KONGU COLLEGE

ENGINEERING

PERUNDURAI, ERODE.

Renaissance07 PAPER ON MEMS AND ITS APPLICATIONS

Presented by K.Devi (devikcse@gmail.com) D.Kokila (kokilababu@gmail.com) III-CSE-A

ABSTRACT: This paper is about MEMS, which is the recent technology introduced in every field. The main objective of this paper is to know about MEMS and its applications. Its biomedical application holds well in recent days. The paper explains some of the applications of MEMS. It mainly illustrates the switching architecture in optical communication, since the
MEMS

mirror switches are reliable than the digital electronic

switches; it has been illustrated about the three types of micro mirrors. The MEMSBased, Optical Identification and Communication System with bi-directional half-duplex communication from an interrogating transceiver hold well in hazardous environment. INTRODUCTION: A machine that is so small that it is invisible to the naked eye. The devices that is the size of grains with mechanical parts smaller than a dust mite (Fig. 1), and entering a realm where the dominating physical principles is no longer gravity and inertia, but are substituted by atomic forces and surface science. These micro machines being produced in batch sizes of thousands at a time, with cost of individual unit nearing zero. Welcome to the micro world, a place now occupied by a new technology known as MEMS, or more simply, micro machines. The word MEMS is an acronym for Micro-Electro-Mechanical System and generally refers to the devices that are on a millimetre scale with micro-resolution. MEMS are the integration of mechanical elements, sensors, actuators and electronics on common silicon substrate through the utilization of micro fabrication technology. MEM promises to revolutionize nearly every product category, thereby, making the realization of complete system-on-a-chip. In Microsystems, microelectronic integrated circuits (ICs) can be thought of as the brains of system and MEMS augment this decision-making capability with eyes and arms, to allow Microsystems to sense and control the environment. The sensor gathers the information from the environment through measuring mechanical, thermal, biological, chemical, optical, and magnetic phenomena. While the electronics process the information derived from the sensors and through some decision making capability direct

the actuators to response by moving, positioning, regulating, pumping, and filtering, thereby, are controlling the environment for some desired outcome or purpose. APPLICATION OF MEMS: This recent explosion in interest in the MEMS area could have been, in part, a result of the successful commercialisation of some high profile products like the Bubble Jet Printer Head. MICRO SENSORS BIOMEDICAL APPLICATIONS Micro and RF Switches
OPTICAL SWITCHING

MEMS-Based Optical Identification and Communication System (MOICS) Advanced simulation and modelling tools for MEMS design are The packaging of MEMS devices and systems needs to improve MEMS device design must be separated from the complexities of

TECHNICAL CHALLENGES: CHALLENGES urgently needed; considerably from its current primitive states; the fabrication sequences MICROSENSORS: There are quite selections of MEMS-based sensors that have been commercialised. One of the more common applications of MEMS sensors comes in the form of an accelerometer in the deployment of safety airbag in car. Some examples of MEMS sensors include (a) pressure sensors, (b) strain gauges, and (c) accerolometer for the measuring of acceleration and (d) gyroscope for the measurement of rotation. The airbag deployment sensor is one of the earliest uses of MEMS sensors in cars. Other possible use of the MEMS sensors includes the controlling of the amount of vibration on a car using the accelerometer together with the suspension system. Also by measuring the rotation of the car with the gyroscope, it is possible to judge whether the driver is losing control of the car, and hence the deployment of the braking system. Outside the car industry, the gyroscope can be used to check the rotations of essential

machine parts so as to prevent critical failure. Examples would be in the turbine of engine and power plants.

An used for activating the integration Airbag in Cars BIOMEDICAL APPLICATIONS:

A Pressure Sensor with IC

Another rapidly developing field of MEMS falls under the biomedical category. In this area, MEMS have the great potential in (a) the Biomedical Instruments and Analysis, and (b) Implants and Drug Delivery. Miniaturization of surgical and diagnostic instruments are done for reasons like Cost reduction Less intrusive surgical procedures, Health concerns, Reducing amount of test sample needed, e.g. blood, Speed of diagnosis, Patient recovery time and,

Miniaturization of medical instruments is of interest for a number of reasons, dependent on the application. In the case of surgical instruments, the decreasing size would mean a less invasive operating procedure for patient, which also would mean a faster rate of recovery for the patient. Furthermore, having micron-size instruments would mean that previously untreatable complication pertaining to neural and cell repair is fast becoming a thing of the past. Having the ability to shrink instruments to incredibly small sizes also means that previously relatively unskilled personnel on Credit-Card size devices can do time consuming and expensive diagnostic procedures. Similar in function to their room size cousin but smaller in cost, these MEMS-based devices will be able to do things like

DNA testing, blood testing and many more. And due to its size, only a small amount of test sample is needed for the diagnosis and to top it off, the decreasing cost of the device allows it to become disposable, hence reducing the chances of potential health hazard. Another area of potential beneficial application of MEMS-based devices in the biomedical field comes in the form of implants. The idea is to have a small drugdispensing device implanted into patients for the slow dispensing of drugs like antibiotics, etc. This method of slow dispensing will even out the dosage of drugs in the body as compared to that of popping pills and injections. Micro sensors for Pneumatic Biosystems Micro sensors for Chemical Biosystems Impedance Sensors Electrochemical Sensors Molecular-Specific Sensors Micromanipulators Micro pumps, and Micro valves, Micro filters, and Micro needles Surgical Micro instruments

MEMS ENABLES FAST, RELIABLE OPTICAL SWITCHING: Micro-mirrors are mirrors that have been "shrunk" down to the microscopic world. Lately, the design and fabrication of micro-mirrors has received much more attention than in the past. This is due to their ingenious application to the field of fiber optics. In

any optical network, be it phone lines, small office networks, or large university networks, most information is sent through optical fibre as beams of light that are either on or off, depending upon whether the piece of information is a 1 or a 0 in binary form. But, when the information needs to be re-routed (to a personal computer, for example) the information transmission process becomes a little more complicated. A switching station takes the incoming light beam, converts it into a digital signal, sends it to the fibre that is going towards the PC, then converts it back into a light beam, as shown below.

This is all well and good, but what exactly does it have to do with micro-mirrors? Well, wouldn't it be easier if, instead of having to convert the signal twice, one could simply have the signal reflect off something, automatically sending it to its correct destination? That's where micro-mirrors come in. By focusing the incoming light beam onto a micromirror, the beam will reflect off of it and be sent into another fibre. If, however, the micro-mirror has been actuated and is thus in an upright or slanted position, the incoming beam will be sent to a different outgoing fibre. By utilizing many of these micro-mirrors in sequence, all the incoming signals can be re-routed to their correct destination, without ever having to be converted into a digital signal! This means a huge saving of time, which corresponds to a higher network data transmission speed.

Rotational structure. APPLICATIONS:

Switching mechanism for photonic switches Retinal scanning system DWDM (MUX, DeMUX, Optical add/drop) Optical Switches, Amplifiers, and Isolators Variable Optical Attenuators Wave guide to Fiber Coupling

TYPES OF MICRO MIRRORS : 1D ARCHITECTURE 2D ARCHITECTURE 3D ARCHITECTURE WITH SCRATCH DRIVE

The 1-D architecture uses a mirror for each wavelength. A line array of micro mirrors integrated with dispersive optics separates DWDM wavelengths. A simple digital electronics an open loop configuration controls the micro mirrors. It uses a relatively common manufacturing process compared to 2-D, 3-D architectures; hence the cost is also considerably low.

A crossbar switch allows parallel communication

2D architecture actuators

In 2-D architecture, a two dimensional array of micro mirrors is arranged in a single plane. It can connect 'N' input fibers to 'N' outputs, hence also called N2 architecture since it uses N2 micro mirrors to address 'N' channels. To establish a path between two fibers, the corresponding mirror is activated while rest are disabled. All the light beams in the in the switch reside on the same plane and hence the probability of insertion loss is proportional to the port count.

2D ARCHITECTURE 2D architecture

3D ARCHITECTURE

The 2-D structure has limited scalability due to the chip size and the distance the light must through the free space. As the port count increases, both the chip size and free space travel will also grow as the square of the port count, resulting in an unacceptable level of losses due to diffraction. For instance, 16-port micro mirror structure requires 256 microns and associated fibre alignment/consystems. The free-space beam propagation distances among port-port switching are not a constant. Therefore in loss due to Gaussian beam propagation is not uniform for all ports. A typical 16*16 switching system suffers a loss of about 5 db.2-D optical switches are used in communication networks that require smaller port size. Mirror control for 2-D switches is binary, hence relatively 2-D switches is binary, hence relatively simple and straightforward. The switches are digital since mirror position is bistable or on/off. Hence 2D type OXC is also called digital OXC (OPTICAL CROSS CONNECT). Nearly all-micro mirror devices shipping today are 2-D MEMS also posses a flexibility in functionality by arranging the mirror differently. For instance these can be configured to function as arrays of 1*2, 2*2, N*M, 2*N, 1*N. The 2-D MEMS structure directly functions as a re-configurable wavelength add-drop multiplexed (WADM). The WADM consists of a wavelength de-multi-plexer separating the wavelengths from the input fibre, switching them to different output fibers.

The 2-D MEMS type ADM

have two rows of mirrors that operate simultaneously.

When mirror path is enabled, the incoming signal guided to the drop port and the corresponding adds port is coupled to the output port. If the mirror is disabled, the light signals travels straight from the input to the output port. 3-D MEMS, true engineering challenge, are known as the technology of the future. The 3-D micro mirror switch was first proposed in 1982 and its commercial version appeared only 4-5 years ago. 3-D MEMS devices achieve photo ionic interconnection in three-dimensionsional space. These use two degrees of freedom and can assume 'N' positions. The number of mirrors required to route all the signals simultaneously is a 2N as opposed to N2 mirror in 2-D architecture.An immediate advantage of 3-D architecture is that it can have port count over 1000*1000. Since it can tilt freely about two axes, each operates in analogue mode than binary modes in 2-D. Lucent's technology 3-D OXC using wave star Lambda router uses continuously tilt angle greater than +or-6. In the year 2000,Nortel made the first ever 3-D OXC called X-1000 to beat the 1000 port barrier. To attain multiple stable mirror positions, a closed loop servo system with feedback is necessary for each mirror which in turn, warrants large size, high power consumption and high cost. In addition like 2-D, it has to de-multiplex each wavelength oh the DWDM before assigning an output port of the OXC and multiplex again for retransmission. In spite of all these hurdles, 3-D MEMS scats hundred of ports in size and 1000 ports switches are coming to the scene, though in such dense port all-optical switches might never be necessary. An altogether different approach in 3-D class micro machined mirror is the scratch drive architecture proposed by AT&T Research Labs. Mirror based on SDA-type MEMS switches respond very fast and the translational movement is extremely precise compared to 3-D MEMS with two rotational axes. SDA employs a couple of push rods to lift the mirror, is attached to them through micro machined hinges. The translational movement of the translational plate is converted into a rotational movement onto the mirror The number of bias pulses applied to the SDA determines the plate translation distance and hence the degree of rotation the mirror with pushrods and hinge joints. Like two-axes 3-D MEMS, the mirror can be rotated to multiple angles

MEMS technology of this class is called free space micro-machined optical switch (FSMOS). MEMS-Based Optical Identification and Communication System

The MEMS-Based, Optical Identification and Communication System (MOICS), technology, that can identify friend or foe (IFF) or relay data from sensors in hazardous environments. MOICS comprises two types of components: Remote units with MEMS CORNER CUBE REFLECTORS, which reflect incident energy back to its source and can modulate the reflected signal An interrogator unit, which sends a
CODED OPTICAL LASER BEAM

to locate and

request information from the remote units The remote units will be small, lightweight, rugged, and environmentally sealed, and they will require minimal power because the interrogator transmits the signal energy. Moreover, they will not require expensive positioning systems because the interrogator can be based on common laser range-finding technology. Because MOICS operates at optical wavelengths, it can be eye safe, and the apertures for both the interrogator and remote units can be very small. As a LOS optical system with a low beam divergence, MOICS provides high angular and range resolution, thereby assuring specific target identification. The small beam divergence combined with a high data rate also makes MOICS a low probability of intercept (LPI) system. With cryptographic coding, MOICS would be one of the most secure communications capabilities on the battlefield.

An electrostatic micro CCR: The movable base mirror is tilted when at rest. Applying a voltage that pulls the mirror toward the substrate into a position orthogonal to the other two mirrors can modulate incident light. CCRs of this design have a bandwidth ranging from 0.2 to 2 kHz, with a driving voltage of 20 to 40 V. The key component of MOICS, the Tanner optical MEMS communication system, is the MEMS CCR (the microelectromechanical systems corner cube reflector). When its three mirrors are mutually orthogonal, any incoming radiation is reflected directly back to the source. A CCR can modulate the signaland thereby relay informationby tilting one of its mirrors. Because the area of each CCR mirror will be less than 0.1 sq.mm, the remote units will be very small. Our goal is to develop affordable MEMS CCRs that achieve MOICS performance specs (e.g., a bandwidth of 100 kHz) and that can be easily assembled MOICS COMMUNICATION: This test bed demonstrates bi-directional half-duplex communication from an interrogating transceiver (laser and photoreceptor) to a MOICS CCR unit and back. The MEMS-Based Optical Identification and Communication System (MOICS) provide secure bi-directional half-duplex communication between an interrogator unit and a remote unit that includes a corner-cube reflector (CCR). First, the interrogator transmits a modulated laser beam that encodes information (e.g., "Who goes there?"). The remote unit demodulates and decodes the signal Next, the interrogator transmits a modulated carrier beam (a raw uplink "supply" beam) that impinges on the remote unit CCR. The remote unit controller toggles the base mirror of the CCR, thereby adding further modulation ( ) and the remote unit data ( ) to the

beam reflected back to the interrogator. The interrogator extracts and decodes the data by isolating signals with the carrier modulation ( ) from other light sources such as the sun,

and isolating signals with the CCR modulation ( off of objects other than the CCR. CONCLUSION:

), to filter out reflections of the laser

Thus MEMS play an important role in the above-illustrated applications. Micro machining and MEMS technologies are powerful tools for enabling the miniaturization of devices useful in optical communication, biomedical engineering; MEMS based optical identification and communication systems. MEMS give a highly reliable optical switching.