NEW Motion Analysis Microscope VW-6000

High-Speed Motion Analysis

Microscope
Slow down time for better observations

Now anyone can effortlessly capture high-speed motion

Introducing the industrys first microscope with high-speed magnified video capture capabilities
KEYENCE added high-speed video functionality to the imaging technology developed for the VHX Series digital microscopes to produce a completely new microscope with previously unheard of high-speed video capabilities.

[Industry First]

Motion Analysis
Microscope

Analyzing Hard Drive Head Behavior

NEW Motion Analysis Microscope VW-6000

[High-Speed Recording]

P.4

Industrys first high-speed microscope

Capable of high-speed motion recording of up to 24,000 fps. This enables accurate filming of highspeed motion which conventional microscopes cannot capture.

[Easy Setup]

P.6

Built-in light source and LCD monitor means setup takes just minutes.
Unlike conventional high-speed camera systems, there is no need to set up lighting and a monitor separately. The e-Guidance feature makes adjusting settings a breeze.

[Moving Target Analysis]

P.12

Easily quantify and analyze motion that was previously impossible.

[Magnified Observation]

P.14

Perfect as a portable microscope for on-site magnified observation.

New versatile style for any situation

On-site recording made easy

Magnified observation anywhere, anytime

High-Speed Recording

Capture high-speed phenomena

that conventional microscopes cant fully capture.

Industry First

High-speed mode
Up to 24,000 fps

Capable of high-speed recording of up to 24,000 fps. Easy observation of high-speed moving targets with microscopelike functionality. From checking the behavior of mechanisms on a production line to analyzing moving targets in research tests, the VW-6000 reliably captures high-speed motion in a variety of situations.

Drill

Footage of a drill rotating at high speed as it cuts into wood. Wood chips can be seen clearly as they are dispersed.

Dropped PCB

Capture flex and bounce as a PCB board is dropped.

Relay Contacts

Capture contact vibration. Changes in vibration can be clearly observed.

Popping Balloon

Footage of a water balloon exploding. The splash created the instant the balloon explodes is captured accurately.

In response to the widespread need to capture high speed phenomena, the VW-6000 includes high-speed video capture capabilities. High-speed recording of up to 24,000 fps makes it perfect for R&D on the factory floor or on a production line.

One controller for all applications

Supports both color and monochrome cameras

Image captured with a color camera
For situations that require color observation.

The VW-6000 supports both highly-sensitive monochrome cameras that are necessary for ultra high-speed observation and color cameras for situations where color is required. Cameras can be used separately with the same controller.

Image captured with a monochrome camera (highly-sensitive recording)

Highly-sensitive recording for ultra highspeed observation.

Color Camera Unit VW-100C

Monochrome Camera Unit VW-100M

Easily observe changes over time

Time Advance function

Observe changes over time in targets that move continuously. For example, record ten seconds of a production line moving at high speed once a day at the same time each day. By comparing multiple videos from the same time of the day, the user can easily identify changes from production start to finish.

First Day

After One Day

After Two Days

World First

Real-Time High-Speed Observation

Quick Preview Feature

Momentary Footage

High-speed recording and slow playback are automatically repeated within a short time, allowing real-time observation of high-speed phenomena.

Momentary Footage

Actual Video Play back content recorded at a specified frame rate at 5 frames per second.
Slow Playback Slow Playback

Playback

Easy Setup

No need for major equipment investment

Setup made easy

Space-saving specs are perfect for any on-site application

Stand alone design with built-in light source and LCD monitor
This is all the equipment you need to record high-speed video
Controller

The VW-6000 features built-in lighting and an LCD monitor - both items that are separate in conventional products. The system has been reduced to the bare essentials, eliminating the need to make large investments in equipment. With the VW-6000s space-saving specs, youll be surprised at just how easy it is to achieve high-speed recording even in on-site applications and laboratories where space is limited.

Supports USB 2.0

Supports LAN

Lens

Tripod

Hard Drive

Built-in Metal Halide Lamp

8.4" LCD Monitor

USB Port for PC

Two USB 2.0 Ports

Console Hyper Spot Lighting

Macro Zoom Unit

Conventionally...

Conventional configurations require a considerable amount of equipment.

Monitor

Lighting

High-Speed Camera

Conventional configurations for high-speed recording require a considerable amount of equipment including a monitor, camera tripod, lighting tripods and a PC, in addition to a high-speed camera. They are not practical if you want to record anywhere at any time.
Camera Tripod PC
Lighting Tripods

Conventional systems for high-speed recording require a considerable amount of equipment and take a long time to set up. The VW-6000 only has a controller, lens, and tripod. This revolutionary system with space-saving specs allows you to record when and where you need to. The VW-6000 provides the perfect solution to avoid the tedious preparations involved with setting up a conventional system.

Quick Adjustment Mechanism

Macro Zoom Unit

One of the most difficult aspects of high-speed recording has been adjusting the lighting appropriately. We took a completely fresh look at this issue and designed a macro zoom unit with built-in lighting. Lighting coverage and angle can be adjusted freely to suit the target.

Macro Zoom Unit 6x optical zoom

Quick Adjustment Mechanism

Lighting position can be adjusted according to obstacles around the target.

VW-Z1

Hyper Spot Lighting

Lighting zooms in sync with the field of view, ensuring optimum brightness.

Aperture Ring Focus Ring Zoom Ring

Access frequently-used functions from the console

Easy hand-held operation

MODE
Switches between Observation, Playback, and Record modes

Frequently-used functions are concentrated on this special console. The console provides easy, efficient operation by enabling high-speed recording at the push of a button - perfect for onsite multi-tasking.

MENU
Displays menus

ARROW KEYS
Move the cursor

ENTER
Selects an item

MULTI FUNCTION WHEEL READY / REC

Starts recording Advances frames/Changes parameters

CAPTURE
Captures a still image

SHUTTER SPEED
Switches between AUTO and MANUAL control

REWIND, PLAY, and FAST FORWARD WHITE BALANCE

Adjusts the image color

GAIN

Easy Setup

To simplify operation, follow the flow chart

Recording made easy

Industry First

Understand operational steps at a glance

e-Guidance Feature

The advanced interface simplifies the operational procedure. Simply follow the steps to configure the settings and perform highspeed recording. This makes for a simple and smooth operation, even for a novice.

Flow Chart Panel

Easily see which setup step you are on. Return to a previous step with a single mouse click.

Guide Panel
Displays detailed operating instructions and recording instructions relevant to the situation.

Operation Panel
Adjust the Operation Panel according to the instructions displayed in the Guide Panel. This makes it possible for anyone to easily perform high-speed recording.

The e-Guidance feature consists of the Flow Chart, Guide, and Operation Panels. This feature makes it easy to carry out complex operations.

Useful tips provide extra help

Tips are provided for more difficult operations. If you get stuck, try clicking here first.

Few people perform high-speed recording every day. The main design concept behind the VW-6000 was to provide operability that enables anyone, even first time users, to maximize performance each and every time.

Simple operation from setup to saving a finished project - Just follow the steps!

STEP 1

Initial Setup
The secret to successful highspeed recording lies in the initial settings. Follow the flowchart for instructions on how to do everything from selecting the right lens to securing the tripod and dedicated stand.

STEP 2

Recording Settings
After adjusting the position, zoom, and brightness, set a suitable shutter speed and frame rate for the moving target. Last of all, choose the trigger settings appropriate for the situation, and record.

STEP 3

Save the Settings

Save recorded content on the built-in hard drive. When saving, it is possible to specify the required range for recorded footage. This screen also allows the user to control playback speed from 1 fps and to check/analyze footage immediately after recording.

Easy Setup

Observation and analysis

Convenient support tools

Easy editing of high-speed footage

Video editing application

Easily edit recorded footage with high resolution from the controller or a PC. In addition to resizing and trimming footage, it is also possible to measure dimensions and load footage onto a desktop PC for detailed analysis after recording.

Image Resizing
It is possible to reduce the size of recorded footage

Image Trimming and Rotation

Resize recorded footage to a desired display resolution Video editing application

Still Image Extraction/Sequential Saving

Save a crucial moment as a sequence of still images.

VW-H1ME
Image Touch Up
Adjust the white balance, edge enhancement, and other settings.

Comment Input
Insert comments into recorded content.

Dimension Measurement
Provides the same dimension measurement function as the controller.

Comparative observation

Synchronized multi-file playback

High-speed footage can be compared in vertical, horizontal, or a four way split-screen display. This makes it easy to compare movements by displaying normal movement on the left side of the screen and current movement on the right side. All footage can be displayed in synchronized playback. It can also be rewound or fast forwarded in sync.

Vertical Comparison

Horizontal Comparison

Four-Way Comparison

10

The design of the VW-6000s editing software emphasizes easy processing of large video files. KEYENCEs editing software ensures that processing after recording is easy and that created data is easy to understand.

High-Speed Video

Extended-play recording

When recording targets that continue to move for long periods of time, up to 62 hours* of video data can be stored on the controllers built-in hard drive. This handy function is useful in a variety of situations. For example, when monitoring a production line during startup, and storing test data. *Recording time when using frame rate of 15 fps.

Record up to 62 hours of video footage

Data is stored directly to the hard drive

Flexible trigger
settings to suit any target

High-speed phenomena are recorded in a variety of situations. To accommodate this variation, the VW-6000 provides an assortment of different trigger settings.

Start Trigger
Trigger Stop

End Trigger
Trigger

Center Trigger
Trigger

Custom Trigger
Trigger

Under this setting, recording commences from the moment the trigger is activated. Start and stop times can be set as desired.

Under this setting, recording finishes from the moment the trigger is activated. Recording can be performed prior to the moment the trigger is activated.

Under this setting, recording is performed before and after the trigger is activated.

This setting is the same as the Center Trigger setting, except the duration of recording before and after the trigger can be set to a desired value.

A more efficient recording process

Reduced data saves time

The time and hassle involved with saving data have been significantly reduced thanks to support for JPEG 2000, a video communication application with original video editing features. Now anyone can easily edit video anywhere.

JPEG 2000 support - Time taken to save data reduced by 50%

The VW-6000 uses JPEG 2000 compression, which ensures high image quality and excellent compression. Data is compressed using a dedicated high-speed IC, reducing the time taken to save video by 50%. Large amounts of video data can be saved smoothly, significantly improving efficiency.

Video Communication Application

The VW-6000 transfers large amounts of high-speed video smoothly. Thumbnails can be checked on a PC allowing for easy management of recorded footage. Because the application can be copied, it can be used on multiple PCs.

11

Moving Target Analysis

Previously impossible

Quantifying motion

Flexible motion analysis

Moving target analysis software

The VW-6000 automatically tracks moving objects in recorded footage to quantify speed, distance, angle, and other measurements. This lets you analyze not only how a target is moving, but how far a target is moving.

Moving target analysis application

VW-H1MA

Video Display Window

Allows the operator to check changes at a specified point on the video.

Menu Window
Used to specify what to analyze.

Analysis Results
Simultaneous display of video footage and wave form graph data. It is also possible to synchronize playback of video footage and graph data, allowing the operator to accurately check specific values at points in the video where changes occur. By using actual figures and video footage to check axial wobble, robot arm behavior can be quantified. It is now possible to gain more accurate and reliable analysis results.
Played in sync with video. Accurately check graphs against images.

Principles of Moving Target Analysis

The movements of specified points in the video are tracked within the frame and position coordinates are calculated. As a result, distance and speed are calculated from time and XY calibration values.

Determine points to track in the first image.

When the video is played, the points are tracked.

Distance and speed are analyzed from the tracking results.

Results are graphed with time on the X-axis

12

Do you want to analyze speed, displacement, and how targets move? KEYENCE has the solution. Introducing a new approach to moving target analysis.

A variety of analytical tasks made easy

A diverse lineup of analytical functions

A variety of analytical methods can be conducted at the same time and displayed simultaneously within video footage. This enables motion to be quantified by providing a comparison of changes between normal and defective-state motion.

Points can be specified in a variety of ways to display target motion in graph form.

Individual Point

Two Points

Vertical Line

Between Two Lines

Angle Between Three Points

Analytical Methods X Coordinate

Graphs the amount of movement for the specified points in X coordinates over time.

Y Coordinate
Graphs the amount of movement in Y coordinates.

Displacement
Graphs displacement of the specified points.

Speed
Graphs changes in speed for the specified points.

The following analytical methods can also be performed:

Acceleration / Distance / Angle / Angle Speed / Angle Acceleration

The distance between two points, radius, parallel lines, and other measurements on a still image can also be performed at the same time.

Trajectory analysis feature uses line trajectory diagrams

The amount that specified points move can be displayed on video as a trajectory diagram. This lets the operator visualize amounts of movement.

PCB Drop Test

13

Magnified Observation

Portable microscope

Perfect for on-site magnified observation

Observe. Record. Measure. All-In-One Design.

Digital microscope features

All-In-One
Observe monitor
8.4" LCD

The VW-6000 capabilities extend well beyond simply recording high-speed video footage. Its compact body contains all the functionality required to perform magnified observation of still images.

All-in-one design inherited from previous models lets you observe, record, and measure.

Flexible observation angle Free-angle observation system VH-S30

Record drive

Built-in hard

A wide variety

Measure of measurement
features

Perfect for on-site observation. CMOS camera with maximum resolution of 2.7 megapixels.
The CMOS camera with maximum resolution of 2.7 megapixels takes high definition images even in on-site observation applications.

Connector (20x)

Solder (50x)

Semiconductor Bumps (500x)

14

Easier, more convenient magnified observation. Built-in LCD monitor, light source, and hard drive. Portable size makes it easy to use in any on-site location.

Compatible with KEYENCE microscope lenses

Full lens lineup

All lenses from the KEYENCE Digital Microscope VHX Series can be used with the VW-6000 for magnified observation. Choose from a lineup of over 30 types of lenses, including the RZ Lens Series, which boasts the best resolution in the industry. Select the perfect lens to match your application.

Real Zoom Lens

Best resolution in the industry RZ Lenses NEW

Employing high grade lenses, cutting-edge optical design and advanced lighting technology, RZ lenses for digital microscopes minimize chromatic aberration
VH-Z500R VH-Z100R

and distortion.

From the whole target to a magnified image

High-performance low-range zoom lens VH-Z00R

Compact size with high resolution

50x

Ultra-small, high-performance zoom lens VH-Z20R

High resolution and high depth of field

20

200x

Wide-range zoom lens VH-Z100R

100 1000x

The ultimate optical lens, with the best resolution in its class
VH-Z00R VH-Z20R

High-resolution zoom lens VH-Z500R

500 5000x

15

Magnified Observation

Advanced tools for superior imaging

Cutting-edge microscope functions

Peace of mind when observing targets with irregular surfaces

High quality depth composition

With the ability to obtain infinite depth of focus, observation time has been significantly reduced, even for targets that have irregular surfaces. High quality depth composition employs the hybrid D.F.D. method, which was perfected in the development of the VHX Series digital microscopes. This microscope easily produces high quality composite images.

A completely in-focus composite image is created by bringing the highest parts of the target into focus and moving down to the lowest parts, then compiling the images from these different height intervals.

Microchip (200x)

Simply move the lens down from top to bottom

Quick 3D display

Simply turn the focus adjustment dial to move the lens down and instantaneously display a 3D image of the target. The VW-6000 uses the same advanced technology employed by the VHX Series digital microscopes and provides ultimate ease-of-use.

Composition is completed instantly once the focus has been shifted from the highest part of the target to the lowest point.

Just turn the dial

Converted directly into a 3D image

Trimmer (200x)

16

The VW-6000 inherits technology used for KEYENCEs VHX Series digital microscopes. Conventional imaging challenges with microscopes, such as irregular or reflective surfaces, can be resolved with the push of a button.

Eliminate glare on targets

Halation Removal

Highly-reflective targets produce glare, making them difficult to observe. The VW-6000 uses two algorithms to remove this glare, making it possible to observe details on shiny targets. This significantly reduces time spent adjusting lighting to reduce glare.

Halation Removal - Two Algorithms

A.B.S. Algorithm
Detects the observation state of the screen as a whole, and adjusts brightness accordingly.

L.C.I. Algorithm
Improves contrast at the pixel level
Solder (150x)

in addition to adjusting overall image brightness.

Make on-screen measurements in real time

Measure dimensions
Distance Radius

Maintaining the ease-of-use established by the VHX Series digital microscopes, the VW-6000 allows for fast, accurate measurements at any time.

Center distance

X-Y distance

Length of perpendicular line

Measures the distance between two specified points.

The radius of a circle can be measured by specifying three points on the circumference.

Measures the distance between the centers of any two circles.

Distance between parallel lines

Measures the sides and diagonal of a rectangle formed by two pairs of parallel lines on the Xand Y-axes.

Calculates the length of perpendicular lines relative to a specified reference line.

Angle

Count

Area Measurement

Measurement Zoom
This useful feature enlarges the area surrounding points used when measuring

Calculates the distance between a specified reference line and a line running parallel to it.

Measures the angle formed by two specified lines.

Counts the number of specified points on the screen.

Calculates the area and perimeter length for a specified area.

dimensions from 2x to 9x. Measurement locations can be specified from the enlarged image, enabling more accurate dimension measurements.

17

Options

Free-Angle Stand
VW-S100A

Observation from any angle: Perfect for use with a wide range of equipment and devices
The Free-Angle Stand allows the camera and lens to be mounted at any desired angle. The camera is mounted on the pistol grip camera platform and the freely adjustable stand enables high-speed recording for a variety of locations.
643 mm 25.31"

The camera attachment arm has a movable range of 550 mm 21.65". The camera can be mounted to allow you to get closer to the target.

1558 mm 61.34"

The camera can be adjusted in any angle and nearly any position. Combined with the flexibility provided by the macro zoom units lighting, the free-angle stand opens up a new world of observation possibilities.

Macro Zoom Unit

VW-Z1
Standard zoom lens with built-in lighting. Provides 6x optical zoom.

VH Lighting Unit
VW-L1
A lighting unit that allows attachment of VH Series lenses.

A variety of lenses can be attached.

*Lenses sold separately.

Carrying Case
OP-84305

VW-VHX Cap
OP-87054
An adaptor that is used to connect the VHX/ VH Series fiber cable to the VW-6000/5000 controller.

VW Vertical Illumination Cap

OP-84306
An adapter that is used to connect the VW-6000/ 5000s fiber cable to the lighting unit of a coaxial vertical illumination zoom lens.

Close-Up Lenses
No. 1 (971932) No. 4 (971933)

Tripod
971931

18

Dimensions
Unit: mm inch

Controller VW-6000/VW-5000

256.2 10.09" 215.5 8.48"

410 16.14"

239.5 9.43"

Macro Zoom Unit VW-Z1

Color Camera Unit VW-100C Monochrome Camera Unit VW-100M

23.4

0.92

"

39 (42) 1.54"(1.65") 1/4-20UNC 139.5 5.49" 4-M3 137 5.39" 144.2 5.68" 60 2.36" 0.55" 14 42 1.65" 3 0.12"

0.55" 14 152 5.98"

18 0.71"

33 1.30"

1/4-20UNC

VH Lighting Unit VW-L1

Free-Angle Stand VW-S100A

23.4 0.92"

2-M3

1/4-20UCN

60 2.36" 66 2.60" 138.8 5.46" 0.28" 7 18 0.71"

17.5 0.69"

1558 61.34"

46.5 1.83" 135.2 5.32" 144.7 5.70"

643 25.31" 100 3.94" (Wheel movement range) 300 11.81" 450 17.72"

19

System Configuration Diagram

Macro Zoom Unit

VW-Z1

6x optical zoom

Standard close-up lenses No.2/No.3

Moving Target Analysis Application VW-H1MA Video Editing Application VW-H1ME Video Communication Application

RZ LENS*

High-resolution zoom lens

VH-Z500R*1

500x to 5000x

VW-6000
Supports USB 2.0 Supports LAN

Wide-range zoom lens

VH-Z100R*1

100x to 1000x VH Lighting Unit VW-L1 Color Camera Unit VW-100C Monitor

Ultra-small, highperformance zoom lens

VH-Z20R

20x to 200x PC

High-performance lowrange zoom lens

VH-Z00R

0x to 50x

Bayonet-type standard attachment*2 OP-51478

Monochrome Camera Unit VW-100M

LW LENS*3
Long-focal-distance, highperformance zoom lens
VH-Z50L*1 50x to 500x

VW-5000
Supports USB 2.0 Supports LAN

Compatible with all VH Series lenses, zoom lenses, fixed focal length lenses, borescope lenses, etc.
VH-F Bayonet-type C-mount attachment OP-51479

Two fiberscopes*4
VH-F61/VH-F111

*1 Requires VW Vertical Illumination Cap (OP-84306) or VHX Fiber Cable (OP-51480) and VW-VHX Cap (OP-87054). *2 Attachment for VH-Z50L/VH-Z100R/VH-Z500R/VH-Z450 is OP-51647. *3 Magnification on 15" monitor. *4 Requires attachment of VHX Fiber Cable Adapter (OP-51482) and VW-VHX Cap (OP-87054).

Optional

Close-up lenses No. 1 (971932) No. 4 (971933)

Free-angle stand VW-S100A

Tripod 971931

Free-angle observation system VH-S30

Anti-vibration, High-magnification observation system VH-S5

20

Specifications
y Controller
Model Size Screen size Pixel pitch Number of pixels Display color Brightness Semiconductor memory (For high-speed recording) Hard drive Video Still images Recording start input (TRG IN) Photo start input (CAPTURE) Still image input (PAUSE) Sync output (SYNC OUT) Video trigger output (TRG OUT) Service power supply (+12V) Analog RGB Type A Type B For external PC communication Voltage Power consumption Ambient temperature Relative humidity Controller Controller Easy recording Quick preview feature Extended-play recording Image touch up Comment display Timer recording Memory split Dimension measurement High quality depth composition Quick 3D display Moving target analysis VW-6000 Color LCD (TFT) 8.4" 170.4 (H) 127.8 (V) mm 6.71" (H) x 5.03" (V) 0.213 (H) 0.213 (V) mm 0.01" (H) x 0.01" (V) 800 (H) 600 (V) SVGA Approx. 16 million 350 cd/m2 (typical) 2 GB 160 GB (Includes reserved system space of 20 GB) Compressed: JPEG 2000 Uncompressed: Uncompressed AVI Compressed: JPEG Uncompressed: TIFF No-voltage input No-voltage input No-voltage input NPN open collector output NPN open collector output 12 VDC 100mA 1280 x 1024 or 800 x 600 pixels 4x For external PC communication (via communication application) RJ-45 (100BASE-TX) 100 to 240 VAC 10% 50/60 Hz 200 VA max. 5 to 40C 41 to 104F 35 to 80% RH (No condensation) Approx. 7.1 kg 410 (W) x 215 (H) x 230 (D) mm 16.14" (W) x 8.46" (H) x 9.06" (D) Yes Yes Yes (90 fps: max. 4 hr, 60 fps: max. 15 hr, 15 fps: max. 62 hr) Yes Yes Yes Yes Yes Yes Yes Yes (1 point track) VW-5000 Color LCD (TFT) 8.4" 170.4 (H) 127.8 (V) mm 6.71" (H) x 5.03" (V) 0.213 (H) 0.213 (V) mm 0.01" (H) x 0.01" (V) 800 (H) 600 (V) SVGA Approx. 16 million 350 cd/m2 (typical) 512 MB 160 GB (Includes reserved system space of 20 GB) Compressed: JPEG 2000 Uncompressed: Uncompressed AVI Compressed: JPEG Uncompressed: TIFF No-voltage input No-voltage input No-voltage input NPN open collector output NPN open collector output 12 VDC 100mA 1280 x 1024 or 800 x 600 pixels 4x For external PC communication (via communication application) RJ-45 (100BASE-TX) 100 to 240 VAC 10% 50/60 Hz 200 VA max. 5 to 40C 41 to 104F 35 to 80% RH (No condensation) Approx. 7.1 kg 410 (W) x 215 (H) x 230 (D) mm 16.14" (W) x 8.46" (H) x 9.06" (D) Yes Yes Yes (90 fps: max. 4 hr, 60 fps: max. 15 hr, 15 fps: max. 62 hr) Yes Yes No No No No No No

LCD monitor

Recording media Image format

Terminal block I/O

Video output USB 2.0 ports LAN ports Power supply Environmental resistance Weight Dimensions

Software

y Camera
Model Image receiving element Image element resolution Scanning system 250fps max. 500fps Maximum recording 1000fps 2000fps resolution (Maximum recording 4000fps 1 time* ) 8000fps 16000fps 24000fps Maximum recording pixels (When saving still images) Electronic shutter White balance Lamp Weight
*1 Recording time for VW-6000. *2 Recording time at 250 fps.

Lamp Lifetime Color temperature

VW-100C (Color Camera Unit) 1/2" CMOS image sensor 640 480 Progressive 640 480 (22.4 s*2) 640 240 (22.4 s) 256 256, 640 118 (26.2 s) 256 128, 640 58 (26.1 s) 128 120, 256 68 (28.0 s) 128 60, 256 34 (27.7 s) 64 50 (33.6 s) 64 32 (35.1 s) 1920 1440 (When using pixel shift) AUTO, MANUAL (1/30 to 1/870000 s), LONG SHUTTER (100, 200, 300 ms) MANUAL, PUSH-SET 60 W metal halide lamp 2000 hr (average) 8000 K Approx. 510 g

VW-100M (Monochrome Camera Unit) 1/2" CMOS image sensor 640 480 Progressive 640 480 (22.4 s*2) 640 240 (22.4 s) 256 256, 640 118 (26.2 s) 256 128, 640 58 (26.1 s) 128 120, 256 68 (28.0 s) 128 60, 256 34 (27.7 s) 64 50 (33.6 s) 64 32 (35.1 s) 640 480 AUTO, MANUAL (1/30 to 1/870000 s), LONG SHUTTER (100, 200, 300 ms) MANUAL, PUSH-SET 80 W metal halide lamp 2000 hr (average) 6400 K Approx. 420 g

y Detailed Modules
Controller Easy recording software Main/Area measurement software Depth composition 3D display software Camera setting image touch up software Comment input software Records and plays video and still images Sets and records video via flow chart Measures dimensions and area (VW-6000 only) Loads multiple, in-focus images of the target at various heights to create a single composite 3D image (VW-6000 only) Corrects images to make them easier to observe Enables comments including text or highlighting to be added to images

Software

21

Related Products

VHX is the best choice in terms of both image sharpness and comprehensive functionality.
Digital Microscope

VHX-600
The VHX Series employs advanced technologies in the lensing, camera, graphic engine, and in all other functions. The VHX-600 contains a newly improved graphic engine, which acquires images with high dynamic range. Welcome to a new era in observation and analysis.

World First Observation with ultra-high definition images

Quick processing to produce superior images

Compact 54 megapixel 3CCD camera*

Compact camera employs the worlds smallest drive mechanism using a piezo actuator. It also uses the Pixel Shift Method to control the CCD at the sub-pixel level and achieves maximum resolution of 54 megapixels for ultra-high definition observation.
*Achieves images with excellent color reproduction and ultra-high definition at 18 megapixels x 3CCD mode.

High-performance graphic engine

This high-performance graphic engine quickly processes complicated information to enable observation of profiles which could not be observed with conventional systems. It is ideal for magnified observation.

2.11 megapixels

Image processed with conventional engine

54 megapixels

Image processed with VHX-600

22

New Method More precise 3D display

Accurate D.F.D. Method

The VHX Series employs a new algorithm that picks up minute changes in texture to estimate height. In addition to providing the ability to create three-dimensional images from only a limited number of source images, the VHX improves observation speed and image quality.

Conventional

Accurate D.F.D.

3D profile measurement
* Function of the VHX-H2MK

Height color/scale display

* Function of the VHX-H2MK

The VHX-600 creates a 3D image based on automatically captured images, and it calculates height profile data on a desired measuring line. Height, width, and height difference data on the measuring line are plotted on a graph. Since the profile graph is related to the cursor position in the image display area, it is easy to see the current measuring point.

Color bars that indicate height are displayed on a 3D image. The highest position is displayed in red, and the lowest position is displayed in blue, allowing you to see a height difference at a glance. The height data can be superimposed on a raw image. Furthermore, the X-axis, Y-axis and Z-axis scales are calculated automatically and displayed according to the image size and the 3D rotation angle.

3D raw image

3D topographic image

Bump on semiconductor (3000x)

With the horizontal/vertical cursor, the height and width can be measured. The 2-line comparative mode can simultaneously display comparative analysis profile data on two parallel lines.
3D raw image + topographic image Grind stone (500x)

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The VK-9700 combines the convenience of an optical microscope with the advanced analysis capabilities of an SEM and a roughness gauge.
Ultra-deep color 3D profile measurement microscope VK-9700
y Observation magnification: 200x to 18000x y High resolution and large depth of field comparable to SEMs y Z-axis measurement resolution: 1 nm y Abundant analyzing functions, including profile and roughness y Applicable to large-size samples y Provides an image combination function that enables widevisual-field analysis

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