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Journal of the Korean Physical Society, Vol. 62, No. 5, March 2013, pp.

794799

Eect of Li Doping on Ferroelectric and Piezoelectric Properties of


Ba0.5 Na0.5 TiO3 -BaTiO3 (BNT-BT) Thin Films

Susant Kumar Acharya and Byung Guk Ahn


Division of Advanced Materials Engineering, Hydrogen and Fuel Cell Research Center,
Chonbuk National University, Jeonju 561-756, Korea

Jung-Hwan Hyung and Sang-Kwon Lee


Basic Research Laboratory (BRL), Department of Semiconductor Science and Technology,
Chonbuk National University, Jeonju 561-756, Korea

(Received 28 January 2013)

The piezoelectric and the ferroelectric properties of x-mol% Li-doped 0.94Bi0.5 Na0.5 TiO3 -
0.06BaTiO3 (BNT-BT-Lix , x = 0, 5, 10, 15, 20) lead-free piezoelectric thin lms deposited on
Pt (111)/Ti/SiO2 /Si substrates via a metal-organic solution deposition method were investigated.
Our results show that the Li-substituted lm has a remarkable improvement in electrical properties
compared with the BNT-BT lm. We also found that the substitution was eective in decreasing
the coercive eld in the thin lms. The enhanced electromechanical properties are contributed by
both crystal structure evolution and improved microstructure. The optimal ferroelectric properties
were obtained in the lm with x = 10 providing a remanent polarization (Pr ) and a coercive eld
(Ec ) of 23.9 C/cm2 and 124 kV/cm, respectively.

PACS numbers: 77.65.Bn, 77.84.-s, 77.90.+k


Keywords: Ferroelectric, BNT-BT thin lm, Li-doped BNT-BT, Local eective piezoelectricity, Remanent
polarization
DOI: 10.3938/jkps.62.794

I. INTRODUCTION However, it is known that this thin lm is dicult to


pole adequately because of its large coercive eld, which
limits its industrial applications. Many recent studies
Piezoelectric thin lms for use in microelectromechan- have reported that Li-substituted BNT-based ceramics
ical systems (MEMS), micro actuators, and transducers such as BNT-BLT [12], BNLT-BT [13], BNT-BT-BLT
have been extensively studied [13]. Among these appli- [14], BNT-BKT-BLT [15], BNT-BKT-BLT-BT [16], and
cations, the most widely used materials are lead-based BNKBT+ x-mol% Li2 CO3 [17] were remarkably eec-
thin lms, such as Pb(Zrx Ti1x )O3 (PZT), because of tive in decreasing the coercive eld of these ferroelec-
their superior ferroelectric and piezoelectric properties. tric ceramics. Moreover, the piezoelectric and the elec-
However, there is signicant interest in developing piezo- trochemical properties of these ceramics were also en-
electric lead-free thin lms owing to environmental is- hanced with Li substitution. To date, however, little
sues. The search for alternative piezoelectric thin lms attention has been paid to the impact of Li doping on
has been focused on alkali niobates, modied bismuth BNT-based thin lms [18]. Thus, it is important to un-
titanates, bismuth ferrites and other systems with mor- derstand the eect of Li modications on the crystallo-
photropic phase boundaries (MPBs) [46]. graphic, microstructural and electrochemical properties
Among various lead-free piezoelectric thin lms, the of BNT-BT thin lms.
(Bi0.5 Na0.5 )TiO3 -BaTiO3 (BNT-BT) system is most at- In this work, x-mol% Li-doped 0.94Bi0.5 Na0.5 TiO3 -
tractive due to its excellent ferroelectric and piezoelec- 0.06BaTiO3 (BNT-BT-Lix , x = 0, 5, 10, 15, 20) thin
tric properties. The (Bi0.5 Na0.5 )TiO3 -BaTiO3 (BNT- lms were deposited on Pt/Ti/SiO2 /Si substrates via a
BT) system exists as the MPB between the rhombohe- metal-organic solution deposition. The eects of Li dop-
dral phase (BNT) and the tetragonal (BT)phase [711]. ing on the phase, microstructure and electrical properties
of the prepared BNT-BT-Lix thin lms were systemati-
E-mail: bkahn@chonbuk.ac.kr cally investigated. Our results demonstrated that an op-
E-mail: sangkwonlee@cau.ac.kr; Fax: +82-63-270-3585
Present Address: Department of physics, Chung-Ang University,
timized Li substitution at x =10 led to a noticeable im-
provement in the ferroelectric and the piezoelectric prop-
Seoul 156-756, Korea
-794-
Eect of Li Doping on Ferroelectric and Piezoelectric Properties Susant Kumar Acharya et al. -795-

erties of the BNT-BT-based lms. We conclude that the


enhanced electromechanical properties are contributed
by both crystal structure evolution and improved mi-
crostructure.

II. EXPERIMENTAL DETAILS

To prepare the BNT-BT-Lix precursor solution, we


rst made BNT-Lix and BT solutions separately and
then mixed them together in stoichiometric ratios. Bar-
ium acetate (Ba(CH3 COO)2 ), bismuth nitrate (Bi-
(NO3 )3 5H2 O), sodium acetate (NaOOCCH3 ), lithium
nitrate (LiNO3 ) and titanium isopropoxide (Ti[OCH-
(CH3 )2 ]4 ) were utilized as starting materials while
acetyl acetone, isopropyl alcohol, distilled water, and
acetic acid were used as solvents. Diethanolamine (HN-
(CH2 CH2 OH)2 ) was chosen for use as a ligand. The de-
tailed solution preparation method has been described
elsewhere [19]. In short, stock solutions were spin-coated Fig. 1. (Color online) XRD patterns of BNT-BT-Lix thin
onto Pt/Ti/SiO2 /Si(100) substrates at a spin rate of lms with dierent Li contents.
4500 rpm for 30 s by using a commercial photoresist spin-
ner. After each coating step, the gel lms were dried at
170 C for 10 min and pyrolyzed at 450 C for 10 min on sphere for 5 min. The lms can be seen to be polycrys-
a hot plate. The amorphous lms were then crystallized talline with no preferred orientations. No obvious change
at a temperature of 700 C by rapid thermal anneal- in the crystal orientation due to the Li substitution is ob-
ing (RTA) under an O2 atmosphere with a soak time of served. It can also be observed from the XRD images of
5 min. All processes including deposition, drying, pyrol- the thin lms that Li substitution up to 10 mol% achieves
ysis, and post-crystallization were repeated several times a single perovskite phase, suggesting that Li+ diuses
to obtain a proper lm thickness. into the BNT lattice to form a solid solution. However,
The phase structures of the lms were characterized a secondary pyrochlore phase was detected for x = 15,
by using X-ray diraction (XRD, D/MAX-111A, Rigaku indicating that the solubility of Li in the BNT-BT lat-
Corporation, Japan) with Cu K radiation. Atomic force tice had been exceeded [17]. The ionic radius of Li+ for
microscopy (AFM, NanoScope IIIa, Digital Instruments, a 12-fold coordination (Li+ = 1.41 A) [20] is close to
USA) was performed to evaluate both the surface mi- the ionic radius of Na+ (1.39 A) [21]. Accordingly, the
crostructure and the roughness of the lms. The elec- radius-matching eect shows that Li+ ions eectively re-
trical properties of the BNT-BT-Lix thin lms were place Na+ ions in BNT-BT-Lix for value of x up to 10.
evaluated using a capacitor structure of Au/BNT-BT- On the other hand, for the BNT-BT-Lix (x = 15) thin
Lix /Pt, where Au electrodes with a radius of 200 m lms, excess Li+ cations enter the six-fold coordinated
were prepared on top of the surface through a shadow B sites of the perovskite structure [17]. The substitution
mask by using an e-beam deposition technique under of the six-fold coordinated Li+ with the larger radius of
vacuum. Polarization-electric-eld (P-E) hysteresis loops 0.76 A for the smaller radius Ti4+ (0.61 A) generates ad-
were obtained using a TF Analyzer 2000 system (aix- ditional oxygen vacancies because of its having a lower
ACCT, Aachen, Germany). A precision LCR meter (HP valence than that of Ti4+ [21]. The as-deposited amor-
4284A, USA) was used to analyze the dielectric proper- phous BNT-BT was shown to transform to the perovskite
ties of the thin lms. The leakage currents though the phase through the formation of an intermediate oxygen-
Au/BNT-BT-Lix /Pt capacitor were measured using a decient A2 B2 O7x pyrochlore phase during a conven-
programmable electrometer (Keithley 6517A, USA) at tional annealing process [22]. An increase in the Li con-
room temperature. The piezoelectric properties of the centration leads to an increase in the oxygen deciency
thin lms were obtained by using piezoforce microscopy and tends to stabilize part of the immediate pyrochlore
(PFM, Digital Instruments, NanoScope IV, USA) incor- phase.
porating a lock-in amplifying technique. Figures 2(a) (d) show the microstructure evolution
of the BNT-BT-Lix thin lms with Li content via AFM
observations. From the AFM results, elongated or rect-
III. RESULTS AND DISCUSSION angular grains can be found in the 5% and the 10% Li-
doped BNT-BT thin lms. With increasing Li content,
Figure 1 shows the XRD patterns of BNT-BT-Lix thin the grain length in the BNT-BT-Lix thin lms increased
lms annealed at 700 C by using RTA in an O2 atmo- to x = 10, but further Li doping reduced the grain size,
-796- Journal of the Korean Physical Society, Vol. 62, No. 5, March 2013

Fig. 2. (Color online) AFM micrographs of BNT-BT-Lix


thin lms with dierent Li contents: (a) x = 5, (b) x = 10,
(c) x = 15, and (d) x = 20.

and the shape of the grains became spherical, with more


pores being found on this surface. The root-mean-square
(rms) roughness values for the 5, 10, 15, 20% Li-doped
samples were determined to be 3, 3.6, 6.6, and 6.8 nm,
respectively, indicating that the grain growth increased
the lm roughness with increasing Li content from 0 to 10
mol%. In addition, when the Li content exceed 10 mol%,
the appearance of pinholes resulted in a further increase
in the rms of 6.6 nm. The microstructural evaluation
of the Li-doped Bi0.92 Na0.92 Ba0.06 Sr0.02 TiO3 system re-
ported by Lin and Kwok [23] showed a similar trend with
the grain size decreasing signicantly when the Li doping Fig. 3. (Color online) (a) Polarization-electric eld (P-
was increased from 5 to 15%. The grain growth with in- E) hysteresis loops for BNT-BT-Lix thin lms with various
creasing Li content (x > 10) can also be explained by the Li-doping concentrations and (b) remanent polarization (Pr )
fact that Li addition in BNT-BT-Lix may decrease the and coercive eld (Ec ) values of BNT-BT-Lix thin lms as
sintering temperature. Thus, both bulk and lm materi- functions of Li content.
als with a higher Li content may grow more suciently
and show larger grain sizes when the sintering or an-
nealing temperature is xed. However, for Li contents slightly increases and then decreases quickly with fur-
x > 10, the appearance of pores can be attributed to ther increasing Li content. At x = 10, the Pr reaches
relatively enhanced volatilization. The suppressed grain the maximum value of 23.8 C/cm2 while the Ec lin-
growth may result from the enhanced volatilization and early decreases with increasing Li content. Again, the
possible formation of a second phase. partial substitution of Na+ by Li+ eectively decreases
To characterize the ferroelectric properties of the Li- the coercive eld, but maintains the high Pr in the P-E
doped BNT-BT thin lms, we performed polarization- hysteresis loop. This allows ecient poling of the thin
electric eld (P-E) measurements by using a metal- lms, resulting in a signicant enhancement of their fer-
ferroelectric-metal conguration. Figure 3(a) shows well- roelectric properties. Our results correspond well with
dened saturated P-E hysteresis loops for all the lms at previously published reports on Li-doped bulk BNT-BT
1 kHz. The variations of remanent polarization (Pr ) and ceramics [13,14]. The change in Pr with Li amount can be
coercive eld (Ec ) values with x are shown in Figure assigned to the multisite occupation behavior of the Li+
3(b). With increasing atomic fraction to x = 10, the Pr cations in the perovskite structure and the generation of
Eect of Li Doping on Ferroelectric and Piezoelectric Properties Susant Kumar Acharya et al. -797-

oxygen vacancies [17]. For BNT-BT-Li10, a small num-


ber of Li+ cations compensated for the A-site deciencies
due to the volatilization of A-site cations during the an-
nealing process, which may contribute to the increased
Pr . Above this doping level, oxygen vacancies are cre-
ated for ionic charge compensation. The higher concen-
tration of oxygen vacancies in the lm makes the pin-
ning eect stronger and the ferroelectric domain switch-
ing under an electric eld lower, resulting in a decrease
in the Pr [16]. It should be noted that the Pr values for
the BNT-BT-Lix lms are lower than those of the bulk
BNT-BT whereas the Ec values are considerably higher.
Similar results have been reported for doped BNT thin
lms [8,10], which is attributed to the clamping eect
[9].
The dielectric measurements for the BNT-NT-Lix thin
lms were carried out with a 200 mV sine wave at a fre-
quency of 100 kHz. The results indicate that the dielec-
tric permittivity at zero electric eld was signicantly
enhanced from 543 (undoped) to 571 (Li10) by Li
doping. A similar enhancement in dielectric properties
can be found in Li-doped BNT-based ceramics [1315].
The applied voltage dependence of the leakage current
density (J-V) for the BNT-BT-Lix thin lms was also
determined at room temperature. It was found that the
BNT-BT-Lix lms with Li doping exhibit a lower leakage
current then the BNT-BT lm up to a Li doping level of
10%, and then increase. The BNT-BT-Lix thin lm with
10 mol% exhibited the lowest leakage current density of
1.9 106 A/cm2 at 100 kV/cm. Several factors af-
fect the current-eld characteristics of ferroelectric thin
lms, including the intrinsic Li-doping eect: the dier-
ent grain structures among the Li-doped thin lms, and
the eects from vacancies [24]. First, due to the volatili-
ties of bismuth and sodium during heat treatment, some
intrinsic oxygen vacancies appear and produce electrons
according to the following equation:

OO = VOI + 2e + 1/2OO , (1)
Fig. 4. (Color online) Local piezoresponse characteristics:
(a) amplitude and (b) eective d33 hysteresis loops of BNT-
where OO is the oxygen ion on its normal site, VOI is
the intrinsic oxygen vacancy and e is the free electron. BT, BNT-BT-Li10 and BNT-BT-Li20 thin lms measured at
As mentioned above, the substitution of Li+ cations at room temperature.
low doping levels into the A sites of the BNT-BT lattice
compensates for the oxygen vacancies, thereby decreas-
ing the leakage current. On the other hand, the excess The piezoresponse measurements were obtained by
Li+ cations at a high doping level (x > 10) occupied the keeping the PFM tip xed on the grain and apply-
B sites substituted for Ti4+ cations. The substitution ing a direct current (DC) voltage from 10 to 10 V
of Li+ at B sites (Ti4+ ) increases the oxygen vacancies, while recording the signal. Figure 4(a) displays the varia-
giving rise to an increase in leakage current. Besides, it tions of the static piezoresponse (PR) amplitude (A) for
is generally accepted that grain boundaries and void de- BNT-BT, BNT-BT-Li10, and BNT-BT-Li20 thin lms
fects in thin lms also act as a leakage current paths. As with the bias DC electric eld for thin lms at room
the Li-doping concentration is increased further above 10 temperature. For all the thin lms, typical buttery-
mol%, the grain size decreases, leading to an increase in shaped displacement-voltage loops are obtained, and the
the proportion of grain boundaries in the lm, thereby electrically-induced displacements of the lms ranged
increasing the current-path concentration. This may be from 0.7 to 0.15 under a bipolar driving force of 10 V.
the reason for the increased leakage current characteris- The nonlinear and hysteretic part in the loops indicates
tics for the lm samples with Li-doping concentrations the contribution to the strains from the movement of
above 10 mol%. the domain walls in the BNT-BT-Lix lms [24]. The ef-
-798- Journal of the Korean Physical Society, Vol. 62, No. 5, March 2013

fective d33 values were derived from d33 = A cos , as ACKNOWLEDGMENTS


shown in Fig. 4(b). We found that the maximum values
and remanent d33 were 51.6 and 19.9 pm/V, 57.3,
This work was supported by the Fusion Research
and 25 pm/V and 26.3 and 15.3 pm/V for BNT-
Program for Green Technologies through the National
BT, BNT-BT-Li10, and BNT-BT-Li20 thin lms, re-
Research Foundation of Korea (NRF) funded by the
spectively. With increasing of Li-doping concentration,
Ministry of Education, Science and Technology (Grant
the pinning center density induced by the charged carri-
no. 2010-0019097) and was also partially supported by
ers trapped in potential wells decreases, thereby aect-
the Selection of Research-oriented Professor Program of
ing the mobility of the domain walls [25]. This may be
Chonbuk National University in 2010 and by the Pri-
the reason for the observed increase in the piezoelectric
ority Research Centers Program, and by the Basic Sci-
properties of BNT-BT-Li10. We found that the highest
ence Research Program through the National Research
d33 value was at x = 10 in the BNT-BT-Lix lms. This
Foundation of Korea (NRF), funded by the Ministry of
value is in good agreement with that for the Li-doped
Education, Science and Technology (2010-0019694).
BNT-BT bulk ceramics [13, 14, 26]. When Li doping is
further increased, the eective d33 value is decreased as
in the case of the BNT-BT-Li20 thin lms because of
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