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Course Syllabus
Course Information - Fall 2010
EE, MSEN, MECH 6322.001
Semiconductor Processing Technology
Room: ECSS 2.103
Time: F 12:30 – 3:15 PM
Course Description
EE 6322 (MSEN 6322 and MECH 6322) Semiconductor Processing Technology (3 semester
hours) Modern techniques for the manufacture of semiconductor devices and circuits.
Techniques for both silicon and compound semiconductor processing are studied as well as an
introduction to the design of experiments. Topics include: wafer growth, oxidation, diffusion, ion
implantation, lithography, etch and deposition. (3-0) T
Grading Policy
These descriptions and timelines are subject to change at the discretion of the Professor.