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TASK: ASSIGNMENT 1
Yield models relate the process steps, defect density and chip (die) size parameters to the
wafer-sort yield. They include;
i. Poisson Yield model
Where;
𝑌 = 𝑒 −𝐴𝐷
ii. Murphy’s Yield model; A=Area of a circuit (die)
First equation is given by: D=Defect density
1 − 𝑒 −2𝐴𝐷
𝑌=( )
2𝐴𝐷
Second equation is given by:
2
1 − 𝑒 −𝐴𝐷
𝑌=( )
𝐴𝐷
𝑌 = 𝑒 −√𝐴𝐷
Taking a die with sides of 14mm and defect density of 0.84/cm2,
A= (14x14) x10-6= 196 x 10-6𝑚2
0.84
D= 1 𝑥 10−4 = 0.84 x 104 /m2 = 8.4 x 103 /𝑚2
1 − 𝑒 −2𝐴𝐷 1 − 𝑒 −2(1.6464)
𝑌=( )=( ) = 0.2360 = 23.6%
2𝐴𝐷 2(1.6464)
Second equation:
2 2
1 − 𝑒 −𝐴𝐷 1 − 𝑒 −1.6464
𝑌=( ) =( ) = 0.2404 = 24.04%
𝐴𝐷 1.6464
Defects = [0.1:0.1:2.0];
W = Area.*Defects;
Yield = exp(-W);
1 − 𝑒 −2𝐴𝐷
𝑌=( )
2𝐴𝐷
Second equation is given by:
2
1 − 𝑒 −𝐴𝐷
𝑌=( )
𝐴𝐷
Matlab code
Area = [1:0.1:2.8];
Defects = [0.1:0.1:2.0];
W = Area.*Defects;
Yield=(1-exp(-2W))/(2.*W);
plot (Area, X, Defects, X);
𝑌 = 𝑒 −√𝐴𝐷
Matlab code
%Seed Yield
Area = [0.1:0.1:2];
Defect = [1:0.2:4.8];
W = - (sqrt(Area.*Defect));
Yield = exp(W);
plot (Area, Yield, Defect, Yield);
title (' Seed Yield model graph');
xlabel('Area and Defect');
ylabel('Seed Yield');