Benchtop SEM

The Most Advanced Benchtop SEM

vanc
Ad e

d
capabi
High Vacuum or Low Vacuum mode selectable
Sample imaging at various angles using a tilt
rotation motorized specimen holder*

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※
iti
o
ve per
*Optional accessory es
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i
Intu

ion
Utmost ease of operation through a touch
panel system with intuitive GUI
 Eas
y

mai ten
Cartridge filament integrating

n
wehnelt for easy exchange
Auto gun alignment capability
an
ce

ick re
Qu
sp

Speedy system startup

onse

A single touch to select

High Vacuum or Low Vacuum mode

Sample: Compound eye of an ant

 Intuitive operation

Advanced capabilities

Sample: Iron rust

Touch panel
JEOL's renowned image quality can be achieved with the utmost ease. A touch panel
system with intuitive GUI will guide the operator through the imaging process with the level
of ease equal to a smartphone.

4
Automated functions
Auto controls include alignment, focus, stigmator, contrast/
Manual control
brightness, and Full Auto. A single touch of Full Auto will initiate
the entire imaging process to present an image instantly. An item touched and selected will turn
green.
Hard, continued pressing of the buttons
for coarse control. Light, intermittent
tapping for fine control.
These control buttons combines the
ease of operation from the touch panel
and the familiar feel of the knobs.

Image search/
display
The Display image button is used to
search a library of images for a specific
image. Checking the Display image
button after selecting a desired image
will present a magnified view of the
image for closer examination.

Minimum
magnification
image
Checking the Low Mag Image will allow
the operator to view an image acquired
at the lowest magnification immediately
after the evacuation sequence was
completed. This is a useful feature when
examining the positioning of the sample.

Preset
magnification
Up to 6 magnifications are presettable.
Programming frequently used
magnifications will increase operating
efficiency. One of the buttons can be
used to preset the current magnification.

Stylish Mechanism 5
 Intuitive operation

Advanced capabilities
Observe Aoperator
HV
S E IVacuum and Low Vacuum, allowing the
single touch can switch the mode between High
H
S EVI
to acquire a variety of images.

H
High vacuum mode S EVI
HV
Secondary electron image in the High Vacuum mode can bring
B EI
out clear images of samples that require high magnification HV
Low
image andvacuum mode
samples with an uneven surface. Comparing SEI B EI
images with BEI images allows for closer examination of the HV
H V B EI
surface structure.

Search
SE
imageI windowH differences.
The image mode may also be switched to backscattered L V
S EVI LV
electron image to examine compositional

HV
Print H V
SEI
HV LV
BEI SEI
01 H V Sample: Yogurt culture HV 2 μm

Retrieve imaging conditions

B EI S EI
Accelerating voltage 15 kV, magnification 20,000×

HV H
BEI S EVI
LV B
HV
Dual frame display EI
LV H
B EVI
LV B
HV
Metrology
LV EI
HV
SEI LV
Sample: Metal fracture surface
EDS HV 5 μm

SEI
Accelerating voltage 15 kV, magnification 5,000×

LV
HV HV
SEI SEI
HV HV
BEI Sample: Butterfly scales
S
1 μm

HV EI
Accelerating voltage 15 kV, magnification 30,000×

BEI HV
Powerful aid in complicated H analysis S EI
V HV
BEI BEI
L V H
Qualitative/Quantitative B EVI
analysis LV H
B EVI
L V LV
LV
Sample: Coated paper
Accelerating voltage 5 kV, magnification 3,000×
10 μm
LV
Sample: Mouse trachea 2 μm
6 Accelerating voltage 15 kV, magnification 10,000×
 H H
S EVI S EVI
H H
B EVI S EVI
H H
B EVI B EVI
H H
B EVI B EVI
LV H
B EVI
LV LV
LV LV
LSHEVV
I H
S EVI
H
B EVI
Sample: Aluminum alloy 10 μm 10 μm
H
Backscattered electron image
High vacuum mode
Accelerating voltage 10 kV, magnification 3,000× B EVI
Sample: Concrete 200 μm

LV
Backscattered electron image　
Accelerating voltage 15 kV, magnification 200×
H
Low vacuum mode
S EVI LV
H
The Low Vacuum mode, a standard feature in NeoScope™, S EVI L
Search image window H
S EVI
is designed to increase the pressure in the specimen
H
S EVI
chamber to neutralize the charges on the sample surface,
H
B EVI
allowing the operator to observe uncoated non conductive
H
S EVI
samples.
Print H
B EVI
The Low Vacuum mode is also effective for samples
containing a small amount of oil or water and gas-emitting
H
B EVI
samples that resist coating.
H
Retrieve imaging conditions LV B EVI
H
LV B EVI
Dual frame display LV
Sample: Filter paper
LV 50 μm
Accelerating voltage 15 kV, magnification 540×

Metrology LV
L
EDS

Sample: Dandelion puff 500 μm

Accelerating voltage 15 kV, magnification 80×
Powerful aid in complicated analysis

Qualitative/Quantitative
50 μm
analysis Sample: Cookie
Accelerating voltage 15 kV, magnification 500×

7
 High vacuum mode

Low vacuum mode

Search and print
Search image window
The Search image window allows the operator to select and print image data. The window also allows the operator to restore the
photographing conditions (accelerating voltage. filament current, probe current, etc.) for any image.
Print

Retrieve imaging conditions

01
Dual frame display

Metrology

High vacuum mode

EDS

Low vacuum mode

High vacuum
High vacuum mode mode
Search image window
Powerful aid in complicated analysis
Search image window

Low vacuum
Low vacuum mode mode
Qualitative/Quantitative
Print
analysis
Checking a desired image and pressing the Output images
SearchSearch
image image window window
Retrieve imaging conditions
button in the Search image window will display a preview
image. If multiple images are selected, the system will
automatically print 3 images per page.

Print Print
Dual frame display

Retrieve
Retrieve imaging
imaging conditions
conditions
Metrology
NeoScope™ can retrieve the imaging conditions of any
Dual
EDS frame
Dual frame displaydisplay
image that is saved in memory. The system will retrieve the
data when an image is selected and the Load observation
conditions button is pressed. It is a convenient feature for
routine operation.
Metrology
Metrology

EDS EDS
Powerful aid in complicated analysis Sample: Human hair
Print view
8
Qualitative/Quantitative
analysis
Print

Retrieve imaging conditions

Compare
Dual frame display

NeoScope™ can simultaneously display live and retrieved images. In the example below, a low magnification image is presented

Metrology
on the right while a magnified live image on the left. This allows the operator to compare a current image with another image
retrieved from memory.

High vacuum mode 01

EDS

Low vacuum mode

Search image window

Powerful aid in complicated analysis

Print
Qualitative/Quantitative
analysis
Retrieve imaging conditions

Dual frame display

Sample: Star sand

Metrology
Measure
EDS
01
NeoScope™ incorporates a feature to measure the distance between 2 points. When the Scaler button is selected, the functions
needed for measurement will be assigned to the auto control buttons. The measured results can be saved in image and CSV
data files.

Powerful aid in complicated analysis

No.1

Qualitative/Quantitative
5.79 μm

analysis
No.3
6.12 μm No. Length [unit] Angle[deg]
No.2
5.47 μm 1 5.79 um 44
2 5.47 um 12
No.4
3 6.12 um 89
5.54 μm 4 5.54 um 41

Sample: Metal particles

9
 EPrint
DS

定性・定量
Retrieve imaging conditions
複雑な分析をアシストします
01
Elemental analysis
Dual frame display

EDS
Metrology
Pressing the Analysis button will open the EDS view. EDS
supports qualitative/quantitative analysis, point analysis,
プローブトラッキング
and mapping (elemental distribution).
EDS

Powerful aid in complicated analysis

Sample: Black ore (mineral)

Qualitative/Quantitative Element
CK
(ke V)
0.277
Mass % Atomic number %
45.65 70.06
analysis OK 0.525 1.5 1.73
Al K 1.486 0.78 0.53
Two buttons, Image and Spc, initiate analysis. Si K 1.739 26.03 17. 09
Pressing the Quantitative button after data acquisition will Ca K 3.69 15.38 7.07
Fe K 6.398 10.66 3.52
display quantitative results.
Total  100 100

Image Spc

Point analysis

Mapping (elemental distribution)

Pressing the Map button will initiate elemental mapping of the image.
Using mapped results, the operator can:
Line analysis
The mapped results will show 2 dimensional distribution of the
constituent elements. Create quantitative maps in color

where each color represents the

Probe tracking quantitative value of an element.

Reconstruct maps of additional elements

by data processing alone after analysis.
EDS Select a specific area on the map and

extract the spectrum

定性・定量 Overlap elemental maps and

identify where the elements of

複雑な分析をアシストします interest exist in the area of view

or how they are overlapped.

10

EDS
EDS

Pointanalysis
Powerful aid in complicated analysis
Analytical Assistance is one of the functions to help the operator navigate any data acquisition process, including mapping and
Qualitative/Quantitative
line analysis.
Mapping (elemental distribution)
analysis
When a type of analysis is selected from the Analytical Assistance view, the system will display a series of process steps needed
for the analysis. The buttons shown in the view will guide the operator through any analytical procedure.

An example of mapping sequence

Line analysis

Probe tracking

EDS
Select MAP. Select an image. Select conditions.
定性・定量

複雑な分析をアシストします
Start analysis.

Select elements.
EDS Point analysis
Verify conditions.

プローブトラッキング
Mapping (elemental distribution)

Point analysis Line analysis

Point analysis
When multiple analytical When a line is defined on the image,
Probe tracking
Mapping (elemental distribution)
points are selected on the system will begin measuring
the image, the system will relative concentration changes in the
automatically analyze the 1-003
Mapping (elemental distribution)
elements on the line.
1-001
elements on each point, The elements may be edited after the
Line analysis
and display spectral data.
1-002
EDS
analysis is completed.
These spectra can be
Line analysis
compared after the
定性・定量
Probe tracking
analysis is completed. 30 μm

Probe tracking
複雑な分析をアシストします
EDS Probe tracking is
designed to maintain a
EDS
stable analytical point
定性・定量 EDS
for prolonged operation.

定性・定量 11
複雑な分析をアシストします
プローブトラッキング
 01

View at varying angles

Tilting and Rotating Motor Drive Holder
The Tilting and rotating motor drive holder allows the operator to examine samples at different angles.
Observation of a tilted sample results in 3 dimensional information of the sample.

Startup
The tilt rotation motorized specimen holder is optional.

Selecting
T i lt High
Tilt
Vacuum or Low Vacuum
Tilt
°
Tilt mode
0° 0 45°
45 °

Filament

Auto gun alignment

ネオコーター

Sample: Substrate; magnification 45× 10 μm Sample: Substrate; magnification 45× 10 μm

EDS analysis

Design your own operating environment

Coating device
You can select any wallpaper for
your GUI.
Select one that you desire.

傾斜回転モーター駆動ホルダー

JCM-6000 character Sample: Spiderwort, uncoated, Low Vac mode

Mr.Power Supply 「Rokumaru kun」

∼お着替え SEM∼
12
Easy maintenance

Quick response
Tilting and Rotating Motor Drive Holder

Startup

Intuitive operation
NeoScope™ will be ready for operation in 3 minutes after
it is powered on.
Selecting High Vacuum or Low Vacuum mode
Placing a sample and closing the door will automatically
initiate the evacuation sequence.
An SEM image will be displayed when the evacuation is

Filament
completed.

Advanced capabilities
Tilting and Rotating Motor Drive Holder

Auto gun alignment

Startup Tilting and Rotating Motor Drive Holde

ネオコーター
Selecting High Vacuum or Low Vacuum mode
Startup
Tilting and Rotating Motor Drive Holder

EDS analysis
Filament
A single touch on the panel can switch
Selecting High Vacuum or Low Vac
Startup
the mode between High Vacuum and
Low Vacuum.

Auto gundevice
Coating alignment Filament
Selecting High Vacuum or Low Vacuum mode

ネオコーター Auto gun alignment

Filament
傾斜回転モーター駆動ホルダー

EDS analysis ネオコーター

Auto gun alignment

ネオコーター EDS analysis

Coating device

EDS analysis Coating device

傾斜回転モーター駆動ホルダー
NeoScope™ incorporates a JEOL proprietary dry SD detector. The detector is always ready for analysis during SEM
imaging.

Coating device 傾斜回転モーター駆動ホルダー

New Laboratory 13

傾斜回転モーター駆動ホルダー
 Tilting and Rotating Motor Drive Holder
Peripherals
Startup

Easy
Selecting maintenance
Tilting andHigh
Rotating MotororDrive
Vacuum LowHolder
Vacuum mode

Tilting
Startupand Rotating Motor Drive Holder
Filament
Quick response
Changing filaments is simple and easy.

Startup
Unlike the conventional filament assembly that requires cleaning of the
Selecting
Auto High Vacuum or Low Vacuum mode
gun alignment
wehnelt, the electron gun in NeoScope™ uses a pre-centered cartridge
filament that integrates a wehnelt. Since the cartridge is replaced as a unit,
cleaning of the wehnelt or centering of the filament is not needed. The
exchange process is quick and insures correct positioning of the filament.
Selecting
Filament High Vacuum or Low Vacuum mode
ネオコーター
Intuitive operation
Filament
Autoanalysis
gun alignment
EDS

Advanced
gun alignment capabilities
Any new filament that is installed requires alignment to insure good image quality.
This alignment process is fully automated in NeoScope™.
Auto
ネオコーター Filament-wehnelt integral grid

Coating device
ネオコーター
EDS analysis
傾斜回転モーター駆動ホルダー

Peripherals
EDS analysis
Coating device

Coating device
Easy maintenance
傾斜回転モーター駆動ホルダー
Coating allows non conductive samples to be observed in the SEI mode under high vacuum. Comparing the SEI image with the
low vacuum BEI image allows for closer examination of the fine surface structure.

傾斜回転モーター駆動ホルダー

Quick response Coating

Intuitive operation
20 μm 20 μm
Sample: Resin fracture surface , Uncoated Sample: Resin fracture surface, gold coated
Low Vacuum mode, backscattered electron image× High Vacuum mode, secondary electron image

Advanced capabilities
Accelerating voltage: 15 kV; magnification: 1,500× Accelerating voltage: 15 kV; magnification: 1,500×
14
Specifications Optional accessories
Magnification Secondary electron image: ×10 to ×60,000 ◆ Tilt rotation motorized holder
Backscattered electron image: ×10 to ×30,000 Tilt: -15° to +45°; rotation: 360°
(when image size is 128 mm × 96 mm) ◆ EDS
Imaging mode Secondary electron image, backscattered electron image
Accelerating voltage Secondary electron image; 5 kV, 10 kV, 15 kV (3 stages)
Backscattered electron image; 10 kV, 15 kV (2 stages)
Installation requirements
Electron gun Small gun with cartridge filament Power supply Voltage: Single phase AC 100 V

integratinng wehnelt (120 V, 220 V, 240 V)

Bias current Auto bias 50/60 Hz, 700 VA (AC 100 V),

(linked to accelerating voltage and filament current) 840 VA (AC 120 V),

Condenser lens Two stage electromagnetic zoom condenser lens 880 VA (AC 220 V),

Objective lens Electromagnetic lens 960 VA (AC 240 V),

Auto magnification Magnification corrected with reference to sample Fluctuation ±10% or less, with grounding

correction height (7 mm, WD56 to 53 mm, WD10) Installation Room

Preset magnification 6 levels, user programmable Room temperature 15 to 30°C

Specimen stage Manual control for X and Y: X: 35 mm, Y: 35 mm Humidity 60% or less

Maximum sample size 70 mm diameter × 50 mm height Operation table Sturdy table with a loading capacity of

Specimen exchange Draw-out mechanism 100 kg or more

Image memory One, 1,280 × 960 × 16 bits Weight Main console: approximately 50 kg

Pixels 640 × 480, 1,280 × 960 RP: approximately 9 kg

Image processing Pixel accumulation Power supply box: approximately 10 kg

Image accumulation (recursible) Base unit (Width) (Depth) (Height)

dimensions 325 mm × 490 mm × 430 mm
Automated functions Filament, alignment, focus,
stigmator, exposure
Metrology Distance between 2 points, angles
File format BMP, TIFF, JPEG
※ Specifications subject to change without notice.
®
Computer PC (desktop PC), OS Windows 7 ※ The official name of Windows7 is Microsoft(R), Windows(R), Operating System.
Monitor 23 inch wide LCD monitor (touch panel) ※ Windows is a registered trademark of Microsoft Corp. in the U.S.
※ Other trademarks referenced in this catalog and marked with* are the
Evacuation system Fully automatic, TMP: 1, RP: 1 property of our allied companies.

System composition Index of samples Page

Compound eye of an ant 3
JCM-6000 base unit Iron rust 4
Yogurt culture 6
Metal fracture surface 6
Butterfly scales 6
Coated paper 6
Mouse trachea 6
Aluminum alloy 7
Concrete 7
Filter paper (LV) 7
PC & LCD
Rotary Dandelion puff (LV) 7
Pump Cookie (LV) 7
Human hair 8
Star sand 9
Metal particles 9
Black ore (mineral) 10
Power supply box
Substrate 12
Spiderwort (LV) 12
3P
Resin fracture surface (LV, HV) 14

15
Benchtop SEM

No. 1301B390C Printed in Japan, Kp