The CVD diamond booklet

available at: www.diamond-materials.com/download

Content
1. 2. General properties of diamond..................................... 2 Optical Properties .......................................................... 4 Optical transparency ....................................................... 4 Absorption coefficient at 10.6 m ................................. 5 Refractive index: n vs. .................................................. 6 Refractive index: nd vs. T ................................................ 7 Refractive index: Thermal coefficient ............................ 8 X-ray absorption ............................................................. 9 THz dielectric properties............................................... 10 Optical specifications of Diamond Materials............... 11 Surface finish, optical coatings and mounting ........ 12 Thermal Properties ...................................................... 13 Thermal conductivity .................................................... 13 Thermal conductivity vs. T ............................................ 14 Specific heat vs. T .......................................................... 15 Thermal expansion........................................................ 16 Thermal specifications of Diamond Materials ............. 17 Mechanical Properties ................................................. 18 Vickers-Hardness ........................................................... 18 Mechanical specifications of Diamond Materials........ 19 Examples of CVD diamond applications ..................... 20 Useful formula ............................................................. 23 Bowing of a circular disk under pressure..................... 23 Thickness requirements ................................................ 23

3.

4.

5. 6.

Contact Diamond Materials ............................................... 25

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CVD Diamond wafers prepared by Microwave Plasma CVD: boron doped disk (blue), optical grade diamond, mechanical grade, unpolished disk

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1. General properties of diamond

The most important properties of CVD diamond are the

unsurpassed hardness extremely high thermal conductivity broad band optical transparency extremely chemically inert:
Not affected by any acid or other chemicals (T > 700C in an oxygen containing and 1500C in an inert atmosphere) (>1800 W/mK, five times that of copper)

Graphitization only at very high temperatures

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Property Vickers hardness* Young's modulus* Poisson's ratio Density Atom density* Thermal expansion coefficient Sound velocity* Friction coefficient Specific heat @ 20C Debye temperature* Bandgap Resistivity

Value 10,000 kg/mm2 1050 GPa 0.1 3.515 g/cm3 1.771023 1/cm3 1.010-6/K @300K 17,500 m/s 0.1 0.502 J/gK 186010K 5.45 eV 1013 - 1016 cm

*highest value of all solid materials

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2. Optical Properties
Optical transparency

80 70

Transmission (%)

60 50 40 30 20 10 0 1 10 100

Wavelength (m)

Optical transparency of CVD diamond In the UV, Visible, IR and far IR The spectrum has not been corrected for reflection losses

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Absorption coefficient at 10.6 m

0.14

Absorption coeff. (cm )

-1

0.13 0.12 0.11 0.10 0.09 0.08 9.0

9.5

10.0

10.5

11.0

Wavelength (m)

Absorption coefficient of CVD diamond as measured by laser calorimetry

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Refractive index: n vs.

2.50

Refractive index

2.45

2.40

2.35

10

100

Wavelength (m)

The spectral variation of n is described by the Sellmeier equation:1

n=

0.3306 x 2 4.3356 x 2 + 2 +1 x 2 1752 nm 2 x 1062 nm 2

where x is the wavelength in nm

F. Peter, Z Phys 15, 358 (1923)

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Refractive index: nd vs. T

16 14 12

nd/nd (10 )

-3

10 8 6 4 2 0 0 200 400 600 800 1000

Temperature (C)

Variation of nd with temperature Patterson et al.2 our data measured at 633 nm wavelength

M.J. Patterson et al., Electrochem. Soc. Proc. 95-4, 503 (1995)

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Refractive index: Thermal coefficient

5.0

4.0

dn/dT (10 /K)

3.0

-5

2.0

1.0

0.0 -200 0 200 400 600 800

Temperature (C)

Thermal coefficient of the refractive index Measured by laser refraction of a diamond prism Measured with laser interferometry Fontanella et al.3
3

J. Fontanella et al., Appl. Opt. 16, 2949 (1977)

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X-ray absorption

Absorption Coefficient (1/m)

0.1
Lead

0.01

Tin Titanium

1E-3
Diamond Beryllium

1E-4

1E-5 0

10

20

30

40

50

Energy (keV)

X-ray absorption coefficient of various materials. Data from http://www.photcoef.com

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THz dielectric properties

Wavenumbers [cm ] Absorption Coefficient [cm ]
-1 -1

20 15 10 5 0 -5 -10 -15 -20

10

20

30

40

50

60

70

80

90 100 110

CVD Diamond

0.5 3.0 2.5 0.5

1.0 1.0

1.5 1.5

2.0 2.0

2.5 2.5

3.0 3.0

3.5 3.5

Frequency [THz]

Refractive Index

2.0 1.5 1.0 0.5 0.0 10 20 30 40 50 60 70 80

-1

90 100 110

Wavenumbers [cm ]

data from Peter Uhd Jepsen, University of Freiburg

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Optical specifications of Diamond Materials

The core competences of Diamond Materials include the manufacturing of high purity CVD diamond disks with properties approaching those of perfect natural diamond crystals.
Property Transmission Refractive index Absorption coefficient Bandgap Tensile strength (0.5mm thick) Nucleation surface in tension Growth surface in tension Loss tangent (tan @140 GHz) Dielectric constant 600 MPa 400 MPa < 2.010-5 5.7 Value 225nm to far IR , > 70% @ 10m 2.38 @ 10m, 2.41 @ 500nm 0.10 cm-1 @ 10m 5.45 eV

Properties of optical grade CVD-diamond by Diamond Materials

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Surface finish, optical coatings and mounting

Property Dimensions Thickness Diameter Surface finish Shape Roughness Flatness Wedge Spec. Transmission at 10.6 m Wavefront distortion < 4 fringes at 633 nm over 30 mm* Mounting Diamond windows mounted e.g. in UHV flanges (bakeable at 250C, vacuum tight < 10-10 mbar l/s)* *specifications available upon request flat, spherical (convex & concave) < 5 nm* 1 fringe/cm* 0 1* >98.6 % 10 - 2000 m up to 100 mm Value

Antireflection Coatings (visible and infrared)

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3. Thermal Properties
Thermal conductivity

Thermal Conductivity (W/mK)

2000

1500

1000

CVD Diamond

Copper

Material

The thermal conductivity of diamond in comparison to other materials

AlN

500

Sapphire

Silicon

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Thermal conductivity vs. T

5500

Thermal Conductivity (W/mK)

5000 4500 4000 3500 3000 2500 2000 1500 1000 500 0 -200 -100 0 100 200 300

Temperature (C)

Thermal conductivity of CVD diamond vs. temperature CVD diamond Theory Copper

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Specific heat vs. T

Specific heat (kJ/KgK)

0.1

0.01

1E-3

1E-4

1E-5

50

100 150

200

250

300

350

400 450

500

Temperature (K)

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Thermal expansion

4.0

Thermal Expansion (10 /K)

-6

3.5 3.0 2.5 2.0 1.5 1.0 0.5 0

100

200

300

400

500

Temperature (C)

Thermal expansion vs. temperature High quality CVD diamond Medium quality CVD diamond Values recommended by Slack4

G.A. Slack and S.F. Bartram, J. Appl. Phys. 46, 89 (1975)

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Thermal specifications of Diamond Materials

Optimized CVD-diamond as provided by Diamond Materials reaches a thermal conductivity of up to 2000 W/mK e.g. it exceeds that of copper by a factor of five. In contrast to metals, where heat is conducted by electrons, lattice vibrations are responsible for the high thermal conductivity of diamond.

Property Thermal conductivity @300 K Thermal expansion coefficient @300 K @700 K Specific heat @ 20C Debye temperature

Value > 1200 W/mK* > 1500 W/mK* > 1800 W/mK* 1.0 +/- 0.1 10-6/K 4.4 +/- 0.1 10-6/K 0.502 J/gK 186010K

* various thermal grades are available upon request

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4. Mechanical Properties
Vickers-Hardness

10000

Vickers-Hardness (kg/mm )

8000

6000

Orthocalse

4000

Gypsum

Fluorite

Talc

Calcite

2000

Material

Aptite

Quartz

Topaz

Corundum

CVD Diamond

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Mechanical specifications of Diamond Materials

CVD diamond manufactured by Diamond Materials exhibits an exceptional wear resistance and a low coefficient of friction. Highly demanding applications such as cutting tools, surgical knives and wear resistant components have been demonstrated.
Property Vickers hardness Young's modulus Poisson's ratio Thermal expansion coefficient Tensile strength (0.5mm thick) Nucleation surface in tension Growth surface in tension Density 1100 MPa 500 MPa 3.515 g/cm3 Value 10,000 kg/mm2 1050 GPa 0.1 1.010-6/K @300K

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5. Examples of CVD diamond applications

CVD diamond window in UHV flange

Ultrasharp wear resistant diamond knive

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Flexible CVD diamond heatspreaders

CVD diamond laser windows

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CVD diamond anchor wheel

Decorative CVD diamond dial

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6. Useful formulae
Bowing of a circular disk under pressure5
wss = Pr 4
El 3 5 + 1 S= wcl = Pr 4 64 S (1 + ) 12(1 2 ) 64 S

where w = central deflection (ss = simply supported, cl = clamped), E = Youngs modulus, L = thickness, P = pressure, v = Poisson ratio, r = radius

Thickness requirements6
For flat windows, the minimum thickness as determined by pressureinduced fracture is given by

L = 0.554D pS sf / f
where L = minimum thickness, f = mechanical strength, p = pressure difference, D = diameter, Ssf = safety factor Typically mechanical strength values are in the 2000-400 MPa range depending on thickness. As a rule of thumb the minimum thickness is 1.7 % of the free diameter (one bar pressure difference, Ssf = 4).

5 6

Warren C. Young, Roarks Formulas for Stress & Strain, McGraw-Hill, New York (1989) C.A. Klein, SPIE 1624, 475 (1992)

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Contact Diamond Materials

Contact persons:

Dr. Christoph Wild Dr. Eckhard Wrner www.diamond-materials.com contact@diamond-materials.com +49 (0)761 600 6554 +49 (0)761 600 6553 Diamond Materials GmbH Tullastr. 72 79108 Freiburg Germany

Internet: E-mail: Telefon: Fax: Address:

Images 2008 Fraunhofer IAF This booklet may be freely distributed provided that it is unaltered and that no charge is made and this copyright notice is retained.