Nanometrics RPMBlue

Pre-Installation Manual Part Number xxx-xxxx

April 2010

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NOTE Information in this document is subject to change without notice and does not represent a commitment on the part of Nanometrics Incorporated. Nanometrics Incorporated makes no warranty of any kind with regard to this material. Neither Nanometrics Incorporated nor its employees, contractors, or consultants shall be liable for errors contained herein or for incidental or consequential damages in connection with the furnishing, performance, or use of this material.
Copyright Notice 2010 Nanometrics Incorporated

This document contains proprietary information which is protected by copyright. All rights are reserved. No part of this document may be reproduced, transmitted, stored in a retrieval system, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, optical, chemical, manual, or otherwise, without the prior written permission of the copyright owner, Nanometrics Incorporated, 1550 Buckeye Drive, Milpitas, CA 950357418. Copyright infringement carries with it serious civil and criminal penalties under the United States and foreign copyright laws. This manual describes a product which includes copyrighted software. Said software is licensed to the
customer for use only in accordance with the license agreement. Credits and Trademarks RPM and RPMBlue are registered trademarks of Nanometrics Incorporated. All other product names are trademarks or registered trademarks of their respective holders. Printed in the United States of America. Nanometrics, Inc. 1550 Buckeye Drive Milpitas, Ca. 95035-7418 408.545.6000

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Revision History
Revision 1 is a preliminary draft manual, issued for comment only. The first formally issued manual is Revision A. All subsequent revisions are identified alphabetically.
Revision 1 Date of Revision April 26, 2010 Section(s) affected All Reason for revision First issue

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Table of Contents

Chapter 1 Introduction 1.1 About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.2 Chapter Summary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.3 Product Liability. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Chapter 2 Installation Requirements 2.1 Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.2 Power Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.3 Vacuum Supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.4 Utility Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Chapter 3 Transportation and Storage

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Chapter 1: Introduction
1.1 About this Manual
This manual describes the facilities required for a successful installation. It is intended for customers, Nanometrics service engineers, and any approved personnel who may be involved in the installation or commissioning of a RPMBLUE. It contains information on physical specifications, environmental conditions, utilities, supplies and connections.

1.2 Chapter Summary

Chapter 1: Introduction Chapter 1 warns against practices which may cause damage or personal injury, or which may invalidate the warranty. Chapter 2: Installation Requirements Chapter 2 lists the RPMBLUE specifications and recommended environmental conditions. Chapter 3: Transportation and Storage Chapter 3 outlines the recommended transportation and storage when RPMBlue crates arrive.

1.3 Product Liability

Customers are responsible for using the RPMBLUE in a safe and proper manner. Nanometrics provides information about its products and their associated hazards, but assumes no responsibility for after-sale operation and safety practices. Customers must take appropriate action to protect personnel and property from potential hazards. Nanometrics will not accept responsibility for equipment damage or personal injury caused by: Operation of the tool with doors or covers removed and / or interlocks overridden Unapproved servicing, adjustment, cleaning, or modifications to the equipment Unapproved incorporation of third-party manufactured products Unapproved addition of parts designed and supplied by the customer Future transportation, reuse, or reselling of the equipment Unsolicited return of parts for repair or evaluation Return of parts via unapproved packaging or delivery method (always contact Nanometrics for advice on acceptable packaging and delivery methods) Failure to observe warnings and cautions in the Manuals Failure to observe safety labels on the equipment Any misuse of the equipment (not limited to the above list) may invalidate the warranty. The scope and duration of any equipment maintenance provided by Nanometrics is dependent on the warranty agreement signed at the time of purchase. Nanometrics will make available an appropriate repair and maintenance service for a limited period after discontinuation of production of the equipment. Field retro-fits for known equipment defects are announced and implemented by Nanometrics Technical Product Support team. Repair or maintenance work conducted by Nanometrics personnel is subject to the customers premises meeting relevant health and safety standards. Full disclosure of the names and contents of processing materials being used and/or process piping is also required.

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1. The system is to be used in an ESD controlled environment. 2. The system is intended for use for measurement as a piece of laboratory equipment. 3. The system requires a clean AC power source free of significant bursts or surges of over voltage. 4. This equipment is intended to be operated in a controlled electromagnetic environment.

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Chapter 2: Specifications
Operation of the Nanometrics RPMBLUE requires specific utilities and supplies. Before the RPMBLUE is received, the utilities should be installed and the necessary supplies made available. This chapter provides pre-installation utility and supply instructions. The figure below illustrates the physical layout and a top view of the RPMBLUE.

Figure 2-1: Physical layout and dimensions of the RPMBLUE

A service clearance of at least 75 cm should be allowed on all sides of the equipment.

Width Depth Height Weight

Manual RPMBlue without robot 757 mm (30 in) 1066 mm (42 in) 1430 mm (56.3 in) 230 kg ( 500 lbs)

Auto RPMBlue with robot 1449 mm (57 in) 1066 mm (42 in) 1430 mm (56.3 in) 460 kg (1000 lbs)

Note that the computer monitor extends above the illustrated envelope on an adjustable arm.

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2.1 Environmental Requirements

Lighting Well lit but away from direct sunlight Temperature 20 TO 26 C C Temperature gradient 1C maximum /hr Relative humidity 20% to 80% non-condensing Altitude 3000m maximum Other requirements Free from corrosive and flammable fumes Free from strong electromagnetic fields Free from vibration

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2.2 Power Requirements

One phase, power consumption 100 ~ 240V (100 ~ 120V, or 200 ~ 240V configured in factory), 2000VA minimum, 50/60HZ Heat dissipation 1450 Btu/hr Nanometrics recommend a clean power circuit with grounded receptacles. No other instruments should be powered from the same circuit. Each of the system components - PC, monitor, printer, and spectrometer - requires a grounded receptacle. Circuit breaker to be rated for an interruption current of 10,000 amps. In general, one of the greatest risks to computer systems is spikes or transients. These impulses can send in excess of 3000V into your RPMBLUE, which can cause permanent damage to the system. For this reason, Nanometrics recommends that a power survey be conducted using one of the commercially available microprocessor power-line disturbance analyzers. Power problems are a function of both the internal and external environment and often change with time. A pre-installation electrical site analysis can define your electrical characteristics. If not satisfactory, you may require some degree of power conditioning equipment that protects against such transients. If any of these problems occur on your power line, please contact your Nanometrics Customer Support engineer for proper power conditioning recommendations. Even if your power lines are judged free of spikes and transients, we suggest using a surge protection device. They provide inexpensive insurance against a major disaster. Many surge protection devices, specifically designed for computers, are available. They provide good protection against RFI and EMI interference.

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2.3 Vacuum Supply

55 l/min (2cfm) @ 170 mbar (25 Hg) absolute Vacuum is required for wafer hold-down when a wafer is on the robot arm, prealigner, or RPM stage. Note that this also depends on the measured sample. In some cases when the samples have rough back surface, a separated vacuum line or 2nd pump might be required to operate vacuum for robot/prealigner and RPM stage separately.

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2.4 Utility Connections

The fittings for the main power supply in, vacuum in, external laser control out, external laser power out, external laser fiber in are located on the rear of the RPMBLUE.

Figure 2-2: Rear of the RPMBLUE

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Chapter 3: Transportation and Storage

Transport
The units should be transported by forklift, in the original packing material, to the unpacking point. A forklift pallet is integral to the packing case. The site location will be influenced by local considerations such as access and connection to the unit, and the availability of services. The unit should remain in its original packing material until a suitable location has been designated. When deciding on the location, refer to the dimensions in the relevant section of the Dimensions section and ensure that all doorways are wide enough for the equipment to pass through. Once unpacked the units can be setup to have integral castors, with anti-vibration jacking, suitable for use on a smooth floor. The castors will be in their stable position in the packing case (see illustration below). Rotate the orange wheel clockwise, on each castor, to lower the wheels to the castors rolling positions. Once at the working location, rotate the orange wheels anti-clockwise to raise the wheels off the floor and return the castors to their stable positions.

Rolling position Rotate orange wheel clockwise to lower wheel

Stable position Rotate orange wheel anti-clockwise to raise the wheel off the floor

Storage
If the instrument has to be stored for a while before it is installed, it should be kept in the original packing material. The packing material should not be damaged. The conditions for storing the instrument are: Temperature: 0 to 35 C C Relative Humidity: 20% to 80% non-condensing Packing requirements: Must stay closed during storage to prevent moisture from entering.

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