AD898 Overhaul Part III - Rev C

AD898 Overhaul Manual-Part III
OVERHAUL MANUAL AD898 AUTOMATIC DIE BONDER

Part III Module Assembly
REFERENCE REVISION
: M164-O3 :C
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THE INFORMATION HEREIN IS SUBJECT TO CHANGE WITHOUT PRIOR NOTICE

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ASM Office (Worldwide)

Should you have any inquiry about machine setup/operation, please contact the ASM office nearest to your area for assistance. ASM
Hong Kong ASM ASSEMBLY AUTOMATION LTD 4/F Watson Centre, 16 Kung Yip Street Kwai Chung, Hong Kong 16 4 Tel : 852-2619 2000 Fax : 852-2619 2118/9 China ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD 2/F, No.55 Qing Yun Road, Shanghai Zhangjiang HiTech Park, Shanghai, China Post Code: 201203 Tel : 86-21-5080 5465 / 5080 5466 Fax : 86-21-5080 5467 () 55 : 201203 Tel : 86-21-5080 5465 / 5080 5466 Fax : 86-21-5080 5467 ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD Suzhou Branch Office Block A, #05-03/06, No.5 Xing Han Street, Suzhou Industrial Park, Suzhou, China Post Code: 215021 () A 05-03/06 : 215021 Tel : 0512-67626278 Fax: 0512- 67626378 ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD Shenzhen Branch Office 7/F, Asia Light Building, West Wing No. 8, TaiRan Road 8, Block 503 TaiRan Industry & Commerce Zone, Chegong Temple FuTian District, Shenzhen, China () 8 8 503 7 : 518040 Tel : 86-755-8344 6365 Fax : 86-755-8344 6245 ASM MICROELECTRONICS TECHNICAL SERVICES(SHANGHAI) CO.,LTD DONG GUAN OFFICE Zhang Mu Tou Town, Dong Guan City, China () A A9,A10,A11 : 86-769-7125600, : 86-769-7125601 Taiwan ASM ASSEMBLY AUTOMATION (TAIWAN) BRANCH 10F, No. 530, Sec.2, Chung Shan Road Chung Ho City, Taipei Hsien Taiwan, R.O.C. 2 530 10F Tel : 886-2-2227 3388 Fax : 886-2-2227 3399 No. 4-2, East 3 Road Street N.E.P.Z. Kaohsiung Taiwan, R.O.C. 811 4-2 Tel : 886-7-367 6300 Fax : 886-7-367 6399 2/F, No. 9, Lane 379, Sec 1 Ching Kuo Road Hsin-Chu, Taiwan, R.O.C. 300 379 9 2 Tel : 886-3-543 1500 Fax : 886-3-543 1555 8F-1, NO. 135, Sec 2 Chung-Shan Rd, Tantzu Taichung, Taiwan R.O.C. Tel : 886-4-2535 6390 Fax : 886-4-2535 6820 Europe ASM ASSEMBLY PRODUCTS B.V. Jan van Eycklaan 10 3723 BC Bilthoven The Netherlands Tel : 31-30-229 8411 Fax : 31-30-225 0584 U.S.A. ASM PACIFIC ASSEMBLY PRODUCTS INC. 3440 East University Drive, Phoenix Arizona 85034-7200, U.S.A. Tel : 1-602-437 4760 Fax : 1-602-437 4630 West Regional Office 97 East Brokaw Road, Suite 100, San Jose California 95112-4209, U.S.A. Tel : 1-408-451 0800 Fax : 1-408-451 0808 Singapore ASM TECHNOLOGY SINGAPORE PTE LTD 2 Yishun Avenue 7 Singapore 768924 Tel : 65-6752 6311 Fax : 65-6758 2287 Malaysia ASM ASSEMBLY EQUIPMENT MALAYSIA SDN. BHD. Bayan Point, Block A, No: 15-1-23 Medan Kampung Relau, 11900 Penang, Malaysia Tel : 60-4-644 9490 Fax : 60-4-645 1294 ASM MUAR 17 Tingkat Satu, Jalan Mulia Satu Taman Sri Mulia, Sungai Abong 84000, Muar, Johor, Malaysia Tel : 60-6-951 5713 Fax : 60-6-951 5786 Thailand ASM ASSEMBLY EQUIPMENT BANGKOK LTD. 51/3, Vibhavadi Tower, 18/2 Floor Ngamwongwan Road, Ladyao, Chathuchak, Bangkok 10900 Thailand Tel : 66-2-941 3181/2 Fax : 66-2-941 3183 Japan ASM ASSEMBLY TECHNOLOGY CO LTD 5F, Tachikawa F-Bldg, 1-7-18, Nishiki-cho Tachikawa-shi, Tokyo 196-0022, Japan Tel : 81-42-521-7751 Fax : 81-42-521-7750 Korea ZEMOS KOREA INC./ ASM PACIFIC KOR LTD 3F, 628-6, Deung Chon Dong Kangseo Gu, Seoul, 157-030, Korea Tel : 82-2-538 5900 Fax : 82-2-561 5905 ASM PACIFIC KOR LTD. Rm501, 5F., Hi-Tech Center, 958-14 Daechon-dong, Buk-gu, Gwangju 500-470, KOREA Tel : 82-62-973 4174 Fax : 82-62-973 4216 Philippines CAPITAL EQUIPMENT DISTRIBUTION LTD 2108 Prime Street Corner Enterprise Street Madrigal Business Park Alabang, Muntinlupa City Philippines 1770 Tel : 63-2-850 4543 Fax : 63-2-850 4547
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Table Of Contents
CHAPTER 1
1.1 1.2
INTRODUCTION....................................................................... 1-1
AD898 Main Module List .......................................................................................... 1-1 Overhaul Flowchart ................................................................................................. 1-2
CHAPTER 2
2.1 2.1.1 2.1.2 2.2 2.2.1 2.2.2 2.3 2.3.1 2.3.2 2.4 2.4.1 2.4.2 2.5 2.5.1 2.5.2 2.6 2.6.1 2.6.2 2.7 2.7.1 2.7.2 2.8 2.8.1 2.8.2 2.9 2.9.1 2.9.2 2.10
MODULE ASSEMBLY ................................................................ 2-1

Bond Head Table .................................................................................................... 2-1 Bond Head Specification Check List ..................................................................................2-1 Bondhead Table Assembly .................................................................................................2-2 Bond Optic Table .................................................................................................. 2-10 Bond Optic table Specification Check List........................................................................2-10 Bond Optic Table Assembly..............................................................................................2-10 Workholder .......................................................................................................... 2-15 Workholder Specificaitons Check List ..............................................................................2-15 Workholder Assembly .......................................................................................................2-15 Epoxy Table ......................................................................................................... 2-27 Epoxy Writer Table Specification Check List....................................................................2-27 Epoxy Writer Assembly.....................................................................................................2-27 Ejector................................................................................................................. 2-32 Ejector Specification Check List .......................................................................................2-32 Multiple Ejector Assembly.................................................................................................2-32 Wafer Table ......................................................................................................... 2-42 Wafer Table Specification Check List...............................................................................2-42 Wafer Table Assembly......................................................................................................2-42 Wafer Ring Assembly (8 Wafer Ring)..................................................................... 2-45 Wafer Ring Specifications Check List...............................................................................2-45 Wafer Ring Assembly .......................................................................................................2-45 Wafer Expander Assembly ..................................................................................... 2-48 Wafer Expander Specifications Check List.......................................................................2-48 8 inches wafer expander assembly procedures ...............................................................2-48 Leadframe Loader................................................................................................. 2-51 Leadframe Loader Specification Check List .....................................................................2-51 Leadframe Loader Assembly............................................................................................2-51 Stack Loader ........................................................................................................ 2-54
CHAPTER 3 CHAPTER 4
4.1
TOOL LIST ............................................................................. 3-1 GREASE AND LUBRICANT......................................................... 4-1

Tools for Preventive Maintenance ............................................................................. 4-2
CHAPTER 5 CHAPTER 6
6.1 6.2 6.3 6.4 6.5 6.6
LOCTITE AND WHERE TO USE .................................................. 5-2 STANDARD LM GUIDE/CROSS ROLLER WAY ASSEMBLY .............. 6-2
Cross Roller Way..................................................................................................... 6-2 LM Guide ............................................................................................................... 6-5 A/C Bearing............................................................................................................ 6-7 Ballscrew ............................................................................................................... 6-9 Timing Belt........................................................................................................... 6-11 Coupling .............................................................................................................. 6-12
CHAPTER 7 CHAPTER 8
VOICE COIL & LINEAR MOTOR RESISTANCE .............................. 7-1 SCREW USAGES AND REQUIREMENTS ....................................... 8-1
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AD898 Overhaul Manual-Part III Revision History Record
Revision History Record

Revision A B C Initial Release Add tools and grease/ oil pictures Update the procedure and pictures on Ch2 and add voice coil and linear motor resistance on Ch7 Ch3, Ch4 & Ch5 Ch2 & Ch7 Revision Description Amended Section
AD898 Overhaul Manual Ch1 Introduction
Chapter 1
Introduction
Overhaul is a part of Machine Preventive Maintenance which refers to thorough examination followed by any necessary repairs. The need of overhaul mainly depends on machine utilization, requirements, operating condition and etc. In general, it could be done when the machine has been servicing for long time. It includes dismantle and assembly of main modules or the whole machine. This manual shows the overhaul procedures of main machine modules.
1.1

AD898 Main Module List

Bondhead Table Bond Optic Table Wafer Optic Table Workholder Epoxy Writer Table Ejector Table Wafer Table Wafer Expander Wafer Loader Stack Loader Leadframe Loader
Epoxy Writer Table
Bond Head
Stack Loader
Ejector Table
Wafer Expander
Part III 1-1
AD898 Overhaul Manual Ch1 Introduction
1.2
Overhaul Flowchart
Below flowchart gives the general procedure of overhauling AD898.
Design the overhaul plan
Are all the spare parts and tools ready? Yes

AD898/AD8912 Key modules for overhaul Bondhead Table 2.1 Bond Optic Table 2.2 Wafer Optic Table Workholder 2.3 Epoxy Table 2.4 Ejector 2.5 Wafer Table 2.6 Wafer Ring 2.7 Wafer Expander 2.8 Wafer Loader Leadframe Loader 2.9 Stackloader 2.10
No
Order necessary parts and tools
Check the key parts of modules and sub-modules and see if repair or replacement is needed
Perform modules disassembly, parts replacement and assembly
Is there any other module for overhaul? No
Yes
Machine integration and module alignment *Please refer to Intermediate Machine Setup Manual Device setup for bonding quality check *Please refer to Operation Manual
End
Part III 1-2
AD898 Overhaul Manual Ch2 Module Assembly
Chapter 2
2.1
Module Assembly
Bond Head Table 2.1.1 Bond Head Specification Check List

Item Description Specification/requirement Y axis LM Guide Note: Use THK AFF Grease 1 Y LM Guide parallelism <10m 2 Y LM Guide Block sliding force 100-400gf (each) 3 Y With YZ bracket sliding force 250-650gf Z axis LM Guide Note : Use THK AFF Grease 4 Z LM Guide parallelism <10m 5 Z LM Guide Block sliding force 30-130gf 6 Z LM Guide with loading (Z Back 200-450gf Plate) Y axis Ballscrew assembly Note : Use NSK LG2 Grease 7 Y axis ball screw forward preload A1=100-400gfcm, <=150gfcm 8 9 Y axis ball screw backward preload With loading (forward) A2=100-400gfcm, <=150gfcm Result
A11= A1+(150-200gfcm), <=150gfcm 10 With loading (backward) A22=A2+(150-200gfcm), <=150gfcm 11 Y axis and Z guide rail parallelism <=0.04mm Z axis Ballscrew assembly Note: Use NSK LG2 Grease 12 Z axis ball screw forward preload B1=100-400gfcm, <=150gfcm 13 B2=100-400gfcm <=150gfcm 14 With loading (forward) B11=B1+(150-200)gfcm, <=150gfcm 15 With loading (backward) B22=B2+(150-200)gfcm, <=150gfcm Z front guide LM Guide plate Note: Use THK AFF Grease 16 LM Guide preload 30-130gf (each) 17 No gap between the bearings and the Z Visual Check. The bearings should guide plate move at the same time and the torque increment cannot more than 20gfcm 18 Z moving distance 32-34mm Micro X cross roller ways Use: Staburags Grease NBU12/300KP 19 Cross roller ways sliding force 22-32gf Micro X play <0.002mm gap 20 Check play between cross roller way using 2kgf applied at one cross roller ways 21 Locking force for the M3 screw >= 15kgfcm Z axis ball screw backward preload
A1= <= A2= <= A11= <= A22= <= B1= <= B2 <= B11= <= B22= <=
Part III 2-1
22
Y axis Toque after install the Z front guide link with the Z bar
The Y axis torque will be increase less than 20m No folding <=-85Kpa Refer to setup manual Refer to setup manual
Others 23 Check wiring and cable 24 Vacuum reading 25 Micro X calibration 26 Bond head Y encoder calibration 2.1.2
Bondhead Table Assembly
Tools and Equipment Preparation 1) Grease gun 2) 6 G clamp 3) 100-1000gf gram gauge 4) 50-500gf gram gauge 5) 25-250gf gram gauge 6) 5-50gf gram gauge 7) Loctite #222 8) 4 & 6 Spanner 9) 1200gfcm torque driver 10) dial gauge: resolution 1um 11) Torque Driver (50 kgfcm) 12) MicroX Calibration Equipment Assembly Procedures 1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Add AFF grease into the Y and Z LM Guide Block as Figure 2-1 and Figure 2-2. 3) Check the Y LM Guide Block preload force with a gram gauge for each side should be 100-400gram and on Z LM Guide Block preload force should be 30-130gram. 4) Add LG2 grease into the Z ballscrew and Y ballscrew.
Figure 2-1 Add grease to Y LM Guide Block
Figure 2-2 Add grease to Z LM Guide Blocks
5) Use a G Clamp to clamp the Bond Head Y table LM Guide rail. Check the parallelism of the LM Guides if it is less than 10um and then tighten the six M4X14 with spring lock screws at 42kgfcm added with loctite#222 as Figure 2-3.
Part III 2-2
6) Use a G clamp to clamp the Bond Head Z table LM guide rail. Check the parallelism of the LM Guides if it is less than 10um and then tighten the four M3X12 with spring lock screws at 20kgfcm added with loctite#222 as Figure 2-4.
Figure 2-3 Use G clamp to fix Y LM Guide Rails
Figure 2-4 Use G clamp to fix Z LM Guide Rail
7) Install the YZ Bracket on the LM Guide Blocks using four M4X12 screws with springs added with loctite#222. 8) Check the sliding force on the Y LM Guide with the YZ Bracket with a gram gauge as Figure 2-5. The specification should be within 250 to 650gram. 9) Similarly, install the BH Back Plate on the Z LM Guide Blocks using sixteen M4X8 screws with springs added with loctite#222. 10) Tighten the Z table mount set screw with 2.5kgcm force. 11) Measure the Z LM Guide with gram gauge and the specification is within 200 to 450gram as Figure 2-6.
Figure 2-5 Check the YZ Bracket sliding force
Figure 2-6 Check the BH Back Plate sliding force
12) Assemble the parts in A as B shown as Figure 2-7 13) Measure the Y ballscrew preload force with a torque gauge. The specification is 100400gfcm and the variation is less than 150gfcm. 14) Install sub-assembly parts and the ballscrew as Figure 2-8. 15) Mount the part B onto the BH table.
Part III 2-3
Figure 2-7 Assembly the Y stopper
Figure 2-8 Assembly the Y ballscrew sub-assembly
16) Install the parts as shown in Figure 2-8 into the Y table LM guide as shown in Figure 2-9. 17) Do not tighten the screws. Slightly tighten the lock screws as shown in Figure 2-9 and then measure the torque with torque gauge. Rotate the ballscrew and then tighten the lock screws slowly if you get the lowest torque reading (250-600gram). The specifications for the torque variation within 150gfcm.
Lock screws
Figure 2-9 Check the driving torque of Y ballscrew
18) Similarly, install the Z ballscrew parts as shown in Figure 2-10 and Figure 2-11 to the Z base plate as Figure 2-12. 19) Rotate the Z ballscrew and slightly tighten the lock screw and monitor the torque and then tighten the lock screw to get minimum torque. The torque specification for the back and forth motion is within 100 to 400gfcm and variation is 150gfcm.
Figure 2-10 Assembly the Z ballscrew sub-assembly
Figure 2-11 Assembly the Z stopper
Part III 2-4
Figure 2-12 Install the Z ballscrew and stopper
20) After installing the ballscrew in the BH Z base plate and put the Z base plate assembly to the BH table base and rotate the ballscrew and adjust all the related lock screws so that the torque is within the specification. 21) Mount a dial gauge at the Y motion assembly as Figure 2-13. 22) Measure the parallelism of the Z guide rail respective with the Y LM guide. The specification is within 40um.
Figure 2-13 Check parallelism of Z Guide Rail respect to Y LM Guide
23) Assemble Figure 2-14 parts as shown in Figure 2-15.
Figure 2-14 Assembly the Z front guide CRW
Figure 2-15 Check the CRW sliding force
Part III 2-5
24) Adjust the set screw by torque driver and then measure the sliding force with a 50g gram gauge. The specification is between 22 to 32gf. 25) Assembly the LM guide onto the parts as Figure 2-16. Be careful of the LM Guide Block wont come out from the LM Guide. Or adding the stopper at both ends. 26) Put the Z clamp bearing assembly shown in Figure 2-16 onto the Figure 2-17. 27) Adjust the clamp bearing on the X plate guide. The gap should be zero between the bearings and the guide. After adjusting the clamp bearing, check the Y motion ballscrew torque again. The increased torque should not be larger than 20gfcm.
Clamp bearing
Stopper
Linear encoder read head

Figure 2-16 Assembly the LM Guide to Z front guide Figure 2-17
28) Install the Micro X read head and the electronic ruler shown in Figure 2-18 onto the Micro X position as shown in Figure 2-19.
Electronic ruler
Read head
Figure 2-18 Micro-X Encoder and Linear Scale
Figure 2-19 Check the Micro-X Waveform
29) Adjust the gap between the electronic ruler and read head to 1mm. 30) Connect the read head cable to PWM 8 and oscilloscope. 31) Adjusting the read head position until we can get required specification. (Note: the details calibration may refer to the setup manual) 32) Assemble pneumatics tube and parts as shown in Figure 2-20 and tighten set screws to avoid pressure air leakage. 33) Assemble the parts and wiring as Figure 2-21 to Figure 2-23.
Part III 2-6
Set screws position

Figure 2-20 Figure 2-21
Figure 2-22
Figure 2-23
34) Connecting all the wiring and pneumatics tubes in sequence as shown in Figure 2-24 to Figure 2-28.
Figure 2-24
Figure 2-25
Part III 2-7
Figure 2-26
Figure 2-27
Figure 2-28
Figure 2-29
35) Install the AC servo motor to the BH assembly as Figure 2-30.
Figure 2-30 Finished BH Table Assembly
36) Adjust the BHY Scan Head and Encoder Scale position by inserting a 0.8mm spacer between the scan head and encoder scale and then lock the screw and remove the spacer.
Figure 2-31 0.8mm Spacer
Part III 2-8
37) Adjust the following two screws of the encoder yaw adjustment block in up/down direction, until the gap is 0.8mm as in Figure 2-32.
Figure 2-32 Adjust the gap is 0.8mm
38) Adjust the following two screws of the encoder pitch adjustment block in left/right direction, until the green LED (of encoder) is ON throughout the traveling range of encoder scale as in Figure 2-33.
Figure 2-33 Adjust position until green LED is all the way ON
39) Adjust the reference mark such that when homing the read head to the reference mark should light red.
Part III 2-9
2.2
Bond Optic Table 2.2.1 Bond Optic table Specification Check List
Item Description Specification/requirement Result Y Optic table assembly Note: use AFF grease for LM Guide, NBU 12/300 KP grease for cross roller ways 1 LM Guide rail parallelism <10m 2 LM rails leveling <10m 3 LM Guide block preload 40-90gfcm (each) 4 LM Guide with loading (forward or backward) 150-400gfcm 5 Gap between linear motor and magnet 1.1~1.4mm 6 Cross roller ways sliding force 140-180gf 7 Y Table sliding force with loading 800gf 8 Leadscrew torque with loading 200-400gfcm 9 Y direction traveling distance <84mm 2.2.2
Bond Optic Table Assembly
Tools and Equipment Preparation 1) Gram gauge 2) Dial indicator 3) Feeler gauge 4) Torque gauge 5) Torque driver Assembly Procedures 1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Use 6 M4X12 screws with springs to mount the (OB) Magnet Mount onto the (OB) Table Base as Figure 2-34.
Figure 2-34 Mounting of Magnet Mount onto the Table Base
3) Use 4 M4X18 screws with springs to mount the (OB) Adj. Hard Stopper (L & R) to the (OB) Table Base as Figure 2-35.
Part III 2-10
Figure 2-35 Mounting of Adjustment Hard Stopper
4) Add AFF grease into the Y and Z LM block as Figure 2-36.
Figure 2-36 Greasing on the LM Guide Blocks
5) Check the LM preload force with a gram gauge. The specification should be within 40 to 90gf. 6) Use 10 M3X12 screws with springs to mount the LM Guide onto the (OB) Table Base. LM Guide with KB mark should put on the reference side. LM Guide Blocks without KB mark and with smooth side should face out. Parallelism of LM Guide should <10um. Leveling of LM Guide should <10um. 5 screws to KB side
Figure 2-37 Mounting of LM Guide onto the Table Base
7) Install the LM guide on the Y table. Tighten the lock screws with 20kgfcm force. 8) Use 16 M4X16 screws with springs to mount the (OB) Y Sliding Plate onto the LM Guide as in Figure 2-38. Parallelism of the (OB) Y Sliding Plate to the LM Guide should <0.01mm. Gap between them should be 1.1~1.4mm. Sliding force of the (OB) Y Sliding Plate should 800g.
Part III 2-11
Figure 2-38 Mounting of Y Sliding Plate onto the LM Guide
9) Install the magnet onto table. Be careful of the direction of the magnet. The five screw hole should be close to the reference surface as Figure 2-37. 10) Use 4 M4X12 screws with springs to mount the (OB) Fixed Hard Stopper (L & R) to the (OB) Table Base as in Figure 2-39.
Figure 2-39 Mounting of Fixed Hard Stopper
11) Use 2 M3X6 flat screws to mount the cable clamp onto the (OB) Table Base.
Figure 2-40 Mounting of Cable Clamps
12) Use 2 M4X12 screws with springs to mount the (OB) Y-Sensor Holder onto the (OB) Table Base as in Figure 2-41.
Figure 2-41 Mounting of Y-Sensor Holder
Part III 2-12
13) Use 2 M3X8 screws with springs to mount the (OB) Y Sensor Flag onto the (OB) Y Sliding Plate as in Figure 2-42.
Figure 2-42 Mounting of Y Sensor Flag
14) Assemble the linear motor as Figure 2-43. 15) Check the lighting of the linear encoder. Green light should be observed along the way. If red LED is on, adjust the linear encoder lock screw as shown Figure 2-43.
Set screw for encoder adjustment
Lighting position
Figure 2-43 Checking of Linear Encoder
16) Assemble the part A into part B through the cross roller as adjustment table as in Figure 2-44. Check the sliding force if within 140-180gf with the gram gauge. Set the force by adjust the set screws (let say 0.8kg) on the adjustable cross roller way. After that, use the torque driver to tighten all the screws. The torque should be 20kgfcm. 17) Assemble X-leadscrew and X-nut. The torque specification should be within 200400gfcm with the use of torque gauge as Figure 2-45. 18) Install all the parts as shown in Figure 2-46. 19) Make sure all the sensor flags cannot be crashed with the sensor. There should be signal only sensor flag cut in the middle of the sensor. The traveling distance of sensor flag Y should be kept less than 84mm. Part A
Part B
Figure 2-44 Assembly of Cross Roller Way
Part III 2-13
X leadscrew
Figure 2-45 Assembly and Check the Torque of the X Leadscrew
Figure 2-46 Finished Module
Part III 2-14
2.3
Workholder 2.3.1 Workholder Specificaitons Check List

Item Description Specification/requirement Result Left Workholder stand Note: NBU 12/300KP for cross roller ways and NSK Grease PS2 for ballscrew 1 Y Cross roller way sliding force 250-350gf 2 Z Cross roller way sliding force 150-250gf 3 Y leadscrew torque with loading 150-300gfcm 4 Z leadscrew torque with loading 150-300gfcm 5 Play check 10um Right Workholder stand Note: NBU 12/300KP for cross roller ways and NSK Grease PS2 for ballscrew 6 Y Cross roller way sliding force 250-350gf 7 Z Cross roller way sliding force 150-250gf 8 Y ballscrew torque with loading 150-300gfcm 9 Z ballscrew torque with loading 150-300gfcm Indexer Assembly Note: AFF Grease for LM Guide 10 LM Guide preload A1=30-100gf (each) 11 LM Guide after equipped with linear A11=A1+(0-100gf) motor 12 LM guide parallelism between datum 10um 13 LF support lower than the lower claw 10-30um jaw 14 Indexer lower jaw leveling with the <5um LM guide 15 Torque for the LM Guide lock screw 18kgfcm with some loctite#222 16 Torque for the Indexer lower jaw 8kgfcm lock screw 17 Torque for the Indexer Clamp screw 18kgcm 18 Torque for the Indexer wire clamp 15kgcm 19 Indexer clamp force in X direction 800gfcm (Use SOIC LF) 20 Indexer clamp force in Y direction 400gfcm (Use SOIC LF) 21 Indexer cable tension Move the indexer to the stopper and then release and the indexer cannot bound back more than 30mm 22 Gap between upper and lower jaw 1.6mm 2.3.2
Workholder Assembly
Tools and Equipment Preparation 1) Gram gauge 2) Dial gauge 3) Torque gauge 4) Torque driver
Part III 2-15
Assembly Procedures 1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Check the preload force of LM guides. The specification should be less than 30100gfcm for each LM guide. 3) Install the LM guides onto the index base. Tighten the screws. 4) Use the dial gauge to measure the parallelism which should be less than 10um as in Figure 2-47 and Figure 2-48.
LM guide
Figure 2-47 Check the parallelism of the LM Guide
Figure 2-48 Method of measuring parallelism
5) Install the four indexer clamps onto the LM guides. Tighten the screw with torque at 18kgfcm.
Indexer clamp
Linear encoder
LM guide
Figure 2-49 Sticking the Golden Scale
6) Install the linear encoder into the indexer clamp. Adjust the lock screw such that the encoder have green light without blinking all the way of the encoder. 7) Install the coil with the clamp and tidy up all the wires using wire support as Figure 2-50. Tighten the 2 M3X14 with spring lock screws with torque equals to 15kgfcm.
Part III 2-16
Wire support
Lock screws (2 M3X14 with spring washers)
Coil
Figure 2-50 Install the coil with the clamp
8) Install all the parts and wiring as shown in Figure 2-51 and Figure 2-52.
2 M3X8 Flat Screw
Figure 2-51 Connect the cables
Figure 2-52 Tide up the cables
9) Install two magnet bars as Figure 2-53 such that the coil is surrounded by the two magnets
Magnet bar
Reference mark Coil is located between two magnet bars
Figure 2-53 Install the magnet bars
10) Measure the parallelism of the three lower jaws. Use the lowest one as the reference as shown from Figure 2-54 to Figure 2-57. Adjust the other lower jaws in order to meet the specification. For single jaw, the parallelism should be less than 5um. The parallelism for all the lower jaw throughout the workholder should be less than 20um
Part III 2-17
Figure 2-54 Check the level on Input Indexer
Figure 2-55 Check the level on Dispense Indexer
Figure 2-56 Check the level on Dispense Indexer near mid way
Figure 2-57 Check the level on Bond Indexer

Input clamp lower jaw Dial gauge
Figure 2-58 Check the parallelism of the Input Indexer lower jaw
Part III 2-18
Figure 2-59 The parallelism of the single lower jaw should less than 5um
11) Install the leadframe support into the workholder as Figure 2-60. The leadframe support should be lower than the lower jaws by 10-30um.
Leadframe support
Figure 2-60 Checking the LF Support Level
12) Install the upper jaw with clamp plate using six M3 screws. 13) Install the clamp plate with index clamp such that the gap between upper jaw and lower jaw should be 1.6mm.
2 M3X8 Flat Screw Clamp plate
Figure 2-61
Part III 2-19
14) Adjust the linear encoder mount such that the encoder will off the light when pass the reference mark but green light throughout the workholder. 15) Check the distance between the reference mark and the home sensor should be 1mm 0.2mm. If not, adjust the home sensor mount to achieve the specification.
Home sensor
Position of reference mark
Figure 2-62 Adjust the Home Sensor Position
16) Install the double leadframe sensor and the sensor mount as Figure 2-63.
Double lead frame sensor and sensor mount
The right most wire is number 1 while the left most wire is number 5
Figure 2-63 Mount the Double LF Sensor
17) The wiring of the workholder was shown in the following Figure 2-64.
Part III 2-20
Figure 2-64 Wiring for the indexer clamp
Wire 1 Wire 2 Wire 3 Wire 4 Wire 5
Black colour Red colour Green/Black colour Blue/Black colour Red/Black colour
Clamp coil Clamp coil Linear motor Linear motor Linear motor
Figure 2-65
Figure 2-66
Part III 2-21
For the LF adjust assembly: There are two parts for the assembly. Y direction control the track width while the Z direction control the downset. 1. Clean all mechanical parts with alcohol and dustless paper or clothes. 2. Add grease into the cross roller with NBU 12/300KP. 3. Install two pairs of cross roller into the module as Figure 2-67. The force for Y direction should be 250gf-350gf while Z direction should be 150gf-250gf. Force can be adjusted by set screw at the side of cross roller.
Table Y Z direction cross roller
Y direction cross roller
Table Z Bed
Figure 2-67
4. Add grease to A/C bearing with NBU 12/300KP. 5. Install Y direction leadscrew into the table as Figure 2-68.
A/C bearing
Figure 2-68 Install the Y direction leadscrew
6. Add grease PS2 into the leadscrew. Install the Z direction leadscrew and A/C bearing. The torque should be within 100-300gfcm. Make sure the left bed and right bed have the same height.
Part III 2-22
A/C bearing
Figure 2-69 Z direction ballscrew
7. For Y direction: Add grease NBU 12/300KP into MC bearing. Tighten one side of bearing cover and then adjust the other side such that the worm shaft have torque between 150-300gf.
Worm shaft
Figure 2-70
8. For right side Z direction, assemble MC bearing and add grease with NBU 12/300KP. Adjust bearing cover such that the torque within 150-300gf.
Part III 2-23
Figure 2-71 Z direction right side
9. Install Z direction left side as mention in procedure 8.
Figure 2-72 Z direction left side
10. Check the parallelism of Y and Z table. The left and right stand maximum difference should be less than 0.03mm and the leveling should be less than 0.03mm as well. 11. As Figure 2-73, install the Z direction worm gear by using C-clamp to adjust the worm gear position such that the worm shaft and worm gear work smoothly.
Worm shaft
Worm gear
Figure 2-73 Z Direction Worm Gear
Part III 2-24
12. Install Y direction worm gear as mention in procedure 11.
Worm gear
Worm shaft
Figure 2-74 Install the Y direction worm gear
13. Check the total torque of the table should be within 150-300gfcm. If out of specification, adjust the position of worm gear.
Figure 2-75 Check the torque of the worm gear
14. Add PS2 grease into worm gear and worm shaft. Install the motors and sensors as Figure 2-76.
Left table
Right Table
Figure 2-76 Left and right WH stand
Part III 2-25
For the front track: 1. Assemble drop-off alignment clamp as shown in Figure 2-77.
Figure 2-77 Drop off alignment clamp
2. Install the dowel pin and flat screw onto the front track as Figure 2-78. Flat screw Dowel pin
Figure 2-78 Install the dowel pins and flat screws
3. Install the platform blocks.
Figure 2-79 Different Platform Blocks
4. Install the anvil blocks and measure the parallelism of the surface should be within 00-0.03mm. 5. Finished module as shown in Figure 2-80.
Figure 2-80 The finished front track module
Part III 2-26
2.4
Epoxy Table 2.4.1 Epoxy Writer Table Specification Check List

Item Description Specification/requirement Result X table Installation Note: AFF grease for LM, NSK PS2 or LG2 grease for ballscrew 1 X LM Guide parallelism <10um 2 LM Guide preload 50-150gf (each) 3 LM with loading 200-500gf 4 X ballscrew preload (forward) A1= 100-400gfcm, Max Range 150gfcm Variation 100gfcm 5 X ballscrew preload (backward) A2= 100-400gfcm, Max Range 150gfcm Variation 100gfcm 6 X ballscrew with loading A11=A1+50gfcm, Max Range 150gfcm (forward) Variation 100gfcm 7 X ballscrew with loading A21=A2+50gfcm, Max Range 150gfcm (backward) Variation 100gfcm Y table Installation Note: AFF grease for LM, NSK PS2 or LG2 grease for ballscrew 8 Y LM Guide parallelism <10um 9 LM Guide preload 100-400gf (each) 10 LM with loading 400-1000gf 11 Y ballscrew preload (forward) B1=100-400gfcm, Variation 150gfcm 12 Y ballscrew preload (backward) B2=100-400gfcm 13 Y ballscrew with loading B11=B1+50gfcm, Variation 150gfcm (forward) 14 Y ballscrew with loading B22=B2+50gfcm, Variation 150gfcm (backward) Z LM Guide Note: Use AFF grease for Z LM 15 LM guide block with loading 100-200gf 16 Z Spring force 3.1 - 4.65 KG 17 XY table leveling 30um 2.4.2
Epoxy Writer Assembly
Tools and Equipment Preparation 1) Gram Gauge (25-250gf, 50-500gf, 100-1000gf) 2) Torque Driver 3) Torque Gauge 4) Push & Pull Gauge 5) G Clamp Assembly Procedures 1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Add AFF grease into the LM Guide Block as Figure 2-81.
Part III 2-27
Figure 2-81 Adding grease to the LM Guide
3) Add NSK grease PS2 or LG2 into the ballscrew. 4) Check the parallelism of the two sides of the Y table. The parallelism should be less than 10um. 5) Check the preload force of the both X and Y LM guide by gram gauge. The X LM guide should be between 50-150gf for each LM guide block while the Y direction LM guide should be within 100-400gf. 6) After install the table, the table X sliding force is between 200gf-500gf while the Y table is 400-1000gf. 7) Check the torque of the ballscrew for both X and Y direction. For the X direction, the torque for clockwise and anti-clockwise direction should be between 100-400gfcm while variation less than 150gfcm. For Y direction, the torque for both clockwise and anticlockwise direction is 100-400gfcm while variation less than 150gfcm. 8) Install the LM guides with torque force 42kgfcm as Figure 2-82.
Figure 2-82 Install the LM guides
9) Assemble part A onto the LM guide as Figure 2-83. 10) Install the A/C ball bearing. Check the torque again and the specification is the LM guide torque plus 50gfcm while the variation is less than 150gfcm as Figure 2-84. Part A
Testing point
Figure 2-83 Put on the X table over the Y table
11) Install the ballscrew and then check the torque. The total torque should be A/C bearing torque plus 150-200gfcm while the variation less than 100gfcm as Figure 2-85.
Part III 2-28
Testing point for torque
Figure 2-84
Figure 2-85
12) Install the two LM guide on the X table as Figure 2-86. Tighten all the screws with torque at 20kgfcm.
Testing point for table Y direction
Figure 2-86 Check the Y driving torque with loading
13) Assemble part B onto the LM guide. Check the force of the table in X direction in both clockwise and anti-clockwise direction as the specification should within 200500gfcm as Figure 2-87. Testing point for table X direction
Part B
Figure 2-87 Check the X driving torque with loading
14) Install the ballscrew and bearing and check the torque. The specification is ballscrew preload torque plus 50gfcm with variation less than 100gfcm. 15) Check the overall torque. The specification is ballscrew preload torque plus 100150gfcm with variation less than 100gfcm. 16) Assemble the A/C bearing as Figure 2-88.
Part III 2-29
Figure 2-88 Assembly the A/C bearings
17) Check the preload force of the Z LM guide with specification between 100-200gf. 18) Install the Z-axis LM guide onto the table and tighten all the screws. The torque of the screws should be 20kgfcm. 19) Install Z-eccentric shaft and part C as shown in Figure 2-89.
Part C
Figure 2-89 Install the Z-eccentric shaft
20) Install part D onto the LM guides. Be careful that part D should stay near the reference side and then tighten all the screws. Check the force with the use of gram gauge. The specification should be within 100-200gf.
Part D
Figure 2-90
21) Install all the parts as shown in Figure 2-91. The spring force specification is 3.104.65kg.
Spring
Z-direction testing point
Figure 2-91 Part III 2-30
22) Push the X, Y table to the limits and check the parallelism of the Z-bracket should less than 0.03mm. 23) Assemble all the parts as shown in Figure 2-92 and Figure 2-93. Check the preload force of the cross rollers should within 130-170gf.
Figure 2-92
Figure 2-93
24) Arrange all the wires. 25) The below Figure 2-94 and Figure 2-95 show the finished epoxy writer.
Figure 2-94 Epoxy writer (1)
Figure 2-95 Epoxy writer (2)
Part III 2-31
2.5
Ejector 2.5.1 Ejector Specification Check List

Item Description Specification/requirement Result XY Table Assy Note: JoJoba oil for leadscrew, NBU 12/300 KP for cross roller ways 1 X and Y Table cross roller ways 10um parallelism 2 XY Table sliding force 200~600gf 3 Timing belt tension 230-300Hz (for 73-10522 grey one) 500-600Hz (for 73-10055 black one) 4 Z Up down mount Sliding force 65-85gf 5 Ejector pin up down sliding force 18-25gf 6 Up down cylinder cross roller 35-45gf ways sliding force 7 No play after installing the Visual check by camera or use dial ejector pin gauge to check 8 Ejector Vacuum -35KPa or 50cmhg 9 Ejector cam adjust to lowest When home sensor flag block the position sensor, the cam should at the lowest position. When turn 90 clockwise, it should be at the highest position. 2.5.2
Multiple Ejector Assembly
Tools or Equipment Preparation 1) Belt tension meter 2) Grease 3) Gram Gauge 5~50 Gram 4) Gram Gauge 10~100 Gram 5) Gram Gauge 50~500 Gram 6) Allen Keys (Metric) include 1.0mm one 7) Spanner 8) Hook 9) Shim Paper 10) Loctite# 222 Assembly Procedures 1) Clean all the part and cross roller ways with alcohol and dustless paper. 2) Add some anti-rusting grease on the cross roller way and appropriate grease on the cross roller. 3) Add small amount of loctite# 222 on set screws and lock screws. 4) Use 10 M3X10 screws with springs to mount the Cross Roller Way CRW2-75 (inner part) onto the (EJ) X-Plate Offset Knob as in Figure 2-96.
Part III 2-32
Figure 2-96 Install the Cross Roller Way onto the X Plate
Figure 2-97 Install the Fixed and Adjustable CRW
5) Use 5 M3X16 screws with springs to mount the Fixed Cross Roller Way CRW2-75 on the left hand side of the (EJUD) Ejector Base Offset Knob. And put the together with the adjustable CRW on the right and use 5 M3X16 screws with springs to fix its position as in Figure 2-97.
Figure 2-98 Adjust the set screw to get the correct sliding force
6) Use 5 M3X6 set screws to adjust the sliding force of around 200~600g as in Figure 2-98. After adjusting the sliding force, tighten the lock screw with torque at 20kgfcm.
Figure 2-99 Install the CRW onto the X-Adjust Screw and Y-Block Assy.
Part III 2-33
7) Use 6 M3X10 screws with springs to mount the Cross Roller Way G2-45 (inner) onto the (EJ) X-Adj. Screw and Y-Block Assy as in Figure 2-99. 8) Install springs and leadscrew at the ejector base as shown in Figure 2-100.
Spring
Leadscrew
Figure 2-100 Install the spring and leadscrew
Figure 2-101 Install the fixed and adjustable CRW
9) Use 3 M3X8 screws with springs to mount the Fixed Cross Roller Way G2-45 onto one side of the (EJ) X-Plate Offset Knob. Then, put together the (EJ) X-Adj. Screw and Y-Block Assy. with the adjustable Cross Roller Way G2-45 on the other side and use 3 M3X8 screws with springs to fix its position as in Figure 2-101. 10) Use 3 M3X6 set screws to adjust the sliding force of around 200~600g as in Figure 2-102.
Part III 2-34
Figure 2-102 Adjusting the sliding force by these 3 set screws
11) Use 2 M4X16 screws with springs to mount the (EJ) X-Adj. Screw onto the Y-Block Assy. as in Figure 2-103
Figure 2-103
12) Insert the (EJ) Y-Adj. Screw with 2 springs mount onto the (EJUD) Ejector Base as in Figure 2-104.
Figure 2-104
13) Use 2 M3X10 screws with springs to mount the Nut Assy. onto the (EJUD) Ejector Base as in Figure 2-105.
Part III 2-35
Figure 2-105
14) Use 2 M4X16 screws with springs to mount the (EJ) Y-Adj. Screw onto the (EJUD) Ejector Base as in Figure 2-106.
Figure 2-106
15) Use 6 M4X12 screws with springs to mount the Cross Roller Way 3-75 (inner) onto the (EJ) Z-Base as in Figure 2-107.
Figure 2-107 Mount the CRW onto Z-Base
Figure 2-108 Check the sliding force
16) Use 6 M4X12 screws with springs to mount the Cross Roller Way 3-75 (outer) to the (EJ) Z-Slide Plate. Use 3 M4X8 set screws to adjust the sliding force of around 65~85g as in Figure 2-108. 17) Install the up-down controlling cross roller ways as Figure 2-109. Use 2 M4X8 set screws to adjust the sliding force of around 35~45g as in Figure 2-110.
Part III 2-36
Figure 2-109 Up/down control CRW assy
Figure 2-110 Adjust the set screw for the sliding force
18) Use 2 M4X12 screws with springs to mount the (EJ) Up/Down Wedge (Figure 2-111) to the Cross Roller Way CRWM 3-50 (inner) as in Figure 2-112.
Figure 2-111 Up-down wedge
Figure 2-112
19) Insert the (EJ) Up/Down Sensor with Cylinder Module to the (EJ) Up/Down Wedge and lock the 2 nuts as in Figure 2-113.
Figure 2-113 Lock the cylinder module
20) Use 4 M5X18 screws with spring to mount the (EJ) Z-Base to the (EJ) X-Adj. Screw and Y-Block Assy.
Figure 2-114 Mounting the Z-Base
Part III 2-37
21) Use 2 M5X10 screws with springs to mount the (EJ) Up/Down Sensor with Cylinder Module to the (EJ) Z-Base as in Figure 2-115.
Figure 2-115 Lock the cylinder
22) Assembly the ejector pin (sliding base) module and mount to the Column Body from Figure 2-116 to Figure 2-121. Adjust the cross roller ways sliding force to 18-25gf. Put some grease on the shaft and around the O-ring.
Figure 2-116
Figure 2-117
Figure 2-118
Figure 2-119
Figure 2-120
Figure 2-121
23) Use 4 M3X8 screws with springs to mount the spacer (left), CAM (A), spacer (right), lock nut, cam shaft, flag mount 270deg to the (EJ) Column Body as Figure 2-122.
Part III 2-38
Figure 2-122 Install the cam shaft
24) Use 2 M3X8 flat screws to mount the (EJ) Fork Sensor Mount onto the (EJ) Column Body as in Figure 2-123.
Figure 2-123 Mount the sensor on the column body
25) Use 4 M3X6 screws with springs to mount the Cover to the (EJ) Column Body as in Figure 2-124.
Figure 2-124 Mount the cover
Figure 2-125 Mount the Top Flange
26) Use 3 M3X6 screws with springs to mount (EJ) Top Flange onto the (EJ) Column Body as in Figure 2-125. 27) Put on the (EJUD) MP Ejector Kit over the (EJ) Top Flange and use 2 M4X5 set screws to fix it as in Figure 2-126.
Part III 2-39
Figure 2-126 Put on MP Ejector Kit
28) Use 4 M4X14 screws with springs to mount the (EJ) Column Body to (EJ) Z-Slide Plate as in Figure 2-127 and Figure 2-128.
Figure 2-127
Figure 2-128 Mount the column body to Z-Slide Plate
29) Use 2 M3X5 set screws to mount the (EJ) Driven Pulley (AT3/40) to the Cam Shaft.
Figure 2-129 Mount the Driven Pulley
Figure 2-130
Part III 2-40
30) Use 2 M4X12 screws with springs and 2 M4X6 flat screws to mount the (EJ) Motor Mount (Servo) to the (EJ) Z-Slide Plate as in Figure 2-130. 31) Use 4 M4X14 screws with springs to mount the (EJSV) 8912 Electrical Assy. to the (EJ) Motor Mount (Servo). Note: New module will equip with servo motor instead of stepper motor as in Figure 2-131.
Figure 2-131 Mount the motor
32) Align the pulleys with timing belt so that they are parallel with each other. 33) Adjust the timing belt tension until the belt tension meter reading is from 230300Hz.(note: If you have no belt tension meter, you may use a cable tie round on the motor body and pull it with 5 to 6 kg force and then tighten the screws). 34) Install all other ejector parts as Figure 2-132 and Figure 2-133.
Figure 2-132 Ejector table (1)
Figure 2-133 Ejector table (2)
Part III 2-41
2.6
Wafer Table 2.6.1 Wafer Table Specification Check List

Item Description Specification/requirement XY Table Assy Note AFF Grease for the LM Guide 1 X LM rail parallelism 10um 2 X LM guide preload 100-450gf (each) 3 X LM guide with loading Initial sliding friction 1000-2000gf Dynamics sliding friction 1000-1400gf 4 Y LM rail parallelism 10um 5 Y LM guide preload 100-400gf (each) 6 Y LM guide with loading Initial sliding friction 1000-2000gf Dynamics sliding friction 1200-1600gf 7 Check the linear encoder Refer to manual 2.6.2 Result
Wafer Table Assembly
Tools and Equipment Preparation 1) Gram gauge 2) Feeler gauge 3) Torque gauge 4) Torque driver Assembly Procedures 1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Install the LM guide onto Y-table base. Tighten all the screws with torque at 40kgfcm. Be careful that the KB mark of the LM guide should face to the reference side. 3) Check the LM guide preload force should be within 100-450gf (each block) with gram gauge.
Stopper
KB
Figure 2-134 Y table
4) Install the LM guide onto X table. Reminded that the LM guide without KB marks should face the reference side. Tighten all the screws with torque at 40kg. 5) Check the preload force of the LM guides should be between 100-450gf. 6) Turn the X table upside down and then install the coil as shown in Figure 2-136. 7) Put the X table onto the LM guides of the Y table.
Part III 2-42
8) Install two magnet bars into the Y table as shown in Figure 2-137. Tighten the screws with torque at 40kg. The gap between the coil and magnet bar should between 1.11.4mm 9) Check the sliding force of LM guide on Y table. The specification should be within 1200gf-1600gf.
KB
Figure 2-135 X table
Wafer table left coil
Reference side Wafer table right coil

Figure 2-136 Y direction linear motor coil
Coil X table
Magnet bar
Figure 2-137 Y direction magnet bars
Part III 2-43
10) Turn expander table upside down and install the coil onto the table. 11) Install expander table onto the LM guides of the X table and put the magnet bar into X table. The gap between the coil and magnet bar should between 1.1-1.4mm. 12) Check the force of the X table with gram gauge. The specification is within the range 1000gf-1400gf.
Expander table
Magnet bar
Figure 2-138 X direction magnet bar
13) Install the linear encoders on both X and Y table. The gap between the encoder and the electronic ruler should be equal to 0.8mm. Adjust the linear encoder mount such that green light must observe through the whole traveling distance and no blinking should be seen.
Linear encoder
Electronic ruler
Figure 2-139 Linear encoder and golden ruler
14) Connect all the wires and check the sensors flag should cut the sensor exactly at the middle of the fork sensor.
Part III 2-44
2.7
Wafer Ring Assembly (8 Wafer Ring) 2.7.1 Wafer Ring Specifications Check List
Item 1 2 3 2.7.2 Description Ring rotation timing belt Theta motor timing belt tension Rotational sliding force Specification/requirement 110-150Hz (by belt tension meter) 250-400Hz (by belt tension meter) 500-1000gf Result
Wafer Ring Assembly
Tools or Equipment Preparation 1) Gram gauge 100-1000gfcm 2) Belt tension meter 3) Grease 4) Loctite# 222 Assembly Procedures 1) Clean the (WE) 8 rotational ring as in Figure 2-140 and Figure 2-141. 2) Put on the bearing onto the bottom part of the rotational ring and make sure the bearing direction such that the balls of the bearing can be seen on bottom of the rotational ring as in Figure 2-142 and Figure 2-143.
Figure 2-140 (WE) 8 Rotational Ring Top View
Figure 2-141 (WE) 8 Rotational Ring Bottom View
Figure 2-143 Balls of the Bearing
Figure 2-142 Bearing KC-110XPO
3) Put the (WE) bearing clamp plate 2 on the bottom of the rotational ring as in Figure 2-144 and tighten the 16 M3X4 flat screws with Loctite# 222 as in Figure 2-145.
Part III 2-45
M3X4 Flat Screw (WE) Bearing Clamp Plate 2 Ring Home Sensor Flag
Figure 2-144 Put on the (WE) Bearing Clamp Plate2
Figure 2-145 Tighten the 12 M3X4 Flat Screws
4) Put the rotational ring onto the expander frame as in Figure 2-146 and Figure 2-147. Make sure the timing belt is already attached to the rotational ring.
Figure 2-146
Figure 2-147 Put on the Rotational Ring
5) Put on the 12 (WE) bearing mount plates to fix the rotational ring by using M3X4 flat screws (2 for each plate) with Loctite# 222 to tighten it as in Figure 2-148 and Figure 2-149. 6) Check the rotational sliding force using the gram gauge if it is within 500 to 1000gf as in Figure 2-150.
Figure 2-148 Put on the bearing mount plates Figure 2-149 Put on the M3X4 Flat Screws
Figure 2-150 Check the Rotational Sliding Force
Part III 2-46
7) Mount the (WE) theta motor assembly and the (WE) idler bracket on the expander frame as in Figure 2-151. 8) Adjust the idler bracket position until the timing belt tension is within 110-150Hz as shown in Figure 2-152. 9) Install the theta motor timing belt and then adjust the belt tension so that it can be within the range 250-400Hz as in Figure 2-153.
Figure 2-151 Mount the Theta Motor Assy and the Idler Bracket
Figure 2-152 Adjust the Timing Belt Tension (Large)
Figure 2-154 Finished Wafer Ring Assembly
Figure 2-153 Adjust the Timing Belt Tension (Small)
Part III 2-47
2.8
Wafer Expander Assembly 2.8.1 Wafer Expander Specifications Check List

Item Description 8 Inch Wafer Expander 1 Timing belt tension 2 2.8.2 Top plate leveling Specification/requirement 165-195Hz <100um for 4 leadscrew location Result
8 inches wafer expander assembly procedures
Tools or Equipment Preparation 1) Belt tension meter 2) Loctite #222 Assembly procedures 1. Install all the pulleys and timing belt on the wafer expander ring base as in Figure 2-155. Note: You should add some Loctite #222 onto the pulley screw nuts. 2. Check the timing belt tension with the belt tension meter and adjust the tension by turning the tensioner shaft shown as in Figure 2-156 to Figure 2-158. Loosen the lock screw first Then, turn this screw to adjust the tensioner shaft
Figure 2-156
Figure 2-155 Put on the pulleys and timing belt
Figure 2-157 Adjust the tension (1)
Figure 2-158 Adjust the tension (2)
3. Install the top plate onto the 8 bottom disk as shown in Figure 2-159. Make sure the ring open/close sensor flag sit in the slot on the bottom disk as in Figure 2-160.
Part III 2-48
Figure 2-159 Put on the top plate
Figure 2-160 Align the ring open/close sensor flag slot
4. Put on the four leadscrew assembly onto the top plate and screw a little bit onto the pulleys as shown in Figure 2-161 and Figure 2-162.
Figure 2-161 Put on the leadscrew assy
Figure 2-162 Screw in a little bit of the leadscrew assy
5. Put on the leadscrew cover over the leadscrew assembly and tighten a little bit on the 2 M4X5 flat screw as shown in Figure 2-163. Use a screw driver to adjust the height of the top plate by turning the leadscrew such that the level on the top plate is the same on the ring as shown from Figure 2-164 to Figure 2-166.
Figure 2-163 Hand tighten the leadscrew assy
Figure 2-164 Adjust the top plate level
Figure 2-165 Check the level (1)
Figure 2-166 Check the level (2)
6. Put back the top cover of the wafer expander. Align on the 3 guide pins at the back as shown in Figure 2-167 and Figure 2-168. Tighten the eight M3X8 lock screws (4 on left and 4 on right) with spring and flat washers as shown in Figure 2-169 and Figure 2-170.
Part III 2-49
Figure 2-167 Back of the wafer expander
Figure 2-168 Put on the top cover
Figure 2-170 4 lock screws on right Figure 2-169 4 lock screws on left
Figure 2-171 8 Wafer Expander
Part III 2-50
2.9
2.9.1
Leadframe Loader Leadframe Loader Specification Check List

Specification/requirement Result 200-300gf (each) 800-1500gf 80-120Hz Visual Check Visual Check
Item Description Y Pick Arm Assembly Note: AFF 1 Pick Arm LM Guide preload 2 Pick Arm LM Guide with loading 3 Y Arm Timing belt 4 Check Solenoid Valve Function 5 Check Sensor function 2.9.2
Leadframe Loader Assembly
Tools and Equipment Preparation 1) Gram gauge 2) Torque gauge 3) Torque driver Assembly Procedures 1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Assemble A/C bearing as in Figure 2-172. 3) Install the motor and A/C bearing onto the base as shown in Figure 2-173. 4) Install the timing belt. The timing belt and the pulley should be parallel. The timing belt tension should within 80-120Hz.
Figure 2-172 Install the Motor and A/C Bearing
Figure 2-173
Figure 2-174 Install the Timing Belt and check the tension
Part III 2-51
5) Check the preload force of LM guide which between 200-300gf. 6) Add grease AFF onto the LM guide. 7) Install the LM guide onto Y arm and tighten the screw with torque equal to 40kgfcm as Figure 2-175.
Figure 2-175 Checking the sliding force of the LM Guide without loading
8) Install Y arm onto the base mount. Check force of the LM guide with gram gauge. The force should between 800-1500gf as in Figure 2-176.
Use gram gauge to check the force
Figure 2-176 Checking the sliding force of the LM Guide with loading
9) Connect the Y arm with the timing belt and the motor. Make sure all the parts can move smoothly without missing step. 10) Assemble all the parts shown in Figure 2-177. All the sucking heads should in the same level and no air leakage.
Sucking heads
Figure 2-177
11) Install the lead frame and paper sucker onto Y arm. 12) Connect all the wires, sensors and air pipe.
Part III 2-52
Figure 2-178
Figure 2-179
Part III 2-53
2.10 Stack Loader

Stack Loader Specifications Check List Item Description Stack Loader Assembly 1 LM Guide Preload 2 LM Guide with loading 3 Leadscrew preload 4 Leadscrew with loading 5 Timing belt tension Tools and Equipment Preparation 1) Gram gauge 2) Tension meter 3) Torque gauge 4) Torque driver Assembly Procedures 1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) For the stack loader elevator, check the preload torque of the leadscrew with a torque gauge. The specification is between 50-250gfcm while variation less than 150gfcm. 3) Assemble the A/C bearing and add NSK grease into the leadscrew as shown in Figure 2-180. Specification/requirement 50-100gf (each) 100-250gf 50-250gf, 150gfcm 100-400gfcm, 150gfcm 250-350Hz (by belt tension meter) Result
A/C bearing
Figure 2-180 Install the A/C Bearing and Leadscrew
4) 5) 6) 7)
Check the LM guide preload force with gram gauge. The specification is 50-100gf. Install the LM guide and tight all screws with torque 20kgfcm. Install the L/F plate mount onto the LM guide. Check the torque of leadscrew in both clockwise and anti-clockwise direction that should be between 100-400kgfcm with variation less than 150gfcm. 8) Assemble all parts as shown in Figure 2-181.
Part III 2-54
L/F plate mount
Stopper mount
Figure 2-181 Put on the L/F Plate Mount
9) Assemble part A and motor as shown in Figure 2-182 to Figure 2-184. Check the tension of the timing belt should within 250-350Hz.
Part A
Figure 2-182
Motor
Figure 2-183
Figure 2-184 Mount the motor
10) Assemble Y-rack, Y L/F rear guide onto Y-rear guide base to form Y-rear guide. 11) Install Y-rear guide into the base as Figure 2-185.
Part III 2-55
Y rear guide Y L/F rear guide
Figure 2-185
12) Assemble Y rack, Y L/F front guide onto Y-front guide base to form Y-front guide. 13) Install Y-front into the base. Make sure the gears of rear guide and front guide work smoothly as Figure 2-186.
Y L/F front guide
Y front guide
Figure 2-186
14) Assemble X-rack and X L/F left guide onto X-left guide base to form X-left guide. 15) Install X-left guide onto Y-front guide as Figure 2-187.
X left guide
X L/F left guide
Figure 2-187
Part III 2-56
16) Assemble X-rack and X L/F right guide onto X right guide base to form X-right guide. 17) Install X-right guide onto X-left guide as Figure 2-188. Make sure the gears for X left guide and X right guide work smoothly and the height of six platform guide should be the same.
X L/F right guide
X right guide
Figure 2-188
18) Install part A onto X right guide as in Figure 2-189. Part A
Figure 2-189
19) Figure 2-190 shown the finished module.
Figure 2-190 Finished Module
Part III 2-57
AD898 Overhaul Manual Ch3 Tool List
Chapter 3
Item 1 2 ASM Part No. 26-E08842 26-E08868
Tool List
Description Locking tool (ejector eccentric shaft clamp) Torque gauge adaptor (ID10) Torque gauge adaptor (ID12) Photo Qty 1 1
26-E08869
26-E08870
Torque gauge adaptor (ID8)
53-00208
62-10002
Micro-X Calibration Kit PWM9 Interface Adapter (11uA) Interface Adapter (TTL) Interface Adapter (1Vss) BNC Cables 12-Pin Connecting Cable Gram gauge 25-250gf
62-10003
Feeler Gauge - Metric
62-10004
Gram gauge 5-50gf
Part III 3-1
93-83000
BP Allen key (metric straight)
10 11 12
S26-58902 S26-58903 SPP-00081
Gauge Block Clamp Bar Torque Gauge 1200gfcm
1 2 1
13 14 15 16 17
SPP-00082 SPP-00083 SPP-00084 SPP-00085 SPP-00087
Torque Wrench 120 kgfcm Torque driver 12 kgfcm Torque driver 3 kgfcm Torque driver 50 kgfcm Dial indicator 513-1011(8mm stem)
1 1 1 1 1
18
SPP-00088
Dial indicator (1mm and range 1mm)
Part III 3-2
19
SPP-00089
Dial Height Gauge 192-130
20
SPP-00091
Gram gauge 100-1000gf
21
SPP-00092
Gram gauge 10-100gf
22
SPP-00094
Gram gauge 50-500gf
23 24
SPP-00096 SPP-00097
Holding bar 900321,100mm long Magnetic stand ( Fine adjustment )
1 1
25
SPP-00098
Push and push gauge 10KG
26
SPP-00100
Swivel Clamp 900321
Part III 3-3
27
SPP-00258
Belt tension meter Vendor Name: Clavis Model no. : Belt tension meter type 5
28
049-03001
Oil Stone Fine 25MM Flat
29
NO ASM part no. and customer can buy this at the market NO ASM part no. and customer can buy this at the market NO ASM part no. and customer can buy this at the market NO ASM part no. and customer can buy this at the market
Ring Piler
30
G Clamp (around 80 mm)
31
Leveling table
32
Oscilloscope
1 2 3 4 5 6 7
SPP-00295 SPP-00296 SPP-00297 SPP-00298 SPP-00299 SPP-00300 SPP-00301
Optional Items 6.0MM HEX BIT USE IN TORQUE DRIVER 1.5MM HEX BIT USE IN TORQUE DRIVER 2.0MM HEX BIT USE IN TORQUE DRIVER 2.5MM HEX BIT USE IN TORQUE DRIVER 3.0MM HEX BIT USE IN TORQUE DRIVER 4.0MM HEX BIT USE IN TORQUE DRIVER 5.0MM HEX BIT USE IN TORQUE DRIVER
1 1 1 1 1 1 1
Part III 3-4
SPP-00302
7MM NUT SOCKET USE IN WRENCH
SPP-00303
10
SPP-00304
11
SPP-00305
10.0MM NUT SOCKET USE IN WRENCH
12
SPP-00306
13
SPP-00307
3.0MM SOCKET USE IN TORQUE WRENCH 6.0MM SOCKET USE IN TORQUE WRENCH 4.0MM SOCKET USE IN TORQUE WRENCH 5.0MM SOCKET USE IN TORQUE WRENCH 7.0MM SOCKET USE IN TORQUE WRENCH
14 15
SPP-00308 SPP-00309
1 1
16 17
SPP-00310 SPP-00311
1 1
Part III 3-5
AD898 Overhaul Manual CH4-Grease and Lubricant
Chapter 4
Name NSK grease PS 2, Light duty
Grease and Lubricant

ASM P/N 00-50019 Remark Usage Ballscrew, leadscrew Qty 80g
NSK grease LG2, Clean Room
00-00145
Ballscrew, leadscrew
80g
Dunwell EP-2 (high temp, lithium soap base, multi- purpose)
00-50020
Bearing , cross roller(slider)
14 OZ
JOJOBA oil (filed test with good anti friction property on lead-screw assy.)
00-50022
Specially for die bonder W/H Table 4" X 8" 6" X 6" 8" X 8"
1L
THK AFF grease, Clean Room Base Oil: High-grade Synthetic Oil Consistency Enhancer: Lithium-based THK AFB grease Base Oil: Refined Mineral Oil Consistency Enhancer: Lithium-based
00-00144
LM guide
70g
00-00275
LM guide
400g
Kluber Staburags Grease NBU12/300KP
00-50023
Bond Head X, cross roller way, bearing
1Kg
Part III 4-1
AD898 Overhaul Manual Ch4 Grease and Lubricant
4.1
Tools for Preventive Maintenance

Name THK grease gun unit P/N Usage For ballscrew, LM guide slider Photo
00-00146
Syringe
Nil
For LM guide
Alcohol
Nil
For cleaning
Dustless / lintfree paper
Nil
For cleaning
Part III 4-2
AD898 Overhaul Manual Ch5 Loctite and Where to Use
Chapter 5
Loctite 222 Photo
Loctite and Where to Use

Appearance Purple liquid Cure Anaerobic Usage Threadlocking. Particularly suitable for applications such as adjustment of set screws, small diameter or long engagement length fasteners, where easy disassembly is required without shearing the screw. Screws up to diameters.
243
Blue liquid
Anaerobic
406
Transparent liquid
Humidity (Although full functional strength is developed in a relatively short time, curing continues for at least 24 hours before full chemical/solvent resistance is developed.) Humidity (Although full functional strength is developed in a relatively short time, curing continues for at least 24 hours before full chemical/solvent resistance is developed.)
Threadlocking. Particularly suitable for applications on less active substrates such as stainless steel and plated surfaces, which prevents loosening and leakage from shock and vibration. While disassembly with hand tools is required for servicing. Screws up to diameters. Bonding. Designed for bonding of plastics and elastomeric materials where very fast fixturing is required.
409
Clear to slightly cloudy gel
Bonding. Suitable for plastics, rubbers and metals. It prevents adhesive flow even on vertical surfaces.
Part III 5-2
AD898 Overhaul Manual CH5-Grease and Lubricant
498
Transparent liquid
Humidity (Although full functional strength is developed in a relatively short time, curing continues for at least 24 hours before full chemical/solvent resistance is developed.) Anaerobic
Bonding. Designed for bonding of rubbers, plastics and metals where heat resistance is required.
609
Green liquid
Retaining. Designed for the bonding of cylindrical fitting parts and prevents loosening and leakage from shock and vibration.
1401C
Red
Anaerobic
Sealing. Synthetic-resin locking agents that prevent screws and bolts from loosening, leaking, or rusting.
Part III 5-3
AD898 Overhaul Manual Ch6 Standard LM Guide / Cross Roller Way Assembly
Chapter 6
Standard LM Guide/Cross Roller Way Assembly
The following parts would demonstrate the overhaul procedure of our standard parts. Those parts would include: Cross roller way LM guide A/C bearing Ball screw Timing belt Coupling
6.1
Cross Roller Way

Cross roller way can run smoothly in very high accuracy Kluber Lubrication
Advantage: Lubrication:
Cross roller way
End screw
Ball cage
Figure 6-1
Procedures: 1. Clean the mechanical parts with alcohol or dustless paper. 2. Add grease onto the cross roller way. 3. Usually one pair of cross roller way can be divided into two parts: adjustable and fix one. Install the fix part onto the module and tighten all the screw from center to the two sides. 4. Install the adjustable part on to the module.
Part III 6-2
Fix side of cross roller way
Adjustable side of cross roller way

Figure 6-2
No set screw on the fix side
Set screw on the adjustable side
Figure 6-3
5. Loosen the end screw of either side. 6. Keep moving the module and put the ball cage inside the gap between the two cross roller way as in Figure 6-4.
Part III 6-3
7. Put back the end screw into the cross roller way.
End screw
Figure 6-4
8. Adjust the set screw at the adjustable side of the cross roller way until the whole module move smoothly and no bouncing during the movement. Also, the force should be within specification. (Different modules have different specification, please refer to corresponding chapter).
Part III 6-4
6.2
LM Guide
High efficiency, high accuracy, low cost THK AFB grease or THK AFF grease (for clean room). The grease being used must be same as the original one and a thin layer of Grease should be added onto the surface of LM guide to prevent rusting. A KB mark would be shown at the reference side of the LM guide.
Reference mark:
Procedures: 1. Check the part number of the LM guide and roller if they are the same. The mark on the rollers should be in the same direction. 2. Install the roller onto the LM guide and tighten the screws. The sequence of tightening the screw should follow the figure shown below.
Figure 6-5
3. The torque (kgf.cm) of the screw should follow the below table. M2 5 M2.5/M2.6 M3 12 20 M4 42 M5 90 M6 140 M8 310
4. Clean the LM guide with alcohol and cloth. 5. Use G clamp to fix the LM guide close to the reference side of the module. Tighten all the screws from center to two sides. 6. If there is no reference side on the module, use the KB side as reference. Check the parallelism of the LM guide with dial gauge and specification should be within 10um as Figure 6-6. 7. Check the preload force of the roller and let this value be A.
Part III 6-5
Testing point
Reference side
Figure 6-6 Checking Parallelism of the LM Guide
8. Put the module onto the rollers but not tighten all the screws. 9. Check the loaded force of the LM guide and let this value be B. The vale of B should be smaller than A+100gf.cm. 10. Also check the loaded force in reverse direction and let this value be C. The value of C should be smaller than A+100gf.cm.
Maximum value
Minimum value
Figure 6-7 Checking the loaded sliding force of the LM Guide
Remarks:
The parallelism of the LM guide for normal purpose is 10um.
Part III 6-6
6.3
A/C Bearing
Kluber lubrication
Lubrication:
Procedures: 1. Clean the A/C bearing with alcohol. 2. Add Kluber lubrication into the bearing. 3. There is a little circle mark located both in the inner bearing and the outer bearing. Rotate the bearing such that the two circle marks stand in the same line as Figure 6-8.
Figure 6-8 Locate the marks on the bearings
4.
Put the two bearing together as Figure 6-9 so that a V mark would be form on the surface of the bearing. Usually the arrow would point to the shaft or nut.
Figure 6-9 Position the bearings to form a similar V mark
Part III 6-7
5. 6. 7. 8. 9.
Install the bearing into the module hole. Install a lock nut into the bearing and measure the torque. Let the value be A. Tighten the lock nut with a specific torque driver and the torque should be smaller than A+80gf.cm. Install the E ring into the bearing and the torque should have no change. The outer bearing was locked and there should be a gap between the bearing and module. So tighten the bearing cover screw.
Remarks: If there is a large change of torque after tightening the bearing cover screw, may be The module bearing hole is not perpendicular with the bearing. Usually, four screws are used to lock the bearing cover. The screws should not be tighten in one time but at least to tighten the screws in three times. The module hole is not match with the bearing.
Part III 6-8
6.4
Ballscrew
High efficiency, less noise NSK PS2 or LG2 grease
Procedures: 1. Check the torque of the ballscrew before adding grease. The torque should not exceed 30gf.cm and variation should be constant. 2. Add grease with grease gun using NSK PS2 or LG2 grease and then run the screw for 5 minutes as Figure 6-11.
Figure 6-10 Figure 6-11
3. 4.
5.
Wait for 10 minutes after dry run of ballscrew to prevent the high temperature may affect the operation of ballscrew. Check the torque and torque variation of ballscrew for full traveling distance. As the ballscrew turns, there would be a maximum value and a minimum value for each pitch such as (max1, min1) for the first pitch and (max2,min2) for the second pitch. Take the maximum value only for example the torque range would be max1 to max2 gf.cm. Check the torque variation by comparing the torque difference for every pitch. For example, first pitch have max1 min1 = 80, second pitch have max2 max2 = 100. Then 100gf.cm would be the torque variation.
Part III 6-9
Torque value
Figure 6-12
Assemble the ballscrew and the A/C bearing and the module. Do not tighten all the screw but measure the torque first. 7. Measure the preload torque of ballscrew and A/C bearing and let the values be Tp and Ta. 8. Measure the force of the module and ballscrew traveling distance. The value would be F and L respectively. 9. The total torque would be T=Tp+Ta+F*L/(2*3.14) 10. After tightening all the screw, the torque should be smaller than T+100gf.cm.
6.
Part III 6-10
6.5
Timing Belt
Things to be notice during installation of timing belt: 1. The timing gear should be parallel to each other and not tilted. 2. The timing tension should not be too tight or too loose. 3. The size of timing belt gear is matched to each other such that the size of gears cannot be changed. 4. The screw should be tightened well. 5. During the operation of timing belt, no noise should be made and movement should be very smooth.
Figure 6-13 Tension Meter
The timing belt gear is parallel with each other and the tension of timing belt is not too tight or too loose.
Figure 6-14 Checking the Timing Belt Position
Part III 6-11
6.6
Coupling
Constant angular speed, oil resistance, anti-corrosive Connect 2 shafts which may not be parallel, transmitting the power, reduce the
Advantage: Application: vibration.
Marking: DKN20/42-6.35H7-8H7 (DKN20:20 Rated torque is 2Nm; 42:Length of coupling; 6.35H7-8H7:Hole size and tolerance. Procedures: 1. Incoming material inspection: no scratch on surface, no bend, no dirt, gap between pitch is even. 2. Hole size of the coupling should match with the shaft. 2 shafts should not touch each other. 3. When assembly, the 2 shafts should in the same center line, when loosen the locking screws, the coupling can move freely. When tighten the locking screw on one side, while turning the shaft on the other side, the coupling should not turn. Gap should be even
Locking screws
Figure 6-15 Coupling
4. The shafts length inside the coupling should exceed the locking screw area toward inward. 5. Locking screws will come with the coupling, tightening force should follow Screw Usages and Requirements (screws should add Loctite#222), follow special instruction on special requirement. 6. Follow instruction to add RED Loctite to mark the screws have already tightened. Remarks: Before assembly, dont extend, compress, bend the coupling with hands to reduce its accuracy.
Part III 6-12
Torque Driver Red Loctite
Figure 6-16
Part III 6-13
AD898 Overhaul Manual Ch7 Voice Coil & Linear Motor Resistance
Chapter 7
Voice Coil & Linear Motor Resistance

Description (Bond Head Table) Micro-X Coil-4 (MAG6) Assy. (red and white cables with normal value 7.9~8.0 ) (Bond Arm) BF VCM Module (for PF2 bond arm) (Bond Optic) 8912 Y Motor Assy. (red and white cables with normal value 1.2~1.3 ) Indexer Linear Motor Coil Assy. (pairs with red and white, red and black, white and black with normal value 1.1 ) (Wafer Table) Linear Motor Male: 1-2 2-3 1-3 (Work Holder) Clamp Coil Assy. (red and white cables with normal value 6.2 ) Resistance ( ) 7.15~9.96
Picture
Part No. 01-20343
01-25178
111
S02-17117
1.05~1.89
S01-17906
0.9~1.2
S01-17752
10.2 for X 20.3 for Y
01-19158
6.50.3
Part III 7-1
AD898 Overhaul Manual Ch8 Screw Usages and Requirements
Chapter 8
Screw Usages and Requirements

Screw Type Washer Spacer
M2 M2.5(6) M3 M4 M5 M6 M8 ball head
Item
1
Description
Cross Roller or LM Guide
Loctite 222
(301-00110-1)
Tightening Loctite Torque 1401C Remark (kgf.cm) (SS-00273)

5 12 20 42 90 140 310 The screw (LM guide should be in the hold rail not center required, LM guide block need to add)
Coupling, Pulley, Clamp Rring, Ball Screw, Lead Screw, Nut Mount, Motor
M2 M2.5(6) M3 M4 M5 M6 4-40
ball head
4 10 18 40 80 130
X ball head ball head flat head ball head flat head ball head
18
3 4
Sensor Flag , Cover Heating Area
ALL All Screw All Screw
* * * X
* X X X X X
General specification
* X
Depend on the design Use OKS240
2 mm Aluminium All Screw Board All Screw Non Metal M2 M2.5 M3 M4 M5 M6 M8 M2 M2.5 M3 M4
General specX0.7
* *
2 4 6 14 29 49 122
other screw
2 4 6 14
Part III 8-1
AD898 Overhaul Manual Ch7 Screw Usages and Requirements
Item
Description
Screw Type Washer Spacer

M5 M6 M8
(301-00110-1)
Loctite 222
Tightening Loctite Torque 1401C Remark (kgf.cm) (SS-00273)

29 49 122
General case
M2 M2.5(6) M3 M4 M5 M6 M8 M10 M12 M14 M16 M20 M2 M2.5/M2.6 M3 M4 M5
ball head
4 8 13 28 60 94 Tighten with appropriate torque
flat head
(Cover screw no need to add
3 6 10 18 35
All Set Screw 4-40 6-32 ball head
X *
* 13 25 *
: Need to add loctite
X : No need to add
* : Depended on requirement
Note: 1) Non metal screw, no need to add Loctite. 2) Install with specific requirement. 3) NON metal including non metal thread and pressed non metal. 4) General screw selection: Same part and location use same type of screws. The thread length of screw is larger the twice of outer diameter of the screws and the thread cannot over more than two threads. 5) For Loctite 1401C, only for specific requirement.
~~~ End of Part III ~~~
Part III 8-2

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AD898 Overhaul Manual-Part III

OVERHAUL MANUAL AD898 AUTOMATIC DIE BONDER

THE INFORMATION HEREIN IS SUBJECT TO CHANGE WITHOUT PRIOR NOTICE

AD898 Overhaul Manual-Part III

ASM Office (Worldwide)

AD898 Overhaul Manual-Part III

MODULE ASSEMBLY ................................................................ 2-1

TOOL LIST ............................................................................. 3-1 GREASE AND LUBRICANT......................................................... 4-1

AD898 Overhaul Manual-Part III

AD898 Overhaul Manual-Part III Revision History Record

Revision History Record

AD898 Overhaul Manual Ch1 Introduction

AD898 Main Module List

Epoxy Writer Table

Part III 1-1

AD898 Overhaul Manual Ch1 Introduction

Below flowchart gives the general procedure of overhauling AD898.

Design the overhaul plan

Are all the spare parts and tools ready? Yes

Order necessary parts and tools

Perform modules disassembly, parts replacement and assembly

Is there any other module for overhaul? No

Part III 1-2

AD898 Overhaul Manual Ch2 Module Assembly

Bond Head Table 2.1.1 Bond Head Specification Check List

Part III 2-1

AD898 Overhaul Manual Ch2 Module Assembly

Bondhead Table Assembly

Figure 2-1 Add grease to Y LM Guide Block

Figure 2-2 Add grease to Z LM Guide Blocks

Part III 2-2

AD898 Overhaul Manual Ch2 Module Assembly

Figure 2-3 Use G clamp to fix Y LM Guide Rails

Figure 2-4 Use G clamp to fix Z LM Guide Rail

Figure 2-5 Check the YZ Bracket sliding force

Figure 2-6 Check the BH Back Plate sliding force

Part III 2-3

AD898 Overhaul Manual Ch2 Module Assembly

Figure 2-7 Assembly the Y stopper

Figure 2-8 Assembly the Y ballscrew sub-assembly

Figure 2-9 Check the driving torque of Y ballscrew

Figure 2-10 Assembly the Z ballscrew sub-assembly

Figure 2-11 Assembly the Z stopper

Part III 2-4

AD898 Overhaul Manual Ch2 Module Assembly

Figure 2-12 Install the Z ballscrew and stopper

Figure 2-13 Check parallelism of Z Guide Rail respect to Y LM Guide

23) Assemble Figure 2-14 parts as shown in Figure 2-15.

Figure 2-14 Assembly the Z front guide CRW

Figure 2-15 Check the CRW sliding force

Part III 2-5

AD898 Overhaul Manual Ch2 Module Assembly

Linear encoder read head

Figure 2-18 Micro-X Encoder and Linear Scale

Figure 2-19 Check the Micro-X Waveform

Part III 2-6

AD898 Overhaul Manual Ch2 Module Assembly

Set screws position

Part III 2-7

AD898 Overhaul Manual Ch2 Module Assembly

35) Install the AC servo motor to the BH assembly as Figure 2-30.

Figure 2-30 Finished BH Table Assembly

Figure 2-31 0.8mm Spacer