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MEMS is the integration of mechanical elements ,sensors, actuators and electronics on a common substrate through utilization of microfabrication technology or Micro-technology
: Japan : Europe
Topics:
- Introduction and Orientation (1) - Basic Electrical &Mechanical concepts (2) - Transduction Methods (10) Electrostatic/Thermal/Piezoresistive/ Piezoelectric/Magnetic Sensing & actuation - Materials for MEMS (2) - Fabrication Technologies ( 5) - RF MEMS (3) - Optical MEMS ( 4) - Micro-fluidics (2) - Chemical & Bio MEMS (2) - Packaging & testing (2)
There is plenty of room at the bottom ( R.Feynman) Silicon Integrated Piezo Actuators (O.N.Tufte et.al) Surface Micromachined FET Accelerometer ( H.C.Nathanson et.al.) Resonant Gate Transistor (RGT) at Westinghouse Diaphram type silicon micro-machined pressure sensor Silicon Electrostatic Accelerometer ( Stanford) Ink jet Printers by HP Silicon as a Mechanical Material ( K.Peterson) Integrated pressure sensor LIGA ( W.Ehrfeld) Silicon Wafer Bonding ( M.Shimbo) Batch fabricated Pressure Sensor via Wafer bonding (Nova Sensor)
1993 1999
Transducer
Transducers are the devices which convert energy from one form to another. So, a transducer can either be a sensor or an actuator or both.
Why MEMS?
What is Scaling?
Why MEMS?
MEMS SCALING ISSUES
A simple example:
The volume scales by a factor of 1000 Surface area scales by only a factor of 100 So, after miniaturization, Surface effects dominate 10 times as against before miniaturization
Example of a dominant surface effect: Consider a miniaturized electrochemical battery. As the charge holding capacity varies linearly with volume, a decrease of 1000 times Consider a miniaturized solar cell, as charging capacity depends on surface area, a decrease of ONLY 100 times!
So, after miniaturization, solar cell is 10 times better in performance if the two were alike before miniaturization.
Dimensions: L, b and h (length, width and thickness, respectively). Density of the material : , The mass of the cantilever is: M = Lbh The elastic constant along the z-direction can be expressed as: Kz = 12YI / L3 where Y is the materials Young modulus and I is the cross-sectional momentum of inertia, which is proportional to bh3.
Taking s as the generic linear dimension, M scales as s3, and Kz scales as s, or linearly with s.
One of the after effects of miniaturization:
If the linear dimensions of this cantilever are scaled by a factor of 10, isomorphically, say s = 0.1s, then the corresponding scaled mass and elastic constant are, respectively: M = 0.001M and Kz = 0.1Kz.
This means that the 10 times linearly scaled cantilever is 1000 times lighter, but only 10 times less stiff than its non-scaled counterpart; therefore, the scaled version has an improved mechanical robustness !!!!!!!
Cantilever contd...
Scaling of resonance frequency
The vibrating cantilever may be used as a mass sensor by measuring its resonance frequency shift with respect to a reference, or unloaded, value 0, due to a change in the mass.
As
,
So scales as s-1
Sensitivity,
For a 10X down scaling of dimensions, sensitivity increases 10000 times !!!
Why MEMS ?
SCALING OF PARAMETERS
Example : Capacitor (Electrical Parameters)
If the same electric field E = 108 V/m needs to be mainitained between the plates of a micro sized capacitor and a macro sized capacitor, then
Voltage
Voltage = E x gap Thus, voltage will scale as the gap between the plates. Therefore a much smaller voltage will be required in the micro case to produce the same effect. +V gnd
gap
Surface tension
Electrostatic, Pressure Magnetic Gravitational
S1
S2 S3 S4
Where s is a scaling factor, Means if the device dimensions are scaled s times, the effects of surface tension are scaled s times, electrostatic force are scaled s2 times and so on
Device
Device
System/ Packaging
System/ Packaging
IC Design
MEMS Design
System
Devices Physical Processes
Material DB
PDEs
Behavioral model
Intelligent/Smart Microsystem
Pressure sensor
Inertial sensor Microfluidics / Bio MEMS
Optical MEMS / MOEMS Micro mirror array for projection (DLP) Micro grating array for projection (GLV) Optical fiber switches, adaptive optics....
RF MEMS Others High Q-inductors, switches, antenna, filter.... Relays, microphone, data storage, toys...
MEMS Products
MEMS Applications
Cantilever contd...
Strength to Mass Ratio for a scaled cantilever beam
Total strength scales with its cross-sectional area. Hence, total strength scales as S2. Therefore,total strength to mass ratio scales as S-1.
As a result, the micro cantilever is 10 times stronger than the macro model !!!!
As
, So scales as s-1
Sensitivity,
And it can be shown that S varies as s -4 . So, after 10X miniaturization, For a 10X down scaling of dimensions, sensitivity increases 10000 times !!!