Excitao por feixe de eltrons

Microssonda Eletrnica Cameca SX50

Microssonda Eletrnica Cameca SX50
Microssonda Eletrnica
Vacuum Regimes: Whats what
What # of gas
molecules
present
Dominant gas
species
Mean Free
Path (between
collisions)
Pressure
Atmospheric
Pressure
10
19
gas
molecules/cm
3
N>O>H
2
O MFP=0.1 um 760 torr
Mechanical
Pumping
10
14
gas
molecules/cm
3
H
2
O>N,O
MFP = 1 cm
10
-3
torr
Diffusion
Pumping
10
9
gas
molecules/cm
3
H
2
O
MFP=10
5
cm 10
-6
torr
Ultra High
Vacuum
10
6
gas
molecules/cm
3
H, He
MFP=10
6
m 10
-10
torr
UW- Madison Geology 777
Units of Vacuum
The two main units used to measure
pressure (vacuum) are torr and Pascal.
Atmospheric pressure (STD) = 760 torr or
1.01x10
5
Pascal.
One torr = 133.32 Pascal
One Pascal = 0.0075 torr
An excellent vacuum in the electron
microprobe chamber is 4x10
-5
Pa (which
is 3x10
-7
torr)
John Fournelle. Electron probe microanalysis
EPMA. UW-Madison
ESPECTROSCOPIA POR
DISPERSO EM
ENERGIA - EDS
Analisador Multicanal
Resolues com diferentes contadores
LIMITE DE RESOLUO EM EDS
ESPECTROSCOPIA POR DISPERSO EM
COMPRIMENTO DE ONDA - WDS
n = 2d sen( )
Geometria de Parafocalizao
EDS x WDS
EDS
WDS
Preparao de amostras
Exemplos de
mapas de raios X
Corroso
em ao
BSE Fe
O S
Distribuio de Elementos em Zirco
Mapas de raios X