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A six degree of freedom MEMS manipulator

by de Jong, Boudewijn Ruben, Ph.D., Universiteit Twente (The Netherlands), 2006, 212 pages; AAT C826699

Abstract (Summary)
This thesis reports about a six degrees of freedom (DOF) precision manipulator in Micro Electro Mechanical Systems
(MEMS) technology. MEMS fabrication is characterized by a "2.5 dimensional" design freedom. This largely complicates the
design of 3 dimensional geometries, especially for structures normal to the wafer-plane. This turns the design of a 6 DOF
stage for precision manipulation into a large challenge. However, the potential improvements obtained by downscaling a
manipulation system encourage to research the feasibility of a 6 DOF precision MEMS manipulator. A miniaturized precision
benefits from reduction in size, substantial reduction of thermal drift and increases of the primary resonance frequency.
Specifications are defined for a sample manipulator in a transmission electron microscope (TEM). This application requires a
highly stable system capable of strokes of ±10 µm and nanometer resolution positioning.

A concept for 6 DOF manipulation is presented, based on stacking of two 3 DOF parallel kinematic manipulators. The design
of the flexure based mechanisms is largely based on exact kinematic constraining of the DOFs. Limitations to fabrication of
the desired mechanism rising form MEMS technology are identified and solutions are proposed. The planar 3 DOF
manipulator is successfully fabricated in bulk SCS. Characterization shows largely linear mechanical behavior.

For actuation of the out-of-plane stage, a torsion beam suspended vertical comb-drive is designed. To increase stability with
respect to electrostatic side pull-in, the torsion beam consists of vertical and horizontal parts. A process is developed to
enable fabrication of the required geometry for the torsion beams and the vertical comb-drive teeth in SCS. This process is
compatible with the fabrication of the planar 3 DOF stage. Increased pull-in stability might also be obtained by a different
kind of electrostatic transduction. In this case a dielectric plate or a floating conduction plate is inserted between to parallel
electrodes. A voltage over the electrodes will result in a force pulling the plate inwards. In a first order approximation no
forces in lateral (pull-in) direction are found. Finite element simulations (FEM) reveal forces in lateral direction do occur,
however these are much smaller compared to the case of a comb-drive. Additionally, lateral forces on a charge sheet
between two parallel electrodes are modelled.

Indexing (document details)

School: Universiteit Twente (The Netherlands)
School Location: Netherlands
Keyword(s): Six degrees-of-freedom, MEMS, Manipulator
Source: DAI-C 68/01, p. 303, Spring 2007
Source type: Dissertation
Subjects: Electrical engineering
Publication Number: AAT C826699
ISBN: 9789036524131
Document URL: http://proquest.umi.com/pqdweb?did=1314055131&sid=3&Fmt=2&cl
ientId=99088&RQT=309&VName=PQD
ProQuest document ID: 1314055131

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