Escolar Documentos
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6, JUNE 1989
I. INTRODUCTION
p - SUBSTRATE
well processes [5]. Moreover, it is reported that in a
retrograde twin-well process it is possible to eliminate an
(d)
additional channel stop process [6].
Fig. 1. Process sequence of the new CMOS structure: (a) after phosphorus
The purpose of this paper is to present a self-aligned implant, (b) after boron implant, (c) after forming the shallow trench
retrograde twin-well structure with a buried p +-layer, which isolation with 0.5 pm depth, and (d) after forming n-channel and p-channel
gives a scalable CMOS structure for the very tight n+-to-p+ MOSFET’s.
spacing of 1.5 pm. This is achieved by a non-epi-CMOS
process based on high-energy implantation technology. for both n- and p-channel stop doping, and a buried p+-layer
11. FABRICATION SEQUENCE surrounding the n-well for achieving high CMOS latch-up
immunity. The novel step in this process is a single litho-
The basic fabrication sequence is shown in Fig. 1. This graphic step to define the retrograde n-well and p-well regions
consists of forming retrograde twin wells, which are also used and to create the buried p -layer using two high-energy ion
+
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LATERAL POSITION ( pm ) -
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Fig. 2. Simulated two-dimensional doping profiles. The 700-keV phos- 5 6 - I
phorus is implanted at a dose of 1.0 x l O I 3 cm-*. The 1.5-MeV boron is : I
implanted at a dose of 3.0 x lot3 They were subject to an anneal in . I
N2 at 1050’C for 2 h. 4 - I
I
I
which become p-wells. Its thickness is such as to allow the P + TO P-WELL I N + TO N-WELL
2-
boron implantation into the silicon region through the photore- I
sist for forming the retrograde p-well and buried p -layer +
0 1 1 I I I
under the n-well in the uncovered region. The 1.5-MeV boron 4 3 2 1 0 1 2 3 4
ions are implanted with moderate doses of 3.0 x 1013to 7.0
x lOI3 cm-2, which are known to avoid the generation of ACTIVE AREA TO WELL EDGE, d ( pm )
secondary defects, especially dislocation loops [7]. Using the Fig. 3. Isolation characteristics of the parasitic n-channel and p-channel field
same mask step, the retrograde n-well is formed by a second transistors as a function of the distance from the active region to the well
edge. The maximum test voltage is limited at 12 V.
700-keV phosphorus implant with a dose of 1.0 x l O I 3 cm-2.
The phosphorus implant is self-aligned to the p-well regions.
In the above range of boron doses, the reverse leakage current edge. Fig. 3 plots gate voltages defined by the subthreshold
of the n-well to the p-well was kept low, about 1.0 PA, in the leakage current of 1 pA/pm. The maximum test voltage is
test device with a large area of 2.1 x cm2 when the n- limited at 12 V to prevent very thin gate oxide. The results
well voltage is applied to 10 V. In this work, the shallow indicate that for the 1.5-pm n+-to-p+ spacing the leakage
trench isolation [8] was used with an isolation oxide thickness currents are < 1 pA/pm where the n+ poly gate bias is
of 0.5 pm. between - 10.0 and 12.0 V.
The simulation of Fig. 2 demonstrates doping profiles The CMOS latch-up immunity was characterized by mea-
achieved with the fabrication sequence shown in Fig. 1. A suring the latch-up switching point at which switching from
process simulator (SMART-P [9]) was used to design the the blocking state occurs [lo]. The switching points are
doping profiles of the retrograde twin well and the buried p +- determined as functions of the n+-to-p+ spacing and different
layer. It represents a cross section of the twin-well structure boron dose conditions. To clarify the latch-up immunity of the
proposed in this work, which has a 2-pm n+-to-p+ spacing on present CMOS structure, the switching points of this structure
the mask. The 1.5-MeV boron implant determines the two are compared with those of a retrograde n-well CMOS and a
peak concentration regions. One is centered at a depth of 0.8 retrograde n-well CMOS with a blanket implanted p + buried
pm below the silicon surface under the photoresist and the layer. The high-energy implantation conditions for these
other at a depth of 2.3 pm below the silicon surface in the n- CMOS structures are similar to those described in Section 11.
well region. The simulation result also indicates that the high The test devices have a diffusion width of 40 pm and a topside
concentration regions of the retrograde wells are effectively substrate contact. The experimental data and a schematic of
placed as channel stops for active device isolation. The the configuration are shown in Fig. 4.
channel stop processes are eliminated by using the tight spatial Fig. 4 shows latch-up switching currents for triggering due
profiles of the retrograde twin wells. to the forward-biased p + to n-well junctions. The present
CMOS structure provides the same latch-up immunity as the
111. DEVICE
CHARACTERISTICS retrograde n-well CMOS with the blanket implanted p + buried
The isolation characteristics of the present CMOS structure layer. The latch-up immunity depends on the device parame-
were estimated by measuring the current characteristics of the ters of the buried p+-layer, which are the concentration,
parasitic n- and p-channel field transistors formed between n- thickness of transition region, and depth [ 111. In comparison
channel and p-channel MOSFET’s. The gate was formed with with the retrograde n-well CMOS having a n+-to-p+ spacing
n+-polysilicon over field oxide. The experimental data and a of 1.5 pm, the latch-up switching current is increased by a
schematic of the configuration are shown in Fig. 3 as a factor of 8.8 for a boron dose of 3.0 x l O I 3 cm-2, and a factor
function of the distance from the active region to the well of 16.7 for a boron dose of 7.0 x 1013cm-2. The results also
~
282 IEEE ELECTRON DEVICE LElTERS, VOL. 10, NO. 6, JUNE 1989
A RETROGRADE n-WELL
”- ACKNOWLEDGMENT
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