Organizing Engineering

Research Papers (47)

http://www.chineseowl.idv.tw


(:)

Setting of research (): ?
?
Research problem () :
?
Quantitative specification of problem () :

Importance of problem () :
, ?
(:)
Research objective ()
Methodology to achieve objective
()
Anticipated results ()
Contribution to field ()
(:)
Increasingly larger substrate requirements have spurred advances in
semiconductor manufacturing, explaining the increasing importance of the pumping
performance of vacuum pumps in etching, chemical vapor deposition (CVD), and
physical vapor deposition (PVD) to satisfy ultraclean environment requirements. However,
using oil-free backing pumps in combination with the turbomolecular pump (TMP) to
satisfy ultraclean environment requirements is problematic. The TMP compound includes
the addition of a turbodrag section to the conventional TMP stage in the same rotation
shaft in order to ensure that the discharge pressure ranges between 7.5 and 15 Torr.
Levi (1992) also pioneered the use of hybrid pumps, which uses a variety of impellers
without increasing the number of stages on the same axis. Notably, the conventionally
adopted TMP uses momentum transfers from high-speed rotating blades to the gas
molecules for pumping gas. According to the direction of the pumped fluid to the
movement of the moving wall, the TMP is perpendicular to the movement of the moving
wall; otherwise, the molecular drag pump (MDP) is parallel. The MDP can operate in the
7.5x-3 Torr-7.5 x-2 Torr at a full pumping speed owing to a high compression ration in the
viscous flow regime, which is infeasible for a molecular flow regime.
(:)
The CVD and etching equipment in the IC industry require superior
discharge pressures from the atmosphere to a high-vacuum region. Among the
many subsequent design types include those of Becker, Siegbahn, Holwek,
and Gaede. Although these designs normally increase either the pumping
speed or compression ratio, increasing the pumping speed and compression
simultaneously (especially in higher discharge pressures) is problematic owing
to the complex transition flow phenomena. Additionally, the processing
pressure can not remain constant with a declining pumping performance.
A typical TMP typically has many stages for optimizing the
pumping speed and compression ratio, resulting in different compression ratios,
especially the lower value for light gases. Moreover, the compression ratios are
high at discharge pressures lower than 7.5x-3 Torr. However, the pumping
speed obviously declines at higher discharge pressures.
Ultimately, the pumping performances of TMP lower its
efficiency as the distance of blades becomes comparable to the mean free path
of gas molecules.
(:)
Based on the above, we should develop a
vacuum performance system (based on OR according to)
ISO standards with automatic testing and human-machine
interface functions.
To do so, pumping performances can be
evaluated based on the flow meter method. The flow rate
can then be adjusted to obtain a balanced inlet pressure.
Next, the pumping speed based on the difference of inlet
pressure and ultimate pressure can be divided by the
throughput. Additionally, results of the experimental pumping
speed can be compared with those of the simulations.
(:)
As anticipated, the proposed vacuum
performance system can evaluate the throughput, pumping
speed, ultimate pressure, and residue gas analysis via its
automatic testing and human-machine interface functions in
an inlet pressure exceeding 1.3x10-6 Torr.
Importantly, the proposed system can provide
desired characteristics such as ultimate pressure,
compression ratio, and pumping speed, ultimately
eliminating the evaluated time and providing human-machine
interface functions.
(:)
Industrial development has led to the extensive
use of plastic products in daily life, with polymers like
polyvinyl alcohol (PVA), polyethylene (PE), or
polypropylene (PP), as an increasingly common source of
related industrial applications. For instance, PVA is
commonly adopted in the textile and paper-making
industries.
However, similar to other polymers, the difficulty
of PVA degradation reflects the complexity of handling it
during industrial wastewater treatment.
(:)
Despite the numerous chemical and
biological treatment methods developed for PVA
degradation and their promising results, such methods
have certain limitations, including too long of a reaction
time and pollution caused by biological or chemical
reactants. While investigating mixed cultures acclimatized
to PVA solution, Solaro et al. indicated only 40%
mineralization of PVA after 48 days of incubation.
Additionally, use of Fenton reaction to reduce PVA was
revealed that after 2 hours of reaction time, the PVA
removal rate reached only 40%.
The inability to degrade PVA adequately
through wastewater treatment will result in PVA entering
the public water supply and flowing into the sea, ultimately
threatening humans and the surrounding ecology.
(:)
Based on the above, we should develop an
efficient and environmentally friendly PVA-based
wastewater treatment method that does not produce other
by-products or harmful waste.
To do so, PVA can be degraded efficiently
by photocatalysis. The removal efficiency of PVA can then
be examined based on the reaction temperature, PVA
concentration, and photocatalytic quantity. Next, analysis
results of the proposed wastewater treatment method can
be compared with those of previous methods.
(:)
As anticipated, the photocatalysis of
the proposed wastewater treatment method can
degrade PVA contents completely in two hours.
In addition to its photocatalysis
capability to degrade PVA efficiently, the proposed
method provides a valuable reference for research
in other industrial applications such as
decomposing polymers in a sewage treatment
plant.
Further details can be found at
http://www.chineseowl.idv.tw