Quality Manual 9001

Engineering Test Request Form RST ETR-001 Part A

Rev 2 09/04/2013

Department/ Area: Engineering Process: Wet bench WD0

Initiator: S.Narendran Date: 26 Nov ETR#: 13-118
2013
Title: Qualification of WD0 using new process flow Target
Completion
Date: 29 Nov 2013
Test Objective (Describe reason for test…goals, gaps, etc.):
1. To resolve WD0 stain issue to produce stain/powder free wafers after lapping process
2. To optimize WD0 cleaning system

Test Plan
- The test plan is initiated to produce stain/powder free wafers after WD0 cleaning process
- Current cleaning wafers process of lapping wafers is follows

RST ETR-001 Rev 1 Part A Page 1

 Quality Manual 9001
Engineering Test Request Form RST ETR-001 Part A
Rev 2 09/04/2013

WD0 configuration is as follows

Condition
Tank 1 – Valtron, 10%
SC2 – 6L of HCL, 3L of H202 and 51L of DIW , composition HCL: H202 : DIW ( 10:5:85)
QDR Tank 2 - Bubble 80s, Shower 20s , 4 cycles
QDR Tank 4 & 6 - Bubble 120s, Shower 30s , 3 cycles
All the chemical tank process rime is 10min

- New process flow is design for a better cleaning efficiency

- 2 Control wafers process been design which is
i) Lapping – WD0
ii) Lapping – Scrubbing – WD0 (Scrubbing using Valtron 5%)
- 2 Test process flow are as follows

RST ETR-001 Rev 1 Part A Page 2

 Quality Manual 9001
Engineering Test Request Form RST ETR-001 Part A
Rev 2 09/04/2013

Test Process Flow

- WD0 condition is unchanged for both new processes

- QC inspection will be done by QC Inspector Dila

Cleaning Method Wafers (Yield) Wafer Size

Control Wafers A
( Lapping - WD0)
Control Wafers B
( Lapping- Scrubbing - WD0)
Test 1
Wipe - WD0 -Ultrasonic DIW
Test 2
Ultrasonic DIW- WD0 - Ultrasonic DIW

RST ETR-001 Rev 1 Part A Page 3

 Quality Manual 9001
Engineering Test Request Form RST ETR-001 Part A
Rev 2 09/04/2013

Support data and documents:

- Inspection under White and Green Light

Test Approved Operation: Engineering: Quality: GM: Supply Line

Management
by: (if required):

Date:

RST ETR-001 Rev 1 Part A Page 4