Scanning Electron Microscope

The basic premise of an SEM is that signal produced

from a scanned area of the specimen is displayed as
an image with the exact same scan pattern on a CRT
The scan pattern on
the specimen is
created by a set of
deflection coils in
the column that
move the beam in a
coordinated X/Y
pattern. This is
referred to as a scan
or “raster” pattern
Cathode Ray Tube accelerates electrons towards
the phosphor coated screen where they produce
flashes of light upon hitting the phosphor.
Deflection coils create a scan pattern forming an
image in a point by point manner
Color CRTs usually have three separate
e-guns, one each for red, green, and blue
(RGB)
The scan generator
coordinates the movement
of the primary beam with
the movement of the e-gun
in the back of the CRT
Magnification is accomplished by scanning
a progressively smaller portion of the
specimen and displaying the image on the
CRT. Thus total magnification is square
area of CRT divided by area scanned.
In contrast focus is
accomplished by
bringing the beam to
its crossover point on
the surface of the
specimen. In this
way focus and
magnification are
completely separate
from one another in
the SEM.
In the TEM the specimen lies very close to the
objective lens resulting in a relatively large half
angle of illumination. In SEM since the image is
not formed by an objective lens the half angle can
be very small resulting in a large depth of field.
 10X
An SEM focused at
high magnification
will still be in focus
at low magnification
110X
200X
400X
4K
16K
45K
Strong Lens: Weak Lens:
Small probe size, high Larger probe size, low
resolution, short resolution, long working
working distance and distance, and larger
shallow depth of field depth of field
A smaller final lens
aperture can reduce
the half angle and
therefore increase the
depth of field. This
is true on a relatively
strong lens which has
a fairly short working
distance and
therefore high
resolution.
The SEM forms an image by generating a
number of signals as a result of the beam
interacting with the specimen.
The SEM is a probe forming (e- beam) and signal
detecting device. By developing an image created in a
point by point fashion an important factor is the signal to
noise (S/N) ratio. The signal being the result of the beam
interacting with the specimen and the noise being the
result of imperfections in the electronics of the detector
and display systems as well as spurious signal.
Signal can be increased by:
Creating more beam specimen interactions

Noise can be reduced by:

Cooling electronics
Keeping detectors settings to a minimum

Signal/noise ratio can be increased by:

Placing detector closer to source of signal
Slowing down the scan (collect more signal
per unit time)
Although the same amount of signal is produced
throughout the specimen the topography of the
surface will allow differing amounts of signal to
reach a detector placed off to the side.
A number of different detectors can be
incorporated into the chamber surrounding
the specimen.
The shadow produced in
an SEM is determined by
the position of the
detector but the view is a
“beam’s eye” view as if one were looking down the
column
 LEO Gemini Column

A detector placed within

the column is known as
an “in-lens” detector and produces a very different
image compared to a conventionally located
detector
 Secondary Electron Detector

Side Mounted In-Lens

 Secondary Electron Detector

Side Mounted In-Lens

MIRA SEM
MIRA SEM