Circuit Multi Project: IC's Fabrication Prices between Micro and Nano Scale

Technology
0.18u CMOS C18A6 0.18u HV-CMOS H18A6 0.35u CMOS C35B4C2 0.35u CMOS C35B4C3 1290 Euro/mm2 1480 Euro/mm2 600 Euro/mm2 (3) 650 Euro/mm2 (3)

Prices 2012

0.35u CMOS Bulk Micromachining 650 Euro/mm2 (4)+ 3700 Euro for 10 dies 0.35u CMOS C35B4M3 0.35u CMOS-Opto C35B4O1 0.35u CMOS Flash C35B4E3 0.35u SiGe BiCMOS S35D4M5 0.35u HV-CMOS H35B4D3 130nm CMOS HCMOS9GP 130nm CMOS HCMOS9A 130nm SOI HCMOS9-SOI 890 Euro/mm2 (4) 810 Euro/mm2 (3) 800 Euro/mm2 (6) 890 Euro/mm2 (4) 1000 Euro/mm2 (6) 2200 Euro/mm2 (1) (12) (if Area less or equal to 20mm2 ) 2200 Euro/mm2 (1) (12) (if Area less or equal to 20mm2 ) 4000 Euro + (Area * 3000 Euro/mm2) (1)(if Area less or equal to 10mm2 ) 34000 Euro + [ (Area-10) * 2000 Euro ] (if 10mm2 < Area < 25mm2 ) (12) 3500 Euro/mm2 (1) (12) (13) (if Area less or equal to 10mm2 ) 4500 Euro/mm2 (1) (12) (14) (if Area less or equal to 10mm2 ) 7500 Euro/mm2 (1) (if Area less or equal to 5mm2 ) 37500 Euro + [ (Area-5) * 6000 Euro ] (if 5mm2 < Area < 15mm2 ) (12) 9500 Euro/mm2 (1) (2) (if Area less or equal to 5mm2 ) 47500 Euro + [ (Area-5) * 7500 Euro ] (if 5mm2 < Area < 15mm2 ) (12) 10000 Euro/mm2 (1) (if Area less or equal to 3mm2 ) 30000 Euro + [ (Area-3) * 7500 Euro ] (if 3mm2 < Area < 15mm2 ) (12) 15000 Euro/mm2 (1) (if Area less or equal to 3mm2 ) 45000 Euro + [ (Area-3) * 12000 Euro ] (if 3mm2 < Area < 15mm2 ) (12)

130nm SiGe BiCMOS9MW

65nm CMOS CMOS065

65nm SOI CMOS065-SOI

40nm CMOS CMOS040LP

28nm CMOS CMOS28LP

Notes: 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. Minimum charge is the price of 1 mm2. (X*Y) Open to Educational Institutions and Research Laboratories from France and abroad. Minimum charge is the price of 3 mm2. (X*Y) Minimum charge is the price of 4 mm2. (X*Y) Area = (X + 0.24) * (Y + 0.24) mm2. Minimum charge is the price of 7 mm2. (X*Y) Price for Educational Institutions and Research Laboratories, for 15 identical chips, 1cm x 1cm (fixed size). For bigger chip size contact CMP. Price for Industrial Companies, for 15 identical chips 1cm x 1cm (fixed size). Price for Industrial Companies, for 15 identical chips 0,9cm x 0,9cm (fixed size). Additionnal prices for Subdicing and Release: - Subdicing: $ 220 per cut lane and per 15 chips, - HF Release: $ 870 flat rate for up to 60 die/subdie, - Supercritical CO2 Dry: $ 1,100 flat rate for up to 60 die/subdie. Contact CMP for multiple location prices. Contact CMP for a price quotation when Area is larger. Price for Educational Institutions and Research Laboratories. Price for Industrial Companies. Circuits must have one of the following sizes with transistor grids parallel to the Y axis (no rotation of 90 or of 270 for transistor cells and for diode cells). Sizes include the sawing street of 138m: - X= 1000m, Y= 1500m - X= 1000m, Y= 2000m - X= 1500m, Y= 1500m - X= 1500m, Y= 2000m CMP will provide you with sawing street and circuit identifier. Around 50 samples are delivered on gel pack. Minimum charge is the price of 5 mm2. (X*Y).

11. 12. 13. 14. 15.

16. 17. 18.