Flow sensor for compressed air Refrigerating

type dryer
Desiccant
type dryer
High polymer

PFD/PFK (display separate type flow sensor) membrane

type dryer

Air filter

 Sensor / flow sensor Auto. drain

/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
C O N T E N T S plate
Magnetic
Product introduction 1432 spring buffer

Applications 1434 Mechanical

pressure SW
Safety precautions 1435 Electronic
pressure SW
 Flow sensor (PFD)display separate type 1440 Contact / close
contact conf.
 Tester kit (PFK) 1446 SW

Air sensor
Electric wiring 1450
Pressure SW
Monitor section functional explanation and operation explanation 1452 for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Display separate type for compressed air
Flow sensor

1431
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
Contributing to the global
type dryer

Air filter

Auto. drain
environment with energy
/ others
F.R.L.
(Module unit)
F.R.L.
saving control.
(Separate)
Compact
F.R.
Precise
regulator
Analyzing the current state
F.R.L.
(Related
products)
Clean  Measurement of the
F.R. current flow rate
Electro
pneumatic  Review of actions
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate Revision and Continuance Implementing actions
 Stop air pressure supply
Magnetic
spring buffer  Standardization of when system is not
consumption rate in operating
Mechanical systems and line
pressure SW  Shorten blow time
 Horizontal  Use energy-saving nozzle
Electronic
pressure SW development to  Lower pressure
Contact / close
other lines
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water Confirmation of effect
Total air
system  Measure with flow
Total air sensor
system
(Gamma)  Calculate costs with
integrating function
Ending

Flow sensor for compressed air

1432
 PFD / PFK Series
PFD Series flow sensor for compressed Refrigerating
type dryer
air assists in analyzing current energy Desiccant
type dryer
consumption and confirming the effect. High polymer
membrane
type dryer

Air filter

Auto. drain
/ others

Ample output variations Directly read digital displays with no need for calibration F.R.L.
(Module unit)

Since bothersome pressure compensation and temperature F.R.L.

(Separate)
Output function compensation are not required, the digitally display value
can be read and used. Compact
Pressure range F.R.
Pressure compensation not required Precise
Digital display Instantaneous flow *1 Method of detecting weight flow adopted
0.1MPa 1.5MPa
regulator
Integrated flow *1 40
F.R.L.
Temperature compensation not required Temperature range (Related
Automatic temperature compensation 0 products)
Switch output NPN transistor *2 Clean
PNP transistor *2 function built in F.R.
Electro

High precision with general precision of 4%F.S.

Integrated pulse output pneumatic
Transistor output *3 regulator
Air
A general precision of 4%F.S. is realized in a temperature booster
Analog output 0-5VDC (standard) range of 10 to 30C and pressure range of 0.2 to 0.7MPa Speed
4-20mA DC (option) even without calibration.
control valve

1-5VDC (option) Silencer

0-10VDC (option) Total precision = (linearity)2 + (temperature characteristics)2 + (pressure characteristics)2
Check valve
*1. Switch between the instantaneous flow and integrated flow (Note) The general precision is the reference value including all errors including / others
with a single touch. the errors from temperature or pressure variation and the linearity, etc. Joint
*2. Select NPN or PNP for the switch output. / tube
Two output points are provided. (PFK series has 1 point)
*3. Change one of the switch outputs to an integrated Vacuum
pulse output with easy operations. Convenient portable kit available filter
Vacuum
regulator
Five types of tester kids consisting
RoHS Directive compliant of a sensor section, monitor section
Suction
plate
All substances, such as lead and and piping, etc., in a trunk case Magnetic
are available. spring buffer
hexavalent chrome, which could
adversely affect the global environment, Piping and wiring can be Mechanical
exchange with a single touch. pressure SW
have been completely eliminated from
the materials used in this controller. Electronic
pressure SW
Contact / close
contact conf.
Optimum for ISO 14001 acquisition SW

Air sensor
The lineup includes a large flow type, which supports energy
Pressure SW
saving control in factory units. This device is essential for for coolant
acquiring ISO14001, the International Standardization
Small
Standard for environment management systems. flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
Covering a wide range of flow rates with 11 types system
Total air
system
(Gamma)
Standard (port size) Kit (port size) Flow range [L/min. (normal)]
Ending
Display separate type for compressed air
Flow sensor

* Coupler connections are used for the PKF series.

1433
 PFD Series
Refrigerating
Flow sensor for compressed air applications
type dryer
Desiccant
type dryer
High polymer
membrane
Controlling flow rate in automobile manufacturing lines
type dryer

Air filter  Automobile line control  Painting line robot

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others Controlling flow in FPD manufacturing
Joint
/ tube
 Ionizer  Air knife
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water Functional explanation
Total air
system
Total air
system
(Gamma)
The flow sensor consists of a rectifier passing even amounts of
Ending
compressed air and a platinum membrane resistor that detects flow.
Inserting a bent pipe such as an elbow just before the sensor evens
the rectifier flow. Using multiple rectifier plates suppresses pressure
Piping adapter loss, enabling a rectifier effect.
When compressed air is not flowing, the platinum membrane sensor
that detects flow is heated to a set temperature by the fluid
temperature. When compressed air flows, heat is lost proportional to
air, so a current flows to the platinum membrane sensor circuit that
detects flow. The display receives this current as the flow signal and
indicates the practical atmospheric pressure, instant flow of air
Platinum membrane
sensor converted to 0C, and integrated flow. Compressed air temperature is
measured and compensated for by the platinum membrane sensor
Flow path
that detects the fluid temperature.
Rectifier
Flow direction

1434
 Pneumatic components (sensors)

Safety precautions
Always read this section before starting use. Refrigerating
type dryer
Refer to Intro 67 for general precautions, and to " Safety Precautions" in this section for
Desiccant
details on each series. type dryer
High polymer
membrane
Flow sensor for compressed air PFD Series type dryer

Air filter

Design & Selection Auto. drain

/ others
F.R.L.
 The flow sensor has no moving parts but if the sole- (Module unit)
1. Specifications confirmation noid valve is repeatedly turned on or off, the F.R.L.
(Separate)
rectifier's mesh or fixed section could move slightly Compact
DANGER and generate particles. Be sure to provide a filter F.R.

 Do not use this product for flammable fluids. on the secondary side (downstream) of the flow Precise
regulator
sensor for applications susceptible to particle gen- F.R.L.
(Related
WARNING eration. products)
Clean
 Use this product in accordance with the specifica- F.R.

tions range. 3. Design per applications Electro

pneumatic
regulator
Products in this catalog are for use only in a com- Air
pressed air system. Using this product at a pres- CAUTION booster

sure or temperature exceeding specifications could  This product is designed for compressed air, and Speed
control valve
cause ruptures or malfunctions. will tolerate small amounts of leakage. Contact CKD
Silencer
when no leaks are tolerable.
 This product cannot be used as a business meter. Check valve
/ others
This product does not comply with Measurement Joint
4. Working environment / tube
Laws, and cannot be used for commercial business.
Vacuum
Use this as an industrial sensor. filter
DANGER Vacuum
 Do not use this product in flammable atmosphere. It
regulator
 Compressed air or nitrogen can be used. Do not Suction
use other fluids or the precision cannot be guaran- does not have an explosion-proof structure, so flame plate

teed. or fires could occur. Magnetic

spring buffer
Mechanical
 There is a risk of oxygen deficiency if nitrogen gas pressure SW
2. Design for Safety
is used for the applicable fluid. Observe the follow- Electronic
pressure SW

WARNING ing points when handling: Contact / close

contact conf.
(1) Use this product in a well-ventilated place. SW
 Take measures to protect personnel and equipment (2) Ventilate the area while using nitrogen gas. Air sensor
against injury or damage if this product fails. (3) Regularly check nitrogen gas piping for leaks. Pressure SW
for coolant
CAUTION Small

 Understand compressed air features before design-

WARNING flow sensor
Small
ing a pneumatic circuit.  Do not use the product where the product is ex- flow controller

 Pop-out, air discharge, or leakage due to air compression posed to direct-sunlight or may come in contact with Flow sensor
for air
and expansion could occur. water or rain. Flow sensor
for water
 Design the circuit so that compressed air in the system is
exhausted.  Do not use in a corrosive environment. Use in the Total air
system
environment like this could result in damage or Total air
system
 Check the leakage current to prevent malfunction malfunction. (Gamma)

caused by current leaking from other controllers. Ending

 When using a programmable controller, etc., the leakage  Consult with CKD if ozone could occur in supplied air.
Display separate type for compressed air

current could cause this product to malfunction.

 The sensor and monitor of this product are inde-
pendent and can be exchanged if the flow range is
within the same model.
 Sections cannot be exchanged for different flow ranges.
 The sensor and monitor must be used as a set. Using
 Avoid use in ozone occurring environments.
 Keep the fluid temperature within 0 to 40C.
Even if the temperature is within the specified range,
do not use this product if the temperature could
suddenly change and cause dew to condense.
Flow sensor

only one will not ensure correct functions.

 This product fails if pressure exceeding the maxi-

mum working pressure is used. Check that the pres-
sure is less than the maximum working pressure.
1435
 PFD Series
 The sensor is dust-proof and drip-proof, so prob-  Use within an ambient temperature range 0 to 50C.
Refrigerating
type dryer lems do not occur if water gets on the sensor dur-
Desiccant ing maintenance or cleaning. The sensor should not  Avoid using in areas where vibration exceeds 49m/s2
type dryer
High polymer
be exposed to water for long periods or used in and impact 294m/s2.
membrane
type dryer
places where water and oil scatter with force.
Air filter
CAUTION 5. Securing of space
Auto. drain
/ others
 Confirm that the product will withstand the working
F.R.L.
environment. CAUTION
(Module unit)
 This product cannot be used in environments where func-
F.R.L.
tional obstacles could occur. Such environments include
 Ensure space around the pneumatic component for
(Separate)
high temperatures, a chemical atmosphere, or where
installation, removal, wiring, and piping work.
Compact
F.R. chemicals, vibration, moisture, water drip, coolant or gas
Precise are present; Where ozone is generated.
regulator
F.R.L.
(Related
products) Installation & Adjustment
Clean
F.R.
Electro
pneumatic
regulator
1. Installation 2. Operation pre-confirmation
Air
booster
DANGER CAUTION
Speed
control valve  Use power voltage and output within the specified  When supplying compressed air after connecting
Silencer voltage. If voltage exceeding the specified voltage piping, be sure to check for air leaks at all sections
Check valve
is applied, the sensor could malfunction or be dam- where piping is connected.
/ others aged, or electrical shock or fire could occur.  Apply a leakage detection agent on pipe connections with
Joint
/ tube a brush, and check for air leaks. Check that leak detec-
Vacuum tion fluid does not get on resin parts. Otherwise resin could
filter
WARNING be damaged.
Vacuum
regulator  Check the wire color and terminal numbers when
Suction
wiring. Incorrect wiring connections could result in  Separate the cable from sources of noise such as
plate
sensor damage, problems, and malfunctions. Check power distribution wires. Failure to do so could re-
Magnetic
spring buffer
wire color and terminal numbers against the instruc- sult in malfunctions caused by noise.
Mechanical
pressure SW tion manual before wiring.
Insert a noise filter if required.  Do not short-circuit the output contact
Electronic
pressure SW If the load is short-circuited, the overcurrent protec-
Contact / close
tion circuit protects the output transistor. If left as is
contact conf.
SW  Check wiring insulation.
Check that wires do not contact other circuits and too long, the output transistor could break.
Air sensor
that there are no ground faults or insulation faults
Pressure SW
for coolant across terminals. Overcurrent could flow in and  Do not use this product for loads generating surge
Small damage the sensor. voltage.
flow sensor
When directly driving a load that generates a surge,
Small
flow controller
 Separate the monitor from high-voltage wires, high such as a relay or solenoid valve, use a sensor with
Flow sensor
voltage devices, and powered devices such as integrated surge absorbing element. Similarly, use
for air
surge countermeasures if there is a source of surge
Flow sensor motors.
for water in the power supply line.
Total air
system  Check that there are no swarf or wire scraps on the
Total air
monitor's gland and sensor connectors before wiring.  This product cannot withstand lightning surges.
system
(Gamma) This product complies with CE Marking, but is not
Ending CAUTION resistant to lightning surges. Protection must be pro-
vided on the system side.
 Do not remove air compressor packaging or the dust-
proof cap on the piping port until just before the prod-
 Do not repeatedly bend or tension to leads or wires
uct is piped.
could disconnect.
 If the piping port cap is removed from the piping port be-
fore piping work is started, foreign matter could enter the
pneumatic component from the piping port and result in  Use the enclosed cable (3m) to wire the sensor to
faults or faulty operation. the monitor. Check with CKD when a longer cable
is required.
 Do not install pneumatic components with a method
that supports with pipes.

1436
 PFD Series
Installation & Adjustment Refrigerating
type dryer
Desiccant
 When adjusting the flow with a metering valve (globe type dryer
3. Piping valve, ball valve, etc.), install the metering valve on High polymer
membrane
type dryer
the secondary side of the sensor (downstream). If the
CAUTION metering valve is installed on the primary side, drift Air filter

 When connecting pipes, wrap sealing tape in the (turbulent flow) could occur and result in an error. Auto. drain
/ others
opposite direction from threads starting 2 mm in- F.R.L.
side from the end of piping threads. (Module unit)

 If sealing tape protrudes from pipe threads, it could be cut F.R.L.

(Separate)
when screwed in. This could cause the tape to enter the Compact
F.R.
solenoid valve and lead to faults.
Precise
 Do not install a regulator before the sensor. Incor- regulator
F.R.L.
rect flow could cause errors. (Related
products)
 When installing a pressure reduction valve on the primary Clean
F.R.
side, be sure to include straight piping having an inner
Electro
diameter of 10 D or more. pneumatic
regulator
* D indicates the pipe's inner diameter. Air
 Select a pressure reduction valve having sufficient flow booster

 When using a liquid sealing agent, check that it does not for maximum sensor flow. Speed
control valve
get on resin parts. Otherwise resin could be damaged.
Silencer
 Check that the fluid direction and the direction indi-
 Check that the pipe connected to the pneumatic cated on the sensor are the same when piping. Oth- Check valve
/ others
component is not dislocated due to vibration, loos- erwise reading will not be correct. Joint
/ tube
ening, or pulling.
Vacuum
 Dislocation of piping will cause hazards.  When using an elbow or bushing in piping, install 10 filter

D or larger straight piping on the primary side and 5 Vacuum

 Observe the following precautions when using ny- D or larger straight piping on the secondary side.
regulator
Suction
lon tubes or urethane tubes for piping material.  Be sure to provide straight piping when using the PFD- plate

 Use a flame resistance tube or steel pipe when using in 163 Series. Magnetic
spring buffer
an environment where spatter could scatter.  Note that the bore can be changed up to one rank upward Mechanical
 When using the standard pushin joint for spiral tubing, fix with the bushing. pressure SW

the base of tubing in place with a hose band. Holding will Electronic
pressure SW
drop if tubing rotates. Contact / close
10D 5D contact conf.
SW
 Connect piping so that connections are not dislo- Using an elbow Air sensor
cated by system movement, vibration, or tension. Pressure SW
for coolant

 Always flush just before piping pneumatic compo- 10D 5D

Small
flow sensor
nent. Small
Using a bushing flow controller
 Check that foreign matter entering during piping does not
Flow sensor
get into the air compressor. for air
 Check that force is not applied to resin parts when
Flow sensor
 Apply adequate torque when connecting pipes. piping. for water
Total air
 To prevent air leakage and screw damage. system
 First tighten the screw by hand to prevent damage to screw 4. Pneumatics pressure source Total air
system
threads, then use a tool. (Gamma)

CAUTION Ending
(Recommended value)
Port thread Tightening torque Nm  Install an air filter just before the pneumatic compo-
Display separate type for compressed air

Rc3/8 22 to 24 nent in the circuit.

Rc1/2 28 to 30
Rc3/4 31 to 33  When supplying compressed air for the first time
Rc1 36 to 38 after connecting pipes, do not apply high pressure
Rc11/2 48 to 50 suddenly.
Rc2 54 to 56  Piping connection could deviate and cause piped tubing
to pop off and lead to accidents.
Flow sensor

1437
 PFD Series
 Quality of air  Install a filter, air dryer, and oil mist filter on the primary
Refrigerating
type dryer  Use a CKD clean air system depending on the applica- side (upper stream side) of the sensor. The sensor's mesh-
Desiccant tion. ing rectifies flow in the pipe. It does not filter out foreign
type dryer
High polymer
 Use compressed air free of oxidized oil, tar, or carbon substances, so provide a filter.
membrane from the air compressor.
type dryer

Air filter
 Use compressed air free of solid foreign matter.

Auto. drain
/ others
F.R.L.
(Module unit) Filter Air Oil mist Flow sensor Valve
dryer filter PFDseries
F.R.L.
(Separate)
Compact
F.R. When requiring ultra clean air
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R. Filter Air Oil mist Flow sensor Valve Precise
Electro dryer filter PFDseries filtration filter
pneumatic
regulator
Air
booster
Speed
During Use & Maintenance
control valve

Silencer
1. During use 2. Maintenance and inspection
Check valve
/ others
Joint
/ tube
WARNING CAUTION
Vacuum  A flow several times higher than the rated flow oc-  Be sure to turn power off, stop supplied compressed
filter
curs if the valve connected to the sensor is sud- air, and check that there is no residual pressure
Vacuum
regulator denly opened. This can damage the platinum mem- before starting maintenance.
Suction brane sensor or rectifying unit and cause fluid to  This is required to ensure safety.
plate
flow to the secondary side. Gradually open the valve
Magnetic
spring buffer connected to the sensor while checking that the  Inspect the sensor at least once a year and confirm
Mechanical monitor display does not exceed the rated flow. that it operates correctly.
pressure SW
Electronic
CAUTION
pressure SW
 If a problem occurs during operation, immediately  Do not disassemble or modify this product. Doing
Contact / close
contact conf.
SW turn power off, stop use, and contact your dealer. so could result in faults.
Air sensor

Pressure SW
 Internal settings, such as the hardware check, are
for coolant made in the first 10 seconds after power is turned
Small
flow sensor ON. The display and output do not function correctly
Small during this time. If an interlock circuit is established
flow controller
with control system devices using switch output, an
Flow sensor
for air abnormal stop could occur, so mask the output dur-
Flow sensor ing this time.
for water
Total air
system  If the output setting value is changed, control sys-
Total air
system tem devices could operate unintentionally. Stop
(Gamma)
devices before changing settings.
Ending

 When an interlock circuit is used, use a double in-

terlock circuit and regularly check that operations
are correct.

1438
MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Display separate type for compressed air
Flow sensor

1439
 Flow sensor

Refrigerating
PFD Series
type dryer
 Flow rate range : 25 to 500, 50 to 1000, 100 to 2000, 200 to 4000
Desiccant
type dryer
High polymer
400 to 8000, 800 to 16000 L/min. (normal)
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
Features
F.R.L.  Detect flow with a general accuracy of 4% F.S.
(Separate)  Compensation is not required for pressure or temperature fluctuation.
Compact
F.R.
 Flow is converted to a reference (0C, 101.3 kPa) and displayed.
 Use either integrated display or integrated pulse output.
Precise
regulator  Diverse functions and variations available for flow ranges and electric output.
F.R.L.
(Related
products)
Clean
F.R.
Electro
Specifications
pneumatic
regulator Descriptions PFD-501-10 PFD-102-15 PFD-202-20 PFD-402-25 PFD-802-40 PFD-163-50
Air
Specifications

booster Flow rate range L/min.(normal) 25 to 500 50 to 1000 100 to 2000 200 to 4000 400 to 8000 800 to 16000
Speed Port size Rc3/8 Rc1/2 Rc3/4 Rc1 Rc11/2 Rc2
control valve
Working fluid Clean compressed air/nitrogen gas
Working conditions

Silencer
Working air quality JIS B8392-1:2003/1.1.1 to 1.6.1 (Note 1)
Check valve Max. working pressure MPa 1.0
/ others
Joint Min. working pressure MPa 0.1
/ tube
Withstanding pressure MPa 1.5
Vacuum
filter Ambient temperature/humidity 0 to 50 , 85%R.H. or less (no dew)
Vacuum Fluid temperature C 0 to 40
regulator
3.0%F.S. (0.5MPa, 20C)
Precision

Linearity
Suction
plate Pressure characteristics 2.0%F.S. (0.5MPa reference, 0.2 to 0.7MPa)
Magnetic
spring buffer Temperature characteristics 2.0%F.S. (at 20C reference, 10 to 30C)
Mechanical Pressure loss MPa 0.015 or less (maximum flow rate, 0.5MPa)
pressure SW
Responsiveness sec 2.5 or less
Electronic
pressure SW Indicator Instantaneous/integrated flow 4 digit LED display
Contact / close
contact conf. Resolution L/min.(normal) 1 5 5 10 20 50
SW
Min. display flow L/min. (normal) 10 20 40 80 160 320
Output

Air sensor
Integrated flow Max. 9 digits (display switched by change key) (Note 4)
Pressure SW
for coolant Analog output Standard: 0 to 5 VDC /option: 4 to 20mA, 1 to 5 V, 0 to 10 VDC
Small Switch output 2 points (NPN/PNP transistor output: selection type)
flow sensor
Pulse output (Note 2) 10L (normal)/pulse 100L (normal)/pulse
Small
flow controller Power voltage V 24 VDC (6 W or less, excluding switch output load current)
Flow sensor Cable Enclosed (3 m, 4-conductor, finished outer diameter of 6, conductor wire 0.5 mm2, insulator outer diameter of 1.72 mm, with connector)
for air
Installation

Flow sensor Installation attitude Both vertical and horizontal

for water
Straight piping section IN side: 10D, OUT side: 5D recommended (Note 3)
Total air
system Protective structure Equivalent to IP64 (only sensor section)
Total air Weight kg 1.1 1.1 1.3 1.4 1.7 4.5
system
(Gamma)
Note 1: Dew could collect if ambient temperature is lower than working fluid temperature.
Ending Defection faults could occur if oil accumulates.
This product does not have clean device specifications, so particles could form on the secondary side.
If ultra-clean air is required, a precision filtration filter should be installed on the end.
Note 2: Pulse output is used with switch output. Switch the function before use.
Note 3: A straight pipe should be installed to eliminate the effect of piping conditions. D indicates the piping bore size.
Note 4: Integrated flow is backed up regularly and can also be backed up with operation.
Refer to Explanation of Functions and Operations on page 1452 for details.

1440
 PFD Series
How to order
How to order Refrigerating
type dryer
 Display separate type
Desiccant
PFD 501 10 N 0 B type dryer
High polymer
membrane
type dryer
Symbol Descriptions Air filter
A Flow rate range
Auto. drain
A Flow rate range / others
501 25 to 500 L/min. (normal)
102 50 to 1000 L/min. (normal) F.R.L.
(Module unit)
202 100 to 2000L /min. (normal) F.R.L.
(Separate)
402 200 to 4000L /min. (normal)
Compact
802 400 to 8000L /min. (normal) F.R.

163 0.80 to 16.00m3/min. (normal) Precise

regulator
B Port size F.R.L.
(Related
B Port size products)
Flow rate range 501 102 202 402 802 163
Clean
10 Rc3/8  F.R.
Electro
15 Rc1/2  pneumatic
regulator
20 Rc3/4  Air
booster
25 Rc1 
Speed
40 Rc11/2  control valve
50 Rc2  Silencer
C Switch output Check valve
C Switch output / others
N NPN transistor output2
Joint
P PNP transistor output2 / tube
Vacuum
D Analog output filter
D Analog output
0 0 to 5 VDC Standard Vacuum
regulator
1 4 to 20mA DC Option
Suction
2 1 to 5 VDC Option plate

3 0 to 10 VDC Option Magnetic

spring buffer
E Bracket Mechanical
E Bracket (Note 1) pressure SW
Blank None Standard
Electronic
B Bracket attached Option pressure SW
Contact / close
Note on model no. selection contact conf.
SW
Note 1: The bracket option is not available for PFD-163.
Air sensor
Note 2: This product consists of a sensor, monitor, and
cable. Pressure SW
for coolant
The following are indicated on the nameplate.
Small
The model is not indicated on the cable. flow sensor
Small
Product : PFD - (A) - (B) (C) (D) - (E) flow controller
Sensor : PFD - (A) - (B) Flow sensor
Monitor : PFD - (A) - (C)- (D) for air
Flow sensor
for water
Total air
<Example of model number> system
Total air
PFD-501-10N0-B system
(Gamma)
Model: PFD
A
A Flow rate range : 25 to 500 L/min. (normal) Ending
A
B Port size : Rc3/8
Display separate type for compressed air

A
C Switch output : NPN transistor output
A
D Analog output : 0 to 5 VDC
A
E Bracket : Bracket attached

 Discrete option model no.

PFD-C3
Symbol Descriptions
Flow sensor

C3 Standard cable
CW Extension cable
B Bracket (501/102/202/402)
B1 Bracket (802)

1441
 PFD Series
Refrigerating
Internal structure and parts list
type dryer
Desiccant
 PFD-501 to PFD-802
type dryer 9 11 10 12
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer 5 6 2 1 13 3 7 8 4

Check valve
/ others
No. Parts name Material No. Parts name Material
Joint
/ tube 1 Platinum thin membrane sensor 1 Alumina/platinum 7 O ring NBR Nitrile rubber
Vacuum 2 Platinum thin membrane sensor 2 Alumina/platinum 8 O ring NBR Nitrile rubber
filter
3 Body A6063S Aluminum alloy 9 Sensor base circuit board Glass epoxy
Vacuum
regulator 4 Adaptor A6063S Aluminum alloy 10 Sensor base PBT PBT
Suction 5 Rectification plate SUS304 Stainless steel 11 Sensor circuit boar Glass epoxy
plate
6 Mesh SUS304 Stainless steel 12 Guard ABS ABS resin
Magnetic
spring buffer 13 Bracket SUS304 Stainless steel
Mechanical  PFD-163
pressure SW
Electronic 5 6 2 9 11 12 1 10 3 7 8
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
4 18 13 19 15 16 14 17

No. Parts name Material No. Parts name Material

1 Platinum thin membrane sensor 1 Alumina/platinum 11 Sensor circuit boar Glass epoxy
2 Platinum thin membrane sensor 2 Alumina/platinum 12 Guard ABS ABS resin
3 Body A6063S Aluminum alloy 13 Flow path 1 A6063S Aluminum alloy
4 Separate flow adaptor A6063S Aluminum alloy 14 Flow path 2 A6063S Aluminum alloy
5 Rectification plate SUS304 Stainless steel 15 Orifice C3604BD Brass
6 Mesh SUS304 Stainless steel 16 O ring NBR Nitrile rubber
7 O ring NBR Nitrile rubber 17 O ring NBR Nitrile rubber
8 O ring NBR Nitrile rubber 18 Sub-attachment SCS13 Stainless steel
9 Sensor base circuit board Glass epoxy 19 O ring NBR Nitrile rubber
10 Sensor base PBT PBT

1442
 PFD Series
Dimensions
Dimensions Refrigerating
type dryer
 PFD-501 to 802 Desiccant
type dryer
High polymer
membrane
type dryer

Air filter
Model no. Port size
6
Auto. drain
PFD-501-10 Rc3/8 / others
PFD-102-15 Rc1/2 F.R.L.
(Module unit)

I
J
PFD-202-20 Rc3/4
F.R.L.
PFD-402-25 Rc1 (Separate)
PFD-802-40 Rc11/2 Compact

L
Standard cable (3 m) F.R.
Note: Enclosed with product K
Precise
H regulator
F.R.L.
G F (Related
products)
B
Clean
F.R.
Electro
pneumatic
regulator

(E)
Air
booster
C

Speed
control valve

D
Silencer
3

Check valve
/ others
M A
Joint
/ tube
Vacuum
Model no. A B C D (E) F G H I J K L M filter
Vacuum
PFD-501/102 140 52 76.2 22 54.2 52 36 26 72 64 6.5 4.5 M4 screw depth 6 regulator
PFD-202 150 55 87.2 27.5 59.7 57 36 26 72 64 6.5 4.5 M4 screw depth 6 Suction
plate
PFD-402 175 55 90.7 27.5 63.2 69.5 36 26 72 64 6.5 4.5 M4 screw depth 6
Magnetic
PFD-802 190 65 103.7 34 69.7 75 40 26 94 80 8 6 M5 screw depth 8 spring buffer
Mechanical
pressure SW
 Monitor
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
*45
48

Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
48 88 for water
Total air
(panel cut dimension) system
Total air
system
7.4 (Gamma)

Ending

(panel bracket)
Display separate type for compressed air

M3L8
62 25
10

75

6 7 8 9 50 10
11

2-310R
12

45+0.6
0

5 4 3 2 Tapping screw
1

48

Flow sensor

45 +0.6
0

* Panel thickness (t0.5 to 9.5)

1443
 PFD Series
Refrigerating
Dimensions
type dryer
Desiccant
 PFD-163
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
6
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
Standard cable (3 m)
F.R.L.
(Related Note: Enclosed with product
products)
Clean Product name plate
F.R.
Electro
pneumatic
regulator PFD-163-50
MADE IN JAPAN

MAX: 16000L/min.

Air 6601-001

booster
Speed

(111.2)
control valve

148.7
Silencer

Check valve
/ others
Joint

75
/ tube
37.5

Vacuum
filter
Vacuum
regulator
300 79
Suction
plate Port size Rc2
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending

1444
MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Display separate type for compressed air
Flow sensor

1445
 Tester kit

PFK Series
Refrigerating
type dryer
Air flow rate measuring component kit is available to measure the flow
Desiccant rate instantly at workshop.
type dryer
High polymer
 Flow rate range : 25 to 500, 50 to 1000, 100 to 2000,
membrane
type dryer 200 to 4000, 400 to 8000 L/min. (normal)
Air filter

Auto. drain
/ others
F.R.L.
Specifications
(Module unit) Descriptions PFK-501-15NO PFK-102-15NO PFK-202-25NO PFK-402-25NO PFK-802-40NO
Specifications

F.R.L. Flow rate range L/min.(normal)

(Separate) 25 to 500 50 to 1000 100 to 2000 200 to 4000 400 to 8000
Compact Port size Rc1/2 Rc1 Rc11/2
F.R.
Working fluid Clean compressed air/nitrogen gas
Precise
Working conditions

regulator Working air quality JIS B8392-1:2003/1.1.1 to 1.6.1(Note 1)

F.R.L.
(Related Max. working pressure MPa 1.0
products)
Min. working pressure MPa 0.1
Clean
F.R. Withstanding pressure MPa 1.5
Electro
pneumatic Ambient temperature/humidity 0 to 50 , 85%R.H. or less (no dew)
regulator
Air Fluid temperature C 0 to 40
booster
3.0%F.S. (0.5MPa, 20C)
Precision

Linearity
Speed
control valve Pressure characteristics 2.0%F.S. (0.5MPa reference, 0.2 to 0.7MPa)
Silencer Temperature characteristics 2.0%F.S. (20C reference, 10 to 30C)
Check valve
Pressure loss MPa 0.015 or less (maximum flow rate, 0.5MPa)
/ others
Responsiveness sec 2.5 or less
Joint
/ tube Indicator Instantaneous/integrated flow 4 digit LED display
Vacuum Resolution L/min.(normal) 1 5 5 10 20
filter
Min. display flow L/min.(normal) 10 20 40 80 160
Output

Vacuum
regulator Integrated flow Max. 9 digits (display switched by change key) (Note 4)
Suction
plate Analog output 0 to 5 VDC
Magnetic Switch output 1 point (NPN transistor output) (Note 5)
spring buffer
Pulse output (Note 2) 10L (normal)/pulse 100L (normal)/pulse
Mechanical
pressure SW Power voltage V 100 VAC (6 W or less, excluding switch output load current)
Electronic Cable Enclosed (3 m for connection between sensor and monitor, 2.5 power cord)
pressure SW
Installation

Contact / close Installation attitude Both vertical and horizontal

contact conf.
SW Straight piping section IN side: 10D, OUT side: 5D recommended (Note 3)
Air sensor Protective structure Equivalent to IP64 (only sensor section)
Pressure SW Weight kg 6.0 7.5 9.5
for coolant
Note 1: Dew could collect if ambient temperature is lower than working fluid temperature.
Small Defection faults could occur if oil accumulates.
flow sensor
This product does not have clean device specifications, so particles could form on the secondary side.
Small If ultra-clean air is required, a precision filtration filter should be installed on the end.
flow controller
Note 2: Pulse output is used with switch output. Switch the function before use.
Flow sensor Note 3: A straight pipe should be installed to eliminate the effect of piping conditions. D indicates the piping bore size.
for air Note 4: Integrated flow is backed up regularly and can also be backed up with operation. Refer to Explanation of Functions and Operations on page 1452 for details.
Flow sensor Note 5: Only OUT2 can be used. OUT1 can be set, but no output terminal is available.
for water
Total air Product configuration
system
Total air
system
(Gamma)

Ending

Case
(Monitor)

Sensor Coupler (2 pcs.)

Cable (3m) Power cable (2.5m)

1446
 PFK Series
How to order
How to order Refrigerating
type dryer
 Tester kit
Desiccant
PFK 402 25 N 0 type dryer
High polymer
membrane
type dryer
Symbol Descriptions Air filter
A Flow rate range
A Flow rate range Auto. drain
501 25 to 500 L/min. (normal) / others

102 50 to 1000 L/min. (normal) F.R.L.

(Module unit)
202 100 to 2000L /min. (normal) F.R.L.
(Separate)
402 200 to 4000L /min. (normal)
Compact
802 400 to 8000L /min. (normal) F.R.
Precise
B Port size regulator
B Port size F.R.L.
Flow rate range 501 102 202 402 802 (Related
15 Coupler for 15A   products)
Clean
25 Coupler for 25A   F.R.
Electro
40 Coupler for 40A  pneumatic
regulator
C Switch output Air
C Switch output booster
N NPN transistor output Note 1
Speed
control valve
D Analog output
D Analog output Silencer
0 0 to 5 VDC
Check valve
/ others
Note on model no. selection Joint
Note 1: Only OUT2 can be used. OUT1 can be set, but / tube
no output terminal is available. Vacuum
filter
Note 2: The sensor, monitor, cable, and coupler for this
product are enclosed in a dedicated trunk. Vacuum
regulator

Product: PFK-(A)-(B)N0 Suction

plate
Magnetic
spring buffer
<Example of model number> Mechanical
pressure SW
PFK-402-25N0
Electronic
A Flow rate range : 200 to 4000L /min. (normal) pressure SW
B Port size : Coupler for 25A Contact / close
contact conf.
C Switch output : NPN transistor output SW

D Analog output : 0 to 5 VDC Air sensor

Pressure SW
for coolant
Small
Dimensions flow sensor
Small
flow controller
 PFK
B A B C Flow sensor
Sensor for air
A
Sensor for PFK-501 to 102 228 264 Rc1/2 Flow sensor
Sensor for PFK-202 331 Rc1 for water
285
Total air
Sensor for PFK-402 300 346 Rc1 system
Sensor for PFK-802 350 402 Rc11/2 Total air
system
(Gamma)
C
Ending
Coupler
Knob
Display separate type for compressed air

Case

Analog output terminal

245

Flow sensor

Switch output terminal (OUT2)

389 220

1447
 PFD Series
Refrigerating
Pressure loss characteristics
type dryer
Desiccant
 PFD-501-10  PFD-102-15
type dryer
High polymer 0.006 0.020 0.2MPa
membrane
type dryer 0.2MPa
Air filter
0.005
Auto. drain
/ others 0.015
F.R.L.
Pressure loss [MPa]

Pressure loss [MPa]

(Module unit)
0.004

F.R.L.
(Separate)
0.003 0.010
Compact 0.5MPa
F.R.
0.5MPa
Precise
regulator 0.002 0.7MPa
0.7MPa
F.R.L.
(Related 0.005
products)
Clean 0.001
F.R.
Electro
pneumatic
regulator 0.000 0.000
Air 0 100 200 300 400 500 0 200 400 600 800 1000
booster
Speed Flow (L/min. (normal)) Flow (L/min. (normal))
control valve

Silencer
 PFD-202-20  PFD-402-25
Check valve
/ others 0.015 0.015
0.2MPa
Joint
/ tube
Vacuum
filter
Vacuum 0.5MPa
regulator
0.010 0.010
Pressure loss [MPa]

Pressure loss [MPa]

Suction 0.2MPa
plate
Magnetic
spring buffer 0.7MPa
Mechanical 0.5MPa
pressure SW
Electronic 0.005 0.005
pressure SW
0.7MPa
Contact / close
contact conf.
SW

Air sensor

Pressure SW 0.000 0.000

for coolant
0 500 1000 1500 2000 0 500 1000 1500 2000 2500 3000 3500 4000
Small
flow sensor Flow (L/min. (normal)) Flow (L/min. (normal))
Small
flow controller
Flow sensor  PFD-802-40  PFD-163-50
for air
Flow sensor 0.015 0.006
for water
0.2MPa
Total air
system
0.005
Total air 0.5MPa
system
(Gamma)
0.7MPa
Pressure loss [MPa]

Pressure loss [MPa]

Ending 0.010 0.004

0.5MPa

0.003
0.7MPa

0.005 0.002
0.2MPa

0.001

0.000 0.000
0 1000 2000 3000 4000 5000 6000 7000 8000 0 2000 4000 6000 8000 10000 12000 14000 16000

Flow (L/min. (normal)) Flow (L/min. (normal))

1448
MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Display separate type for compressed air
Flow sensor

1449
 PFD Series
Refrigerating
PFD Series electric wiring
type dryer
Desiccant 1 Analog output (option symbol: -0 (standard), -1, -2, -3)
type dryer
High polymer
membrane
type dryer 0 to 5V (-0) DC 4 to 20mA (-1) DC
Load resistance of analog output
Descriptions
Air filter
Analog output Load resistance
0 to 5 VDC 50K and over
Auto. drain
/ others 4 to 20mA DC 300 or less

Analog output (mA)

Analog output (V)

F.R.L. 1 to 5 VDC 50K and over

(Module unit)
F.R.L.
0 to 10 VDC 50K and over
(Separate)
Compact Model no. Min. L/min. (normal) FS L/min.(normal)
F.R.
PFD-501-10 25 500
Precise
regulator PFD-102-15 50 1000
F.R.L.
(Related PFD-202-20 100 2000
products)
Min. F.S Min. F.S PFD-402-25 200 4000
Clean
F.R. Flow L/min. (normal) Flow L/min. (normal)
PFD-802-40 400 8000
Electro
pneumatic PFD-163-50 800 16000
regulator 1 to 5V (-2) DC 0 to 10V (-3) DC
Air
booster
Speed
The relation of the flow and analog out-
control valve
put is shown in the graph at left. Analog
Analog output (V)

Analog output (V)

Silencer output is not output correctly when lower

Check valve than the minimum.
/ others
Joint Do not short-circuit the analog output ter-
/ tube
minal with other terminals. Failure to ob-
Vacuum
filter serve this could result in problems.
Vacuum
regulator
Keep wiring short to prevent the effect of
Min. F.S Min. F.S noise. Separate the wire from sources of
Suction
plate Flow L/min. (normal) Flow L/min. (normal)
noise such as power distribution cables.
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
2 Integrated pulse output. (Change with switch output. Only OUT2 is used.)
Small The integrated pulse outputs the pulse at the following integrated value. L(normal) Output circuit
flow sensor
PFD-501 PFD-102 PFD-202 PFD-402 PFD-802 NPN output
Small Model no. PFK-501 PFK-102 PFK-202 PFK-402 PFK-802
PFD-163
flow controller
NPN
Flow sensor Integrated flow transistor (7) OUT2
for air 10 100 output
per pulse
Internal circuit

Flow sensor
for water (Example) The pulse waveform for the PFD-802 is shown below. Max. rated voltage 30 VDC
Total air Max. rated current 50mA
When displaye integration exceeds When displaye integration exceeds
system
100 L (normal) 200 L (normal)
Total air 40msec 40msec 40msec
system
(Gamma) (9) GND

GND common
Ending ON ON 40
msec

OFF OFF
PNP output
Time Time
(10) 24 VDC
Note that the integrated display is updated at 1 sec. intervals.
Internal circuit

Max. rated current 50mA

PNP (7) OUT2

transistor output
(9) GND

1450
 PFD Series
Electric wiring
3 Wiring the sensor and monitor Refrigerating
type dryer
 Observe the following precautions when wiring. Desiccant
type dryer

Power supply 24 VDC

High polymer

Power supply GND

membrane
type dryer

Analog output
 Use the enclosed cable for wiring. Air filter

[Specifications]
OUT1

OUT2

Auto. drain
/ others
With 4-conductor connector for DC F.R.L.
(6) (7) (8) (9) (10) (Module unit)
Finished outer diameter of 6
F.R.L.
Conductor size 0.5 mm2 (Separate)

Insulator outer diameter of 1.72 Compact

F.R.
 Check with CKD before extending the cable. Precise
regulator
(11) NC
F.R.L.
(Related
products)
(12) NC Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
(5) (4) (3) (2) (1) control valve
Sensor power supply

Sensor GND

Sensor signal 1

Sensor signal 2

Integration reset

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter

No. Function Vacuum

regulator
1 Integration reset Integrated flow is cleared by connecting this terminal to the (9) GND terminal.
Suction
2 Sensor signal 2 Connect to enclosed cable (black) plate

Sensor signal 1 Connect to enclosed cable (white) Magnetic

3 spring buffer
4 Sensor GND Connect to enclosed cable (blue) Mechanical
pressure SW
5 Sensor power supply Connect to enclosed cable (brown)
Electronic
6 OUT1 NPN/PNP transistor output pressure SW

OUT2 NPN/PNP transistor output Contact / close

7 contact conf.
SW
8 Analog output Voltage/current output
Air sensor
9 Power supply GND Connect to 0 VDC power supply
Pressure SW
10 Power supply 24 VDC Connect to 24 VDC power supply for coolant
11 NC Do not connect anything. Small
flow sensor
12 NC Do not connect anything.
Small
flow controller

 Switch output circuit  Analog output circuit Flow sensor

for air
 For NPN output  For voltage output
Flow sensor
for water
NPN (6) OUT1 (8) Analog output Total air
transistor (7) OUT2 system
output
Internal circuit

Total air
+
Internal circuit

Recorder (voltmeter) system

Load resistance (Gamma)
Max. rated voltage 30 VDC V
Max. rated current 50mA 150k and over
Ending

(9) GND (common)

Display separate type for compressed air

(9) GND (common)

 For current output

 For PNP output

(8) Analog output

(10) 24 VDC
Internal circuit

+ Recorder (voltmeter)
Internal circuit

Max. rated current 50mA A Load resistance

300k and over
Flow sensor

(6) OUT1
PNP (7) OUT2 (9) GND (common)
transistor output
(9) GND (common)

1451
 PFD/PFK Series PFD/PFK Series
Explanation of functions and operation
Refrigerating
Explanation of monitor functions and operations Refrigerating
type dryer [ Instantaneous flow ] [ Integrated flow ] type dryer
Integrated
Desiccant
type dryer Switch output light 4 digit digital display
Measuring TOTAL L/min.(nor) TOTAL L/min.(nor) measurement Desiccant
type dryer
temporary stop
High polymer
membrane
ON Switch is on.
Blinking Overcurrent OUT1/HI
(Measuring mode) mode High polymer
membrane
type dryer Instantaneous/integrated km3 m3 L km3 m3 L type dryer
protection is flow display
Air filter activated Error display Air filter
Operation light (Read/write mode) Count is
Auto. drain Set value display cleared after Auto. drain
/ others ON Flow is displayed OUT2/Lo
TOTAL L/min.(nor) READ
[ Integrated flow ] / others
C Count is stopped The display changes 10 seconds
OFF In setting (confirmation) TOTAL L/min.(nor)
F.R.L. each time the [CHANGE] F.R.L.
(Module unit) process Instantaneous flow unit display (Module unit)
RUN km3 m3 L key is pressed.
F.R.L. Turns on when instantaneous If the [CHANGE] key is km3 m3 L [Delay/value clear] is executed F.R.L.
(Separate) flow is displayed (Separate)
held down for five when integrated flow is
Compact READ Compact
F.R. Integrated flow unit display seconds in the state to displayed. To clear, the key F.R.
[READ] key
be displayed, the status must be held down for 10
Precise Calls set pressure Turns on when integrated [ Integrated flow ] Precise
regulator flow is displayed is entered. seconds as in read mode. regulator
TOTAL L/min.(nor)
F.R.L. If the integrated flow display is F.R.L.
(Related [CHANGE] key (Related
products) temporarily stopped, the products)
[SHIFT] key [UP] key Enters setting km3 m3 L integrated flow is backed up in
Clean Changes/enters unit Clean
F.R. Shifts blinking to right Increments digit at blinking internal memory. F.R.
Electro Electro
pneumatic pneumatic
regulator regulator
Air Air
booster
Switch parameter Hysteresis booster
Speed
control valve Four types of setting are available based on READ MODE READ
WRITE MODE Speed
control valve
the applications.
Silencer Hysteresis Silencer

Check valve ON Check valve

Parameter 0

keys simultaneously for 2 seconds

/ others / others
Joint Joint
/ tube ON Parameter display Parameter setting OFF / tube
Vacuum (OUT1/OUT2) (OUT1/OUT2) Low High Vacuum
filter filter
Vacuum OFF The integrated Vacuum
regulator Low High switch does not hysteresis regulator
Suction
have a hysteresis Suction
plate Instantaneous flow setting. plate
Magnetic Instantaneous flow Magnetic
spring buffer Low display Low setting spring buffer
(OUT1/OUT2) (OUT1/OUT2)
Setting OUT2

Mechanical Mechanical

Setting OUT2
pressure SW pressure SW
Electronic Parameter 1
Integrated pulse output Electronic
pressure SW pressure SW
If the parameter is set to [3] when OUT2,
Contact / close Contact / close
contact conf. ON switch output is changed to integrated contact conf.
SW pulse output. SW

Air sensor Note that OUT1 does not have integrated Air sensor
OFF High display and High setting pulse output.
Pressure SW Low High (OUT1/OUT2) (OUT1/OUT2) Pressure SW
for coolant for coolant
Small Instantaneous flow Backing up integrated flow and peak Small
flow sensor flow sensor
This product automatically backs up
Hold down the

Small Small
flow controller integrated flow and peak in internal flow controller
memory. Data is saved even if power is
Flow sensor Flow sensor
for air turned off. for air
Parameter 2
Hysteresis display Hysteresis setting
Flow sensor Data is backed up at the following timing: Flow sensor
for water
(OUT1/OUT2) (OUT1/OUT2) 1) When five or more minutes have for water
Total air ON passed from previous backup and the Total air
system system
value changed from the previous
Total air Total air
system integrated flow or peak. system
(Gamma) OFF 2) When integrated flow stop was (Gamma)
Set value
Ending executed. Ending
seconds

Integrated flow Peak value display Peak value clear 3) When the integrate value was cleared.
for 10

(Unit light blinking) (Unit light blinking) (The peak value at that point is backed

Display separate type for compressed air

up. For the integrated value, the value
after clearing is backed up.)
4) When the peak value was cleared.
Parameter 3 (The peak value after clearing is
(Only OUT2) backed up, and the integrated value at
Integrated
that point is backed up.)
ON Integrated flow Integrated flow Data is not backed up in the following
pulse
output display clear cases:
1) Less than five minutes have passed

Flow sensor
OFF since data was backed up.
* For parameter 2, the integrated switch setting is used instead of (L) (H) and (h). * The peak and integrated flow are cleared when [SHIFT] 2) Previous data has not changed, even
Time
* There are no setting modes for parameter 3, so in read mode the display goes to "peak value [UP] are held down at the same time for 10 seconds. after five minutes.
display" and in write mode to "parameter setting." When power is turned on, the previously
* Refer to page 1416, integrated pulse output, for details. * If (shift key) is pressed after setting or confirming integrated flow, the integrated flow display changes. backed up value is displayed.
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