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HIGHLIGHTS
● Anodic bonding is a very popular tool for MEMs (Micro Electronic Mechanical Systems)
devices.
● Many of MEMs devices use glass covers for protecting silicon structure in advance the
dicing process.
● The typical condition of the anodic bonding process is 400 to 600 C and 400-1000V.
● Borosilicate glass such as Pyrex is very popular as the bonding glass in this process, but the coefficient
thermal expansion (CTE) curve of borosilicate glass is not equal to that of silicon.
● The unmatched CTE causes compression or tension in between silicon and borosilicate glass.
● The thermal expansion of SW-series glass was carefully designed to match the CTE of
the MEMs silicon substrate.
● Over wide range of temperature thereby minimizing stress or compression loads.
● SW-YY glass can be bonded in lower temperature or voltage condition by adding Lithium with smaller
molecular diameter than Sodium as alkali component in glass.
● SW-YY glass was designed to minimize the compression or tension on glass wafer of MEMs
devices
● The bonding condition of SW-YY glass is 50C-100C lower than conventional borosilicate glass,
SW-3 and SW-Y.
Electrical properties
● Up to 6” Dia.
Ohm cm 10.6 10.7 10.3 11.9 100C
Log Volume Resistivity Ohm cm 8.3 8.3 7.8 9.4 200C
Dielectric Constant 6.1 6 6.3 4.6 R.T. , 1MHz
Loss Tangent 0.01 0.01 0.01 0.01 R.T. , 1MHz
Chemical properties
Acid Durability mg/cm2 0.30 0.16 0.09 0.01 1/100N HNO3 96C×20h Dipping
Alkali Durability mg/cm2 0.09 0.17 0.16 0.14 5% NaOH 80%× 1h Dipping
Water Durability mg/cm2 0.05 0.07 0.05 0.04 Deionized water 95C×40h Dipping
Others
Alkali - Component Na2O Na2O Li2O
Characters Standard TypeSimilar CTE Lower temp
w/ silicon bonding
Remarks: C - - - Degree Centigrade, Ohm -- The unit of resistance
1800
1600
1400
Expansion (ppm)
1200
SW-3
1000 SW-Y
800 SW-YY
PYREX
600
400
200
0
30 70 110 150 190 230 270 310 350 390 430
Temperature(C)
4
Expansion(X10-6/C)
SW-3
3.5 SW-Y
SW-YY
3 PYREX
Silicon
2.5
2
30 70 110 150 190 230 270 310 350 390 430
Temperature(℃)
Heater
Si Silicon: 4" X 0.5mm thickness
Glass Glass : 4" X 2.5mm thickness
SW-Y, PYREX
Not bonded
Not bonded