Applications of MEMS

Applications of mems in various fields

Aerospace
Automotive
Biomedical
Chemical
Optical displays
Fluidics
Wireless and optical communications

Automotive Applications
MEMS pressure sensors sense, monitor
and transmit
Tire pressure
Fuel pressure
Oil pressure
Air flow
Air-bag deployment
Throttle position
Weight and sensing of passengers

Airbag Deployment Sensor

The type of MEMS sensor used in airbags is called a shock sensor using 3
accelerometers.

BioMedical Applications

Blood Pressure Sensing

Intracranial Pressure Sensing
Pressure Sensing in endoscopes
Sensors for infusion pumps
RF (radio frequency) elements
incorporated into the MEMS device
allow the sensor to transmit its
measurements to an external
receiver

Aerospace Applications
MEMS inertial sensors are designed
to sense a change in an object's
inertia, and then transduce into a
measurable signal.
Accelerometers
Gyroscopes.

Accelerometers
The simplest MEMS accelerometer
sensor is an inertial mass suspended
by springs.
The mass is deflected from its
nominal position as a result of
acceleration.

Optical Applications
The objective for optical MEMS is to
integrate optical, mechanical and
electronic functions into one device.
Two commercial devices Digital
Mirror Devices and Grating Light
Valve -redirect light to create high
definition imaging from digital
signals.

Digital Mirror Devices

A DMD is an array of micromirrors
(left figure). Each micromirror
(between 5um and 20um square) is
designed to tilt into (ON) or away
from (OFF) the light source.

MEMS Microgrippers
Grippers or tweezers used in a
variety of fields to clasp, pick up, and
move micron to nanosize
components.

Conclusion
We see, that MEMS exist almost everywhere in
our daily lives in our homes, our cars, our
workplaces and yet they go largely unnoticed.
Despite this low profile, microsystems have
undergone rapid development in the last two
decades, evolving from miniaturized single-function
systems into increasingly complex integrated
systems. From our point of view we call these
complex integrated systems, smart integrated
systems. The application of MEMS sensors to the
markets will require sensors to shrink further and to
work even more power-efficient as in smartphones.