BETA SITE VIRTUAL Mark Note

HVAC EVALUATION 1 Best

2 Normal

A GAS ROOMS #2 OPT1 OPT2 OPT3

Installation 2 2 2
Operation 2 2 2
Not affect to HVAC Not affect to HVAC Not affect to HVAC
Demonstration system system system

B GAS ROOMS-TOOLS #1 OPT1 OPT2 OPT3

Installation 2 2 1
Operation 2 2 1

Bays and Chases

The shape of are symmetrically
cleanroom is too arranged for good
Demonstration Normal long. air distribution

C GAS ROOMS-TOOLS #1 (Without Lathes) OPT1 OPT2

Installation 1 2
Operation 1 2

Total area of bay &

chase are larger
than option 1, so
it's easier to install
Demonstration & maintenance Normal