5s 27-Jun

10s 4-Jul

4-Jul-13 W-Lb1 P-Ka

Remarks Wafers X Y 5s 10s 5s
mm mm cps cps E10
Sample
1 0 0 201.77 171.23
Test 3 - After Ontrack
2 26 26 126.23 142.15
(Normal Flow) A
3 -26 -26 573.99 863.08

Sample
1 0 0 220.2 157.88
Test 3 - After Ontrack
2 26 26 133.76 149.58
(Normal Flow) B
3 -26 -26 462.34 896.38

Sample
Sample
Standard Flow - After 1 0 0 118.28 139.77 ND
Ontrack (Normal Flow) 2 26 26 184.21 160.67 158.7
A 517.89 880.5 156.42
3 -26 -26

Sample
Standard Flow - After 1 0 0 162.92 172.79 ND
Ontrack (Normal Flow) 2 26 26 121.68 139.86 193.22
B 552.56 912.12 ND
3 -26 -26
P-Ka S-Ka Cl-Ka Ca-Ka Ti-Ka Fe-Ka
10s 5s 10s 5s 10s 5s 10s 5s 10s 5s
E10 E10 E10 E10 E10 E10 E10 E10 E10 E10

4117.89 3556.45 237.69 314 202.58 189.56 4.66 4.88

3578.7 3262.75 347.25 275.33 170.85 170.94 9.53 10.16
3746.2 3306.09 317.53 253.43 181.79 181.74 3.99 4.67

4075.71 3034.17 216.29 289.28 166.13 141.86 3.07 3.33

3892.24 3136 385.94 261.18 200.31 188.14 3.02 3.39
3784.9 2854.9 420.71 269.61 190.38 158.37 2.43 2.84

ND 3596.33 2859.54 278.53 329.37 206.61 178.48 3.1 4.39

160.85 3041.92 2601.45 404.14 344.95 155.18 149.55 3.29 4.03
139.78 3026.03 2440.84 437.24 298.34 187.28 174.91 1.97 2.67

3317.41 2641.61 513.97 335.33 179.05 165.15 3.18 4.78

3162.01 2535.5 533.65 275.48 176.49 167.1 2.29 2.9
3120.63 2413.04 497.52 268.72 135.72 114.4 2.33 2.92
Fe-Ka Ni-Ka Cu-Ka Zn-Ka
10s 5s 10s 5s 10s 5s 10s
E10 E10 E10 E10 E10 E10 E10

4.66 2.04 2.2 0.42 ND 1.04 0.97

9.53 0.66 0.67 0.43 ND ND 0.69
3.99 0.75 0.53 ND ND ND 0.82

3.07 0.47 0.47 0.41 ND 1.14 0.74

3.02 0.78 0.63 ND 0.42 1.2 1.18
2.43 0.47 0.47 ND ND 1.15 1.01

3.1 1.78 1.58 0.66 0.86

3.29 ND ND ND 0.53
1.97 ND ND 0.89 1.05

3.18 0.29 ND ND
2.29 ND 0.35 0.79
2.33 0.34 ND ND
 5s 27-Jun
10s 4-Jul

4-Jul-13 P-Ka S-Ka

Remarks X Y 5s 10s 5s
mm mm E10 E10 E10

Test 3 - After Ontrack (Normal Flow) A 0 0 3537.81

Test 3 - After Ontrack (Normal Flow) B 0 0 2869.6

Standard Flow - After Ontrack (Normal Flow) A 0 0 175.56 170.88 3201.9

Standard Flow - After Ontrack (Normal Flow) B 0 0 163.68 112.65 3137.38

S-Ka Cl-Ka Ca-Ka Fe-Ka Ni-Ka Zn-Ka
10s 5s 10s 5s 10s 5s 10s 5s 10s 5s
E10 E10 E10 E10 E10 E10 E10 E10 E10 E10

2853.76 362.8 272.88 173.94 157.76 8.18 7.04 0.96 0.64 0.96

2460.18 337.72 245.17 170.78 160.38 5.51 5.63 3.13 3.58 0.88

2814.29 410.93 319.77 195.48 180.27 7.12 7.23 0.77 0.56 1.08

2209.79 488.75 218.49 170.17 136.64 3.87 3.22 0.31 0.24 0.57
 Cr-Ka K-Ka Ti-Ka
10s 5s 10s 5s 10s 5s 10s
E10 E10 E10 E10 E10 E10 E10

0.96 0.34 2.31

0.95 0.88 0.75

0.96 0.58 0.95 3.85 2.33 1.04

0.39
 Ontrack - Test 3

5s

Wafer A

Wafer B
Ontrack - Test 3

10s
 Ontrack - Standard Flow

5s

Wafer A

Wafer B
Ontrack - Standard Flow

10s