement CMOS into one chip, the S/N from the image taken by the monitor CMOS. target positioning CMOS, the LS-9000 can
ratio has been dramatically improved and Inclination error is removed automatically and determine the position of the target in both
high-speed sampling achieved. For example, does not affect the measurement result. the X and Y axes.
targets that move at 1000 m 3280.8'/min. can The captured image can also be checked with
be measured at a pitch of around 1 mm 0.04". computer software so even novices will have
Even parts that vibrate at high speeds can be no problem taking measurements.
measured stably. *1*2 Functions of the LS-9006 (M) and LS-9030 (M) heads only.
50
LS-9000 Series
LK-G5000 Series
Applications
Measuring the outer diameter wire moving at high speed Measuring the outer diameter of a shaft
Misaligned workpieces are adjusted and measured
Even vibrating targets
are measured with
LK-G3000 Series
high-speed
Measured
value
LJ-V7000 Series
Measuring the position and outer diameter of an optic fiber Outer diameter measurement in harsh environments
LJ-G Series
Enables 2D position measurement
on a single device
Y axis
Detachable air purge unit
SI-F1000 Series
X axis
SI-F80R Series
Lineup
Measuring unit
Type Large-diameter model Standard model Small-diameter model
Subtype With monitor camera With monitor camera Without monitor camera With monitor camera Without monitor camera
LT-9000 Series
Model LS-9120M LS-9030M LS-9030 LS-9006M LS-9006
120 mm 4.72" 30 mm 1.18"
Appearance
6 mm 0.24"
Measurement range 0.8 to 120 mm 0.03" to 4.72" 0.08 to 30 mm 0.003" to 1.18" 0.01 to 6 mm 0.0004" to 0.24"
LS-9000 Series
Smallest detectable 8 m 0.31 Mil 2 m 0.08 Mil 0.5 m 0.02 Mil
object
Measurement accuracy 0.3 m 0.01 Mil 0.1 m 0.004 Mil 0.03 m 0.001 Mil
Monitor function Provided Not provided Provided Not provided Provided Not provided
LS-7000 Series
Type 2-axis standard model 2-axis small-diameter model

Subtype Without monitor camera Without monitor camera
Model LS-9030D LS-9006D
Appearance
TM-3000 Series
Measurement range 0.3 to 30 mm 0.01" to 1.18" 0.04 to 6 mm 0.002" to 0.24"

Smallest detectable object 2 m 0.08 Mil 0.5 m 0.02 Mil
Measurement accuracy 0.1m 0.004 Mil 0.03 m 0.001 Mil
51
LS-9000 Series
Structure
Our proprietary wear-free construction Best in class environmental resistance design*

As a high intensity Green LED is used to generate the measurement The system enclosure maintains an IP67 rated protection for all
beam, laser degradation typical with traditional systems is completely internal components. In addition, the LS-9000 Series heads come
avoided. In addition, as the entire beam is generated with no moving standard with a built in air purge mechanism to further enhance
parts, there is no motor or mirror system to wear out or replace. the systems resistance to environmental influence.
The LS-9000 The laser scanning system Meets the IP67 standard Built-in air purge units
transmitter construction transmitter construction
(No moving parts)
High-efficiency
High-efficiency
condenser unit unit
condenser Reflective
Reflective
mirror
mirror
Semiconductor
Semiconductor
laserlaser
Diffusion
DiffusionHigh-Intensity
High-Intensity Polygon
Polygon
plateplate Green-LED
Green-LED mirror
mirror
* The air purge unit is sold as an optional accessory only for the LS-9120M head.
Functions
Ultra-thin outer diameter and

ultra-thin gap measurement* 16-channel simultaneous measurement
Specialized ultra-fine diameter/gap tool now allows measurement of With up to 16 simultaneous outputs, it is possible to measure any
gaps and diameters previously undetectable. combination of diameters, position, gaps, etc. to meet your needs.
Measuring the outer diameter of an ultra-thin wire Measuring the outer diameter and runout of a photocopier roller
Smallest
detectable Standard mode Ultra-thin mode
object
6 mm 0.24" type 40 m 1.57 Mil 10 m 0.39 Mil
30 mm 1.18" type 300 m 11.8 Mil 80 m 3.15 Mil
* Functions of the LS-9006 (M) and LS-9030 (M) heads only.
Transparent object/two-level edge detection

Irregular surface cancellation threshold value setting
Irregular surface cancellation allows for proper outer diameter Using two-level threshold settings, it is possible to simultaneously
inspection of parts with complex profiles such as key slots or D-cuts. measure two targets of differing transparency.
Measuring the outer diameter of a motor shaft Taking dimensional measurements of transparent film and
coating material
Transparent film width
intensity
Cancel
Measured value
Light
Data used for Data used for

measurement
data measurement
Coating material width
100%
80%
Threshold
value 1
Threshold value 50%
Threshold
value 2
0%
Score
Width
52
LS-9000 Series
LK-G5000 Series
Specifications
Measuring unit
Head (Standard model/small-diameter model)
LS-9006M LS-9006 LS-9030M LS-9030
Model
(with monitor camera) (without monitor camera) (with monitor camera) (without monitor camera)
LK-G3000 Series
Measurement range 0.04 mm (0.01 mm) to 6 mm 0.002"(0.0004") to 0.24" 0.3 mm (0.08 mm) to 30 mm 0.01"(0.003") to 1.18"
Smallest detectable object 0.04 mm (0.01 mm) 0.002"(0.0004") 0.3 mm (0.08 mm) 0.01"(0.003")
Transmitter/receiver distance 60 5 mm 2.36" 0.20" 160 40 mm 6.3" 1.57"
Repeatability 0.03 m 0.001 Mil*1 0.1 m 0.004 Mil*2
Measurement accuracy 0.5 m 0.02 Mil*3 2 m 0.08 Mil*4
Sampling cycle*7 16000 samples/sec.
Detection area 4 x 5 mm 0.16" x 0.20" 20 x 24 mm 0.79" x 0.94"
Transmitter/receiver Smallest detectable object 0.04 mm 0.002" 0.3 mm 0.01"
direction and
LJ-V7000 Series
position detection Repeatability 0.02 mm 0.0008"*5 0.2 mm 0.008"*6
Sampling cycle 4000 samples/sec.
Light source InGaN green LED
Monitor camera Provided Not provided Provided Not provided
Ambient temperature 0 to +50C 32 to 122F
Relative humidity 20 to 85% RH (no condensation)
Environmental
Ambient light Incandescent lamp/fluorescent lamp 3000 lux or lower
resistance
Vibration resistance 10 to 55 Hz, double amplitude 1.5 mm 0.06", 2 hours in each direction (X,Y, and Z)
Shock resistance 15G/6 ms
Enclosure rating IP67 (including connector)
LJ-G Series
Material Aluminum
Transmitter: Approx. 130 g Transmitter: Approx. 130 g Transmitter: Approx. 440 g Transmitter: Approx. 440 g
Weight Receiver: Approx. 300 g Receiver: Approx. 280 g Receiver: Approx. 500 g Receiver: Approx. 440 g
Base: Approx. 180 g Base: Approx. 180 g Base: Approx. 430 g Base: Approx. 430 g
The values in brackets are measured in ultra-thin mode.

*1 2 is the value when the outer diameter of a rod 1.0 mm 0.04" is measured at the center of the measuring area while the number of averaging measurements is set to 2048.
*2 2 is the value when the outer diameter of a rod 10 mm 0.39" is measured at the center of the measuring area while the number of averaging measurements is set to 2048.
*3 The error when a moving rod 1.0 mm 0.04" is measured within the measuring area.
SI-F1000 Series
*4 The error when a moving rod 10 mm 0.39" is measured within the measuring area.
*5 The value of 2 when the position of a rod 1.0 mm 0.04" is measured at the center of the measuring area while the number of averaging measurements is set to 512.
*6 The value of 2 when the outer diameter of a rod 10 mm 0.39" is measured at the center of the measuring area while the number of averaging measurements is set to 512.
*7 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.
Head (2-axis standard model/2-axis small-diameter model)

Model LS-9006D LS-9030D
Measurement range 0.04 mm to 6 mm 0.002" to 0.24" 0.3 mm to 30 mm 0.01" to 1.18"
SI-F80R Series
Smallest detectable object 0.04 mm 0.002" 0.3 mm 0.01"
Repeatability 0.03 m 0.001 Mil*1 0.1 m 0.004 Mil*2
Measurement accuracy 0.5 m 0.02 Mil*3 2 m 0.08 Mil*4
Sampling cycle*5 16000 samples/sec.
Monitor camera Not provided
Environmental
LT-9000 Series
resistance
Measuring head enclosure rating IP67 (including connector)
Material Aluminum
Weight Approx. 4.8 kg Approx. 9 kg
*1 2 is the value when the outer diameter of a rod of 1.0 mm 0.04" is measured at the center of the measuring area while the number of averaging measurements is set to 2048.
*2 2 is the value when the outer diameter of a rod of 10 mm 0.39" is measured at the center of the measuring area while the number of averaging measurements is set to 2048.
*3 The error when a moving rod 1.0 mm 0.04" is measured within the measuring area.
LS-9000 Series
*5 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.
Head (Large-diameter model)

Model LS-9120M
Measurement range 0.8 mm to 120 mm 0.03" to 4.72"
LS-7000 Series
Smallest detectable object 0.8 mm 0.03"

Transmitter/receiver distance 400 100 mm 15.75" 3.94"
Repeatability 0.3 m 0.01 Mil*1
Measurement accuracy 8 m 0.31 Mil*2
Sampling cycle 16000 samples/sec.
Monitor camera Provided
TM-3000 Series

Environmental
resistance
Enclosure rating IP67 (including connector)
Material Aluminum
Weight Transmitter: Approx. 1800 g, Receiver: Approx. 2800 g, Base: Approx. 1600 g
*1 2 is the value when the outer diameter of a rod 40 mm 1.57" is measured at the center of the measuring area while the number of averaging measurements is set to 2048.
53
LS-9000 Series
Specifications
Controller
Model LS-9501 LS-9501P
No. of connectable sensor heads 2
Head compatibility Yes
Display Display range 99999.99 m to 9999.9 mm 3937 Mil to 393.70"
LED display POWER ON indicator, ERROR indicator
Encoder input NPN/PNP open-collector output, voltage output (5 V/12 V/24 V), line-driver output
Synchronous 1, 2 input
Auto-zero 1, 2 input
Reset 1, 2 input
Input Storage trigger input
terminal block Storage enable input
Storage data clear input
Statistics 1, 2 input
Statistics clear 1, 2 input
Program selection input Non-voltage input x 4 inputs Voltage input x 4 inputs
Analog voltage output 10 V x 2 outputs, output impedance 100
Analog current output 4 to 20 mA x 2 outputs, compatible load max. 350
NPN open-collector output x 10 outputs PNP open-collector output x 10 outputs
Universal output
Measured value and tolerance judgment output, status output allocatable Measured value and tolerance judgment output, status output allocatable
Output terminal Status 1, 2 output
Total judgment output
Memory FULL output
Strobe 1, 2 output
Error output NPN open-collector output (N.C.) PNP open-collector output (N.C.)
Ethernet interface 1000BASE-T/100BASE-TX
USB interface USB 2.0 HI-SPEED supported (USB 1.1 Full-SPEED compatible)
RS-232C interface Measured value output, control I/O, setting change, baud rate can be selected up to 115200 bps
Display and settings panel interface LS-D1000 Max. four heads connectable
Power supply voltage 24 VDC 10%, including ripple (P-P)
Rating When LS-HA100 not used: 1.0 A max. when 1 head connected; 1.4 A max. when 2 heads connected
Current consumption*1
When LS-HA100 in use: 2.0 A max. when 3 heads connected; 2.3 A max. when 4 heads connected
When LS-HA100 not used: 0 to +50C 32 to 122F
Environmental Ambient temperature
When LS-HA100 in use: 0 to +45C 32 to 113F
resistance
NPN open-collector output rating: 50 mA max. (40 V max.), residual voltage of 1 V max.
PNP open-collector output rating: 50 mA max. (30 V max.), residual voltage of 1 V max.
Non-voltage input rating: ON voltage of 1 V max., OFF current of 0.6 mA max.
Voltage input rating: Input max. voltage 26.4 V, min. ON voltage 10.8 V, OFF current 0.6 mA max.
*1 Add the current consumption values for all units when connecting the display settings panel and expansion units. When the LS-9006D or LS-9030D is connected, it counts as two heads.
Display and settings panel

Model LS-D1000
Measured value display: 2 colors, 8 digits, 16 segments
OUT number display: Monochrome, 2 digits, 7 segments
Measured value display
Tolerance judgment display: HH, HI, GO, LO, LL. Monochrome
Control status display: TIM, ZERO indicator. Monochrome
Display interface Program number display Monochrome, 2 digits, 7 segments
1D display: 2 colors, 32 levels
Position monitor display
2D display: Monochrome, 7 x 7 matrix display
Display update cycle 5 times/sec.
Numeric keypad, function key, lock key
Operation input interface timing input key, zero input key, reset input key,
escape key, arrow keys (4)
Display and settings panel connection port 2
Power supply Supplied from the controller
Rating Current consumption 0.19 A max.
Environmental Ambient temperature 0 to +50C 32 to 122F
resistance Relative humidity 20 to 85% RH (no condensation)
Enclosure rating IP65 (When panel attached, front surface only)
OS environment for using the LS-H2 (LS-Navigator 2) Setting Support Software

Item Required environment
Windows 7*1
Operating System Windows Vista*2
Windows XP (SP2 or later)*3
Supported languages Japanese, English, German, Simplified Chinese, Traditional Chinese
CPU Core 2 Duo 2 GHz or more
Memory capacity 2 GB or more
L2 cache memory 2 MB or more
Free space in hard disk 10 GB or more
Display XGA (1024 768 pixels) or more, 256 colors or more
USB USB 2.0 HI-SPEED supported (USB 1.1 Full-SPEED compatible)*4
Interface
Ethernet Ethernet 1000BASE-T/100BASE-TX*5
If you wish to use the send to Excel function, please check that one of the Excel versions listed below is installed on your computer.
Excel 2010 (32 bit/64 bit), Excel 2007, Excel 2003, Excel 2002
*1 Each edition of Home Premium, Professional, and Ultimate are supported. *2 Each edition of Ultimate, Business, Home Premium, and Home Basic are supported.
*3 Home Edition and Professional Edition are supported. *4 Connection via a USB hub is not covered by the warranty. *5 Connection to a LAN and connection via a router is not covered by the warranty.
54
LS-9000 Series
LK-G5000 Series
BCD output unit
Model CB-BD100
LED display POWER-ON LED
BCD output *1 NPN open-collector output x 4 ports
Output terminal Strobe output NPN open-collector output x 4 outputs
LK-G3000 Series
OUT selection output NPN open-collector output x 4 outputs
Input terminal OUT selection input Non-voltage input x 4 inputs
Power source Supplied from the controller
Rating Current consumption 0.16 A max.
Weight 800 g
LJ-V7000 Series
Up to 1 unit can be connected to the controller.
NPN open-collector output rating: 30 mA max. (30 V max.), residual voltage of 0.5 V max.
Non-voltage input rating: ON voltage of 1 V max., OFF current of 0.6 mA max.
*1 Selectable from BCD output (29 bits, signed), binary output (25 bits, negative numbers are represented by the twos complement), and judgment output.
EtherNet/IPTM unit
Model CB-EP100
LJ-G Series
Compatible network EtherNet/IP and displacement sensor-specific protocols (socket communication)
TM
Compliant standards IEEE 802.3 (10BASE-T), IEEE 802.3u (100BASE-TX)

Transmission speed 10 Mbps (10BASE-T), 100 Mbps (100BASE-TX)
STP or Category 3 or higher UTP (10BASE-T),
Transmission media
Ethernet STP or Category 5 or higher UTP (100BASE-TX)
Maximum cable length 100 m 328.1' (Distance between the unit and Ethernet switch)
SI-F1000 Series
Maximum number of connectable
4 hubs (10BASE-T), 2 hubs (100BASE-TX)
hubs*1
Cyclic communication (Implicit messaging),
Supported functions Message communication (Explicit messaging),
Compatible with UCMM and Class 3
Number of connections 64
EtherNet/IPTM RPI 0.5 ms to 10000 ms (in 0.5 ms)

Tolerable communication bandwidth
6000 pps
for cyclic communication
SI-F80R Series
Message communication UCMM, Class 3
Conformance test Compatible with Version A9
24 VDC 10%, including ripple (P-P)
Current consumption 0.12 A max.
LT-9000 Series
*1 The number of connectable hubs is not limited when using a switching hub.
PROFINET unit
Model CB-PN100
LS-9000 Series
Compatible network PROFINET IO communication
Compliant standards IEEE 802.3u*1
Transmission speed 100 Mbps, full duplex (100BASE-TX)
Ethernet
Transmission media STP or Category 5e or higher UTP
Maximum cable length 100 m 328.1'
Data I/O communication
Supported functions
Record data communication
LS-7000 Series
Number of connectable PROFINET

1
IO controllers
PROFINET IO Update time 2 ms to 2048 ms

GSDML Version 2.25
Conformance class Conformance Class A compliant
Conformance test version Based on Version 2.2.4
Applicable protocol LLDP, DCP
TM-3000 Series
24 V 10%
Current consumption 0.12 A max.
*1 Although this unit conforms to IEEE 802.3u and can establish 100 Mbps full duplex communication using AutoNegotiation function, it does not have AutoCrossOver and AutoPolarity functions that are normally required
for the PROFINET IO standard. Select a straight or cross cable according to the Ethernet port of the device to be connected.
55
LS-9000 Series
Dimensions
Unit: mm inch
Measuring head
4 x M3 4 x M3
LS-9120M Effective depth 6 Effective depth 6
0.24" 0.24"
0.98" 0.98"
25 25 4 x M4
171 0.67"0.04" 1.38"
35 Effective depth 10
Measurement position 0.39"
2.19"
162 55.6 162
6.38" Measuring 6.38"
head
4 x 6.5 0.26" Through-hole
150 150
5.91" 5.91" 14 0.55" Spot facing depth 7
0.31" 8 0.28"
8 0.31"
30.6 16 16 30.6
1.2" 0.63" 0.63" 1.2"
9.17" 1.18" Measuring 1.18" 6.89"

233 30 area 30 175
3.15"
80
180 168 120 168 180

7.09" 6.61" 4.72" 6.61" 7.09"
R0 2
891
R2
3.5"0.04"
.87
"
0.24"
6
20
6 0.79"
59.2 2.33"
0.24"
3 x 7.5 0.30" 145 15 200 7.87"
3 x 7.5 0.30"
Mounting hole 5.71" 0.59"
400 15.75" 15 125 Mounting hole
0.59" 4.92"
LS-9030/LS-9030M 2 x M3 2 x M3
Effective depth 3 Effective depth 3
0.59"0.59" 0.12"
0.12" 15 15 4 x M4
Effective depth 10
0.39"
55 55
2.17" 1.51"
38.3 2.17"
Measuring 1.02" 26
8 head 8
0.31" 260.21.02"0.01" 6 0.31"
26 1.02" Measurement position 0.24" 4 x 4.5 0.18" Through-hole 26 1.02"
55 55 8 0.31" Spot facing depth 4.5
Front surface of receiver 2.17" 2.17" 0.18" Front surface of transmitter
(387.5) (15.26")
(1.34") 4.29" 4.67"
(34)*2 109 (0.47") (12)*1 (0.47") (12)*1 118.5
Measuring area
0.79"
20
2.81"
2.81" 2.36" 71.5
71.5 60 30(24)*3 60
2.36" Measuring
R0 22
1.4"0.01" 1.18"(0.94")
R
.87
35.5 0.2 head

"
5.5 0.22" 19.5

5.5 0.77"
0.22" (85)(3.35")
3 x 5.5 0.22" 80 3.15" 3 x 5.5 0.22"
*1 With air purge unit attached
(Mounting hole) 50 27 160 27 50 (Mounting hole)
1.97" 1.06" 6.3" 1.06" 1.97" *2 LS-9030M only
*3 ( ) is for ultra-thin diameter mode
LS-9006/LS-9006M 0.24"
1.5" 38 base
6 0.1" 12.5 0.49" 13 0.51" 6 0.24" 0.51" 12.5 0.49"
2 x M2.5 Effective
26 depth 2.5 21.5 0.85" 26 depth 2.5 13
2 x M2.5 Effective 21.5 0.85"
1.02" 1.02" 0.1"
0.39"0.39"
4 x M4 10 10 4 x 4.5 0.18"
24 135 5.31" 135 5.31" 0.94" 24
2 x M4 Through-hole Through-hole 2 x M4
0.94"
Through-hole Through-hole
Measuring head 175 6.89" 165 6.5" 16 0.63" 18 0.71"
0.98"25
(48) 0.49" 0.01" 12.5 0.2 340 13.39" 33.50.16" x 0.31" 3.5 0.14"
8 0.31"
24 24 4x8
(1.89")
Front surface Measurement position 0.94" 0.94" 1.32" Front surface
Spot facing depth 4.5
of receiver 20 20 0.18" of transmitter
0.79" 0.79"
(227) (8.94")
Without transmitter (0.69")
22 (0.91") 1.26" 22
bar attached 0.87" 124.5 4.9" (17.5)*1 (23)*1 32 Measuring
0.87"area
0.16"(0.08")
0.1" 2.5 4(2)*2 0.31" 8
2 x M4 38 113 113 38 2 x M4
Effective depth 5 0.2" 1.5" 4.45" 4.45" 1.5" Effective depth 5 0.2"
R0
2.2"
.87
R2
56 48 46 56
"
2
2.2" 1.89" 6(5)*2 1.81" Measuring

0.24"(0.2") head
0.16" 4 4 0.16" 18
(3.35") 0.71"
(85) (30)
3 x 4 0.16" (1.18") (2.36") 2 x 4 0.16"
(Mounting hole) (60) (Mounting hole)
1.52" 1.28" 1.5" 0.14"
400.2 1.57"0.01" 38.5 4 32.5 38 3.5
0.16" *1 With air purge unit attached
115 78 25 *2 ( ) is for ultra-thin diameter mode
4.53" 3.07" 0.98"
0.94" 0.14"
24 base 3.5
LS-9030D 36 1.42"
Measurement position LS-9006D 18 22.5 0.89"
2.44" 62 2 x M4 5.12" 1.57"Measurement position

2 x M4
Through-hole 130 1.85" 47 40 Through-hole
Air purge unit*1 157 70
(3.35")
Zero point*2 1.33" (85) R22 R0.87" 6.18" Zero point*22.76"
33.9 R22 R0.87"
2 x M5 0.31" Air purge unit*1 (3.35")(85)
Effective depth 8 0.49"
4 x 7 0.28" 0.39"
Fitting mounting Without transmitter 12.5 M5 0.31" 10 15.5 0.61"
(Mounting hole) Effective depth 8
screw bar attached
Fitting mounting 4 x 7 0.28"
140
5.51"2 x M4 screw 2 x (Mounting
M4
Effective depth 5 104 42.5 47 18 Effective depthhole)
5
360 0.2" 316
14.17" 0.2" 4.09" 1.67" 1.85" 0.71" 12.44"
1800.5 93
2000.5 (3.35") 7.09"0.02" 3.66"
7.87"0.02" (85) 147
130 5.79"
5.12" 87
3.43"
2.74" (3.35") (85)
69.6 8.68" R22 78 3.07" R22 R0.87"
220.4 R0.87" 0.31" 8
1450.5 890.5 3.50"0.02"
0.51" 13 0.71" 18 180 7.09"
5.71"0.02"
0.79" 20 255 10.04" 240 9.45" *1 With air purge unit attached
316 12.44" 260 10.24" *2 The zero point represents the intersection of the optical
4 x M6 330 12.99" 4 x M6
axis center of X-axis head and that of the Y-axis head.
1.57" 40 0.94"24
0.67"17
13.5 215 8.46" 134
24
56 0.53" 20
0.79" 0.94"
5.28"
LS-9000 Series
LK-G5000 Series
Unit: mm inch
Cable
CB-B3/CB-B10 CB-B5E/CB-B10E/CB-B20E
LK-G3000 Series
1.61" 2.01"
41 7.6 0.3" 51 7.6 0.3" 32.8' 65.6'
31 1.22" Cable length: 3 m, 10 m 32.8' Cable length: 5 m, 10 m, 20 m
9.8' 55 2.17" 16.4' 55 2.17"
0.71" 18 14
1.26" 0.65" 0.55" 0.55" 0.71" 18 0.55"
32 14 16.5
16.5 14 14 16.5
0.55"
0.65" (CB-B cable side) (Sensor head side) 0.65"
0.51"
13
LJ-V7000 Series
Controller
LS-9501/LS-9501P LS-HA100
3.5" (2.76") 6.04" 1.04" 5.93"
LJ-G Series
88.8 (70) 153.5 26.3 150.6
DIN-rail
mounting position
DIN-rail
mounting position 1.41"
153 35.9
6.02" R
178
R0 R2 0.8
7.01" 35.9 1.41" 2 7" 3.28"
.87
R2 " 83.3
2
SI-F1000 Series
83.3 3.28" (2.76")
0.24" 6 (70)
0.24" 6
4 x M4
Depth 6.6
0.26" 2 x M4
Depth 6.6
60 2.36" 0.26"
13.2
0.52"
14.4 0.57"
SI-F80R Series
3.15" 80 16.5 0.65" 80 16.5
3.15" 0.65"
LS-D1000
LT-9000 Series
6.61"
6.61" 168
168
Mounting bracket
Panel thickness: 2.95"
0.31" 1.44" 2.95" 0.71" 18 147 5.79" Mounting screw 75 4 x M4
183 7.2" 7.9 36.6 75 4 x M4 0.05" 1.2 to 4 mm
0.16" Depth 8 0.31"
Depth 8
0.31"
5.65"
138 143.6
LS-9000 Series
138 5.43" Outer dimension 75 2.95"
123 75 2.95" of mounting
5.43" 4.84"
bracket
0.31"
7.9
7.2" 183 36.6
1.44"
With mounting bracket attached

6.61"
LS-7000 Series
168
Mounting bracket
Panel thickness: 2.95"
2.95" 0.71" 18 147 5.79" Mounting screw 75 4 x M4
75 4 x M4 0.05" 1.2 to 4 mm
0.16" Depth 8 0.31"
Depth 8
0.31"
5.65"
138 143.6
TM-3000 Series
5.43" Outer dimension 75 2.95"

75 2.95" of mounting
bracket
0.31"
7.9
7.2" 183 36.6
1.44"
57
LS-7000 Series
CCD Optical Micrometer
LS-7000 Series
Features
igh repeatability 0.06 m 0.002 Mil
H
High speed 2400 samples/second
Maintenance-free design

measure/index.jsp
Optical System Achieving High-speed, Highaccuracy, and High-durability
Speed, accuracy, and durability have been improved by advanced COMS image sensor Telecentric optical system High-intensity GaN green LED
optical technology, using a high-intensity Green LED, a telecentric lens, Beam splitter
and the HL-CCD in the receiver.
Target Special diffusion

HL-CCD for unit
measurement Collimator lens
Receiver Transmitter
Principle diagram of the LS-7000 Series Controller
The green LED light is distributed as a uniform, collimated beam and is A/D
converter
D.E.
processor CPU Input/output
applied to a target. The edge between the bright and dark area on the A/D
TFT liquid
crystal
Frame memory
CCD is detected and used to calculate a measured value, such as an converter monitor
outer diameter. Video output
Excellent repeatability of 0.06 m 0.002 Mil, 4 times better than conventional systems
By using LED and CCD technologies, repeatability is four times greater than with a conventional laser scan micrometers.
Easy operation and quick inspection High-durability Best in its class
Target viewer for easy position adjustment CCD without moving parts & Long-life LED
The sensor incorporates a CMOS monitor camera to capture a real-time The laser scan method was reviewed thoroughly. Resulting in the
image of a target. Measurement conditions can be checked on the LCD combination of Green LED and HL-CCD that solved the problem of motor
monitor. The target viewer function allows the optical axis to be aligned durability, which had been the weak point of the laser-scanning method.
exactly with the desired measurement point, even if a target has a Furthermore, the long-life LED achieved continued reliability over the
complicated shape or is very small. long term.
The measuring area for the current measurement mode is displayed in
real time. (LS-7070M/LS-7030M/LS-7010M)
Measurement line
Gap
Outer-diameter measurement
measurement
HL-CCD Green LED

Target Viewer
58
LS-7000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
Measuring the deflection of a crank journal Measuring the width of a sheet
LJ-G Series
SI-F1000 Series
Measuring the outer diameter of a wafer Measuring the outer diameter of a catheter
SI-F80R Series
Lineup
Measuring head
LT-9000 Series
Wide range Standard Super fine
Type
With monitor No monitor With monitor No monitor With monitor No monitor
Model LS-7070M LS-7070 LS-7030M LS-7030 LS-7010M LS-7010
LS-9000 Series
Appearance
Measuring range 0.5 to 65 mm 0.02" to 2.56" 0.3 to 30 mm 0.01" to 1.18" 0.04 to 6 mm 0.002" to 0.24"
Measurement accuracy 3 m 0.12 Mil 2 m 0.08 Mil 0.5 m 0.02 Mil
Repeatability 0.2 m 0.008 Mil 0.15 m 0.006 Mil 0.06 m 0.0024 Mil
LS-7000 Series
Controller
Type High-performance Standard
Model LS-7601 LS-7001

TM-3000 Series
Appearance
Measurement indicator Monitor display Red LED 7-level display
59
LS-7000 Series
Function
Dual-head mode Newly-developed One-head simultaneous measurement

Measuring the outer diameter of a metal pipe Measuring both the outer diameter and eccentricity of a
This simple, special mode measures large diameter targets or wide sheet copy roller simultaneously
materials. Complicated calculations or other settings are unnecessary. One measuring head allows simultaneous measurement using two
measurement modes, such as measuring the outer diameter and
eccentricity.
Measuring area designation Transparent object measurement

Measuring IC lead pitch Checking the width or edge position of a glass plate
The measuring area can be designated according to the inspection Even transparent objects that were difficult to detect with conventional
purpose, such as measurement of the IC lead gap or pitch. micrometers can be measured. The edge detection level can be easily
changed via the controller.
Change in received light intensity

caused by the edge of a glass
Measuring object
range
Threshold value
1.18"
30 mm
Lead outer dimension 1 Lead outer dimension 2

Before threshold value adjustment
Gap between leads Lead pitch Threshold value
After threshold value adjustment
Air purge unit (Optional) & IP64 Rating Controller-compatible IP64 head
OP-79428 [for LS-7030 (M)] Air purge The head stores compensation
unit data to ensure compatibility
OP-79429 [for LS-7070 (M)] with the controller. This greatly
Attaching the air purge unit in front of the improves Measurement accuracy
measuring head and feeding an air flow and head maintainability.
prevents dirt or dust from accumulating In addition, the measuring
Air duct head conforms to IP64. It is
on the head surface.
dripproof and suitable for harsh
environments.
60
LS-7000 Series
LK-G5000 Series
Specifications
Controller
Type High-performance Standard
Model LS-7601 LS-7001
LK-G3000 Series
Appearance
No. of connectable measuring heads 2 (All types) 2 (LS-7070/LS-7030/LS-7010 only)

Main display: 7-segment red LED
TFT 5.5-inch LCD display, (Character height: 20.3 mm 0.80")
Measurement display
LJ-V7000 Series
Backlight: CCFL (Average life: 40,000 hours) Sub-display: 7-segment red LED
(Character height: 9.9 mm 0.39") x 3
Display
Minimum display unit 0.01 m 0.0004 Mil to 100 m 3.94 Mil (7-level selectable)
Display range 99.99999 to 9999.9 mm (Linked to minimum display unit setting, mm/inches selectable)
Monitor image (When the measuring head
Measurement position monitor 7-level display with a red LED
with the monitor function is connected.)
Tolerance check output display 5-level LCD indicator Green LED (GO), Red LED x 2 (HI, LO)
5-level comparator output
LJ-G Series
Comparator ready output NPN open-collector output for OUT1
Strobe output
Terminal block
Synchronous input
Reset input Non-voltage input for OUT1
Auto-zero input
Program selection input Non-voltage input x 4 inputs
Statistical processing input Non-voltage input for OUT1
Analog output 10 V x 2 outputs
SI-F1000 Series
5-level comparator output
Comparator ready output NPN open-collector output for OUT2
SUB Strobe output
mode*1
Statistical processing output NPN open-collector output x 2 outputs
Function output Selectable from focus, area check, and difference check, NPN open-collector output x 2 outputs
Connector I/O
BCD output Measurement data output (Sign + 7 digits), OUT1/OUT2 selectable, NPN open-collector output
BCD
BCD selection output NPN open-collector output
mode*1
SI-F80R Series
BCD selection input Non-voltage input
Synchronous input
Reset input Non-voltage input for OUT2
Auto-zero input
Statistical processing input Non-voltage input for OUT2
RS-232C interface Measurement data output and control I/O, printer (Baud rate can be selected up to 115.200 bps)
Video output Conforming to the NTSC system (RCA connector)
Power supply voltage*2 24 VDC 10%
LT-9000 Series
Current consumption*2 1.2 A max. 0.7 A max.
Enclosure rating IP64 (Panel surface only)
*1 Either SUB mode or BCD mode can be selected.
*2 AC power supply can be used when the LS-S11 (AC power supply stand) is connected.
The rating of the NPN open-collector inside the terminal block is: 100 mA max. (40 V max.), with a residual voltage of 0.5 V max. The rating of the NPN open-collector inside the connector I/O is: 30 mA max. (30 V max.), with a residual volt-
LS-9000 Series
age of 0.5 V max. The rating of non-voltage input is: ON voltage of 1 V max., OFF current of 0.6 mA max.
LS-7000 Series
TM-3000 Series
61
LS-7000 Series
Specifications
Measuring head
Type Large-diameter type Wide measurement range Super fine measurement
Monitor camera Provided Not provided Provided Not provided Provided Not provided
Model LS-7070M LS-7070 LS-7030M LS-7030 LS-7010M LS-7010
Appearance
Measuring range 0.5 to 65 mm 0.02" to 2.56" 0.3 to 30 mm 0.01" to 1.18" 0.04 to 6 mm 0.002" to 0.24"
Smallest detectable object 0.5 mm 0.02" 0.3 mm 0.01" 0.04 mm 0.002"
Transmitter/receiver distance 250 50 mm 9.84"1.97" 160 40 mm 6.30"1.57" 60 mm 2.36"
Light source GaN green LED
CCD scanning range Approx. 69 mm 2.72" Approx. 33 mm 1.30" Approx. 7 mm 0.28"
Measurement accuracy 3 m 0.12 Mil*1 2 m 0.08 Mil*3 0.5 m 0.02 Mil*5
Repeatability 0.2 m 0.008 Mil*2 0.15 m 0.006 Mil*4 0.06 m 0.0024 Mil*6
No. of samples*7 2,400 samples/sec.
Monitor function Provided Not provided Provided Not provided Provided Not provided
Enclosure rating*8 IP64
Transmitter: Approx. 540 g, Transmitter: Approx. 540 g, Transmitter: Approx. 420 g, Transmitter: Approx. 420 g, Transmitter: Approx. 140 g, Transmitter: Approx. 140 g,
Weight Receiver: Approx. 770 g, Receiver: Approx. 730 g, Receiver: Approx. 570 g, Receiver: Approx. 470 g, Receiver: Approx. 380 g, Receiver: Approx. 340 g,
Base: Approx. 660 g Base: Approx. 660 g Base: Approx. 430 g Base: Approx. 430 g Base: Approx. 220 g Base: Approx. 220 g
*1 The error when a moving rod 20 mm 0.79" in diameter is measured in the measuring area of 20 x 40 mm 0.39" x 0.79".
*2 The value of 2 when the outer diameter of a rod 20 mm 0.79" in diameter is measured at the center of the measuring area while the number of averaging measurements is set to 512.
*3 The error when a moving rod 10 mm 00.39" in diameter is measured in the measuring area of 10 x 20 mm 0.39" x 0.79".
*4 The value of 2 when the outer diameter of a rod 10 mm 0.39" in diameter is measured at the center of the measuring area while the number of averaging measurements is set to 512.
*5 The error when a moving rod 1.0 mm 0.04" in diameter is measured in the measuring area of 2 x 4 mm 0.08" x 0.16".
*6 The value of 2 when the outer diameter of a rod 1.0 mm 0.04" in diameter is measured at the center of the measuring area while the number of averaging measurements is set to 512.
*7 1200 samples/sec. when the mutual interference prevention function is used.
*8 The connector section is excluded.
Hardware environment for the LS-H1W (LS-Navigator) Sensor head cables

Model LS-H1W Model Cable length
CPU Pentium III, 400 MHz or higher Cable between the controller and measuring head
Windows 7 *1/Windows Vista *2/Windows XP Professional Edition/ LS-C3A 3 m 9.84'
Supported OS
Home Edition/Windows 2000 Professional
LS-C10A 10 m 32.8'
Memory capacity 128 MB or more
LS-C30A 30 m 98.42'
Display XGA (1024 x 768 pixels) or greater, 256 colors or greater
Camera cable between the controller and measuring head
Hard disk space 30 MB or more
LS-C3AM 3 m 9.84'
Interface RS-232C (Serial port) LS-C10AM 10 m 32.8'
Windows is a registered trademark of Microsoft Corporation of America. LS-C30AM 30 m 98.42'
*1 Home Premium, Professional and Ultimate editions are supported. Cable between the receiver and transmitter
OP-42182 1 m 3.28'
AC power supply stand LS-S11 OP-42183 3 m 9.84'
Model LS-S11
Applicable controller LS-7001/LS-7601
Power supply voltage 100 to 240 VAC 10%, 50/60 Hz
Current consumption 110 VA max.
Weight Approx. 1.7 kg
Options
AC power supply stand Air purge unit Air purge unit

LS-S11 OP-79428 OP-79429
[For LS-7030(M)] [For LS-7070(M)]
62
LS-7000 Series
LK-G5000 Series
Dimensions
Measuring heads Unit: mm inch
LS-7070 (LS-7070M) LS-7030 (LS-7030M)

1.18" 1.18" 0.35" 0.18"
0.35" 30 4-M2.5, 30 9 4-M2.5,
9 4-4.5 through-hole 0.39" 0.94" 0.39"
effective depth: 5 0.20" effective 0.39" 0.94" 8 spot facing, 4.5 (d) 15 15 4-M4 effective depth: 10 24
0.59" 0.59"4-M4 effective depth: 10 4-M2.5 10 24 0.31" 10
4-5.5 0.22", through-hole depth: 5 0.18" 0.59" 0.59" 4-M2.5
15 15 effective effective
70 9.5 0.37" spot facing, d=0.22" 5.5 0.39" 70 0.20"
LK-G3000 Series
depth: 3 38 26 1.02"
2.76" Measuring 2.76"
0.12" 45 1.50" 45 depth: 3
head 42 28 1.10"
21 0.83" 1.77" 22 0.2 0.87" 0.008" 1.77" 0.12"
21 1.65" Measurement position 55 55 6 13.5
0.83" 24 0.3 Measurement 1.02"26 0.26" 6.5 2.17" 2.17" 0.24" 0.53"
13.5 0.53"
0.94" 0.01" position 115 65
4.53" 2.56"
Front surface Front surface Front surface Front surface
of a receiver of a transmitter of a receiver of a transmitter
3-5.5 0.22" 4.29" 4.98"
5.12" 4.49" 109 Measuring area 126.5
(Mounting hole) 130 Measuring area 114 (1.34")*(34)*
1.40"0.01" 1.18"
104 92.5 71.5 60 60 71.5
4.09" 65 2.81" 2.36" 30 2.36" 2.81"
92.5 2.56" 3.64"104 35.50.2
3.64" 56 0.3
2.20" 0.01" 4.09"
0.22" 5.5 5.5
LJ-V7000 Series
0.22" 5.5 20 0.79" 0.22"
5.5 3-5.5 (Mounting hole) 80 0.22"19.5 0.77"
* [Cable length: 500] 0.22" 3.15" 3-5.5 0.22"
19.69" 150 mounting hole
5.91" 3-5.5 0.22" Cable length: (500)* 27 160 27
Cable length: 500 18 31 250 31 23 (mounting hole) (19.69")* 1.06" 6.30" 1.06" Cable length: 200
19.69" 0.71" 1.22" 9.84" 1.22" 0.91" Cable length: 260 Cable length: 500
Cable length: 270 19.69" 50 214 50 7.87"
72 312 56 10.24" 1.97" 8.43" 1.97"
10.63" 2.83" 12.28" 2.20" Cable length: 200
7.87"
* Figures in parentheses are the values for the LS-7070M. * Figures in parentheses are the values for the LS-7030M.
LS-7010 (LS-7010M)
0.18"
LJ-G Series
4-4.5 through-hole 0.59" 0.59"
8 spot facing, 4.5 (d) 15 15 4-M4, through
Measuring head 0.32" 0.18"
1.42" 36 24 0.94" 26 1.02"
16 0.2 0.63" 0.01" 25 25 6 0.24"

0.98" 0.98"
Measurement position
(227)* (8.94")*
0.16" Measuring area 0.16"
0.31" 1.26" 2-4
SI-F1000 Series
3-4 (Mounting hole) 76 51 8 32 (Mounting hole)
2.99" 2.01" 4
0.16"
56 46 46 56
2.20" 1.81" 400.2 6 1.81" 2.20"
1.570.01" 0.24"
0.16" 4 4 18 0.71"
(19.69")* 0.16"
Cable length: (500)* (1.18")* (30)*
(2.36")* (60) * Ca ble length: 140
Cable length: 500 3.5
19.69" 0.14" 81 38 3.5 0.14" 5.51"
6 3.19" 1.50" 25 0.98"
Cable length: 48 126
140 5.51" 0.24" 1.89" 4.96"
* Figures in parentheses are the values for the LS-7010M.
SI-F80R Series
Controllers
LS-7601 LS-7001 Panel cutout
8.15"
(191) (7.52") (191) (7.52") 60 207
Dimension of mounting bracket 2.36" 5
2.36"
LT-9000 Series
5 60 Dimension of mounting bracket 0.20" 169 +1
0
22.3 175 6.89" 0.20" 175 6.89" Panel thickness:
111 4.37" Panel thickness: 1.2 to 4.0 0.05" to 0.16" 6.65"+0.04"
0
0.88"
Effective display area 1.2 to 4.0 0.05" to 0.16" Mounting screw 124 +1
0
25
25
Mounting screw 0.98" 4.88" +0.04"
0
0.91" 23.2 200
0.98"
60 Mounting bracket 7.87"
60 Mounting bracket 2.36"
83 3.27" 2.36" 130
Effective 5.12"
display area 130
5.12"
(65)
LS-9000 Series
(65) (2.56")
(2.56")
Cables AC power supply stand

6.3
Cable between the controller and 43
1.69" 0.25"
43
1.69" LS-S11
sensor head 0.58" 14.7 14 0.55"
171
6.73"
LS-CxxA
LS-7000 Series
196
7.72" 2.36"
60
Camera cable between the 35 4.8 35.3

(1.38") (35)
14
controller and sensor head 1.38" 0.19" 1.39"
178 7.01"
0.55"
43.5 148 5.83" (3.94")
1.71"
LS-CxxAM 0.45" 11.5 11 0.43" 216 8.50" 201 7.91" (100)
TM-3000 Series
35 4.8 35.3
0.19"
Cable between the receiver and 1.38" 1.39"
transmitter 0.45" 11.5 11 0.43"
OP-4218x
63
TM-3000 Series
High-speed
2D Measurement Sensor
NEW
TM-3000 Series
Features
ulti-point 2D measurement
M
Tilt correction for inline measurement
High-speed sampling of 5.5 ms

measure/index.jsp
Because the system works in two Position correction function

dimensions it can... [edge correction/pattern correction]
Simultaneously measure dimensions that require both X and Y values. Automatically corrects misalignments and tilt of the target which is directly
In addition, inspection time is reduced due to the elimination of motion linked to measurement errors. Can measure accurately even when
components. positioning is difficult or objects are conveyed in random orientations.
Because the measurement

area autotracks according to
the position and tilt of objects
within the compensation area,
it can be measured accu-
rately.
Area Example of measurement Master image Measured image
Perpendicular
: Hole diameter
distance : Center pitch
Angle : Intersection point coordinates

: Radius Position
Outer diameter correction area Outer
: Width measurement diameter
Position
area measurement
correction area
Intersection point : Angle area after
coordinates Width
correction
: Perpendicular distance Correction
Radius
Center pitch
: Area
Hole diameter
64
TM-3000 Series
LK-G5000 Series
Applications
Unit: mm inch
Overall length 50.000 Point angle

15.0
Outer diameter 5.000

Overall length
LK-G3000 Series
35.000
Tip angle 45.0
Outer diameter Outer diameter Outer diameter

Outer diameter 16.000 0.300 0.299 0.148
V groove angle 22.5 Groove pitch 5.000
Measures outer diameter/tip angle of needle Measures pulley groove pitches/V groove Measures multi-point outer diameter/point
valves angles angle of injection needles
LJ-V7000 Series
Outer thread height Thickness 3.500
Maximum 14.000
diameter 8.000
Neck ring
height
Minimum Outer 26.000
Outer
diameter diameter thread
6.000 12.000 diameter
LJ-G Series
26.500
Roundness 0.020
Measures maximum diameter/minimum Measures outer diameter and threading a PET Measures roundness/thickness of O-rings
diameter of ampules bottle
Lineup
SI-F1000 Series
Sensor head Controller
Type Model Appearance Type Model Appearance
6 mm type TM-006
Standard type TM-3001
SI-F80R Series
40 mm type TM-040
PNP Output type TM-3001P

65 mm type TM-065
LT-9000 Series
Features
Diverse measurement modes
A flexible combination of 15 types of basic measurement modes, and 8 types of auxiliary measurement modes, can support a variety of inspections.
Outer diameter/Step/Width Angle Distance/Intersection Point Distance
LS-9000 Series
Measures a maximum diameter/minimum diameter within Measures an angle between two detected straight lines, Measures a center of the circles and intersection point,
the specified area, and a step/width between the detected and a tilt angle from a virtual line. distance between 2 specified points, distance from a
edges. point to a straight line.
Angle
Maximum diameter Center
distance
Step
Tilt angle from a Intersection point

virtual line. distance
LS-7000 Series
Minimum
diameter Width
Distance between a point
and a straight line
Height / Position/Coordinates Radius/Roundness Pitch
Measures height/ position of detected edges and Measures radius and roundness of specified arc. Measures a maximum/minimum/average pitch within the
coordinates of specified points. specified area.
Intersection point position
(X,Y coordinates)
TM-3000 Series
Radius Pitch
Roundness
Height (Y direction)
Position (X direction)
65
TM-3000 Series
Specifications
Sensor head
Model TM-006 TM-040 TM-065
Measuring range 6 mm 0.24" 40 mm 1.57" 65 mm 2.56"
Smallest detectable object 0.04 mm 0.001" 0.3 mm 0.01" 0.5 mm 0.02"
Transmitter/receiver distance 60 mm 2.36" 180 mm 7.09" 270 mm 10.63"
Light source GaN Green LED InGaN Green LED
Measurement accuracy 0.5 m 0.02 Mil*1 2 m 0.08 Mil*3 3 m 0.12 Mil*5
Repeatability 0.06 m 0.002 Mil*2 0.15 m 0.05 Mil*4 0.2 m 0.08 Mil*6
Sampling cycle (trigger interval) *7 5.5ms (33ms at the initial setting)
Enclosure rating *8 IP64
Environmental
resistance
Relative humidity 35 to 85% (No condensation)
Material Aluminum
Transmitter Approx. 140g Approx. 560g Approx. 1280g
Weight Receiver Approx. 340g Approx. 720g Approx. 1460g
Base Approx. 220g Approx. 630g Approx. 1500g
*1 In a measurement area of 2 mm 0.08" 4 mm 0.16" error when measuring width of KEYENCE standard object (glass calibration scale).
*2 Value of 2 measuring the width of KEYENCE standard object (glass calibration scale) in the center of the measurement area, an average 16 times, average 1.3 mm 0.05" line.
*3 In a measurement area of 10 mm 0.39" 26 mm 1.02" error when measuring width of KEYENCE standard object (glass calibration scale).
*4 Value of 2 measuring the width of KEYENCE standard object (glass calibration scale) in the center of the measurement area, an average 16 times, average 8 mm 0.31" line.
*5 Error when measuring width of KEYENCE standard object (glass calibration scale) in a measurement area of 20 mm 0.79" 40 mm 1.57".
*6 Value of 2 measuring the width of KEYENCE standard object (glass calibration scale) in the center of the measurement area, an average 16 times, average 14 mm 0.55" line.
*7 When measurement area is minimum, others are initial settings
*8 Apart from connector component
Controller
Model TM-3001 TM-3001P
Number of connectable sensors *1 2 units max.
Minimum display unit 0.01 m, 0.001 mm2, 0.01
Display
Maximum display range 9999.99 mm, 99999.9 mm2, 99999.9
Laser remote interlock input Non-voltage input
Input Trigger input (for Head A)
terminal Timing 1 input Non-voltage input
block Voltage input
Auto-zero 1 input
Reset input
Total judgment output NPN open-collector output PNP open-collector output
Output Error output NPN open-collector output (N.C.) PNP open-collector output (N.C.)
terminal
block Process output
Trigger input enable output NPN open-collector output PNP open-collector output
Trigger input (for Head A)
Timing 2 input Non-voltage input Voltage input
Auto-zero 2 input
Program switching input Non-voltage input, 4 inputs Voltage input, 4 inputs
Expansion Memory card save input Non-voltage input Voltage input
connector
3-level judgment output: OUT1 to OUT16, total judgment output 3-level judgment output: OUT1 to OUT16, total judgment output
Judgment/Binary output*2 Binary output: OUT1 to OUT16 measured data output (21 bits) Binary output: OUT1 to OUT16 measured data output (21 bits)
Strobe output
Analog RGB monitor output SVGA (800 x 600 pixels)
USB interface In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible)
Ethernet interface 1000BASE-T/1000 BASE-TX/10 BASE-T
Memory card SD card CA-SD4G (4GB), CA-SD1G (1GB) support
Position correction function, OUT name change function, select measurement mode (outer diameter, height, step height, position, width, distance,
intersection distance, angle, radius, roundness, coordinates, area, search, ring test, pitch) functions, OUT function between operators, auxiliary
measurements (straight edge, circular edge, the edge bounding line, center line, intersection, straight line between two points, any line, any point),
functions, scaling function, average function, measurement function, measurement value alarm setting function, tolerance setting function, auto-zero
Major functions
function, storage (data/image) function, memory card storage function, program memory function, trigger mode change function, mutual interference
prevention function, adjustable measuring range function, detection threshold
value change function, mask function, attitude correction function, display language switching function, support software setting function, trigger
interval-measurement time display function, others
Power supply voltage 24 VDC 10%, Ripple: 10% (P to P) or less

Ratings
Current consumption 1 head connected 480mA max./ 2 heads connected 550mA max.
Environmental Ambient temperature 0 to 50C 32 to 122F
resistance Relative humidity 35 to 85% (No condensation)
Material Polycarbonate
Weight Approx. 1120g
*1 1 or 2 units can be connected only with the same head model
*2 OUT 1 to OUT 8 decision result, OUT 9 to OUT 16 decision result, time share output of binary measurement data.
The rating of the NPN/PNP open collector output (output terminal block): 50 mA (30 V or less) max., residual voltage: 1.4 V or less (50 mA) 1.0 V (20 mA)
The rating of the NPN/PNP open collector output (expansion connector): 50 mA (30 V or less) max., residual voltage: 1.0 V or less
Rating for non-voltage input, ON voltage 1V max., OFF current 0.3mA max. (trigger input terminal, ON voltage 5V max., OFF current 1mA max.)
Voltage rating, maximum rating 26.4V, ON voltage 10.8V, OFF current 0.3mA (trigger input terminal maximum rating 26.4V, ON voltage 10.8V, OFF current 1mA)
66
TM-3000 Series
LK-G5000 Series
Operating system environment
CPU Pentium III 1GHz min. (recommended 1.7GHz min.)
Windows 7 *1 Windows Vista *2
Support OS Windows XP Professional Edition/Home Edition
Windows 2000 Professional
LK-G3000 Series
Memory capacity 512MB min. (1GB min. recommended)
Resolution of display XGA (1024 x 768 pixels) min, 256 colors min.
Free disk space 1GB min.
Interface *3 As described above, all those mounted, USB2.0/1.1 *4, Ethernet *5
* For your OS, use environments above that recommended.
*1 Supports all editions Home Premium, Professional, Ultimate.
*2 Supports all editions Ultimate, Business, Home Premium, Home Basic. 64 bit versions are not supported.
*3 Communicate selecting any of them. Simultaneous communication is not possible.
*4 Connection through a USB hub is not included in the guarantee.
*5 Connection to LAN and connection via a router is not included in the guarantee.
LJ-V7000 Series
Windows Vista, Windows XP, Windows 2000 Professional are registered trademarks of US Microsoft Corporation.
Pentium is a registered trademark of intel Corporation.
LJ-G Series
Controller Sensor head
Sensor head Sensor head Sensor head

Controller 6 mm 0.24" type 40mm 1.57" type 65mm 2.56" type
TM-3001(P) TM-006 TM-040 TM-065
SI-F1000 Series
Controller lineup
NPN Output type TM-3001
PNP Output type TM-3001P
SI-F80R Series
Monitor
Console (Optional) Setting and support USB cable (Optional) High-resolution monitor Monitor stand
OP-82125 software OP-66844 CA-MP81 OP-42278
TM-H1
LT-9000 Series
Cable - connector Option
LS-9000 Series
Cable between Transmitter to receiver Cable between I/O connector cable Protective cover
head and controller expansion cable controller - monitor OP-51657 (3m 9.8') OP-87035 (2 per pack)
CB-A OP-87033 (1m 3.3') OP-66842 (3m 9.8')
(for TM-040)
(0.7, 2, 5, 10, 20, 30m) OP-87034 (3m 9.8')
(2.3', 6.6', 16.4', 32.8', OP-87036 (2 per pack)
65.6', 98.4') (for TM-065)
LS-7000 Series
Ethernet cable RS-232C D-sub9 pin conversion D-sub25 pin conversion Memory card
OP-66843 (3 m 9.8') communication cable connector connector CA-SD4G (4GB)
OP-96368 (2.5m 8.2') OP-26401 OP-96369
CA-SD1G (1GB)
TM-3000 Series
67
TM-3000 Series
Dimensions
Sensor heads Unit: mm inch
TM-006 4-4.5 0.18" through-hole 0.59" 0.59" 4-M4 through-hole

8 0.31 spot facing, 4.5 15 15
1.42" 36 24 0.94" 26 1.02"
25 25
160.2 0.62"0.007" 6 0.24"
0.98" 0.98"
(8.94")
(227)
Measurement
3-4 0.16"(mounting hole) 76 51 area 8 2-4 0.16"(mounting hole)
32
2.99" 2.01" 4 1.26" 1.26"
0.16"
2.20" 56 1.81" 46 400.2 1.81"46 2.20" 56

1.57"0.007" 6
0.24"
4 18 0.71"
0.16" 4 0.16"
1.18"
30
2.36" Cable length 100 3.94"
Cable length 500 19.69" 60 0.14"
0.14" 3.19" 1.50"
3.5 3.5
81 38
Cable length 190 7.48" 6 48 126 25
0.24" 1.89" 4.96" 0.98"
0.18"
2-M4 through-hole Base 35 1.38" 4.5
1.02" 26
4.53" 1.77" 2-M4 through-hole

115 45
5.59" 2.76"
142 70
8.35"
212
2-M4 Effective depth 5 2-M4 Effective depth 5
0.63"16 16 0.63"
40 92 47 18
1.57" 3.62" 1.85" 0.71"
TM-040
0.28"
4-M3 effective depth 3.5 7 Measurement area 4-M3 effective depth 3.5 0.14" 1.89"
48 48 7 0.28"
0.14" 1.89" 4-4.5 0.18" cut 25 25
8 0.31depth 4.5 4-M4
0.98" 0.98"
1.89" 48 48 1.89"
1.97" 50
2.44" 62 50 1.97"
1.63" 41.5 310.3 41.5 1.63"
1.22"0.01" 55 55 6 0.24" Front surface of transmitter

Front surface of receiver
2.17" 2.17"
0.22" 94.8 0.22"

3-5.5 (mounting hole) 3.73" Measurement area 76.5 3-5.5 (mounting hole)
3.01"
0.79" 20
40
1.57" 88
97.5 88
3.84" 3.46" 3.46"
65.50.6 97.5
2.58"0.02" 3.84"
5 5 20 0.79"
0.20"
0.20"
47 29 1.14"
1.85" 90 3.54" 58.5
6.5 180 7.09" 2.30" Cable length: 235 9.25"
Cable length: 500 19.69" 0.26" 8 0.69"
0.31"
Cable length: 175 6.89" 17.5
0.11" 2.8 When minimum bend R
When minimum bend R
2-M4 effective depth 6 0.24" 2-M4 effective depth 6 0.24"

4-M4 effective depth 8 0.32"
6 0.24"
1.22" 31 31 1.22"
50
1.97"
115 4.53" 115 4.53"

145 5.71" 161 6.34" 5.5
39.8 306 0.22" 103.5
34 103 25
1.57" 12.05" 4.07" 0.98"
1.34" 4.06"
68
TM-3000 Series
LK-G5000 Series
Unit: mm inch
TM-065
4-5.5 0.22" cut
0.14"
4-M3 Depth 3.5 9.5 0.37" depth 5.5 0.22" 4-M3 Depth 3.5 0.14"
0.35" 9 4-M4 2.99" 0.35"
76 Measurement 9
2.99" area 76
1.38" 1.38"
35 35
LK-G3000 Series
2.99" 76 76 2.99"
2.76" 70
3.70" 94 70 2.76"
470.6
1.73" 44 1.85"0.02" 44 1.73"
12 0.47"
Front surface of receiver 115 65 Front surface of transmitter
4.53" 2.56"
Measurement
area
5.11" 1.18" 3.82"
129.7 97
LJ-V7000 Series
30
130 65
5.12" 2.56" 130
5.12"
115 820.8 120
4.53"
3.23"0.03" 4.72"
0.20" 5 5 20 0.79"
3-5.5 (mounting hole) 0.20"
0.22" 3-5.5 0.22"(mounting hole)
Cable 6.89"
Cable length: 500 19.69" length: 175 160 6.30"
Cable length: 420 16.53"
LJ-G Series
11.5
0.34" 8.7 0.37" 9.5 270 10.63"
0.45" 19 0.75"
66
When minimum bend R 2.60" 33.5 1.32"
When minimum bend R
66.5
2.62"
4-M5 Depth 10 0.39"
2-M4 effective depth 6 0.24" 2-M4 effective depth 6 0.24"
0.47"
12
47
1.85" 47 1.85"
SI-F1000 Series
70 2.76"
200 7.87" 130 5.12"

240 9.45" 190 7.48"
49.7 430 16.93" 53 176 131.5 44
1.96" 17 2.09" 6.93" 5.18" 1.73"
0.67"
SI-F80R Series
LCD monitor
TM-3001(P) CA-MP81
1.0 to 4.0
241.2 9.50"
0.04" to 0.16"
Outer dimension of mounting bracket Panel thickness
(15) 135.5 5.33" 230 9.06"
92.5 3.64"
0.59" Mounting bracket
151 15.95"
Mounting screw
LT-9000 Series
DIN rail
mounting 191.2 180
position 7.53" 7.09" 129.8
5.11" 106
Outer Effective 4.17"
dimension of display area
153 35.9 mounting
6.02" 1.41" bracket
83.3
3.28" 156 6.14"
65.3
LS-9000 Series
2.57" 172.4 6.79" 6 34
0.24" 1.34"
0.32" 8
(60)
Stand Effective display area
6
0.24" 2.36"
OP-42278
230 9.06"
4 x M4 Depth:
6 0.24"
70
LS-7000 Series
2.76"
236
9.29"
146
5.75"
80 17
3.15" 0.67"
2- R0
0.85" 2.62"
R2 .0
21.5 66.5
TM-3000 Series
.5 1"
5 0.20"
111
4.37"
8
0.32"
130 5.12"
210 8.27"
69
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M E A S U R E M E N T G E N E R A L C ATA L O G

High Precision Measurement

Ultra High Speed Laser

High-speed Optical Micrometer

2014 and Beyond

High-speed 2D/3D Laser

LS-9000 Series High-Speed Optical Micrometer

LS-7000 Series CCD Optical Micrometer

I Sampling rate of 50 kHz

I Linearity of 0.1% of F.S.

LK-G5000 Series Measurement Principle (Triangulation type) HIGH-SPEED WIDE RANGE

At the reference distance At a short distance At a long distance

Semiconductor Light-receiving Semiconductor Light-receiving Semiconductor Light-receiving

Light-receiving Light-receiving Light-receiving

LJ-V7000 Series Measurement Principle

SI Series measurement principles (Spectral-Interference type) micro-head ultra high accuracy

Displacement data SLD: Super Luminescent Diode

SLD Optical interference method Spectroscopic analysis

A small amount of received light All of the received light passes

High-speed exposure CMOS

distances, angle, etc.

Telecentric lens Collimator lens

LK-G5000 Series P.10 LK-G5000 Series P.10 SI-F80R Series P.44

Height and Step Height

LK-G5000 Series P.10 LJ-V7000 Series P.24 LK-G3000 Series P.18

Width and Outside Diameter

TM-3000 Series P.64 LS-9000 Series P.50 LS-7000 Series P.58

LK-G5000 Series P.10 LK-G5000 Series P.10 LK-G5000 Series P.10

SI Series P.38 LJ-V7000 Series P.24 LK-G3000 Series P.18

Profile and Contour

LK-G5000 Series P.10 TM-3000 Series P.64 LJ-V7000 Series P.24

Expert Engineering Sites

Best specifications in class

0.005 m 0.0002 Mil 0.02 % 392 kHz

Wide spot type Focused spot type Specular reflection type

203 mm 0.79" 0.12" 0.02 m 0.0008 Mil LK-H027

8018 mm 3.15" 0.71" 0.1 m 0.004 Mil LK-H087

15040 mm 5.91" 1.57" 0.25 m 0.01 Mil LK-H157

80.5 mm 0.32" 0.02" 0.005 m 0.0002 Mil LK-H008

203 mm 0.79" 0.12" 0.02 m 0.0008 Mil LK-H022

15040 mm 5.91" 1.57" 0.25 m 0.001 Mil LK-H152

80.5 mm 0.32" 0.02" 0.005 m 0.0002 Mil LK-H008(W)

16.12.8 mm 0.63" 0.11" 0.02 m 0.0008 Mil LK-H027K

Main controller Display

Configuration Cable Neutral density filter

Convenient calculation functions

Standard Step Measurement Maximum/Minimum Measurement Flatness Measurement

Warpage Measurement Multi-Point Thickness Measurement Average Height Measurement

Measurement of Velocity (m/s), Acceleration (m/s2)

Example of measurement of stage movement

Displacement Speed Acceleration Vibration test of high-temperature-muffler

Data filter functions made easy

Median filter High pass filter

Moving average filter Low pass filter

Display port Either the display unit (LK-HD500) or N/A

LK-H2 (LK-Navigator2) Operating environment

*2 Editions supported: Ultimate, Business, Home Premium, and Home Basic.

Coarse target measurement (wide spot type)

Fine target measurement (focused spot type)

Transparent/mirror target measurement (specular reflection type)

Enclosure rating IP67

Incandescent lamp or fluorescent

LK-DN100 (DeviceNetTM unit)

Weight Approx. 1150 g