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Mean = The sum of the values divided by the number of values Median = The middle value of a data set when the data is ordered from smallest to largest Mode = The value that occurs most frequently
Statistical Definitions
Range = spread of the data - largest value minus the smallest value
Variance = A measure of the typical squared difference of measurements from the mean of the data
Standard Deviation () = The square root of the Variance. This measure is in the same units as the mean
Variance
Standard Deviation
s=
s2
Types of distribution
Types of Distribution
Types of Variation
Effects of Variation
Output
Machine
Measurement Environment
3. Action on Process
4. Action on output
Control Charts
A control chart is an on-line SPC technique used to detect the occurrence of shifts in process performance so that investigation and corrective action can take place The control chart is a trend chart with statistically determined control limits A process is stable of it has a predictable distribution and is random in behaviour over time
Control Charts
The control chart consists of:
A centre line which corresponds to the mean value of the characteristic corresponding to an in-control state An Upper Control Limit (UCL) A Lower Control Limit
3
Centre line
The control limits are selected so that if the process is in control all the sample points will plot between them
Lower control limit
Control chart
Variation
You need to know the sources of variation :
Common cause natural (random) variations that are part Of the stable process vs Special Cause unnatural (non-random) variations that are not Part of the stable system
Tweaking a stable system will always increase variation Do not adjust system for a special cause work to reduce overall variation
Example
The inspection of 25 wafers yields 37 defects. Set up a c-chart for this situation. c = 37/25 = 1.48 UCL = c +3 c LCL = c -3 c = 5.13 = -2.17
2 6 7 3 8 9 4 5
X Chart
Suppose m samples of size n are collected: True mean / grand average UCL = x +3 /n Centre line = x LCL = x -3 /n
x = x1 + x2 + .. + xm m
S chart
For m samples of size n, the average standard deviation is: 1 s= m
m
si
i=1
UCL = s +3s k
Centre line = s
LCL = s -3s k k is a constant that depends on sample size
Sheet Resistance
Resistance of a square slab of material RAB = L/A t => R = L/t*W Let L = W (square slab) => RAB = /t = Rs ohm / square
A w
B
RAB = ZRsh Z = L/W
Typical sheet resistance values for materials are very well characterised
Layer
Rs (Ohm / Sq
Aluminium N Diffusion
Silicide Polysilicon N-transistor Channel P-transistor Channel
0.03 10 50
24 15 - 100 104 2.5 x 104
Uniformity =
Max - Min
Max + Min
* 100%
Types of behaviour
Types of behaviour
Types of behaviour
Types of behaviour
Rules
1. 6 points in a row steadily increasing or decreasing 2. 15 points above the centre line (1 sigma) 3. 14 points alternatively up and down 4. 8 points in a row either side of the centre line outside (1 sigma) 5. An unusual pattern 6. One or more points near a warning or control limit
Conclusions
SPC is the mainstay of process control in a large number of industries Founded upon principles of statistical analysis of variation Aims to control a process using samples of a reduced number of the production population.