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1.2 Dynamics of Exponentials in Circuits and Systems highly-integrated radar module, (fully integrated into a BGA package), is shown in
Figure 1.2.2. This radar module can provide high-resolution images, and has led
to many automotive applications.
Ahmad Bahai, Chief Technology Officer,
Texas Instruments, Santa Clara, CA Industrial Internet or Industry 4.0, promotes the concept of intelligent
manufacturing and relies on the deployment of a massive number of intelligent
1.1 Introduction sensors at industrial plants to improve efficiency and reliability. Extensive use of
smart devices in factory automation, process control, and building automation will
Scaling of CMOS, the technology that has driven our industry for 45 years and drive a significant growth of electronics in industrial applications.
prompted unprecedented innovations in device, circuit, and manufacturing, is
coming to an end. There is no unanimous agreement as to precisely when this will Personal medicine represents a third emerging market. Medical electronics
happen, or whether it has already happened, or what classes of products it will promises to revolutionize the healthcare industry with low-cost deployment of non-
impact first. However, there is no disagreement that the continued shrinking of invasive and minimally-invasive biosensors for preventive care and treatment
CMOS feature size will end at some point. And when this does occur, what will be procedures.
the consequences for our industry? Certainly, there will be changes in the way
products are developed and produced. This paper will address some of the most Slowdown in CMOS scaling has not reduced the appetite for more intelligent and
important changes that we will see. connected things around us: Many other exponential and nonlinear scaling trends,
some of which are highlighted in this paper, have been and will be at work to
In spite of the slowing of CMOS scaling, an unprecedented revolution in electronics
continue the pace and support demand.
is taking place. “Things” are getting smarter and more connected with more and
more semiconductor content. Smart personal electronics, autonomous systems,
3.1 Scaling Is More than Moore’s Law!
and smart factories are prime examples. These impressive developments are being
fueled by many exponential improvements in communication-bandwidth efficiency,
Scaling is a critical step toward miniaturization on every front, as more electronics
continued reductions in manufacturing cost, innovative new manufacturing
are integrated into a smaller form factor at lower cost. Many innovations have
technologies, and new design techniques. In a sense, the end of CMOS scaling is
contributed to the confluence of multiple scaling trends enabling the amazing
enabling exciting opportunities for “multi-dimensional innovations” in circuits and
journey of electronics miniaturization. Dennard exponential scaling of process
systems.
technology has been complemented with several other trends following
exponentials with variable rates or other nonlinear functions. These have collectively
The continuing demand for higher performance will further tilt solutions toward
contributed to the ubiquity of electronics. The future innovations in semiconductors
creative system and circuit technologies, such as innovative engineering of CMOS
and circuits will be increasingly multi-dimensional.
nodes for RF and analog, MEMS-based sensors and timing references, III-V
devices, high-performance SiGe devices and Si photonics. These technologies will
3.1.1 Bandwidth Efficiency
not necessarily be monolithically integrated, but they will provide opportunities for
system repartitioning and new circuit topologies in applications such as sensor
nodes, high voltage power electronics, high-performance RF, and precision timing. Connectivity has played an enormous role in the proliferation of the semiconductor
industry. Connected PCs and mobile phones have been the two recent drivers of
Market forces are also at work to change our industry. For the past 20 years, the semiconductor market growth. Connectivity, particularly embedded, is an
semiconductor industry has been dominated by personal electronic products. This indispensable element of intelligent devices. Bandwidth efficiency of
has resulted in an industry where huge volumes of a relatively small number of communication systems has consistently improved over the past several decades,
products are provided using commodity CMOS. However, we are currently just about doubling every 30 months.
witnessing the rapid growth and sophistication of electronics for automotive
transportation, industrial/building automation, and health care. The dynamics of The progress in communication-system design utilizing advanced variations in
the automotive, industrial, and medical markets are quite different from the OFDM-enhanced [1] deployment of massive MIMO and coding techniques have
dynamics of that for personal electronics. They will be served by a large number realized near-theoretical capacity of modern communication systems. The
of various semiconductor products provided to a large number of system evolution to 5G is a continuation of exponential improvement in bandwidth
companies using innovative differentiated manufacturing technologies. efficiency. One central mission for 5G is to carry more bits per second to more
users, more efficiently. This is clearly to address the insatiable demand for higher
Examples of many complementary exponential technology trends and their impact data rates (exabytes/month), and support for a large number of connected devices.
on design methodologies are presented below. In addition to extension of 4G LTE performance In addition to extending 4G LTE
capacity, 5G promises to support machine-type communication in industrial and
2.1 Industry in Transition: Ubiquitous Electronics commercial applications, and in other wireless sensor networks. Therefore, low
latency, low power consumption, and extremely high reliability are among the key
Semiconductor growth over the last several decades has been fueled by a small 5G attributes.
number of dominant applications and markets. Emergence of PCs in the 1970s,
Internet and connected PC in the 1990s, and mobile phones in the past two decades As shown in Figure 1.2.3, the bandwidth efficiency of different generations of
coincide with peaks in the semiconductor market. Moving forward, a more wireless cellular radio shows exponential improvement. Embedded-connectivity
diversified proliferation of technologies and products will contribute to the steady solutions such as WiFi, BLE, ZigBee, and other proprietary standards have
growth of the semiconductor market for the foreseeable future. Everything around experienced tremendous improvement in bandwidth and power efficiency. As
us is getting smarter and more connected with new features and more electronics shown in Figure 1.2.4, the power efficiency of WiFi radio has improved significantly
content. As shown in Figure 1.2.1, the number of semiconductor devices per person over generations at a pace of 4× in 10 years. However, many of these improvements
is rapidly growing. Personal Electronics continues to drive this growth, but new happened at the same technology node due to architectural advancements.
markets are also accelerating overall growth.
3.1.2 Manufacturing Efficiency
The automotive industry has been a major driver of recent innovation in
semiconductor growth. There are more than 6,000 semiconductor devices in a Innovation in semiconductor manufacturing has shaped an unprecedented
modern mid-range vehicle, and electronic content contributes to about a third of inflation-defying industry. A combination of improvements in factory throughput,
the vehicle cost. This electronics includes: Advanced Driver-Assist Systems higher yield, and larger wafer size has led to the cost-per-unit-area of silicon to
(ADAS), infotainment cluster, body electronics, lighting and powertrain for Electric remain almost constant over the past three decades. Yield loss can occur during a
Vehicles/Hybrid Electric Vehicles (EV/HEV). To meet the needs of ADAS, sensor complex chain of manufacturing processes such as implantation, etching,
systems are being developed that include radar, LIDAR, optical cameras, time-of- deposition, planarization, cleaning, or lithography, and yet the industry can offer a
flight (TOF) imaging devices, and ultrasound modules. An example of a very high overall yield. Mature technology nodes benefit from higher yield and a

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better cost structure, which make them even more desirable for analog detrimental to efficiency of power devices and systems. Also, cost sensitivity of
applications. As shown in Figure 1.2.5, the longevity of analog nodes spans power solutions (Rsp × wafer cost) is another incentive for power devices to avoid 1
almost a decade, as manufacturing efficiency and challenges of porting analog leverage expensive technologies when digital content is not the defining factor.
circuits motivate designers to park on a node and implement innovative
advanced circuit topologies on a mature technology. Transition to larger wafer Increasing the switching speed of power devices up to the range of tens of MHz
size will further enhance the efficiency of analog IC design. is desirable for achieving high-power density in AC/DC and DC/DC converters.
Since, as described earlier, CMOS scaling inherently compromises operational
3.1.3 Other Scaling Trends voltage of the power MOSFET, alternative materials have been introduced to the
power-FET mix. III-V materials with large band gaps such as GaN and SiC provide
Consistent scaling of CMOS technology has driven growth in the semiconductor low on-resistance and the capability of higher-switching speeds in high-voltage
market over the past four decades. Reliance on the next CMOS technology node applications. At high voltages, GaN shows a substantial improvement over Si in
to reduce the power, size, and cost is widespread across the industry. the important FOM of gate charge (QG × Rds(on). This is illustrated in Figure 1.2.8.
Consequently, the slowdown in CMOS scaling has been cause for concern. While the high cost of GaN is a barrier to widespread deployment at this time,
While,many promising innovations such as 3D structures are extending the the cost is expected to be reduced through improvements in GaN-on-Si wafers
scaling trend, clearly the pace of scaling has subsided. However, many aspects in 200mm manufacturing.
of IC design do not follow the CMOS scaling trends as tightly as digital ICs, so
they have not been impacted. In fact, the slowdown of scaling is opening up The competition between GaN, SiC. and Si power MOSFETs will continue, as
opportunities for design innovation in more exciting ways. Analog, RF, power each technology will offer higher power density through creative device
management, precision circuits, and MEMS devices are some examples of engineering, and will define its region of competitive advantage.
circuits and systems which will follow other exponential or nonlinear trends.
4.1.2 Precision Circuits and Scaling
4.1 Power Management and Scaling
Analog circuits have benefited from many aspects of CMOS scaling, but unlike
In general, power devices have not been the main beneficiary of CMOS scaling. digital circuits they have not been in the forefront of the trend.  
When the power solution is not dominated by digital content, scaling does not
necessarily benefit power-device performance. The performance of the power Analog blocks for low-signal-swing circuits shrink in area with process scaling.
device is mainly determined by its voltage requirement. As a result, many power- However, mask-set cost, development cost, the need for high-voltage devices,
device process improvements are made without shrinking feature size. Though and specialty passive support have resulted in a significantly slower pace of
some power devices do benefit from the availability of new technologies, they scaling for high-performance analog and power processes, as compared to
are driven by feature-size improvement such as advance lithography. Other leading-edge CMOS digital processes.  The transition to the finer nodes for
benefits come from improvements in power-device architecture, and from new analog blocks can usually be justified only when mask and wafer cost of the node
semiconductor materials. comes down. Also, the availability of integrated higher-voltage devices, or a much
higher gain heterojunction bipolar transistor (HBT) for high linearity, ultra-low
However, power solutions see some adjacent benefits of scaling, but the noise (Noise Figure) and high swing/precision circuits may compel transition of
disruptive advances come from device architecture and new materials, such as analog to a new node.    As digital gates are more readily available and more
2D/vertical devices and wide-bandgap GaN. Additionally, power switches and economical in finer analog nodes, architectures that use digital circuitry to tune
passive devices dominate die area. As a result, high-mask-count processes are analog become more common place in standard analog products.
not cost-effective in power ICs and low-mask-count processes that are optimized
for power tend to have long lifespan of up to a decade or more, as opposed to Many low-voltage high-speed analog and RF blocks have made the transition to
about two years for digitally-optimized processes. fine CMOS technologies. In some cases, such as large SoCs with massive digital
gate counts, the transition is inspired by the exponential die size reduction of
In BCD (Bipolar-CMOS-DMOS) integrated power technologies, commonly used digital and the need for higher fT. Therefore, analog and RF designers have
for power management, the feature size is typically larger than the state-of-the- deployed innovative circuit topologies to compensate for imperfection inherent
art CMOS. High-voltage operation of LDMOS power transistors requires a large in the technology (mismatch, gain and noise issues). On the other hand, some
drift region to withstand higher breakdown voltages. Low on-resistance and low high-performance analog and RF circuits such as GSPS ADC and DACs and
gate charge for low voltage operation, and low output capacitance for high mmWave RF continue to utilize fine CMOS processes, albeit a few generations
voltage are among the key figures of merit (FOM) of an LDMOS switch. Also, behind the leading digital node. In these cases, some enhancements to CMOS
higher switching speed is increasingly desirable, as it reduces the inductor size, such as improved matching, low Vt, low leakage, drain-extended CMOS (DEMOS)
thus improving power density. Figure 1.2.6 highlights a few key attributes of for IO circuits, isolated transistors, and integrated passives optimized for analog
scaling and figures-of-merit for power devices. First, improvement in LDMOS design, are added to a baseline digital process to enable aggressive analog/RF
on-resistance, in many cases, is not necessarily related to scaling. Secondly, the integration.
reduction in on-resistance for smaller power devices quickly diminishes for
higher voltages. For example, a typical 20V DMOS has experienced an An analog process typically offers a large number of key analog components and
improvement of about 20% per year which is much slower than Moore’s Law interconnect options, which result in the optimum analog performance at the
scaling. As we go to higher voltage DMOS, the improvement with scaling slows lowest cost.  These analog processes enable innovative analog circuits and IP to
further. A typical 50V DMOS has experienced an annual improvement of about benefit from rich and precise device capabilities. Also, the customization of
14-15%. analog IP to specific product domains, together with the capability of a highly-
tuned analog process, will allow for solutions that are not possible using an
The “1D silicon limit” is more dominant for higher-voltage devices due to the advanced digital CMOS process. 
fact that the drift region is relatively larger than the rest of the device.  The
increase in Rsp with respect to breakdown voltage is a quadratic function of As shown in Figure 1.2.9 [2], the speed-resolution product of A/D converters
breakdown voltage for a typical LDMOS with a uniform drift region. Interestingly, improves with process scaling but at a slower pace than the scaling of digital
within the vicinity of each node, many innovative device engineering techniques, circuits alone. Converters double every 3.5 to 4 years. Interestingly, the
such as the split gate architecture used in discrete power devices, have managed improvement rate beyond 90nm is slowing down as the performance of high-
to improve the device performance significantly. Also, 2D structures like the bandwidth converters is limited by clock jitter (Figure 1.2.10). Clearly,
super-junction structures shown in Figure 1.2.7 has achieved much higher innovations in clock references and new architectures will be critical for achieving
breakdown voltages beyond and above quadratic limits of 1D structures, albeit higher-performance data converters.
at higher cost.
There are many examples of the exceptional capabilities of high-performance
There are other concerns which prevent aggressive scaling of process. Off-state analog processes that are not supported by standard digital CMOS. These include
leakage of switches, which is more pronounced in the finer process nodes, is ultra-low-noise audio DACs with high-voltage efficient Class-D drive, and gigabit

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automotive/industrial Ethernet with robust ESD capability. Such optimized different pace from that of CMOS. This is due to the challenges of integrating a
analog processes are usually 5 to10 years behind the leading digital process. large number of MEMS devices on the chip. Massive signal processing
This lagging trend will most likely further slow once 45nm or 28nm become main requirements for DLP applications in video, imaging, and spectroscopy will rely
stream for some future low-power analog processes. Innovative device on co-packaged advance processors.
engineering for analog and RF at these nodes will be highly desirable for most
RF and analog applications. Also, integrating unique new devices will become 5.1 System in Package
the new axis of expansion in such an analog domain. 
Monolithic integration and System-on-Chip (SoC) trends have also been driving
Digital CMOS is now widely available from foundries, and has led to the CMOS scaling. Integration of massive digital cores with peripheral circuits has
standardization of CMOS technology which has become a commodity. For analog prompted many innovative mixed-signal, RF, and power-circuit design topologies
and power circuits, however, specialized and differentiated process technologies on a single digital CMOS node. System-in-package (SiP) and 3D packaging are
continue to provide a competitive advantage. growing alternative approaches for integration. They can accommodate multiple
process technologies and/or passives in a package, thus creating new virtual Si-
Alternative technologies such as SiGe BiCMOS offer many desirable advantages nodes. Integrating multiple dies, each of which are optimized for different
with less aggressive scaling compared to CMOS. In particular, BiCMOS purposes, can offer higher performance than forcing all circuit components, if
technology can typically offer the same gain-bandwidth products as basic CMOS at all possible, on a single chip. Additionally, the ability to integrate passives and
two nodes beyond. High GBW, relatively higher supply voltage, and better noise sensors can reduce the complexity demands on the circuits.
performance than CMOS technologies with comparable fT are critical in many
precision analog designs. BiCMOS technologies have also shown more Creative variations of wafer-level packaging have been extensively used to offer
promising device interconnect properties for RF circuits than CMOS, as shown heterogeneous solutions in photonics, resonators, and precision applications.
in Figure 1.2.11 [3]. Precision amplifiers using bipolar transistors have Solutions such as, through-silicon via (TSV), wafer-to-wafer bonding, die-to-
outperformed all-CMOS based designs. wafer bonding, and fan-out wafer-level packaging (FOWLP) can accommodate
various integration levels such as 2D, 2.5D, and 3D (Figure 1.2.14). The prospect
Creative engineering of 45 to 28nm CMOS devices optimized for RF and precision of advantages in size, reliability, and efficiency of wafer-level packaging continues
analog is very promising. Also, using high-density CMOS in conjunction with to open more opportunities for the integration of multiple circuit blocks that are
high-performance HBT will offer a desirable combination of process technologies optimized in various technologies in a single package.
optimized for analog design, with the availability of digital gates. However, many
process innovations are needed to keep complexity and cost down. SiP solutions can offer faster time-to-market and local optimization of system
blocks, with less investment. There have been many promising innovations to
4.1.3 MEMS and Scaling reduce size and cost along with increased functionality and performance of SiP
solutions. Innovative die-stacking techniques such as TSV and wire-in-film, with
MEMS technology has its own miniaturization roadmap and challenges that are area efficiency of close to or even sometimes more than 100%, have been
quite different from CMOS scaling. The importance of MEMS as a critical part of demonstrated.
modern systems and circuit topologies is growing. High-performance MEMS
sensors have been deployed in a large number of personal electronics, Many precision applications use SiP techniques, such as flip-chip integration to
automotive, medical, and other applications with low power consumption. The deal with interface parasitic issues. Meanwhile, stacking in a 3D configuration is
presence of MEMS sensors on the chip and in the system avails a wealth of becoming more compelling in power applications. But, innovative thermal
physical information such as orientation, and pressure in a highly-integrated and management within a 3D package is critical to avoid hot-spot issues that
affordable form factor. This has led to a big stride toward “Intelligent Things”. complicate monolithic SoC approaches.

MEMS resonators that are used as clock and frequency references and filters Increasing switching frequency of power devices, higher-bandwidth
have scaled down aggressively over past two decades. Quartz crystal oscillators requirements of interfaces, RF modules, and many other high-frequency
(XOs) still dominate today’s timing market due to their high Q and excellent applications require careful design and parasitic management. Proper spacing
frequency stability over temperature. But, over the past decade, MEMS-resonator and layout of interconnected multi-chip and passives that can be addressed much
timing solutions have become comparable in performance with XOs in many more efficiently by package-level integration are compelling reasons for SiP
applications. MEMS-based oscillators are now available with RMS jitter less than solutions. SiP will increasingly be adopted to integrate heterogeneous
1 pico-second (integrated from 12kHz to 20MHz) and consume less than 1mW technologies.
of power. Quartz crystal references of a similar performance, paired with a phase-
locked loop (PLL) circuit consume higher power and silicon area for on-chip 6.1 Conclusion
inductors used in the LC oscillator. While in the past, MEMS devices have been
considered useable only for research, the MEMS community has been Our industry is in a state of transition as the result of the confluence of two trends
engineering these micro-resonators for both performance and production – the first, technology driven, the second, market driven:
manufacturability to compete with the already-matured quartz crystal technology.
1. CMOS scaling is coming to an end! This is encouraging “multi-
Figure 1.2.12 shows exponential growth of the common FOM, frequency-Q dimensional innovations” in circuits and systems enabled by various scaling
product, of various MEMS-resonator technologies over two decades. Recently, trends (exponential and nonlinear) in CMOS device engineering for analog
the frequency-Q product of capacitive MEMS resonators has surpassed that of circuits, new materials such as III-V, timing references, high-performance
typical quartz crystals. However, most commercial capacitive MEMS resonators SiGe devices, integrated sensors, and Si photonics.
are operating in the tens-of-megahertz range and suffer from high motional
impedance. On the other hand, piezoelectric MEMS resonators (or commonly 2. Electronics is a critical element in many product areas: automotive,
called acoustic wave resonators) operating in the gigahertz range with low industrial, and medical. In all of these, there is rapid growth in both volume
motional impedance bring immediate benefits for modern systems requiring and sophistication. Demand for these products will result in an industry
high-performance (low RMS jitter) clocks. The performance of piezoelectric where a very large number of semiconductor devices is provided to a large
MEMS technology is predicted to surpass quartz technology in the next few number of customers using differentiated manufacturing technologies.
years.
CMOS technology is here to stay! The challenge is to improve CMOS
Another example of scaling in a more complex MEMS structure is reflected in performance beyond scaling. In this process, new materials, new system
Digital Light Processor (DLP) devices. The complex structure of a massive partitioning, and new efficient SiP techniques will add more dimensions to
number of mirrors, up to eight million, on a single chip, has enabled a wide innovation in circuits and systems. Overall, progress is likely to continue to be
spectrum of optical applications ranging from high-resolution projectors to exponential as approximated by a series of nonlinear functions representing
spectroscopy. As shown in Figure 1.2.13, the scaling of DLP devices will have a improvements in various segments of technology.

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References:
[1] A. Bahai, et. Al. “Multicarrier Digital Communications-Theory and Application 1
of OFDM” 2nd edition, 2004, Springer.
[2] B. Murmann, "ADC Performance Survey 1997-2016," [Online]. Available:
http://web.stanford.edu/~murmann/adcsurvey.html.
[3] R. L. Schmid, A. Ç Ulusoy, S. Zeinolabedinzadeh and J. D. Cressler, "A
Comparison of the Degradation in RF Performance Due to Device Interconnects
in Advanced SiGe HBT and CMOS Technologies," in IEEE Transactions on
Electron Devices, vol. 62, no. 6, pp. 1803-1810, June 2015.

DIGEST OF TECHNICAL PAPERS • 17


ISSCC 2017 / SESSION 1 / PLENARY / 1.2

Figure 1.2.1: Semiconductor Market Growth. Figure 1.2.2: Radar system (RF+DSP) on a chip.

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18 • 2017 IEEE International Solid-State Circuits Conference 978-1-5090-3758-2/17/$31.00 ©2017 IEEE


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Figure 1.2.7: GaN and silicon super-junction performance. Figure 1.2.8: Figure-of-Merit for GaN and Si power device.



Figure 1.2.9: Rate of improvement for data converters. Figure 1.2.10: Jitter-limited converter performance.
http://web.stanford.edu/~murmann/adcsurvey.html. http://web.stanford.edu/~murmann/adcsurvey.html.

Figure 1.2.11: fT comparison at top metal – J. Cressler (2015). Figure 1.2.12: Evolution of capacitive and piezo MEMS.

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Figure 1.2.13: Pixel count improvement in DLP. Figure 1.2.14: Integration options using wafer-level packaging.

20 • 2017 IEEE International Solid-State Circuits Conference 978-1-5090-3758-2/17/$31.00 ©2017 IEEE

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