High Efficiency Energy Harvester

of Transferred Epitaxial PZT Films

on Stainless Steel





SUBMITTED BY SUBMITTED TO
ATUL BHARADWAJ Dr. D. BOOLCHANDANI
2013PEV5268
Why Energy Harvester

Energy harvesting is the process of acquiring energy from the surrounding environment.

Long lasting operability

No chemical disposal

Cost saving

Safety

Maintenance free

Increasing popularity of wireless networks

Limitations of batteries

Reduce environmental impact
Power sources
Photons: Light , Infrared, Radio Frequencies
Kinetic: vibrations, human motion, wind, hydro
Thermal: temperature gradients
Biochemical: glucose, metabolic reactions
Pt(upper electrode)
PZT(5H)
Cr(lower
electrode)
Epoxy Resin(X238)
Steel
Fig: Piezoelectric Cantilever
Fixed End
Fabrication Process

1. The piezoelectric energy harvesters were fabricated by transferring epitaxial PZT films from the
deposition substrates to stainless steel sheets


2. The fabrication starts with the deposition of the PZT films. The PZT films were epitaxially grown on
Pt-coated (001)MgO single crystal substrates by rf-magnetron sputtering. The thickness of the PZT
films was 2.8 um.


3. Successively Cr surface electrode was deposited over the PZT films.


4. After it they were bonded to 50 !m-thick stainless steel sheet with epoxy resin of about 3 um.


5. Next the whole MgO substrate was etched out using H3PO4 solution until the Pt electrode was
exposed.
According to their model, output power of the piezoelectric unimoprh harvester is expressed
by the following equation,
GEMC was obtained from the shift of resonant frequency between open and short-circuit
conditions,
Fig: Displacement of Cantilever
Fig :Electric Potential Generation with Change in displacement
Refrences

[1] S. P. Beeby, M. J. Tudor and N. M. White, Energy harvesting vibration sources for Microsystems
applications, Meas. Sci. Technol. vol.17, pp.R175-R195, 2006

[2] S. Roundy, P. K. Wright and J. Rabaey, A study of low level vibrations as a powere source for
wireless sensor nodes, Computer Communications. vol.26, pp.1131-1144, 2003.

[3] K. A. Cook-Chennault, N. Thambi and A. M.Sastry, Powering MEMS portable devices"a review
of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric
energy harvesting systems, Smart Mater. Struct. vol. 17, p.043001, 2008.

[4] R. Elfrink, T. M. Kamel, M. Goedbloed, S. Matova, D. Hohlfeld, Y. van Andel and R. van Schaijk,
Vibration energy harvesting with aluminum nitrid-based piezoelectric devices, J. Micromech.
Microeng., vol.19, p.094005, 2009.

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