Accepted Manuscript

Diamond tool cutting edge measurement in consideration of the dilation induced

by AFM probe tip

Ning Yang, Wen Huang, Dajiang Lei

PII: S0263-2241(18)31108-4
DOI: https://doi.org/10.1016/j.measurement.2018.11.054
Reference: MEASUR 6097

To appear in: Measurement

Received Date: 11 June 2018

Revised Date: 5 November 2018
Accepted Date: 18 November 2018

Please cite this article as: N. Yang, W. Huang, D. Lei, Diamond tool cutting edge measurement in consideration of
the dilation induced by AFM probe tip, Measurement (2018), doi: https://doi.org/10.1016/j.measurement.
2018.11.054

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Diamond tool cutting edge measurement in consideration of the

dilation induced by AFM probe tip

Ning Yang, Wen Huang*, Dajiang Lei
Institute of Machinery Manufacturing Technology, China Academy of Engineering
Physics, Chengdu, Sichuan 621900, P.R. China
Abstract: Measurement of diamond cutting edge is of great importance in
ultra-precision machining. Atomic force microscope (AFM) that takes advantage of
its three-dimensional (3D) imaging in nanoscale becomes an indispensable means to
acquire the 3D surface morphology of the diamond tool cutting edge. However, the
dilation induced by AFM probe tip in diamond tool cutting edge measurement is a key
error source in cutting edge evaluation, especially for the very sharp edge. In this
paper, analysis and elimination method of this dilation effect are presented based on
the principle of AFM imaging in terms of mathematical morphology theory. Our work
effectively improves the evaluation accuracy of diamond tool cutting edge, which is
beneficial to the diamond tool manufacture and selection in ultra-precision machining.
Keywords: diamond tool; ultra-precision cutting; sharpness; measuring method.

Introduction
As an important branch of ultra-precision machining technology, ultra-precision
cutting is of great importance in national defense and economic constructions [1-4]. In
ultra-precision machining, excellent diamond tool is essential for the fabrication of
high quality surfaces. So the technology to obtain and evaluate the diamond tool
cutting edge profile accurately is a key for the research and use of diamond tools in
ultra-precision cutting.
Shi et al. [5] developed the electron-beam-induced deposition (EBID) method to
measure diamond tool profiles through analysis of the EBID-SEM (scanning electron
microscope) images. Other researchers, such as Drescher [6] and Asai [7], are also

*
Corresponding author. Wen Huang, Institute of Machinery Manufacturing Technology, China Academy of
Engineering Physics, Chengdu Sichuan 610200, China
Tel.:+86 028 65726602 Mail: huangw0673@sohu.com
used SEM to measure the diamond tool cutting edge profile. However, 1) the SEM
method can only be operated in vacuum chamber, 2) the SEM image is essentially a
plane projection of the cutting edge, 3) the accuracy SEM image is limited by the
charging effect caused by diamond materials, all of which make the SEM not suitable
to quantitatively measure and evaluate the diamond tool cutting edge profile with
nanometer sized feature [8]. With respect to the optical method, the insufficient lateral
resolutions are resulted from the light diffraction phenomena.
Atomic force microscopy (AFM) is able to image the 3D (three dimensional)
topography of a surface at nanoscale, which is suitable for the measurement of the
sharp diamond tool cutting edge. Through AFM, the profile of the tool cutting edge
copied by indenting into the surface of a specially selected copper material was
measured at nano-precision level by Li et.al [9]. This indirect measurement introduces
the effect of elastic spring-back of the selected copper material. In order to overcome
this indirect measurement by AFM, Gao et.al [10, 11] combined an AFM unit and an
optical sensor for alignment of the AFM probe tip with the tool edge top to realize the
direct on-machine measurement of diamond tool cutting edge. And Zong et.al [12-14]
also used AFM to measure the sharpness of the diamond cutting tool directly under
off-line condition.
The measurements of tool cutting edge by AFM directly or indirectly do not
considerate the influence caused by the finite size of the AFM probe tip which is on
the order of 10 nm [15]. It is thus necessary to remove this influence on the
measurement result of the cutting edge. In 2017, Shimizu et al. [15] utilized AFM to
test the cutting edge and its indentation mark to evaluate the cutting edge radius. This
method has an assumption that the AFM probe tip is a spherical cap and the cross
section of the cutting tool edge is arc. So this method is suitable to test a new diamond
tool cutting edge with fine arc profile, given that a spherical cap shape AFM probe tip
is specially selected. The diamond tool cutting edge (even the new ones) usually
possesses some flaws [16] especially after usage and the AFM probe tip is not usually
a spherical cap. With respect to the cutting tool edge with flaws and wear features, or
other features, a general method of diamond tool cutting edge measurement with high
accuracy needs to be developed.
In this paper, a general diamond tool cutting edge measurement in consideration
of the AFM tip dilation is studied. The measuring error introduced by the size of AFM
probe tip can be eliminated before the evaluation of diamond tool cutting edge with
some geometric features. In the following, the AFM image reconstruction principle is
presented firstly. Secondly, the influence of AFM probe tip on the typical evaluation
of diamond cutting tool edge -- sharpness is analyzed. Thirdly, the diamond tool
cutting edge measurement method based on the AFM image reconstruction is
presented.

Algorithm
AFM imaging simulation of diamond tool cutting edge
Our method is based on mathematical morphology theory dealing with unions
and intersections of sets and their translation. In our study a useful concept in this
theory is dilation. The definition of dilation of set B by set A is
A⨁B= ⋃(A+b),

where b∈B.

For the sake of clarity, the principle of AFM imaging is illustrated in Fig.1. At a
sampling point in x or lateral direction, the tip makes contact of the specimen B
surface at contact point Q after it goes from the above along vector d. Then the
location of the tip apex P defines the image height at this sampling point. All these
locations at each sampling point form the image line or final measurement results.
The general detailed algorithms for AFM image simulation can be referred to the
previous work [17]. Here we especially developed our own AFM measurements
simulation computer programs for research of diamond tool cutting edge sharpness
evaluation in ultra-precision machining.
 Fig.1 The principle of AFM imaging.
Reconstruction of diamond tool cutting edge real profile
Based on the principles of AFM imaging illustrated above, it’s easier to obtain
the method to reconstruct the real tested diamond tool cutting edge profile. Two steps
are required to finish this edge profile reconstruction: firstly, serially put the AFM
probe tip profile on the imaging line (the apex point P on the image line), or the tested
profile, as shown in Fig.2(a); secondly, draw the envelope curve of the serial tip
profile, as shown in Fig.2(b). Then the envelope curve drew in second step is the
diamond tool cutting edge real profile being reconstructed. According to this method,
the reconstruction algorithm and program are developed.

Fig.2 Principle of reconstruction of diamond tool cutting edge profile.

Error Analysis
Based on the AFM imaging simulation computer programs, the effects of AFM
probe tip profile on the diamond tool cutting edge sharpness measurement is
quantitatively analyzed. The edge sharpness of diamond tool was usually
characterized by the radius of the cutting edge [9]. Under the general assumption, the
AFM probe tip is simplified as a spherical cap with a radius Rtip, and the cross section
or profile, of diamond tool cutting edge is composed of two straight lines and an Rtool
arc, as shown in Fig.3. According to the principles of AFM imaging illustrated in
Fig.1, it can be seen that the imaging lines are different when the same cross section
of diamond tool cutting edge is tested by different AFM probe tips with various radii.
It can also be seen that the imaging lines are also different when various cross
sections of diamond tool cutting edges are tested by the same AFM probe tip. As an
example, the imaging lines of a diamond tool cutting edge cross section measured by
different radii AFM probe tips are plotted in Fig.4. In Fig.4 the radius of this tool
edge cross section arc, Rtool (illustrated in Fig.3), is 5 unit length. The image lines for
different ratios λ, given by
Rtip
λ= , (1)
Rtool
are presented.

Fig.3 Ideal profiles of probe tip and cutting edge in diamond tool AFM measurement.
 Fig.4 The imaging lines for different ratios λ.
It can be seen that the imaging line differs from the sample line (cross section
profile of the diamond tool cutting edge) greater and greater as the ratio λ increases.
The radius of the cutting edge, or the diamond tool sharpness, is evaluated by
least-square fitting circle radius (denote as Rfit ) of the imaging line [5, 9, 15, 18]. By
least square method, the fitting circle radii are calculated for each imaging line tested
under different λ values, as shown in Fig.5. It can be seen that the linear correlation is
found between Rfit and λ. Through a further observation, the Rfit is given by
Rfit =Rtool (1+λ) . (2)
Substituting the Equ.(1) into Equ.(2), we get

Rfit =Rtool +Rtip . (3)

The relationship given by Equ.(3) can be verified as illustrated in Fig.6. With

respect to the model in Fig.3, the contact point between tip and tool profiles is the
point of tangency of these two arc profiles. The centers of tip arcs at each sampling
point are on the arc with radius of Rtt (Rtt = Rtip + Rtool), the dashed thin line as shown
in Fig.6. On the other hand, the tip apex P that constitutes the image line (the
continuous thin line as shown in Fig.6) at each sampling point is Rtip (d= Rtip) lower
than the center of tip arc in vertical direction. That is to say, moving the Rtt radius arc
to a distance of Rtip gives the image line. So the radius of the image line is equal to Rtt.
 Fig.5 Least-square fitting circle radius of the image line Rfit versus λ.

Fig.6 Illustration of equation among the fitting circle radius, probe tip radius and
cutting edge radius under the condition of ideal profiles.

Through the above analysis based on the AFM probe tip and diamond tool
cutting edge model, we can see that the tip profile is surely to have great effects on the
measurement and evaluation of diamond tool cutting edge, especially when the λ
(defined in Equ.(1)) is bigger. Based on Equ.(1) and (2), the value of the relative
error ε, defined as
Rtt -Rtool
ε= , (4)
Rtool
is equal to λ. Given that the AFM probe tip radius is between about 10 to 50 nm and
radius of diamond tool cutting edge is usually about 50 to 200 nm, it is necessary to
reconstruct the real profile of the tested diamond tool cutting edge before tool
evaluation, such as sharpness.
Measurement method and experiments
In consideration of the dilation induced by AFM probe tip analyzed above, it is
necessary to reconstruct the real profile of the tested diamond tool cutting edge to
eliminate the evaluation error caused by the probe tip. Here, the measurement method
is presented.
According to the reconstruction algorithm described in above Algorithm section,
when the diamond cutting tool edge profile is obtained, reconstruction of the tested
diamond tool cutting edge profile can be realized as long as the profile of the AFM
probe tip is got. In this study, the profile of AFM probe tip is obtained by scanning
electron microscope (SEM) as shown in Fig.7. Through the image binarization
processing, the edge profile of the probe tip can be extracted as shown in Fig.8. Using
the least square fitting method, the fitting radius of the probe tip Rt in our
measurement is 28.05 nm.

Fig.7 SEM image of the AFM probe tip, a), b) and c) with different magnifications.
Fig.8 Profile of the AFM probe tip, a) binarization image and b) extracted outline with
a 28.5 nm radius fit circle
Two diamond cutting edges, a blunt one and a sharp one, are tested using this
probe tip. And the results are plotted in Fig.9. The sharpness values (characterized by
the radius of the cutting edge arc) evaluated using the image lines, Rob and Ros, are
180.86 nm (Fig.9a) and 48.94 nm (Fig.9b) respectively, while sharpness values after
the reconstruction processing, Rrb and Rrs, are 163.51 nm (Fig.9a) and 14.85 nm
(Fig.9b) respectively. It can be seen that for a blunt tool cutting edge the difference
between Rob and Rrb, 27.35 nm, is almost equal to the probe tip radius Rt 28.05 nm.
While for the sharp diamond tool cutting edge, the difference between Ros and Rrs,
34.09 nm, is 21.5% higher than the Rt. According to the analysis of the above section,
the difference between the fit circle radius of reconstruction line and that of the image
line is equal to the AFM probe tip radius on the assumption that the diamond tool
cutting edge is a perfect arc shape (cross section of the cutting edge). Other diamond
tool cutting edge samples are tested, and the all results are listed in Table.1. In this
table, Ro is the sharpness of the initial image line of diamond tool cutting edge, Rr is
the sharpness evaluated after reconstruction of the cutting edge, and relative error εm
is given by
Ro -Rr
εm = . (5)
Rr
On the other hand, the following equation well be satisfied if the cross section of
the diamond tool cutting edge and the AFM probe tip have perfect arc shapes:
Rt =Ro -Rr . (6)
But we can see in our experiments that there is a difference ρ between Rt and Ro-Rr
defined as
(Ro -Rr )-Rt
ρ= . (7)
Rt
So, using Ro-Rt to get the real sharpness of the diamond tool cutting edge will
lead to error in some extent. This is the reason that our measurement method involves
the reconstruction of the diamond tool cutting edge real profile based on the
reconstruction algorithm to eliminate the AFM tip dilation. Our method well
effectively improves the accuracy of the sharpness evaluation of diamond tool cutting
edge.

Fig.9 AFM image line and reconstruction line of diamond tool cutting edge profile
with image line fit circle and reconstruction line fit circle, a) blunt edge and b) sharp
edge.
Table.1 Parameters of diamond tool cutting edge samples tested.

Sample No. Ro (nm) Rr (nm) εm (%) ρ (%)

1 180.86 163.51 16.73 2.5
2 86.41 61.55 40.39 11.37
3 86.84 53.90 61.11 17.43
4 50.19 18.94 160.50 11.41
5 48.94 14.85 229.56 21.53

Analysis of the measurement uncertainty

The flow chart of calculating the measurement uncertainty for edge extraction
with dilation is shown in Fig.10 . Firstly, the profile of the AFM probe tip and the
sample line are given. Secondly, the image line of the given sample line is got by the
AFM imaging simulation algorithm to mimic the AFM imaging process. Thirdly, the
reconstruction line of the given sample line is obtained through reconstruction
algorithm operating on the image line. Finally, the uncertainty is calculated by
comparison between the reconstruction line and the given sample line.
 Fig.10 Flow chart of the measurement uncertainty analysis.

If the points cannot be contacted by the probe tip, the non-contact profile
information composed by these points is unknown, in which case the non-contact
profile will be unable to be reconstructed, as shown in Fig.11. So, in the following
analysis the contact profile is taken into consideration.

Fig.11 The contact and non-contact profiles in AFM imaging.

With respect to a portion of contact profile or sample line, it has a certain

curvature radius (positive value for convex and negative value for concave). Based on
the measurement uncertainty analysis method presented in the flow chat in Fig.10, it
is found that, in principle, the uncertainty is zero if the AFM probe tip is given. Here
some examples of sample profiles (included angle of both side straight lines is 105°)
with different curvature radii imaged by a 25 nm radius probe tip are given, as shown
in Fig.12 and 13. It can be seen that the convex profile is able to be reconstructed
from the image line perfectly. The reconstruction line coincides with the given sample
line. With respect to the concave profile, the reconstruction line overlaps the sample
line when the sample line curvature radius is large enough that the AFM probe tip can
contact every points of the concave profile, such as the cases shown in Fig.13(c) and
(d). But if the concave sample line curvature radius is small that the probe tip cannot
touch the low portion of the sample line, the non-contact profile of the concave
sample line is unable to be reconstructed, such as the cases shown in Fig.13(a) and
(b).

Fig.12 Uncertainties between different curvature radii (positive value) sample

profiles (included angle of both side straight lines is 105°) and their reconstruction
lines. The reconstruction lines of the non-contact straight portions on both sides of the
given sample line are ignored.
 Fig.13 Uncertainties between different curvature radii (negative value) sample
profiles (included angle of both side straight lines is 105°) and their reconstruction
lines. The reconstruction lines of the non-contact straight portions on both sides of the
given sample line are ignored.

The above analysis is based on the assumption that the profile of AFM probe tip
is perfectly accurate. In fact, the tip profile used in the reconstruction algorithm has
deviation with the real tip profile. For a new AFM probe tip (such as Asylum
Research, ASYELEC.01-R2, tip radius Rt 25 nm), the wear is neglected and the tip
profile has a circle arc shape. Here, a further analysis that refers to the probe tip radius
uncertainty is taken for the example shown in Fig.12 and 13. In the above analysis,
the tip radius used in the reconstruction algorithm is 25 nm, while the reconstruction
results well be as shown in Fig.14 and 15 if a 5 nm uncertainty (minimum 20 nm and
maximum 30 nm) of probe tip radius Rt, estimated based on the result shown in Fig.8,
is taken into consideration.
 Fig.14 Uncertainties between different curvature radii (positive value) sample
profiles (included angle of both side straight lines is 105°) and their reconstruction
lines considering the probe tip radius deviation.

For a convex profile as show in Fig.14, it can be seen that the given sample line
is between the reconstruction line by Rt 20 nm and that by Rt 30 nm. The maximum
separation distance between both reconstruction lines is 2.1 nm.
For a concave profile as shown in Fig.15, it can be seen that the given sample
line is also between the reconstruction line by Rt 20 nm and that by Rt 30 nm under
condition that the AFM probe tip can contact every points of the concave profile, such
as the cases shown in Fig.15(c) and (d). The maximum separation distance between
both reconstruction lines is 2.1 nm. When there are some non-contact low portions on
the concave sample line, the other contact profile been able to be reconstructed is
between both reconstruction lines with the maximum separation distance of 2.1 nm
too, such as the cases shown in Fig.15(a) and (b).
 Fig.15 Uncertainties between different curvature radii (negative value) sample
profiles (included angle of both side straight lines is 105°) and their reconstruction
lines considering the probe tip radius deviation.

As stated above, the AFM probe tip profile deviation contributes to the
measurement uncertainty. The profile that is able to be touched by the probe tip can be
reconstructed perfectly as long as the AFM probe tip profile used in the reconstruction
algorithm is the same as the real one used in measurement. The shape of the profile
measured also has some effect on the reconstruction. The non-contact profile will be
unable to be reconstructed. With respect to the contact profile in our analysis example,
measurement uncertainty is 2.1 nm under 5 nm deviation of the probe tip radius.
Using the same analysis method, the uncertainty calculated is 4.1 nm under 10 nm
deviation of the probe tip radius which is the common radius deviation of the AFM
probe tip.

Conclusions
 This paper analyzes the dilation effects of AFM probe tip on diamond tool
cutting edge measurement and evaluation, and then presents the method to eliminate
the evaluation error caused by the probe tip based on the simulation and
reconstruction algorithms of AFM imaging. Our work promotes the accuracy of
diamond tool cutting edge measurements and evaluation based on AFM.
1) The algorithm principles of AFM imaging simulation and reconstruction of
diamond tool cutting edge real profile are presented in terms of mathematical
morphology.
2) The quantitative analysis and its verification for an idea diamond tool cutting
edge profile measurement using AFM are given, which reveals the importance of
dilation effect of AFM probe tip on the diamond tool cutting edge measurement
quantitatively.
3) The measuring method to eliminate the dilation effect of AFM probe tip is
presented for diamond tool cutting edge measurement. It puts forward that the
reconstruction of the real cutting edge profile is particularly necessary before diamond
tool cutting edge evaluation (such as sharpness) by AFM.
4) The profile that is able to be touched by the probe tip can be reconstructed
perfectly as long as the AFM probe tip profile used in the reconstruction algorithm is
the same as that used in measurement.

Acknowledgement
The authors would like to thank the Science Challenge Project (No.
JCKY2016212A506-0504). And this work is also supported by National Natural
Science Foundation of China (No. 51605453).

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Highlights

 AFM imaging and reconstruction algorithm are presented;

 Measuring method to eliminate the dilation effect of AFM probe tip is presented;

 Dilation effect of AFM probe tip on the diamond tool measurement is important;

 The profile touched by the probe tip can be reconstructed perfectly.