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LEAK
DETECTION
Introduction
Ideal vacuum chamber
• What would an IDEAL vacuum chamber look
like?
– Stable wall surfaces
– NO leaks
– only source of gas is the gas delivery system(process
in the chamber)
• In a REAL vacuum system, there can be other
sources of gas besides the gas delivery
system.
• What problems can these other gas sources
cause?
– significantly increase the pump down time.
– contaminants in the system.
Leak in vacuum systems
Permeation
Diffusion
Real
Leaks
Outgassing Virtual
Backstreaming
Trapped Volumes
Vented Screw
Double O ring sealed shafts
Atmosphere Vacuum
(760 torr)
Real leak and virtual leak curves
.
P
t t t
Leak present in
Real leak Virtual leak vacuum system
Methods of leak detection
• There is two methods for detection of the
leak: searching gas is inside (I) or out side
(O) the system
Searching gas
P out
P in>p out
gauge
detector
(I)
P in
(O) leak
Searching gas
chamber
Discharge Tube
pump
Day spray Test
Dye spray
leak
pump
Spark Test
.
spark
Probe
pump
Palladium
barrier leak
.
Vacuum chamber
. detector
H2
Plalladium
plaet
- +
Thermal
cathode
_
Thermal
cathode
Halogen detector
• . +
+ _
filament
Platinum plate
_
Vacuum
chamber
Halogen gasses
Leak covering by tape
• Leak covering (O)
leak
H
Carbon
dioxide
Thermal
conductivity
gages
He
Mass spectrometer
chamber
He
He source
Helium Leak Methods
Sniffing Test (I)
He
Chamber
ALCATEL
SIMS 180TD+
Leak rate
• Leak rate is measured by standard cubic
centimeter/sec (std. cc/sec).
• Although the leak rate in vacuum system
is very low, but it is a big challenge in the
vacuum techniques.
Leak rate of 1 x 10 std cc/sec
-1
Leak rate of 1 x 10-3 std cc/sec
Leak Rates over Time
LEAK RATES
10 -1 STD CC/SEC --- 1 CC/10 SEC
10 -3 STD CC/SEC --- 3 CC/HOUR
10 -5 STD CC/SEC --- 1 CC/DAY
10 -6 STD CC/SEC --- 1 CC/2 WEEKS
10 -7 STD CC/SEC --- 3 CC/YEAR
10 -9 STD CC/SEC --- 1 CC/30 YEARS
Permeation may occur
<1X10-8 std cc/sec
Why Helium is used for leak
detection
HELIUM
• Helium is very light and small
• Low concentration in air (0.0005%)
• Permits dynamic testing
• Permits non-destructive testing
• Helium is safe
Why Helium?
• Low Background (5-20 PPM)
• Inert F
Ne
Ar
• Safe H
O Kr
• Light ?
• Low Cost Cl He N Xe
Why A Helium Leak Detector?
• High Sensitivity
• Wide Range
• Reliable
• Quantitative
• Dynamic Testing
SIMS 180TD+
Helium Leak Testing: Vacuum Mode
1E-2 mbar
This method
is good for SIMS
vacuum
equipments
180TD+
leak testing
Helium Leak Testing: Sniffer Mode
• Individual packages containing helium can be checked for leaks
using a pencil-sized vacuum collector (sniffer) attached to a
helium leak detector.
• The rate of gas sampling (flow rate) is set at 1cc/second; enabling
a (ambient pressure) leak rate to be measured in ppm, or in
cc/second.
• The sniffer mode test procedure is “site-specific” in that the probe
collects helium escaping within ~ 1/8” of the leak site.
Helium Leak Methods
Sniffing Test
He
100% ALCATEL
He
SIMS 180TD+