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the GFET-based sensor circuits. In the drift-diffusion transport quantum capacitance Cq as a function of surface potential can
model, the drain-to-source current IDS is described by [45]: be explicitly written as [55]:
VDS
W Cq = −∂ (Q s ) /∂ Vch
|Q
IDS = q W tot (x)| vdrift (x) = μeff |Q tot | d V . (1)
L eff 0 2q 2 K B T q V ch
= ln 2 1 + cosh . (7)
where W is the channel width, the effective channel length π (h̄vF )2 KB T
V
L eff = L − 0 DS 1/νsat d V , accounting for the effect of
saturation velocity, νdrift is the drift velocity, which, in a Vcnp is the back-gate voltage at the Dirac point, where the
soft saturation model, is related to the channel electric field carrier sheet density becomes minimal for zero drain and
F = −d V /d x as [46]–[54]: source voltages. We note that Vcnp comprises the work function
difference between the gate and the graphene channel (similar
μF to the flatband voltage in conventional silicon transistors),
vdrift = 1/γ , (2)
1 + (μeff F/vsat )γ interfacial charges at the graphene-oxide interfaces, and the
charge neutrality point shift Vcnp due to intentional or
where vsat is the saturation velocity given by [46]: unintentional doping of graphene (e.g. chemical gating effects
c1 caused by gas, chemical or molecular agents). The channel
vsat = vF + c3 , (3) voltage V (x) in Eq. (6), as a function of the position in the
1 + c2 (Vch )2
channel, can be modeled using the gradual channel approx-
vF = 108 cm/s is the Fermi velocity in graphene, imation: V (x) = (x/L)VDS , which is zero at the source
c1 = (vsat,max − vsat,min )/vF , c2 = [q/(5K B T )]2 , c3 = end (x = 0) and equal to the drain-to-source voltage VDS at the
vsat,min /vF [47], [48], K B is the Boltzmann constant, T is drain end (x = L). The exact surface potential in graphene can
temperature, and Vch is the surface potential of graphene. be obtained by iteratively solving Eqs. (6) and (7). Once Vch is
The effective carrier mobility in Eq. (3) can be written calculated, the total charge density in the graphene channel can
as [49]–[51]: be obtained using Eq. (5), which, when substituted into Eq. (1)
gives the drain current IDS (VDS , VGS ). For a moderate input
nμn + nμp + n pud (μn + μp )/2 m
μeff = , (4) RF voltage, one may numerically calculate the small-signal
n + n + n pud m + Vch
2
transconductance of GFET gm = d I DS /d VGS |VDS =const and
the drain conductance gds = 1/rds = d I DS /d V DS |VGS =const.
where n, p are the electron and hole densities in a graphene
The mobile channel charge, depending on VGS and VDS , can
channel, μn,p is the carrier low-field mobility (here μn,p =
be modeled by the gate-to-source capacitance Cgs and the gate-
1300 cm2 /(V·s)), n pud is the residual charge due to electron-
to-drain capacitance Cgd : Cgs = −d Q ch /d V GS] |VDS =const , and
hole puddles (here n pud = 1.65 × 1012 cm−2 ), and m is the
Cds = −d Q ch /d V DS |VGS
L=const, where the total net charge in
square of the reference channel potential, which is an empirical
fitting parameter (here m = 1 V2 ). The total mobile charge the channel Q ch = W 0 Q tot d x. The physics-driven GFET
density Q tot in graphene, involving the electron and hole sheet model was implemented in the circuit simulator [56].
densities n and p [cm−2 ] and the residual charge due to Consider an GFET biased at a certain DC drain voltage,
electron-hole puddles [50], [52], can be explicitly written as: an RF input signal (a monochromatic, sinusoidal wave) can
be efficiently converted to its second harmonic ( f 0 → 2 f 0 ),
Q tot = Q s + qn pud with magnitude much greater than the output fundamental
2
tone and other harmonics [37], thanks to the V-shape current-
q V ch
Q s = q × n imp + voltage behaviors, as shown in Fig. 3(b). Such interesting
π h̄ 2 v2F property makes GFET an ideal candidate for the RF frequency
2 doubler [37]. Moreover, when chemical dopants (e.g. specific
n pud = (5) molecules or bacterial pathogens) selectively bind on the func-
π h̄ 2 v2F
tionalized graphene surface, the Dirac-point voltage (Vcnp ) is
where is the inhomogeneity of the electrostatic potential shifted due to the chemical gating effect, as shown in Fig. 4(a).
(here = 150 meV), n imp is the sum of the intrinsic field- Such effect alters the bias point and therefore changes the
independent and impurity carrier concentrations (here n imp = frequency conversion efficiency. Fig. 4(b) reports the output
7 × 1012 cm−2 ), h̄ is the reduced Planck constant, q is electric voltage at the fundamental frequency and the second har-
charge. The surface potential (Vch ) related to graphene’s Fermi monic for the practical GFET, of which the graphene channel
level E F , can be expressed as a function of the gate-to-source was fully exposed to the chemical solutions with different
voltage VGS as [46]–[54]: PH values; here we fixed the DC drain voltage to 0.25 V
Cox and the AC input voltage to 5 V.
Vch (x) = E F (x)/q = VGS − Vcnp − V (x) , (6) It has been reported that the charge density in the graphene
Cox + αCq
channel depends on the type and the concentration of chemical
where α is the capacitance weighting factor [48] (α ≈ 1 groups on the graphene surface. Therefore, the drift of Dirac
when q |Vch | kT , and α ≈ 0.5 when q |Vch | kT ), the point may provide a quantitative measure of the acid-based
electrostatic capacitance Cox is related to the permittivity εox properties of the ionizable groups (e.g. as a function of
and thickness tox of gate oxide as Cox = εox /tox , and the solution pH). The induced surface charge is mainly negative
7242 IEEE SENSORS JOURNAL, VOL. 17, NO. 22, NOVEMBER 15, 2017
Fig. 7. Contours of sensitivity as a function of Vin and Vcnp for (a) the
dual-ring sensing-modulator and (b) the quad-ring sensing-modulator.
a large collection of neural units (artificial neurons), loosely where η ∈ (0, 1) and α ∈ (0, 1) are the learning rate
mimicking the way a biological brain solves problems with and momentum factor, respectively; here, a learning rate of
large clusters of biological neurons connected by axons [61]. η = 0.2, momentum factor of α = 0.1, and threshold of
A typical ANN consists of at least three layers, as shown θ = 0 were used. For generating the training data for the ANN,
in Fig. 8(a): the first layer has input neurons, which send data we have simulated 700 dual-ring sensing-modulators, of which
HAJIZADEGAN et al.: GRAPHENE SENSING MODULATOR: TOWARD LOW-NOISE, SELF-POWERED WIRELESS MICROSENSORS 7245
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effect for Internet-of-Things applications,” Microsyst. Nanoeng., vol. 2, sity, Tehran, Iran, in 2013. He is currently pursu-
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biosensor,” in Proc. IEEE SENSORS, Oct. 2016, pp. 1–3. Department of Electrical and Computer Engineering,
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Verilog-A compatible compact model for graphene field-effect transis-
in electronic from the Iran University of Science and
tors,” IEEE Trans. Nanotechnol., vol. 13, no. 5, pp. 895–904, Sep. 2014.
Technology, Tehran, Iran, in 2010, and the M.Sc.
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no. 9, p. 092109, 2007. surement technology and instruments from Beihang
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HAJIZADEGAN et al.: GRAPHENE SENSING MODULATOR: TOWARD LOW-NOISE, SELF-POWERED WIRELESS MICROSENSORS 7247
Haiyu Huang (S’07) received the M.Sc. degree Jonathan C. H. Hung (M’15) received the
in electrical engineering from Columbia University, B.S. degree from National Chiao-Tung University,
New York, NY, USA, in 2008, and the Ph.D. degree Hsinchu, Taiwan, in 2001, the M.S. degree in
in electrical and computer engineering from the electronic engineering from National Taiwan Uni-
University of Texas at Austin, Austin, TX, USA, versity, Taipei, Taiwan, in 2003, and the Ph.D.
in 2014. He was a Research Assistant with the degree in electrical and computer engineering from
Methodist Hospital Research Institute. Since 2014, the University of Texas at Austin, in 2015. From
he has been a Member of Technical Staff with 2003 to 2009, he was a Design Engineer with Taiwan
Maxim Integrated Inc. His research interests include Semiconductor Manufacturing Company, Hsinchu,
wireless medical telemetry and novel nanoelectronic in embedded DRAM and RF circuit design. Since
devices for healthcare applications. 2014, he has been a Principal Member of Technical
Staff with Maxim Integrated Inc., leading a team engaged in the developments
of low-power RFIC. His research interest includes mixed-signal, analog, and
RF integrated circuits.