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SELF BALANCING
ROBOT BASED ON
MEMS
TECHNOLOGY
S.SAI RAGHAVENDRA
Roll No. 37
EEE IInd Year

Meenakshi Sundararajan Engineering College

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MICRO ELECTRO
MECHANICAL SYSTEMS

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ARCHITECTURE
Microelectromechanical
systems (MEMS) is the
technology of very small devices.
It merges at the nanoscale
into nano electromechanical
systems (NEMS)
and nanotechnology.
They usually consist of a central
unit that processes data and
several components that interact
with the surroundings such as
microsensors.

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MATERIALS FOR
MANUFACTURING
The fabrication of MEMS evolved from the
process technology in semiconductor
device fabrication, i.e. the basic techniques
are deposition of material layers, patterning
by photolithography and etching to produce
the required shapes.
Further silicon, polymers, metals and
ceramics play a major role in the
development of efficient components.

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BASIC PROCESSES INVOLVED IN

MANUFACTURE
Deposition processes: One of the basic

building blocks in MEMS processing is the

ability to deposit thin films of material
with a thickness anywhere between a few
nanometres to about 100 micrometres.
There are two types of deposition
processes, as follows:
Physical vapor deposition.
Chemical vapor deposition.
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TECHNO EXCELLENCE

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BULK MICROMACHINING
Bulk micromachining is the
oldest paradigm of silicon
based MEMS.
The whole thickness of a
silicon wafer is used for
building the micro-mechanical
structures.
Silicon is machined using
various etching processes.
Anodic bonding of glass plates
or additional silicon wafers is
used for adding features in the
third dimension and for
hermetic encapsulation.

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SURFACE MICROMACHINING

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Surface micromachining uses

layers deposited on the surface
of a substrate as the structural
materials, rather than using the
substrate.
The original surface
micromachining concept was
based on thin polycrystalline
silicon layers patterned as
movable mechanical structures
and released by sacrificial
etching of the underlying oxide
layer.

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HIGH ASPECT RATIO(HAR) SILICON

MICROMACHINING

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Both bulk and surface silicon

micromachining are used in the
industrial production of sensors,
ink-jet nozzles, and other
devices.
A new etching technology, deep
reactive-ion etching, has made it
possible to combine good
performance typical of bulk
micromachining with comb
structures and in-plane operation
typical of surface
micromachining.

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INDUSTRIAL STRUCTURE
MEMS devices are defined as die-level components
of first-level packaging, and include pressure sensors,
accelerometers, gyroscopes, microphones, digital
mirror displays, microfluidic devices, etc.
The materials and equipment used to manufacture
MEMS devices topped $1 billion worldwide in 2006.
Materials demand is driven by substrates, making up
over 70 percent of the market, packaging coatings
and increasing use of chemical mechanical
planarization (CMP)
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ACCELEROMETER/GYROSCOPE
An accelerometer is an
electromechanical device
that measures
acceleration forces.
These forces may be
static, like the constant
force of gravity pulling at
our feet, or they could be
dynamic - caused by
moving or vibrating the
accelerometer.

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HISTORY/EVOLUTION
The instrument used more like an actual gyroscope was made
by German Johann Bohnenberger , who first wrote about it in
1817. At first he called it the "Machine". Bohnenberger's
machine was based on a rotating massive sphere.
In 1832, American Walter R. Johnson developed a similar
device that was based on a rotating disc. The French
mathematician Pierre-Simon Laplace, working at the cole
Polytechnique in Paris, recommended the machine for use as a
teaching aid.
In 1852, it was Foucault who gave the device its modern name,
in an experiment to see the Earth's rotation (Greek gyros, circle
or rotation), which was visible in the 8 to 10 minutes before
friction slowed the spinning rotor.
EEE IInd Year

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PROPERTIES
A free gyroscope maintains
its axis.
Gyroscopes can be used to
construct gyrocompasses,
which complement or
replace magnetic
compasses, to assist in
stability or be used as part
of an inertial guidance
system.
Gyroscopic effects are used
in tops, boomerangs, yoyos, and Powerballs.

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GYROSTAT
A gyrostat is a variant of
the gyroscope. It consists
of a massive flywheel
concealed in a solid casing.
Its behaviour on a table, or
with various modes of
suspension or support,
serves to illustrate the
curious reversal of the
ordinary laws of static
equilibrium due to the
gyrostatic behaviour of the
interior invisible flywheel
when rotated rapidly.
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MODERN USES
In addition to being used
in compasses, aircraft,
computer pointing
devices, etc., gyroscopes
have been introduced into
consumer electronics.
Since the gyroscope
allows the calculation of
orientation and rotation,
designers have
incorporated them into
modern technology.

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SELF BALANCING ROBOTS BASED

ON MEMS SYSTEMS

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MANEUVERING
Two wheeled balancing robots are based on
inverted pendulum configuration which rely
upon dynamic balancing systems for
balancing and maneuvering.
These robot bases provide exceptional
robustness and capability due to their smaller
size and power requirements.
Such robots find their applications in
surveillance and transportation purpose.
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BALANCING PROCESS
The word balance means the inverted pendulum
is in equilibrium state, which its position is like
standing upright 90 degrees.
However, the system itself is not balance,
which means it keeps falling off, away from the
vertical axis.
Therefore, a gyro chip is needed to provide the
angle position of the inverted pendulum or robot
base and input into the microcontroller, which
the program in itself is a balancing algorithm

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INERTIAL SENSORS
Gyros software will use the
quick reacting rate gyroscope
only for a short term reading.
Software will combine this
measurement with that of an
accelerometer to deduce a
better estimate of absolute
position. The accelerometer
does give a physical
reference because it is able to
measure the static
gravitational force which
allows Gyro to make accurate
measurements even at rest
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LOGICAL PROCESSING UNIT

The processing unit used is
Atmel ATMega16,8-bit
microcontroller unit which
is a versatile EEPROM. It
has four I/O ports, onboard
ADC and two PWM
outputs.
It can be programmed easily
with minimum hardware
requirements which make it
extremely popular in
robotics applications.

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ACTUATOR UNIT
As the robot tilts, we
require to apply a restoring
force to return the robot to
vertical position.
A reaction wheel pendulum
model is followed for the
balancing purpose and the
components used are high
torque reaction motor, a
metallic reaction wheel,
and a capacitor.
EEE IInd Year

Meenakshi Sundararajan Engineering College

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PERFORMANCE RECORDER
(ACC Vs GYRO)

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CONCLUSION
Researchers could build on what is researched
until now. There are a few experiments that are
unaccomplished.
That is the main drawback that hampers the
overall project as concrete result its unable to
attain.
Therefore appropriate conclusions are not able to
achieve.
The problem with the oscillation still remains
with the system and future work has to be done to
achieve a stable solution.

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THANK
YOU!!
EEE IInd Year

Meenakshi Sundararajan Engineering College