Chemical wet bench

safety
CEN- IISc
Wet bench

Only safe place to

work with chemicals in
the cleanroom

Wetbenches make
sure that the
cleanroom stays pure
:
Prevent
Contamination
 All wet bench users
• While working on wet bench, it is
mandatory to
– Wear lab shoes

– Wear Lab coat

– Wear safety glasses/ face shield

– Wear appropriate gloves

– Switch on the exhaust hood

 Make sure to…..
• Leave the wet bench clean after you have
finished work
• Remove your contact lenses!!
– Damaged contact lens (chemical)
• Label your chemical receptacles
 Use of gloves

PVC
– Are used in the P-line to protect wafers from particles generated
by humans
– No resistance to chemicals

NITRILLE
– Thin chemical resistant gloves : used in laboratories
– Strong material : used for installation and maintenance of tools

TRIONIC (MAPA)
– Thick chemical resistant gloves : used for cleaning up leaks
– Nevertheless don’t put your hands in liquid chemicals!
Heavy Duty Neoprene
TRIONIC (MAPA

PVC
1st danger : Chemicals in the eyes
 Splashes in the eyes
 Always pour acid in water and never the other way
round

 Never look in
• recipients with reacting or boiling liquids
• Opening of bottles of liquids
• Glass splinters by breaking of glass or explosions
• Solids in the eyes are irritating too
• Vapors or gasses can cause irritation
1st danger : Chemicals in the eyes
ALWAYS WEAR SAFETY GLASSES
WITH SIDE SCREENS

Never rub in your eyes or face with your hands

or gloves.
 2nd danger : Chemicals on your skin
Irritating chemicals have a harmful effect on the skin.

Possible ways of contamination

writing tools tables and table edges
keyboards stands
dirty hands chairs
wounds door handles
valves floor
towels Loose hair

SOMEBODY WORKING AFTER YOU IN A LAB HAS TO TRUST EVERYTHING IS CLEAN!

2nd danger : Chemicals on your skin
Never touch chemicals with your bare skin!
 Intake through small wounds is very
dangerous
 Nevertheless if you come into contact with
chemicals :
 immediately flush with a lot of water
 Cary the right gloves
 Cary safety shoes
 Cary lab coat (closed) or a chemical
resistant apron.
 A cleanroom suit lets vapors and liquids
pass through.
2nd danger : Chemicals on your skin
Working safely = working cleanly
PURITY = SAFETY

Keep working table clean and pure

Wash your hands as soon as they are dirty

The gloves you carry must always be clean!

Avoid wearing dirty protection clothing

Don’t clean your hands on your lab coat

Decontaminate all used glassware, measuring equipment, working
tables, …
– Eg. Clean up carefully every Friday afternoon
– Always wash used recipients
 3rd danger : Breathing in of vapors
The intake of toxic and biting vapors and gasses through the respiration
system.

Gasses

Liquids
– Gasses can escape when liquids evaporate
– When some chemicals are mixed, dissolved gasses can
escape
– Solvents evaporate very easily (low boiling point and high
vapor pressure)

Solids
– Powdery solids can create fine up whirling dust, that can be
inert, irritating, harmful or toxic.
 Classification of chemicals
By properties :

– organic - inorganic
– Synthetic materials
– acids and bases
– strong electrolytes - weak electrolytes
– Oxidizing and reducing products
– State of aggregation :
solid - liquid - gas - glass - plasma - …
– metal - non-metal
– oxides (acid forming, base forming, amphoteric)
 Classification of chemicals
According to health risks :

– Toxic
– Harmful
– Combustible
– Irritating
– Corrosive
– Carcinogenic
– Mutagene
– Teratogenic
 MSDS
• Material safety data sheet
 Properties of Chloric acid
Formula: HCl
Name: Chloric acid
Origin: Gas dissolved in water
Nature: Colorless fuming acid with a biting smell
Hazard: Strong acid Corrosive
R-sentences: 34-37
S-sentences: (1/2)-26-45
TLV-Value: 5 ppm

Rel.density: 1.2
Hazard symbols :

Corrosive
 Properties of Ammonia
Formula : NH3
Name : Ammonia
Origin :
Gas dissolved in water
Nature :
Colorless liquid with a biting smell
Hazard : Weak base (≠ undangerous)
Corrosive
R-sentences : Contaminant for lithography processes
S-sentences :
34-50
TLV-Value :
Rel. density : (1/2)-26-36/37/39-45-61
20 ppm
0.9
Hazard symbols :

Corrosive
 Properties of Sulfuric acid
Formula : H2SO4
Name : Sulfuricacid
Origin :
Synthesis
Nature :
Colorless oily hygroscopic liquid
Hazard : Very strong acid, very concentrated (100%)
Corrosive
R-sentences : Produces a lot of heat when mixed with water
S-sentences :
35
TLV-Value :
Rel. density : (1/2)-26-30-45
1 ppm
1.83
Hazard symbols :

Corrosive
 Properties of - Bleach
Formula : NaOCl
Name : Sodiumhypochloryt
Origin :
Syntheses
Nature :
Clear yellow green solution with a typical smell
Hazard : strong oxidant and strong base
Corrosive
R-sentences : Decomposes with formation of chlorine gas
S-sentences :
31-34
TLV-Value :
Rel. density : (1/2)-28-45-50
Unknown
1.2
Hazard symbols :

Corrosive
 Properties of Fluoric acid
Formula : HF
Name : Fluoric acid
Origin :
Gas dissolved in water
Nature :
Colorless liquid with a biting smell
Hazard : weak acid (≠ undangerous)
Corrosive en toxic
Evaporates very easily and dissolves the lungs.
R-sentences :
Passes through skin and affects bones.
S-sentences :
TLV-Value : 26/27/28-35
Rel. density : (1/2)-7/9-26-36/37-45
3 ppm
1.2
Hazard symbols :

Corrosive Toxic
 Symptoms HF injury:
diluted HF solution < 20%
• sometimes it can take up to 24 hours before
symptoms appear (pain, rash)
• results in deeper penetration and more painful
burn (especially at hands and finger tips )
• the surface symptoms are minimal and may be
absent
• sometimes white discoloration skin seldom blisters
forming
• HF solution >20%<49%:
• symptoms sometimes just noticeable after a few
hours!
 Symptoms HF injury:
HF 49%
• almost immediate deep throbbing pain,
burning feeling,(especially at hands and
finger tips)
• red discoloration with whitish blister
forming tissue under skin starts dying off
bone de-mineralisation
• Systematic fluoride intoxication
• painful treatment in hospital (plastic
surgery possible)
Hydrofluoric acid (HF) injuries
 First aid of HF burns
• emergency shower: immediately rinse
copiously with water (15 minutes)
• remove contaminated clothing
• a first-aid helper needs to treat the wound
with calcium gluconate gel and cover the
burn with plastic foil.
 Properties of Acetic acid
Formula : CH3COOH, HAc
Name : Acetic acid
Origin :
liquid dissolved in water
Nature :
Colorless liquid with a biting smell
Hazard : weak acid (≠ undangerous), very concentrated (100%)
Corrosive
Is nearly as acid as Sulfuric acid
R-sentences :
Always pour Acetic acid in water when diluting
S-sentences :
TLV-Value : 10-35
Rel. density : (1/2)-23-26-45
10 ppm
1.0
Hazard symbols :

Corrosive
 Properties of Nitric acid
Formula : HNO3
Name : Nitric acid
Origin :
Synthesis
Nature :
Colorless to yellow brown liquid with a biting smell
Hazard : strong acid, oxidyzing acid
Corrosive
reacts with all organic materials
R-sentences :
When diluting always pour nitric acid in water
S-sentences :
TLV-Value : 35
Rel. density : (1/2)-23-26-36-45
2 ppm
1.4
Hazard symbols :

Corrosive
Properties of HNO3/HF mixture
Formula : HNO3 / HF
Name : Nitric acid / Fluoric acid mixture
Origin :
IMEC
Nature :
Colorless solution with a biting smell
Hazard : strong acid, oxidizing acid
Application : Corrosive
Oxidises Si and Ge till SiO2 and GeO2
Afterwards Si and Ge are dissolved by the F– ions

HF gas escapes from the

solution ! ! !
Hazard symbols :

Corrosive Toxic
 Properties of Iodine
Formula : I2
Name : Iodine
Origin :
Solid
Nature :
Dark purple cristals of gray black flakes
Hazard : with a biting smell, oxidiser
Harmful
Properties comparable to those of chlorine
R-sentences :
Sublimates : transition from solid to gas
S-sentences :
TLV-Value : 20/21
Rel. density : (2)-23-25
0.1 ppm
4.93
Hazard symbols :

Harmful
 Properties of Colloidal SiO2
Formula : SiO2
Name : Colloidal Siliciumdioxide
Origin :
CMP Slurry (Polisher)
Nature :
Milky aqueaous solution
Hazard : Used in suspension with NH3
Irritating
Can dry up easily and create particles
R-sentences : Cancerogenic when inhaled
S-sentences :
20/21-45
TLV-Value :
Rel. density : (1/2)-24/25
10 ppm
1.1
Hazard symbols :

Irritating
Properties of Hydrogen peroxide
Formula : H2O2
Name : Hydrogen peroxide
Origin :
Synthesis
Nature :
Colorless liquid
Hazard : strong oxidiser
Corrosive
Can react vigorously in an alkaline environment
R-sentences :
reacts with all organic materials
S-sentences :
TLV-Value : 34
Rel. density : (1/2)-3-28-36/39-45
1 ppm
1.1
Hazard symbols :

Corrosive
Properties of Hydrocyanic acid
Formula : HCN
Name : Prussic acid – Hydrogen cyanide
Origin :
Gas dissolved in water
Nature :
Very toxic colorless liquid with a typical smell
Hazard : Metal baths in alkaline environment used for plating
Highly flammable
Formation of HCN-gas in acid environments
Complexes Fe in blood ( CO-toxification)
R-sentences :
S-sentences : Antidote : oxygen (Pneupac Toren 6)
TLV-Value : 12-26/27/28-50/53
Rel. density : (1/2)-7/9-16-36/37-38-45-60-61
10 ppm
1.1 Hazard symbols :

Highly flammable Toxic

Properties of Isopropylalcohol
Formula : CH3CHOHCH3
Name : Isopropylalcohol (IPA)
Origin :
Synthesis
Nature :
colorless liquid with a typical biting smell
Hazard : Organic solvent
Highly flammable and irritating
Flammable till explosive when mixed oxidising
R-sentences :
products (O2, HNO3, H2O2, I2, …)
S-sentences :
TLV-Value : 11
Rel. density : (2)-7-16
250 ppm
0.8
Hazard symbols :

Highly flammableIrritating