Vacuum Stepper Motors

Ultra High Vacuum Hybrid Stepper Motors

AML stepper motors are specifically designed for use in UHV environments making them ide-
ally suited for precision in-vacuum manipulation without the use of motion feed throughs. The
considerable reduction in mechanical complexity, absence of metal to metal sliding surfaces
and low outgassing characteristics make these motors especially suitable for sensitive han-
dling applications.

The model C motors are two phase hybrid stepper motors, available in a range of standard
NEMA sizes and with torque ratings from 75 to 200 mNm. All motors have a step angle of
1.8° providing 200 full steps per revolution.

• Suitable for use below 1 x 10-10 mB.

• Bakeable to 200°C.
• Operational temperature range –196°C to +175°C
• Very low particulate generation due to the absence of sliding metal contacts.
• Embedded thermocouple for temperature monitoring & control.
• Open construction with all internal spaces ventilated.
• Greatly reduced outgassing and temperature rise due to advanced design, materials,
surface finish and construction.

• Radiation-hard versions are available. 1 x 107Gy.

• Dedicated drive, AML type SMD2 is available.
• Simplified connection with MLF18 feedthrough, cables & connectors.

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Arun Microelectronics Limited

AML SMC Issue A
Electrical and Mechanical Characteristics
Motor Holding Detent Rotor Max Axial Max Radial Mass Current Phase Phase Motional
Model Torque Torque Inertia Load Load Per Phase Resistance Inductance Voltage
at 20°C @1kHz
(p-p)
mNm mNm gcm2 kg kg g A Ω mH V

C14.1 75 5.5 10 10 10 150 1.0 3.0 3.25 4.2

C17.1 100 5 30 15 15 210 1.0 4.0 4.5 2.0
C17.2 200 7 55 15 15 320 1.0 6.0 11.0 4.0

All Operating temperature -196°C to +175°C

Motors
Bakeout temperature 200°C
Step angle 1.8°
Step angle tolerance 5%
Lead qty. & length 4 x phase, 2 x thermocouple. 1.35m long

Torque
The performance shown on the graphs was obtained
using an SMD2 drive operating with standard settings
for step division.

SMD2 is a switch-mode, bipolar, current-regulating

drive with a nominal source of 67volts, optimised for
use with vacuum stepper motors. At low speeds where
step division is active the RSS (root sum of squares) of
phase current is set to the nominal current. Over most
of the speed range the drive operates in wave mode
with nominal set current in only one energised phase.

Different drives will produce different speed/torque

curves and different temperature rise. Drives capable
of producing a total phase current of more than 1A
RSS may damage the insulation. Drives with signifi-
cantly lower source voltages may result in poor high-
speed performance. Use of the embedded thermocou-
ple is essential for motor protection.

Speed (rpm) Speed (rpm)

3 30 300 3000 3 30 300 3000
150 250
1.0A Phase current
1.0A Phase current
0.8A 0.8A
200

100
0.6A
0.6A
Torque (mNm)

Torque (mNm)

150

0.4A 0.4A

100
50

50

0 0
10 100 1000 10000 10 100 1000 10000
Step Frequency (Hz) Step Frequency (Hz)

C17.1 SMD2  Drive, nominal source of 67  Volts, operating in wave mode C17.2 SMD2  Drive, nominal source of 67  Volts, operating in wave mode

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Arun Microelectronics Limited

AML SMC Issue A
APPLICATION NOTES

Design mechanisms with balanced rotating loads and/or friction to maintain position with zero (or reduced) phase cur-
rent for minimum outgassing. Use ministep only to smooth transitions: increase resolution by reduction gearing.

Ensure ice cannot form in the motor if testing at low temperature in air. Avoid thermal shocks.

The shaft end-float-control compression spring is fully exercised with an axial force of 3kg towards the rear of the mo-
tor. In linear mechanisms use gravity and/or apply an opposite axial pre-load to avoid adding end-float to backlash.

Motors are supplied pre-baked at HV. They will absorb water in storage and handling. A 24-hour self bake by SMD2,
with adequate pump, will achieve UHV-compatibility.

For detailed operation guidance & performance data please refer to AML Application Notes:-
No. 18 - “Operation of Stepper Motors in Vacuum.”
No. 11 - “Motor Vacuum Performance.”

Motor Model D L LA LB P T W Wire lead- Rear shaft

out projection
position

C14.1 22.0 25.5 14.0 1.5 26.0 6.5 35.0 Rear 10.0

C17.1 22.0 34.0 24.0 2.0 31.0 9.5 42.0 Top N/A

C17.2 22.0 45.5 24.0 2.0 31.0 9.5 42.0 Top N/A

Dimensions in mm

Ordering Information:
C14.1 75mNm UHV Stepper Motor
C17.1 100mNm UHV Stepper Motor
C17.2 200mNm UHV Stepper Motor Arun Microelectronics Ltd.
Fitzalan Road
Suffix R for Radiation Hard to 1 x 107 Gy Arundel
West Sussex BN18 9JP
Suffix X for Shaft Modification. (Provide a Sketch) England.

SMD2 Stepper Motor Drive Tel: +44 (0)1903 884141

MLF18F 18-Way Feedthrough
Fax: +44 (0)1903 884119
Email: sales@arunmicro.com
MLF18NBL 3-Metre Lead. SMD2 to MLF18F
AML pursues a policy of continuous product improvement and reserves the right to make
detail changes to specifications without consultation. E and OE.

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Arun Microelectronics Limited

AML SMC Issue A