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Yingdong Luo,1,2 Bongkeun Kim,1 Damien Montarnal,1,3* Zoltan Mester,4 Christian W. Pester,1
Alaina J. McGrath,1 Glake Hill,5 Edward J. Kramer,1,6,7 Glenn H. Fredrickson,1,6,7
Craig J. Hawker1,2,6
1
Materials Research Laboratory, University of California, Santa Barbara, California 93106
2
Department of Chemistry and Biochemistry, University of California, Santa Barbara, California 93106
3
Laboratoire de Chimie Catalyse Polymeres et Procedes (C2P2), Universite
de Lyon 1, CPE Lyon, CNRS, UMR 5265, Villeurbanne,
France
4
Department of Chemical and Biological Engineering, Princeton University, New Jersey 08544
5
Department of Chemistry and Biochemistry, Jackson State University, Jackson, Mississippi 39217
6
Materials Department, University of California, Santa Barbara, California 93106
7
Department of Chemical Engineering, University of California, Santa Barbara, California 93106
Correspondence to: C. J. Hawker (E - mail: hawker@mrl.ucsb.edu) or G. H. Fredrickson (E - mail: ghf@mrl.ucsb.edu)
Received 20 January 2016; accepted 23 February 2016; published online 17 March 2016
DOI: 10.1002/pola.28093
ABSTRACT: Block copolymers with increased FloryHuggins the amount of LTA in the blend increased, allowing for further
interaction parameters (v) play an essential role in the produc- control over self-assembly. To understand the mechanism of
tion of sub-10 nm nanopatterns in the growing field of directed this phenomenon, we present a novel field-based supramolec-
self-assembly for next generation lithographic applications. A ular model, which describes the formation of copolymer-
library of PDMS-b-PEO block copolymers were synthesized by additive complexes by reversible hydrogen bonding. The
click chemistry and their interaction parameters (v) determined. mean-field phase separation behavior of the model was calcu-
The highest v measured in our samples was 0.21 at 150 8C, lated using the random phase approximation (RPA). The RPA
which resulted in phase-separated domains with periods as analysis reproduces behavior consistent with an increase of
small as 7.9 nm, suggesting that PDMS-b-PEO is a prime candi- the effective v in the PDMS-b-(PEO/LTA suprablock). V C 2016
date for sub-10 nm nanopatterning. To suppress PEO crystalli- Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem.
zation, PDMS-b-PEO was blended with (L)-tartaric acid (LTA) 2016, 54, 22002208
which allows for tuning of the self-assembled morphologies.
Additionally, it was observed that the order-disorder transition KEYWORDS: block copolymer; lithography; click chemistry; poly-
temperature (TODT) of PDMS-b-PEO increased dramatically as mer blend; supramolecular assembly; phase separation
INTRODUCTION For the semiconductor industry, directed is a measure of the incompatibility between the A and B
self-assembly (DSA) or block copolymer lithography offers a blocks, which in turn determines the domain periods, d, of
promising complement or alternative to emerging patterning self-assembled morphologies according to the formula dv1/
6 2=3 15,16
technologies, such as extreme UV lithography (EUV).17 Key N: Therefore, decreasing the size of the domain in
to the success of these approaches is the self-assembly of AB order to shrink feature sizes for lithographic applications17
diblock copolymers 813 with parameters governing morphol- requires that the polymer chains be lower in molecular
ogy including the overall degree of polymerization (N), the weight (decreased N) and consequently the polymer blocks
relative volume fraction of each individual block (f), and the need stronger incompatibilities (higher v) to maintain segre-
FloryHuggins interaction parameter, v (T21).14 The latter gation strengths large enough to achieve self-assembly
Additional Supporting Information may be found in the online version of this article.
C 2016 Wiley Periodicals, Inc.
V
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(vN > 10.5). A high v parameter therefore plays an important ters between the PDMS and PEO/LTA supra block and the
role in shrinking feature size in directed self-assembly (DSA) PDMS and free LTA molecules determined.
lithography, allowing one to order sub 10 nm self-assembled
morphologies by manipulating substrate topology and chem- EXPERIMENTAL
istry. Examples include contact hole shrink,1822 and line-
Materials and Methods
space patterns from grapho-epitaxy7,13,2327 and chemo-
Unless otherwise noted, all reagents were used as received
epitaxy.2831
from Sigma-Aldrich. Synthesis of x-Azido-PDMS and x-
Poly(styrene-b-methyl methacrylate) (PS-b-PMMA) is the cur- Alkynyl-PEO are summarized in the Supporting Information.
rent industrial and academic standard for patterning applica- Nuclear magnetic resonance spectra were recorded on either
tions due to facile selective etching of PMMA by UV a Varian 500 MHz, or a Varian 600 MHz instrument. All 1H
irradiation and the ready availability of PS-b-PMMA diblock NMR experiments are reported in chemical shift, d, units,
copolymers.32 Further, nearly balanced interfacial interac- parts per million (ppm), and were measured relative to the
tions with the free surface33 enable perpendicular morpholo- signal for residual chloroform (7.26 ppm) in CDCl3, unless
gies to be prepared.34 PS-b-PMMA, however, suffers from a otherwise stated. Size exclusion chromatography (SEC) was
low v parameter ( 0.04 at 150 8C), limiting the smallest performed on a Waters 2695 separation module with a
obtainable feature sizes to around 20 nm.35 With demand Waters 2414 refractive index detector in chloroform with
for ever smaller domain sizes within the semiconductor 0.25% triethylamine as the eluent. Number average molecu-
industry, intense research has been focused on high v block lar weights (Mn), weight average molecular weights (Mw),
copolymers for nanopatterning. High v candidates include, and polydispersities (Mw/Mn) were calculated relative to lin-
but are not limited to, poly(dimethylsiloxane) (PDMS) ear polystyrene standards. Microwave reactions were per-
based,25,3638 polytrimethylsilylstyrene (PTMSS) based,3941 formed in an Initiator Eight Microwave System (Biotage).
and polyhedral oligomeric silsesquioxane (POSS) based
BCPs31,4245 with all systems having high contrast in oxygen Small Angle X-Ray Scattering
plasma etching and inherently low compatibility with organic Small angle X-ray scattering (SAXS) measurements of bulk
polymers. For PDMS-based systems, commercially available samples were conducted using a custom constructed SAXS
PDMS-b-PS has been widely studied for DSA lithography instrument. The instrument used a 50 micron microfocus, a
leading to 10 nm pitch size12,25,4648 and we recently Cu target X-ray source (k 5 1.57 ) with parallel beam multi-
reported sub-10 nm patterns for PDMS-b-PMMA.49 layer optics and monochromator (Genix from XENOCS SA,
France), high efficiency scatterless hybrid slits collimator
In this study, we sought to access even smaller nanoscale developed in-house, and a Detris Pilatus 100 K hybrid pixel
features by further increasing v. PDMS-b-PEO was chosen detector. The typical q range for the measurement spans
based on the amphiphilic nature and synthetic accessibility. 0.010.25 21. Samples for SAXS were melt-pressed inside a
However, one major drawback of PEO-containing BCPs is the metal washer and annealed in a vacuum oven (20 mTorr, 70
crystalline nature of PEO, which can be detrimental to the 8C) for the designated amount of time. The metal washer
formation of well-ordered nano-structures. To address this was then carefully sealed with a Kapton film on both sides
challenge, Watkins has elegantly demonstrated that blending with epoxy glue.
with hydrogen-bond donating polymers and small molecules
can suppress PEO crystallinity and simultaneously enhance General Procedure for Preparing a PDMS Diblock
self-assembly.5054 We present a synthetic and theoretical Copolymer by Copper Nanoparticle Catalyzed Click
approach based on reversible association to increase our Reaction
understanding of how hydrogen-bond donating small mole- A 5 mL microwave reaction tube was charged with 5 mL of
cules influence the effective interaction parameter of PDMS- toluene, copper nanoparticles (8.0 mg, 0.12 mmol), x-
b-PEO. By blending PDMS-b-PEO with (L)-tartaric acid, crys- alkynyl-PEO (Mn 5 2 kDa, 200 mg, 0.1 mol, 1 equivalent),
tallization of PEO is successfully inhibited and effective v and its counterpart, x-azido-PDMS (Mn 5 1.7 kDa, 187 mg,
simultaneously increased. In addition, recent theoretical 0.1 mmol, 1.1 equivalent).49 The mixture was kept at 150 8C
studies based on a field theoretic model have considered for 1 h in the Biotage microwave reactor. The reaction mix-
reversibly bonded copolymer melts, for example, supramo- ture was filtered by 0.45 lm PTFE syringe filter. The filtrate
lecular diblock55 and triblock,56 binary difunctional poly- was then centrifuged at 3000 rpm for 5 min. A clear top
mers,57 and multifunctional supramolecular networks.58 layer was carefully decanted and concentrated. Flash chro-
Here, we build on these studies to treat site-specific interac- matography was performed in order to remove the excess
tions along the polymer backbone and account for the asso- PDMS. The excess PDMS homopolymer was removed first by
ciation of PEO with hydrogen-bonding small molecule eluting with CH2Cl2. PDMS-b-PEO was then obtained by
additives. For simplicity, we employ a coarse-grained bead using MeOH/CH2Cl2 (v/v 5 1/10) as the eluent. The fractions
spring model15 to represent monomer species and small were combined, concentrated and dried under high vacuum
molecule additives alike. With this model, the spinodal phase to yield pure diblock copolymer with a typical yield of 50
boundaries of the block copolymer blends and small mole- 80%. Representative 1H NMR (500 MHz, CDCl3-d1, d): 7.53
cule additives are obtained and the FloryHuggins parame- (s, 1H, triazole), 4.68 (s, 2H, -O-CH2-triazole), 4.31 (t, 2H,
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TABLE 1 Characterization Data Summary for PDMS-b-PEO behavior investigated by differential scanning calorimetry
Copolymers (DSC), as shown in Figure 2. During the heating cycle, pure
D2.2O5.0 showed a strong endothermal peak due to the melt-
Samplea Mn - b
D Dc Mord d0e (nm) TODTf (8C) ing of PEO crystallites [Fig. 2(A)]; upon cooling, the corre-
D1.1O1.9 3.0 1.08 41% (lam) 7.9 80 sponding exothermal crystallization peak was observed [Fig.
2(B)]. Both peaks dramatically decreased and shifted to
D1.1O2.1 3.0 1.08 38% (lam) 8.1 80
lower temperatures when D2.2O5.0 was blended with either 5
D1.7O2.0 3.7 1.10 50% lam 10.2 175
or 10 wt % LTA, indicating an effective partial suppression
D2.2O5.0 7.2 1.04 34% lam 15.3 n/a of PEO crystallization. Significantly, no crystallization peak
D9.0O1.8 10.8 1.07 86% bcc 14.4 n/a was observed in the cooling curve when using 15 wt % or
a
greater LTA. Instead, glass transitions at 230 to 250 8C
Sample name refers to the components (D 5 PDMS; O 5 PEO) and sub-
scripts refer to the number average molecular weight (in thousands) of were observed in both cooling and heating curves, suggest-
each block. ing the formation of a glassy PEO/LTA complex. Although a
b -
D is polydispersity, Mw/Mn. cold crystallization and corresponding melting event were
c
fD is volume fraction of PDMS, calculated based on monomer volume
of each block. m(PDMS) 5 0.138 nm3,65 m(PEO) 5 0.069 nm3.65
observed above the glass transition in each heating curve
d
Mor refers to morphology, which was determined by the q-ratios of
SAXS peak positions. Lam and bcc indicate lamellar and body centered
cubic (bcc) sphere morphologies, respectively. (Lam) refers to morphol-
ogies classified as lamella based on the volume fraction of PDMS, but
the secondary peaks were not observed in SAXS.
e
Domain periods were calculated by d0 5 2p/q*, where q* is the posi-
tion of the primary Bragg reflection.
f
Details of order-disorder transition temperature measurements are
summarized in the Supporting Information.
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using 1525 wt % LTA, crystallization events were com- Selective Binding Leading to Stronger Segregation and
pletely absent in blends containing more than 30 wt % LTA, Increasing TODT
demonstrating efficient suppression of PEO crystallization. To quantify the increased phase separation behavior of
PDMS-b-PEO in the presence of LTA, we quantitatively com-
The ability to control PEO crystallinity allows the domain pared the FloryHuggins parameters of neat BCPs to blends
periodicities and morphologies of neat PDMS-b-PEO BCPs of BCPs with LTA. Initially the v parameters of neat PDMS-b-
and their blends with LTA to be investigated by SAXS. At PEO were obtained by analysis of SAXS profiles in the disor-
room temperature, all neat PDMS-b-PEO BCPs showed a dered phase at various temperatures. The analysis was based
broad primary scattering peak due to the presence of PEO on Leiblers mean field theory14 and modified to account for
crystallites with a broad distribution of grain sizes. These the polydispersity and asymmetry of the block copoly-
crystallites disrupt microphase separation. Upon heating the mers.71,72 To ensure accessibility of the temperature window
samples above the melting point of PEO (60 8C), this peak of the disordered state and reliability of the calculations, the
was replaced by a new set of well-defined scattering peaks, two lowest molecular weight BCPsD1.1O1.9 and D1.1O2.1
suggesting the existence of well-ordered nanostructures. The with low order-disorder transition temperatures (TODT 5 80
domain periods were calculated via d0 5 2p/q* (q* is the 8C, see Supporting Information Figs. S3 and S4) were sub-
position of the principal SAXS peak), and produce values jected to this analysis. Four parameters, including the statis-
below 15 nm for all samples (see Table 1). These domain tical segment lengths of both polymers (bEO, bDMS) and
periods are much smaller than domain period of PS-b-PMMA, fitting constants K and v, were optimized to fit the SAXS pat-
the current industry standard in DSA lithography. Remarkably, tern at a particular temperature. The data analysis is sum-
D1.1O1.9 self-assembled to form lamellae with d0 as low as marized in Supporting Information Figure S5. Both polymers
7.9 nm, one of the smallest domain periods reported for the have similar FloryHuggins parameters (v (D1.1O1.9) 5 16.4/
self-assembly of a linear diblock copolymer.43,66,67 From the T 1 0.17 and v (D1.1O2.1) 5 22.8/T 1 0.15) as shown on
ratio of scattering reflections, the underlying morphologies for Figure 5. These values are significantly higher than the v val-
D1.7O2.0 and D2.2O5.0 (lamellar) and D9.0O1.8 (body-centered ues of both PS-b-PMMA and PDMS-b-PS, and slightly higher
cubic spheres) were observed (Table 1). Higher order scatter- than for PDMS-b-PMMA (Table 2) suggesting that PDMS-b-
ing peaks were not detected for D1.1O1.9 and D1.1O2.1 due to PEO could achieve smaller, nanoscale features.
the low overall molecular weight (see the Supporting Informa-
tion for additional information on SAXS profiles and Shifting attention to the LTA blends, the effective v parame-
morphologies). ters, veff, of PDMS-b-PEO/LTA could not be obtained by the
same method used for neat PDMS-b-PEO. Considering the
On a molecular level, addition of LTA to the diblock copoly- onset decomposition temperature of LTA, 150 8C,41 the dis-
mers leads to an increase in the effective molar volume of ordered phase temperature windows of these blends for veff
the PEO repeat units and a corresponding change in the analysis would be higher than the LTA decomposition tem-
effective molecular volume of the PEO block and domain perature. Therefore, a theoretical model was used to
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Sample va v at 150 8C
35
PS-b-PMMA 4.46/T10.028 0.039
PDMS-b-PS49 6.85/T10.072 0.088
49
PDMS-b-PMMA 24.4/T10.13 0.188
PDMS-b-PEO 16.4/T 1 0.17 0.208
a
FloryHuggins parameters were obtained by analyzing disordered
SAXS profiles based on Leiblers random phase approximation.14 The
reference volume for each case is 0.1 nm3.
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experimental data shows that the effective v, both vAD (PDMS, The specific H-bonding, supramolecular assembly of LTA
PEO/LTA) and vAC (PDMS, LTA), between PDMS and the PEO/LTA with the PEO domains of the block copolymer decreased the
suprablock increased from 16.44/T 1 0.169 to 57.0/T 1 0.23 PEO blocks tendency toward crystallization and improved
for D1.1O1.9 and from 22.8/T 1 0.148 to 75.0/T 1 0.26 for phase separation. This supramolecular driven assembly was
D1.1O2.1. The difference between the extracted v expressions modeled via the random phase approximation (RPA) utilizing
for the two PDMS-b-(PEO/LTA) samples is likely due to the dif- a bead-spring model with the model predictions, obtained
ferences in the bare v parameters of the pure PDMS-b-PEO from fits to experimental TODT data, suggesting a large effec-
copolymers and the different volume fractions of PEO that par- tive v for PDMS and LTA, which drives LTA into the PEO
ticipate in H-bonding. The temperature dependence of the domains and enhances hydrogen bonding of LTA to PEO. The
effective v is much higher after LTA binding, suggesting a large increased polarity of the PEO/LTA supra-block is quantified
unfavorable enthalpic interaction between bound (or free) LTA by a predicted 100% increase in v for PDMS-b-PEO/LTA over
and PDMS. The increase in effective v from vAB (PDMS, PEO) to PDMS-b-PEO, and the order-disorder transition temperature
vAD (PDMS, PEO/LTA) is approximately equivalent to 0.36-0.43 at is observed both experimentally and theoretically to be a
room temperature with the overall increase of vAD (PDMS, PEO/ monotonically increasing function of LTA concentration. The
LTA) being 80120% (see Figure 5). This relatively large higher volume PEO/LTA supra-blocks, further swollen with
effective v parameter excludes LTA from the PDMS domains free LTA can further drive a sequence of morphological tran-
and enhances binding to PEO. When LTA binds exclusively to sitions, consistent with SAXS analysis of the blends. These
PEO, the resulting PEO/LTA supramolecular block copolymer block copolymers achieved lamellar domain periods as low
is more polar than PEO alone, as depicted in Figure 1 with the as 7.9 nm and show promise for next generation block
supramolecular assembly resulting in an increased PDMS-b- copolymer lithographic systems.
(PEO/LTA) v. Significantly, these theoretical calculations predict
a shift towards higher v values, which would improve phase
separation and self-assembly. Experiments were able to further
corroborate this finding: in the pure D1.7O2.0 case at 60 8C, ACKNOWLEDGMENTS
only the principal scattering peak was observed, indicating We thank The Dow Chemical Company through the Dow Mate-
ordered domains without long-range ordering. On addition of rial Institute in UCSB and the PREM program of the National
LTA, higher order SAXS reflections (nq* 5 1:2:3) become appa- Science Foundation (DMR-1205194) for financial support. The
rent, confirming our hypothesis that LTA enhances the self- following Dow researchers are thanked for insightful discus-
assembly capabilities of PDMS-b-PEO and allows for tuning of sions Phillip Hustad, Matthew Christianson, John Kramer,
phase separation, effective molar volume and domain period. Bryan Barton and Paul Clark (DOW). Project assistance by
Hazel Sprafke (UCSB) and insightful discussion with Weichao
As the amount of LTA was increased in D1.7O2.0, the morphol-
Shi, Brian Stahl and Nicolas Treat (UCSB) are gratefully
ogy gradually evolved from lamellae (5% 20 wt % LTA) to
acknowledged. The computer simulations presented in this
cylinders (25 wt % LTA), as pindicated
p by the characteristic
work were performed using computational facilities at the Cali-
peaks position at ratios q*: 3q*: 7q* (see Fig. 3). Similarly,
fornia NanoSystems Institute (CNSI) and Materials Research
as the amount of LTA was increased for D1.1O2.1, D2.2O5.0 and
Laboratory (MRL) at the University of California, Santa Barbara.
D9.0O1.8, the morphology changed from lamella (<5%) to
The MRL Central Facilities are supported by the MRSEC Pro-
gyroid (>20%), from lamella (<10%) to hexagonal cylinder
gram of the NSF under Award No. DMR 1121053; a member of
(>25%), and from bcc sphere (<2%) to hexagonal cylinder
the NSF-funded Materials Research Facilities Network
(>5%), respectively (Supporting Information Figs. S7S9). If
(www.mrfn.org). C.W.P. acknowledges the Alexander von Hum-
we assume homogeneous LTA binding to PEO for all PDMS-
bolt foundation for financial support.
b-PEO compositions, the model calculations indicate that the
volume fractions of PDMS can be decreased from f 5 0.5,
0.38, 0.34, and 0.86 without LTA to feff 5 0.42, 0.32, 0.29,
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