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Coventor Tutorial

Bi-Stable Mechanical Beam Simulation


-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology Kyoto University
Remote Desktop Connection
5 IP addresses for the course ELEC5010:
tmp233.ece.ust.hk
tmp235.ece.ust.hk
tmp236.ece.ust.hk
tmp237.ece.ust.hk
tmp238.ece.ust.hk
Login: elec5010
Password: 5010stu

tmp234.ece.ust.hk
Login: .\elec5010 Password: 5010stu

Two students share one virtual computer, it is important to log off


to release computer for your partner.
Hong Kong University of Science and Technology Kyoto University
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology Kyoto University
Material Definition
For detailed information
on Material Definition,
please refer to the
Section 2.3 of the
manual Designer ! ! !

2.After
opening a 1.Create a
project, you project first
will have or open your
models here unfinished
projects

3. Press this button

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Material Definition
1.Choose MPD
materials database

2.Set the all


parameters of
Silicon_100

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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology Kyoto University
Create Substrate
1.Create a new
process and define
the substrate

2.Define thickness
and material
For detailed information
on editing process,
please refer to the
Section 2.4 of the
manual Designer ! ! !

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Oxide Formation

1.Double click

3.Layer Name

2.Thickness

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Si Formation

Only this Si layer for simulation: Accurate


Thickness!!
Si layer for layout: Accurate Layer Name!!

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Si Patterning

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Metal Formation

Metal layer for layout: Accurate Layer Name!!

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Metal Patterning

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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology Kyoto University
Create Layout
1.After saving the process file,
we will create a new layout and
check the layer names just
defined

For detailed information


on editing layout, please
refer to the Section 2.5
& 3.2.1 of the manual
Designer! ! !

Hong Kong University of Science and Technology Kyoto University


2.Standard
drawing Edit Your Layout
1.Choose the layer
you will draw

3.Other functions
For detailed information on editing layout, please
refer to the Section 2.5 & 3 of the manual
Designer
Hong Kong University ! ! and
of Science ! Technology Kyoto University
Edit Your Layout
How to draw a curving
beam

The important thing is the


equation

Also the rectangle

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Edit Your Layout
For
Bended
beam:
The beam
and anchor Otherwise, solid
should be model cant be
merged. built!!
How?
Select
beam and
anchor and
then using ERROR
boolean-
>Or for
merge.

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Edit Your Layout

For insert
other cells Otherwise, solid
graphs model cant be
and define built!!
Cell.

ERROR

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Finish Layout
1. Just draw
the structures
of two layers:
SILICON!!
METAL!!
2.You can hide
the layer with
turn off the
light ahead
layer name
3. Save the
two layers
layout and
separate
different parts
in your
structure as
different cells.
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Flat Hierarchy
This is for
the final
output!!
(Dont care it
in the
simulation)
Before
exporting
the layout,
find your
final
structure
cell and
flatten.
Then.

For detailed information on editing layout, please refer to the


Section 2.5.7 of the manual Designer ! ! !
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Gds Out
Chose a file to
output the
layout.

For detailed information on editing layout, please refer to the


Section 2.6.6 of the manual Designer ! ! !
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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology Kyoto University
Initial Solid Model
2.Since only
SILICON layer
is simulated,
other can be
hided. (Right-
Click)

1.Select a top
cell to build the
solid model For detailed information on solid model, please refer to the
Section 4.5 of the manual Designer ! ! !
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Partition
Partition the Si
into several
parts.
(Partition the
beam (moved
parts) from the
anchor (fixed
parts) .
1.Ctrl choose 3
points
2.Add a plane
3.Ctrl select the
plane and layer
which will be
parted
4.Partition

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Partition (After)
After partition,
one Silicon bulk
is cut into many
parts. Finally, the one
Silicon bulk will
After partition, be cut into
the plane can many Layer3.
be hided.
After several
times of
partition, the
beams will be
completely
separated from
the anchor.

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Add Layer to Mesh Model

Select ALL
Silicon parts
and add them
to Mesh Model

For detailed information on solid model, please refer to the


Section 4.7 of the manual Designer ! ! !
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Add Layer to Mesh Model

ALL Silicon
parts move into
Mesh Model

For detailed information on Mesh model, please refer to the


Section 4.7 of the manual Designer ! ! !
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Meshing Settings

Smaller
element
size
means
more
accurate
simulation
.
Please try
from
larger
size as
saving
simulation
time at
the
beginning.

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Generate Meshing

Select ALL
Silicon
parts and
Generate
Mesh.

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Finish Meshing

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Naming Entities

Name the
top faces
which will
be used as
electrodes

Potential
will be
applied on
these
faces.

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Naming Entities

Name all the


bottom faces
which connects
substrate
Anchors

Fixall and
Temperature
will be applied
on these faces.

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Naming Entities

Name the front faces


or other needed faces
of the actuator,
amplifier or bistable
beam on the side
faces!

Pressure or
Displacement will be
applied on these faces

For detailed information on Mesh model, please refer to the


Section 4.6 of the manual Designer ! ! !
Hong Kong University of Science and Technology Kyoto University
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology Kyoto University
Solver Setting
After saving
the mesh
model, we will
have it here.

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Solver Setting
Which be talked in the slide
page 40

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Surface Boundary conditions

Example: apply voltage to actuator to analysis the temperature,


displacement, stress and so on.
1.Fixall for anchor
2.Set the temperate of all anchor as room temperature (300K). The
units is K.
3.Apply voltage to electrodes. The units is voltage.

For detailed information on setting


boundary conditions, please refer to
the Section 3.5.3 of the manual
analyzer_standard ! ! !

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Surface Boundary conditions

For other simulations:


1.Fixall and Temperature are always applied on anchor faces.
2.Potential can be applied on electrode faces.
3.Pressure or Displacement can be applied on side faces

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SBCs for Bistable Beam

For detailed information on Simulation methodology of Bistable Beam, please refer to


the Tutorial on simiulation of bistable beam ! ! !
Apply one Displacement to get one
Force

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Displacement-Force Simulation
For simulation, one can not solve an
arbitrary displacement directly,
according to my experience. Instead,
one need to increase the displacement
bit by bit from zero, and telling
Coventor to start the analysis from
the result of the previous one.
In this manner, the simulation will not
fail easily, because defining the
displacement resolves the large non-
linearity of buckling.
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One or Multi Point Simulation
1. Correspond the displacement to a variable,
mechBC1, based on MemMech Solver.

3. Set the 4. Set the


Trajectory value

6. Run here for


simulating one value 3. Correspond the mechBC1 to a
Trajectory
2. Start to
set
Variable 5. Run here for simulating a series of values
Hong Kong University of Science and Technology Kyoto University
Contact Boundary Conditions

Plan: ACT CON If you want to use the


actuator to push the
amplifier,
or use the amplifier
Plan: AMP CON2 to push the beam
you need to define
the Planes of
actuator, amplifier
and beam as contact
planes.
Otherwise, they
actuator will move
Plan: BEAM CON
across the amplifier,
or the amplifier will
Plan: AMP CON1 move across the beam
rather than push it.
Hong Kong University of Science and Technology Kyoto University
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology Kyoto University
Simulation

After simulation, no matter


success or not, you view the
results or debug the errors.

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View Resluts

By click the
displacement, you
can switch to
other parameters.

For detailed information on Visualizer, please refer to the Section 9 of


the manual analyzer_standard ! ! !
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3D Result Viewing

For detailed information on Visualizer, please refer to the Section 9 &


9.1 of the manual analyzer_standard ! ! !
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Simulation Result of the
Displace-Fore of Bistable Beam
Checking the displacement
deformation using
Geometry Scaling

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Simulation Result of the Displace-Fore
of Bistable Beam
Checking the Force Value
using Table rxnForces.

Sign of rxnForces changes


from + to or to +,
indicating two stable states.

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Last years Design

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